JP6248392B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6248392B2 JP6248392B2 JP2013006170A JP2013006170A JP6248392B2 JP 6248392 B2 JP6248392 B2 JP 6248392B2 JP 2013006170 A JP2013006170 A JP 2013006170A JP 2013006170 A JP2013006170 A JP 2013006170A JP 6248392 B2 JP6248392 B2 JP 6248392B2
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- 239000004065 semiconductor Substances 0.000 title claims description 77
- 230000001681 protective effect Effects 0.000 claims description 190
- 229910052751 metal Inorganic materials 0.000 claims description 118
- 239000002184 metal Substances 0.000 claims description 118
- 239000000758 substrate Substances 0.000 claims description 43
- 230000002093 peripheral effect Effects 0.000 claims description 39
- 239000011229 interlayer Substances 0.000 claims description 19
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 18
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 16
- 239000010410 layer Substances 0.000 claims description 15
- 229920001721 polyimide Polymers 0.000 claims description 6
- 239000004642 Polyimide Substances 0.000 claims description 5
- 229920002577 polybenzoxazole Polymers 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 238000009751 slip forming Methods 0.000 claims description 2
- 239000002344 surface layer Substances 0.000 claims 1
- 239000007769 metal material Substances 0.000 description 41
- 239000011347 resin Substances 0.000 description 23
- 229920005989 resin Polymers 0.000 description 23
- 150000002500 ions Chemical class 0.000 description 20
- 230000015556 catabolic process Effects 0.000 description 13
- 238000005229 chemical vapour deposition Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 12
- 238000001312 dry etching Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 9
- 238000000059 patterning Methods 0.000 description 9
- 238000000926 separation method Methods 0.000 description 9
- 230000035515 penetration Effects 0.000 description 8
- 239000000945 filler Substances 0.000 description 4
- 238000002161 passivation Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910018125 Al-Si Inorganic materials 0.000 description 1
- 229910018520 Al—Si Inorganic materials 0.000 description 1
- 229910018594 Si-Cu Inorganic materials 0.000 description 1
- 229910008465 Si—Cu Inorganic materials 0.000 description 1
