JP6363540B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6363540B2 JP6363540B2 JP2015051679A JP2015051679A JP6363540B2 JP 6363540 B2 JP6363540 B2 JP 6363540B2 JP 2015051679 A JP2015051679 A JP 2015051679A JP 2015051679 A JP2015051679 A JP 2015051679A JP 6363540 B2 JP6363540 B2 JP 6363540B2
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- 239000004065 semiconductor Substances 0.000 title claims description 169
- 239000012535 impurity Substances 0.000 claims description 46
- 239000000758 substrate Substances 0.000 claims description 42
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims description 4
- 229920005989 resin Polymers 0.000 claims description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 4
- 238000002161 passivation Methods 0.000 description 22
- 238000002955 isolation Methods 0.000 description 19
- 230000005684 electric field Effects 0.000 description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 230000015556 catabolic process Effects 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- -1 hydrogen ions Chemical class 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 229910021334 nickel silicide Inorganic materials 0.000 description 2
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 210000000746 body region Anatomy 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910001415 sodium ion Inorganic materials 0.000 description 1
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- H01L29/1608—Silicon carbide
Description
本実施形態の半導体装置は、第1の面と第2の面を有する半導体基板と、半導体基板に設けられる素子領域と、素子領域の周囲の前記半導体基板に設けられる終端領域であって、半導体基板の第1の面に設けられる第1導電型の第1の半導体領域と、第1の半導体領域と第2の面との間に設けられる第2導電型の第2の半導体領域と、第1の半導体領域上に設けられる第1の絶縁膜と、第1の半導体領域上に設けられ、第1の絶縁膜の間にある第2の絶縁膜と、を有する終端領域と、素子領域の第1の面上に設けられ、第1の半導体領域に電気的に接続される第1の電極と、半導体基板の前記第2の面上に設けられる第2の電極と、を備える。
本実施形態の半導体装置は、第1の半導体領域の第1の位置の第1導電型の不純物濃度が、第1の位置よりも素子領域から遠い第1の半導体領域の第2の位置の第1導電型の不純物濃度よりも高い以外は、第1の実施形態と同様である。したがって、第1の実施形態と重複する内容については記述を省略する。
本実施形態の半導体装置は、第2の絶縁膜がパッシベーション膜と異なる膜である以外は、第1の実施形態と同様である。したがって、第1の実施形態と重複する内容については記述を省略する。
本実施形態の半導体装置は、素子領域が、前記第1の面に設けられる第1導電型の第3の半導体領域を有し、第1の電極が第3の半導体領域に電気的に接続される以外は、第1の実施形態と同様である。したがって、第1の実施形態と重複する内容については記述を省略する。
本実施形態の半導体装置は、素子領域が、第1の面に設けられる第1導電型の第3の半導体領域と、第3の半導体体領域内に設けられる第2導電型の第4の半導体領域と、第3の半導体領域上に設けられるゲート絶縁膜と、ゲート絶縁膜上に設けられるゲート電極とを有し、第1の電極が前記第3の半導体領域及び前記第4の半導体領域に電気的に接続されるる以外は、第1の実施形態と同様である。したがって、第1の実施形態と重複する内容については記述を省略する。
本実施形態の半導体装置は、第1の面と第2の面を有する半導体基板と、半導体基板に設けられる素子領域と、素子領域の周囲の半導体基板に設けられる終端領域であって、半導体基板の第1の面に設けられる第1導電型の第1の半導体領域と、第1の半導体領域と第2の面との間に設けられる第2導電型の第2の半導体領域と、第1の半導体領域内に設けられ、第1の半導体領域よりも浅く、第1の半導体領域よりも不純物濃度の高い第1導電型の第3の半導体領域と、を有する終端領域と、素子領域の第1の面上に設けられ、第1の半導体領域に電気的に接続される第1の電極と、半導体基板の第2の面上に設けられる第2の電極と、を備える。
