JP2017139289A - ダイオード - Google Patents
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- JP2017139289A JP2017139289A JP2016018089A JP2016018089A JP2017139289A JP 2017139289 A JP2017139289 A JP 2017139289A JP 2016018089 A JP2016018089 A JP 2016018089A JP 2016018089 A JP2016018089 A JP 2016018089A JP 2017139289 A JP2017139289 A JP 2017139289A
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- 239000004065 semiconductor Substances 0.000 claims abstract description 59
- 239000000758 substrate Substances 0.000 claims abstract description 59
- 239000011229 interlayer Substances 0.000 claims abstract description 42
- 239000010410 layer Substances 0.000 claims description 65
- 239000012535 impurity Substances 0.000 claims description 19
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 230000015556 catabolic process Effects 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 4
- 238000009413 insulation Methods 0.000 abstract 4
- 238000003475 lamination Methods 0.000 abstract 1
- 230000005684 electric field Effects 0.000 description 12
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 4
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/872—Schottky diodes
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
- H01L29/0661—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body specially adapted for altering the breakdown voltage by removing semiconductor material at, or in the neighbourhood of, a reverse biased junction, e.g. by bevelling, moat etching, depletion etching
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- H01—ELECTRIC ELEMENTS
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/24—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only semiconductor materials not provided for in groups H01L29/16, H01L29/18, H01L29/20, H01L29/22
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- H01—ELECTRIC ELEMENTS
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/36—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the concentration or distribution of impurities in the bulk material
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- H01—ELECTRIC ELEMENTS
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
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- H—ELECTRICITY
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
- H01L29/407—Recessed field plates, e.g. trench field plates, buried field plates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/408—Electrodes ; Multistep manufacturing processes therefor with an insulating layer with a particular dielectric or electrostatic property, e.g. with static charges or for controlling trapped charges or moving ions, or with a plate acting on the insulator potential or the insulator charges, e.g. for controlling charges effect or potential distribution in the insulating layer, or with a semi-insulating layer contacting directly the semiconductor surface
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- H—ELECTRICITY
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1608—Silicon carbide
