JP6341714B2 - 配線基板及びその製造方法 - Google Patents
配線基板及びその製造方法 Download PDFInfo
- Publication number
- JP6341714B2 JP6341714B2 JP2014062735A JP2014062735A JP6341714B2 JP 6341714 B2 JP6341714 B2 JP 6341714B2 JP 2014062735 A JP2014062735 A JP 2014062735A JP 2014062735 A JP2014062735 A JP 2014062735A JP 6341714 B2 JP6341714 B2 JP 6341714B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- wiring
- insulating layer
- insulating
- pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H10W70/685—
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4673—Application methods or materials of intermediate insulating layers not specially adapted to any one of the previous methods of adding a circuit layer
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- H10W70/05—
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- H10W70/095—
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- H10W70/635—
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- H10W90/00—
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0216—Reduction of cross-talk, noise or electromagnetic interference
- H05K1/0218—Reduction of cross-talk, noise or electromagnetic interference by printed shielding conductors, ground planes or power plane
- H05K1/0219—Printed shielding conductors for shielding around or between signal conductors, e.g. coplanar or coaxial printed shielding conductors
- H05K1/0222—Printed shielding conductors for shielding around or between signal conductors, e.g. coplanar or coaxial printed shielding conductors for shielding around a single via or around a group of vias, e.g. coaxial vias or vias surrounded by a grounded via fence
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0216—Reduction of cross-talk, noise or electromagnetic interference
- H05K1/0218—Reduction of cross-talk, noise or electromagnetic interference by printed shielding conductors, ground planes or power plane
- H05K1/0224—Patterned shielding planes, ground planes or power planes
- H05K1/0225—Single or multiple openings in a shielding, ground or power plane
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0296—Conductive pattern lay-out details not covered by sub groups H05K1/02 - H05K1/0295
- H05K1/0298—Multilayer circuits
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0313—Organic insulating material
- H05K1/0353—Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
- H05K1/0366—Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement reinforced, e.g. by fibres, fabrics
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0313—Organic insulating material
- H05K1/0353—Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
- H05K1/0373—Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement containing additives, e.g. fillers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/115—Via connections; Lands around holes or via connections
- H05K1/116—Lands, clearance holes or other lay-out details concerning the surrounding of a via
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0183—Dielectric layers
- H05K2201/0191—Dielectric layers wherein the thickness of the dielectric plays an important role
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
- H05K2201/0275—Fibers and reinforcement materials
- H05K2201/0281—Conductive fibers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
- H05K2201/0275—Fibers and reinforcement materials
- H05K2201/029—Woven fibrous reinforcement or textile
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
- H05K2201/0275—Fibers and reinforcement materials
- H05K2201/0293—Non-woven fibrous reinforcement
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0335—Layered conductors or foils
- H05K2201/0347—Overplating, e.g. for reinforcing conductors or bumps; Plating over filled vias
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/06—Thermal details
- H05K2201/068—Thermal details wherein the coefficient of thermal expansion is important
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09218—Conductive traces
- H05K2201/09227—Layout details of a plurality of traces, e.g. escape layout for Ball Grid Array [BGA] mounting
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/0929—Conductive planes
- H05K2201/093—Layout of power planes, ground planes or power supply conductors, e.g. having special clearance holes therein
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
- H05K2201/09681—Mesh conductors, e.g. as a ground plane
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
- H05K2201/0969—Apertured conductors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0502—Patterning and lithography
- H05K2203/0514—Photodevelopable thick film, e.g. conductive or insulating paste
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/26—Cleaning or polishing of the conductive pattern
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
- H05K3/381—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the substrate
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4673—Application methods or materials of intermediate insulating layers not specially adapted to any one of the previous methods of adding a circuit layer
- H05K3/4676—Single layer compositions
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- H10W70/60—