12 p型のリサーフ領域(第1の半導体領域)
14 n−型のドリフト領域(第2の半導体領域)
18 フィールド酸化膜(第1の絶縁膜)
20 アノード電極(第1の電極)
21 ソース電極(第1の電極)
22 カソード電極(第2の電極)
23 ドレイン電極(第2の電極)
24 パッシベーション膜(第2の絶縁膜)
26 分離絶縁膜(第2の絶縁膜)
30 p+型の分離領域(第3の半導体領域)
40 p型のアノード領域(第3の半導体領域)
42 p型のベース領域(第3の半導体領域)
44 n+型のソース領域(第4の半導体領域)
46 ゲート絶縁膜
48 ゲート電極
100 SBD(半導体装置)
200 SBD(半導体装置)
300 SBD(半導体装置)
400 PINダイオード(半導体装置)
500 MOSFET(半導体装置)
600 SBD(半導体装置)
Claims (8)
- 第1の面と第2の面を有する半導体基板と、
前記半導体基板に設けられる素子領域と、
前記素子領域の周囲の前記半導体基板に設けられる終端領域であって、
前記半導体基板の第1の面に設けられる第1導電型の第1の半導体領域と、
前記第1の半導体領域と前記第2の面との間に設けられる第2導電型の第2の半導体領域と、
前記第1の半導体領域上に設けられる第1の絶縁膜と、
前記第1の半導体領域上に設けられ、前記第1の絶縁膜の間にある第2の絶縁膜と、を有する終端領域と、
前記素子領域の第1の面上に設けられ、前記第1の半導体領域に電気的に接続される第1の電極と、
前記半導体基板の前記第2の面上に設けられる第2の電極と、
を備え、
前記第1の絶縁膜はシリコン酸化膜であり、前記第2の絶縁膜は樹脂膜である半導体装置。 - 前記第1の半導体領域に接する部分の前記第2の絶縁膜は前記素子領域を囲む環状である請求項1記載の半導体装置。
- 前記第1の絶縁膜の間に挟まれる部分の前記第2の絶縁膜の幅は1μm以上である請求項1又は請求項2記載の半導体装置。
- 前記第1の半導体領域の第1の位置の第1導電型の不純物濃度が、前記第1の位置よりも前記素子領域から遠い前記第1の半導体領域の第2の位置の第1導電型の不純物濃度よりも高い請求項1乃至請求項3いずれか一項記載の半導体装置。
- 前記半導体基板はSiC基板である請求項1乃至請求項4いずれか一項記載の半導体装置。
- 前記素子領域の前記第1の面に前記第2の半導体領域が設けられ、
前記第1の電極が前記第2の半導体領域に電気的に接続される請求項1乃至請求項5いずれか一項記載の半導体装置。 - 前記素子領域が、前記第1の面に設けられる第1導電型の第3の半導体領域を有し、
前記第1の電極が前記第3の半導体領域に電気的に接続される請求項1乃至請求項6いずれか一項記載の半導体装置。 - 前記素子領域が、
前記第1の面に設けられる第1導電型の第3の半導体領域と、
前記第3の半導体領域内に設けられる第2導電型の第4の半導体領域と、
前記第3の半導体領域上に設けられるゲート絶縁膜と、
前記ゲート絶縁膜上に設けられるゲート電極と、を有し、
前記第1の電極が前記第3の半導体領域及び前記第4の半導体領域に電気的に接続される請求項1乃至請求項6いずれか一項記載の半導体装置。
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JP2015051679A JP6363540B2 (ja) | 2015-03-16 | 2015-03-16 | 半導体装置 |
CN201510536237.6A CN105990402B (zh) | 2015-03-16 | 2015-08-27 | 半导体装置 |
US14/854,516 US9620600B2 (en) | 2015-03-16 | 2015-09-15 | Semiconductor device having termination region with laterally heterogeneous insulating films |
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DE102019100130B4 (de) | 2018-04-10 | 2021-11-04 | Infineon Technologies Ag | Ein halbleiterbauelement und ein verfahren zum bilden eines halbleiterbauelements |
DE112019006756T5 (de) * | 2019-01-29 | 2021-10-14 | Mitsubishi Electric Corporation | Halbleiterelement und leistungswandlereinheit |
EP3690957A1 (en) * | 2019-02-01 | 2020-08-05 | ABB Schweiz AG | Passivation layer for spark prevention |
EP3971987A1 (en) * | 2020-09-21 | 2022-03-23 | Infineon Technologies AG | Silicon carbide device with stripe-shaped gate electrode and source metallization |
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JP3006464B2 (ja) | 1995-08-30 | 2000-02-07 | 日本電気株式会社 | Bi−CMOS半導体装置の製造方法 |
JP3708057B2 (ja) * | 2001-07-17 | 2005-10-19 | 株式会社東芝 | 高耐圧半導体装置 |
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