- MXSJNBRAMXILSE-UHFFFAOYSA-N [Si].[P].[B] Chemical compound [Si].[P].[B] MXSJNBRAMXILSE-UHFFFAOYSA-N 0.000 description 1
- 239000005380 borophosphosilicate glass Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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Description
素子周縁部Yの無機保護膜にクラックが発生した場合、THB試験(Temperature,Humidity,Bias Test)のような高温、高湿雰囲気中での信頼性試験でクラック発生箇所に局所的に電界が集中し、ドレイン電極とソース電極との間に局所的な耐圧低下が起こり、リーク不良が発生する。
以下の実施の形態では、半導体装置として主にMOSFET(Matal Oxide Semicondouctor Field Effect Transistor)について説明するが、MOSFETに限定されるものではなく、例えば、IGBT(Insulated Gate Bipolar Transistor)としてもよい。
(実施の形態1)
図1、図2、図3、及び図4は、本発明の第1の実施の形態の構成図である。図1は本発明実施の形態1の平面図であり、有機保護膜2が形成されていない場合を示す。図2は有機保護膜2が形成された場合の図1のA−A’断面図、図3は有機保護膜2が形成された場合の図1のB−B’断面図、図4は有機保護膜2が形成された場合の図1のC−C’断面図である。
ゲート金属配線31は、無機保護膜1が覆うように形成され、図2、図3に示すように、ゲート金属配線31とソース電極33の一部を除く半導体基板100の第1主面側の上面には、有機保護膜2が形成される。有機保護膜2が形成されず表面が露出したゲート金属配線31とソース電極33は、ゲート電極パッド41とソース電極パッド42となる。
ゲート金属配線31、チャネルストッパー電極32、ソース電極33、ソース電極パッド42、及びフィールドプレート電極12は金属材料であり、導電性の良いAl−Si、Al−Si−Cuなどのアルミニウムを含む合金であることが望ましい。
(実施の形態2)
図5、及び図6は本件発明の第2の実施の形態の構成図である。図5は、図1のA−A’断面図であり、図6は、図5のD部の拡大図である。
図5に示すように、無機保護膜1aはソース電極33上面と側面に形成され、無機保護膜1bはゲート金属配線31の上面と側面を覆うように形成される。ゲート金属配線31とソース電極33の一部を露出させて形成するゲート電極パッド31部とソース電極バッド42部を除く半導体基板100の第1主面側の上面には、有機保護膜2が形成される。
(実施の形態3)
図7は本件発明の第3の実施の形態の構成図であり、図1のA−A’断面図である。
ゲート金属配線31とソース電極33の一部を露出させて形成するゲート電極パッド31部とソース電極バッド42部を除く半導体基板100の第1主面側の上面には、有機保護膜2が形成される。
(実施の形態4)
図8は本発明の第4の実施の形態の構成図であり、図1のA−A’断面図である。
ゲート金属配線31とソース電極33の一部を露出させて形成するゲート電極パッド31部とソース電極バッド42部を除く半導体基板100の第1主面側の上面には、有機保護膜2が形成される。
(実施の形態5)
図9は本発明の第5の実施の形態の構成図であり、図1のA−A’断面図である。
(実施の形態6)
図10は本発明の第6の実施の形態の構成図であり、図1のA−A’断面図である。
(実施の形態7)
図11は、本発明の第7の実施の形態の構成図であり、図1のA−A’断面図である。
図11に示すように、ゲート金属配線31の側面、及び上面には、無機保護膜1kが形成され、ゲート金属配線31とエミッタ電極64の一部を露出させて形成するゲート電極パッド41部とエミッタ電極パッド65部を除く半導体基板100の第1主面側の上面には、有機保護膜2が形成される。
(実施の形態8)
図12は、本発明の第8の実施の形態の構成図であり、図1のA−A’断面図である。
図12に示すように、素子活性部Xの半導体基板100の第1主面の第1導電型のドリフト領域15には、pベース領域14が形成され、半導体基板100表面からドリフト領域15に達するトレンチ51が形成されている。トレンチ51内にはゲート絶縁膜4を介してゲート電極52が埋め込まれている。ゲート電極52は、不純物がドープされた多結晶シリコンからなり、層間絶縁膜6で覆われている。トレンチ51に隣接してn型ソース領域16が形成され、n型ソース領域16とpベース領域14には、ソース電極33が接続している。
(実施の形態9)
図13は本件発明の第9の実施の形態の構成図であり、図1のA−A’断面図である。
図13に示すように、ゲート金属配線31の側面、及び上面には、第1の無機保護膜8が形成され、第1の無機保護膜8の上面には第2の無機保護膜9が形成され、ゲート金属配線31とソース電極33の一部を露出させて形成するゲート電極パッド41部とソース電極パッド42部を除く半導体基板100の第1主面側の上面には、有機保護膜2が形成される。