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Physics & Mathematics (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
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- Electrodes Of Semiconductors (AREA)
Abstract
【解決手段】半導体基板4の上面は、第1範囲40と、第1範囲40を一巡する第2範囲42を備える。半導体基板4の上面は、第1範囲40で高くて第2範囲42で低く、第1範囲40と第2範囲42の境界に沿って段差44が延びている。ショットキー電極膜12は、第1範囲40において半導体基板4の上面にショットキー接触している。積層電極膜14は、ショットキー電極膜12に積層されるとともにフィールドプレート電極16と連続している。層間絶縁膜50は、ショットキー電極膜12の端部12aと段差44と第2範囲42を覆っている。フィールドプレート電極16は、ショットキー電極膜12の端部12aを覆う層間絶縁膜50と段差44を覆う層間絶縁膜50を覆って第2範囲42を覆う層間絶縁膜50上まで延びている。下面電極20は、半導体基板4の下面に形成されている。
【選択図】図1
Description
図1に示すように、本実施例のSBD2は、半導体基板4と、上面電極10と、フィールドプレート電極16と、層間絶縁膜50と、保護膜60と、下面電極20を有する。
続いて、図3、図4を参照して、第2実施例のSBD102について、第1実施例と異なる点を中心に説明する。図3、図4では、第1実施例のSBD2と同様の要素は図1と同じ符号を用いて示し、詳細な説明を省略する。本実施例のSBD102は、上層32内に高抵抗領域34が形成されている点が第1実施例とは異なる。
続いて、図5、図6を参照して、第3実施例のSBD202について、第2実施例と異なる点を中心に説明する。図5、図6では、上記の各実施例のSBD2、102と同様の要素は同じ符号を用いて示し、詳細な説明を省略する。本実施例のSBD202は、高抵抗領域34の下面が下層30に到達しているとともに、高抵抗領域34が半導体基板4の側面まで到達している点と、ショットキー電極膜12の端部12aが第1範囲40の端部40aから離間した位置に配置されている点が第2実施例とは異なる。
4:半導体基板
10上面電極
12:ショットキー電極膜
12a:端部
14:積層電極膜
15:境界線
16:フィールドプレート電極
16a:外延
20:下面電極
30:下層
32:上層
34:高抵抗領域
40:第1範囲
40a:端部
42:第2範囲
44:段差
50:層間絶縁膜
60:保護膜
90:空乏層
102:SBD
190:空乏層
202:SBD
290:空乏層
Claims (6)
- 半導体基板と上面電極と層間絶縁膜とフィールドプレート電極と下面電極を備えているダイオードであり、
前記半導体基板の上面は、第1範囲と第2範囲を備えており、前記第2範囲は前記第1範囲を一巡しており、前記半導体基板の上面が前記第1範囲で高くて前記第2範囲で低く、前記第1範囲と前記第2範囲の境界に沿って段差が延びており、
前記上面電極は、前記第1範囲において前記半導体基板の上面にショットキー接触しているとともに前記第1範囲内に留まっており、
前記層間絶縁膜は、前記上面電極の端部と前記段差と前記第2範囲とに亘ってこれらを覆っており、
前記フィールドプレート電極は、前記上面電極に導通しており、前記層間絶縁膜のうちの前記上面電極の端部を覆う部分と前記段差を覆う部分を覆っているとともに、前記層間絶縁膜のうちの前記第2範囲を覆う部分上まで延びており、
前記下面電極が前記半導体基板の下面に形成されている、
ダイオード。 - 前記半導体基板は、n型不純物濃度が高い下層とn型不純物濃度が低い上層の積層構造を備えており、
前記上層が、前記第1範囲と前記第2範囲に露出しており、
前記第1範囲の端部から前記段差を経て前記第2範囲に亘る範囲の前記上層の上面側に前記上層よりn型不純物濃度がさらに低い高抵抗領域が形成されている請求項1のダイオード。 - 前記高抵抗領域が、前記下層に到達している請求項2のダイオード。
- 前記高抵抗領域が、前記半導体基板の側面に到達している請求項2または3のダイオード。
- 前記フィールドプレート電極の外延が、前記高抵抗領域の形成範囲上に留まっている請求項2〜4のいずれかの1項に記載のダイオード。
- 前記上面電極が、ショットキー電極膜と積層電極膜を備えており、
前記ショットキー電極膜は、前記第1範囲で前記半導体基板の上面に接しており、
前記層間絶縁膜は、前記ショットキー電極膜の端部を覆い、
前記積層電極膜は、前記層間絶縁膜で覆われていない前記ショットキー電極膜に積層されており、前記フィールドプレート電極に連続していることを特徴とする請求項1〜5のいずれかの1項に記載のダイオード。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016018089A JP2017139289A (ja) | 2016-02-02 | 2016-02-02 | ダイオード |
US16/073,924 US20190043999A1 (en) | 2016-02-02 | 2017-01-31 | Schottky diode |
PCT/IB2017/000051 WO2017134509A1 (en) | 2016-02-02 | 2017-01-31 | Schottky diode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016018089A JP2017139289A (ja) | 2016-02-02 | 2016-02-02 | ダイオード |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2017139289A true JP2017139289A (ja) | 2017-08-10 |
Family
ID=58057181
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Application Number | Title | Priority Date | Filing Date |
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JP2016018089A Pending JP2017139289A (ja) | 2016-02-02 | 2016-02-02 | ダイオード |
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Country | Link |
---|---|
US (1) | US20190043999A1 (ja) |
JP (1) | JP2017139289A (ja) |
WO (1) | WO2017134509A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108493114A (zh) * | 2017-02-23 | 2018-09-04 | 丰田自动车株式会社 | 半导体装置的制造方法 |
US10418494B2 (en) | 2017-02-23 | 2019-09-17 | Toyota Jidosha Kabushiki Kaisha | Method of manufacturing semiconductor device |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6560142B2 (ja) * | 2016-02-26 | 2019-08-14 | トヨタ自動車株式会社 | スイッチング素子 |
JP6560141B2 (ja) * | 2016-02-26 | 2019-08-14 | トヨタ自動車株式会社 | スイッチング素子 |
Citations (7)
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JPS5113580A (en) * | 1974-06-21 | 1976-02-03 | Westinghouse Electric Corp | Shotsutokiibarya daioodo |
JPH08139341A (ja) * | 1994-11-11 | 1996-05-31 | Murata Mfg Co Ltd | ショットキ−バリアダイオ−ド |
JP2000188406A (ja) * | 1998-12-24 | 2000-07-04 | Fuji Electric Co Ltd | 炭化けい素ショットキーバリアダイオードおよびその製造方法 |
CN103474478A (zh) * | 2013-09-17 | 2013-12-25 | 西安电子科技大学 | 一种碳化硅sbd器件 |
JP2014236094A (ja) * | 2013-05-31 | 2014-12-15 | 豊田合成株式会社 | 半導体素装置の製造方法及び半導体装置 |
JP2015023072A (ja) * | 2013-07-17 | 2015-02-02 | 豊田合成株式会社 | 半導体装置 |
JP2015076577A (ja) * | 2013-10-11 | 2015-04-20 | 住友電気工業株式会社 | 半導体装置およびその製造方法 |
Family Cites Families (4)
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US5853298A (en) * | 1997-03-20 | 1998-12-29 | Framatome Connectors Interlock, Inc. | Initiator connector for airbag systems |
US8928065B2 (en) * | 2010-03-16 | 2015-01-06 | Vishay General Semiconductor Llc | Trench DMOS device with improved termination structure for high voltage applications |
JP2013102081A (ja) * | 2011-11-09 | 2013-05-23 | Tamura Seisakusho Co Ltd | ショットキーバリアダイオード |
JP6241099B2 (ja) * | 2013-07-17 | 2017-12-06 | 豊田合成株式会社 | 半導体装置 |
-
2016
- 2016-02-02 JP JP2016018089A patent/JP2017139289A/ja active Pending
-
2017
- 2017-01-31 WO PCT/IB2017/000051 patent/WO2017134509A1/en active Application Filing
- 2017-01-31 US US16/073,924 patent/US20190043999A1/en not_active Abandoned
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5113580A (en) * | 1974-06-21 | 1976-02-03 | Westinghouse Electric Corp | Shotsutokiibarya daioodo |
JPH08139341A (ja) * | 1994-11-11 | 1996-05-31 | Murata Mfg Co Ltd | ショットキ−バリアダイオ−ド |
JP2000188406A (ja) * | 1998-12-24 | 2000-07-04 | Fuji Electric Co Ltd | 炭化けい素ショットキーバリアダイオードおよびその製造方法 |
JP2014236094A (ja) * | 2013-05-31 | 2014-12-15 | 豊田合成株式会社 | 半導体素装置の製造方法及び半導体装置 |
JP2015023072A (ja) * | 2013-07-17 | 2015-02-02 | 豊田合成株式会社 | 半導体装置 |
CN103474478A (zh) * | 2013-09-17 | 2013-12-25 | 西安电子科技大学 | 一种碳化硅sbd器件 |
JP2015076577A (ja) * | 2013-10-11 | 2015-04-20 | 住友電気工業株式会社 | 半導体装置およびその製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108493114A (zh) * | 2017-02-23 | 2018-09-04 | 丰田自动车株式会社 | 半导体装置的制造方法 |
US10418494B2 (en) | 2017-02-23 | 2019-09-17 | Toyota Jidosha Kabushiki Kaisha | Method of manufacturing semiconductor device |
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Publication number | Publication date |
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US20190043999A1 (en) | 2019-02-07 |
WO2017134509A1 (en) | 2017-08-10 |
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