第1の無機保護膜8、及び第2の無機保護膜9はゲート金属配線31の側面と上面のみに形成することで、組立工程で半導体装置101に加えられる応力により、図14に示した従来技術において素子周縁部Yの無機保護膜10に発生していたクラックを防ぐことができる。このクラックの発生を防ぐことで、THB試験などの高温、高湿雰囲気中の信頼性試験において、クラックの発生箇所に局所的なモールド樹脂中のイオン、及び水分の侵入がなくなり、ドレイン電極22とソース電極33との間の局所的な耐圧低下を抑制することができ、リーク不良を抑制することができる。
なお、本実施の形態では第1の無機保護膜8を酸化シリコン膜、第2の無機保護膜9を窒化シリコン膜としたが、第1の無機保護膜8を窒化シリコン膜、第2の無機保護膜9を酸化シリコン膜としても良い。
2 有機保護膜
4 ゲート絶縁膜
5 ゲート電極
6 層間絶縁膜
7 絶縁膜
8 第1の無機保護膜
9 第2の無機保護膜
10 無機保護膜
11 ガードリング
12 フィールドプレート電極
13 p型表面領域
14 pベース領域
15 ドリフト領域
16 n型ソース領域
21 ドレイン領域
22 ドレイン電極
31 ゲート金属配線
32 チャネルストッパー電極
33 ソース電極
41 ゲート電極パッド
42 ソース電極パッド
51 トレンチ
52 ゲート電極
61 コレクタ領域
62 コレクタ電極
63 バッファ領域
64 エミッタ電極
65 エミッタ電極パッド
66 エミッタ領域
100 半導体基板
101 半導体装置
X 素子活性部
Y 素子周縁部
Claims (7)
- 素子活性部と前記素子活性部の外周に素子周縁部を備えた半導体装置であって、
前記素子活性部は、
半導体基板の第1主面側の第1導電型の半導体層に形成された第2導電型のベース領域と、
前記ベース領域に形成された第1導電型のソース領域と、
前記半導体層と前記ソース領域との間の前記ベース領域の前記半導体基板の表面上に形成されたゲート絶縁膜と、
前記ゲート絶縁膜上に形成されたゲート電極と、
前記ゲート電極上に形成された層間絶縁膜と、
前記層間絶縁膜上に形成され前記ベース領域、及び前記ソース領域と接続されたソース電極と、
前記層間絶縁膜上に前記ソース電極を囲むように形成され前記ゲート電極と電気的に接続された環状のゲート金属配線とを備え、
前記素子周縁部は、
前記半導体層に離間して形成された第2導電型の少なくとも2つ以上のガードリングと、
前記半導体基板の前記第1主面上に形成された絶縁膜と、
前記絶縁膜上に形成された前記層間絶縁膜と、
前記層間絶縁膜上に前記素子活性部を囲むように形成され前記ガードリングと電気的に接続された少なくとも1つ以上の環状のフィールドプレート電極と、
前記半導体基板の第1主面側の上面を覆い、前記ゲート金属配線を部分的に露出する第1開口部、および前記ソース電極を部分的に露出する第2開口部を備え、前記層間絶縁膜に接する有機保護膜と、
前記ソース電極の開口端から前記ゲート金属配線の前記素子周縁部側端部に亘って、前記ソース電極と前記有機保護膜との間、前記層間絶縁膜と前記有機保護膜との間および前記ゲート金属配線と前記有機保護膜との間に連続して形成された第1無機保護膜と、
を備えることを特徴とした半導体装置。 - 前記第1無機保護膜は、前記ゲート金属配線の前記素子周縁部側の側面に形成された前記第1無機保護膜より外周には形成されていないことを特徴とする請求項1に記載の半導体装置。
- 前記第1無機保護膜は、前記ゲート金属配線の前記素子周縁部側の側面に形成された前記第1無機保護膜と前記素子周縁部の最外周の前記フィールドプレート電極の側面との間には形成されておらず、
前記素子周縁部の最外周には、
前記半導体層の表面層に形成された第2導電型領域と、
前記層間絶縁膜上に形成され前記半導体層、又は前記第2導電型領域と電気的に接続された環状のチャネルストッパー電極とを備え、
前記チャネルストッパー電極と前記有機保護膜との間に第2無機保護膜を備えることを特徴とする請求項1に記載の半導体装置。 - 前記第1開口部には前記ゲート金属配線を部分的に露出したゲート電極パッドを備え、
前記第2開口部には前記ソース電極を部分的に露出したソース電極パッドを備えることを特徴とする請求項1に記載の半導体装置。 - 前記第1無機保護膜は、酸化シリコン膜、又は窒化シリコン膜とすることを特徴とする請求項1に記載の半導体装置。
- 前記有機保護膜は、ポリベンゾオキサゾール、又はポリイミドとすることを特徴とする請求項1乃至請求項4いずれか1つに記載の半導体装置。
- 前記ゲート金属配線は、アルミニウムを含む合金であることを特徴とする請求項1乃至請求項4いずれか1つに記載の半導体装置。
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US9985125B1 (en) | 2016-11-25 | 2018-05-29 | Panasonic Intellectual Property Management Co., Ltd. | Silicon carbide semiconductor device |
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JP6854654B2 (ja) * | 2017-01-26 | 2021-04-07 | ローム株式会社 | 半導体装置 |
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