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- H10W70/63—
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- H10W70/69—
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- H10W70/692—
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- H10W70/695—
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- H10W72/072—
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- H10W72/073—
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- H10W72/252—
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- H10W74/15—
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- H10W90/701—
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- H10W90/722—
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- H10W90/724—
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- H10W90/734—
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Ceramic Engineering (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014062735A JP6341714B2 (ja) | 2014-03-25 | 2014-03-25 | 配線基板及びその製造方法 |
| US14/663,921 US10978383B2 (en) | 2014-03-25 | 2015-03-20 | Wiring board and method of manufacturing the same |
| US17/201,631 US11430725B2 (en) | 2014-03-25 | 2021-03-15 | Wiring board and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014062735A JP6341714B2 (ja) | 2014-03-25 | 2014-03-25 | 配線基板及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015185773A JP2015185773A (ja) | 2015-10-22 |
| JP2015185773A5 JP2015185773A5 (enExample) | 2017-02-02 |
| JP6341714B2 true JP6341714B2 (ja) | 2018-06-13 |
Family
ID=54192464
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014062735A Active JP6341714B2 (ja) | 2014-03-25 | 2014-03-25 | 配線基板及びその製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (2) | US10978383B2 (enExample) |
| JP (1) | JP6341714B2 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017152536A (ja) * | 2016-02-24 | 2017-08-31 | イビデン株式会社 | プリント配線板及びその製造方法 |
| WO2017188273A1 (ja) * | 2016-04-28 | 2017-11-02 | デンカ株式会社 | セラミック回路基板及びその製造方法 |
| JP2017204511A (ja) * | 2016-05-10 | 2017-11-16 | ソニー株式会社 | 半導体装置、半導体装置の製造方法、及び、電子機器 |
| KR20190041215A (ko) * | 2017-10-12 | 2019-04-22 | 주식회사 아모그린텍 | 인쇄회로기판 제조 방법 및 이에 의해 제조된 인쇄회로기판 |
| US11309252B2 (en) * | 2017-11-13 | 2022-04-19 | Dyi-chung Hu | Package substrate and package structure |
| US12176277B2 (en) * | 2017-11-13 | 2024-12-24 | Dyi-chung Hu | Package substrate and package structure |
| CN113875011B (zh) * | 2020-04-10 | 2025-12-19 | 京东方科技集团股份有限公司 | 驱动基板及其制作方法、显示装置 |
| WO2023012864A1 (ja) * | 2021-08-02 | 2023-02-09 | 昭和電工マテリアルズ株式会社 | 配線基板を製造する方法、及び配線基板 |
| JP2024008661A (ja) * | 2022-07-08 | 2024-01-19 | 新光電気工業株式会社 | 配線基板及びその製造方法 |
| US20240298405A1 (en) * | 2023-03-01 | 2024-09-05 | Johnson Controls Tyco IP Holdings LLP | Circuit board with alternate component integration capability |
Family Cites Families (38)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US5231751A (en) * | 1991-10-29 | 1993-08-03 | International Business Machines Corporation | Process for thin film interconnect |
| US6239485B1 (en) * | 1998-11-13 | 2001-05-29 | Fujitsu Limited | Reduced cross-talk noise high density signal interposer with power and ground wrap |
| US6399892B1 (en) * | 2000-09-19 | 2002-06-04 | International Business Machines Corporation | CTE compensated chip interposer |
| JP4129971B2 (ja) * | 2000-12-01 | 2008-08-06 | 新光電気工業株式会社 | 配線基板の製造方法 |
| JP2003023252A (ja) | 2001-07-10 | 2003-01-24 | Ibiden Co Ltd | 多層プリント配線板 |
| KR100917081B1 (ko) * | 2001-03-14 | 2009-09-15 | 이비덴 가부시키가이샤 | 다층 프린트 배선판 |
| JP3910387B2 (ja) * | 2001-08-24 | 2007-04-25 | 新光電気工業株式会社 | 半導体パッケージ及びその製造方法並びに半導体装置 |
| JP3872712B2 (ja) * | 2002-04-18 | 2007-01-24 | 日本特殊陶業株式会社 | 多層配線基板 |
| JP4488684B2 (ja) * | 2002-08-09 | 2010-06-23 | イビデン株式会社 | 多層プリント配線板 |
| US7249337B2 (en) * | 2003-03-06 | 2007-07-24 | Sanmina-Sci Corporation | Method for optimizing high frequency performance of via structures |
| KR101014576B1 (ko) * | 2004-02-24 | 2011-02-16 | 이비덴 가부시키가이샤 | 반도체 탑재용 기판 |
| JP2006100463A (ja) * | 2004-09-29 | 2006-04-13 | Ibiden Co Ltd | プリント配線板用層間絶縁層、プリント配線板およびその製造方法 |
| KR20060045208A (ko) * | 2004-11-12 | 2006-05-17 | 삼성테크윈 주식회사 | 반도체 팩키지용 회로기판 및 이의 제조방법 |
| JP4673207B2 (ja) * | 2005-12-16 | 2011-04-20 | イビデン株式会社 | 多層プリント配線板およびその製造方法 |
| JP4964481B2 (ja) * | 2006-03-24 | 2012-06-27 | 日本特殊陶業株式会社 | 配線基板 |
| US8115113B2 (en) * | 2007-11-30 | 2012-02-14 | Ibiden Co., Ltd. | Multilayer printed wiring board with a built-in capacitor |
| JP5121574B2 (ja) * | 2008-05-28 | 2013-01-16 | 新光電気工業株式会社 | 配線基板及び半導体パッケージ |
| US8304915B2 (en) * | 2008-07-23 | 2012-11-06 | Nec Corporation | Semiconductor device and method for manufacturing the same |
| US8692135B2 (en) * | 2008-08-27 | 2014-04-08 | Nec Corporation | Wiring board capable of containing functional element and method for manufacturing same |
| JP2010192784A (ja) * | 2009-02-20 | 2010-09-02 | Kyocera Corp | 配線基板およびプローブカードならびに電子装置 |
| US9299648B2 (en) * | 2009-03-04 | 2016-03-29 | Stats Chippac Ltd. | Integrated circuit packaging system with patterned substrate and method of manufacture thereof |
| WO2010134511A1 (ja) * | 2009-05-20 | 2010-11-25 | 日本電気株式会社 | 半導体装置及び半導体装置の製造方法 |
| JP5460388B2 (ja) * | 2010-03-10 | 2014-04-02 | 新光電気工業株式会社 | 半導体装置及びその製造方法 |
| JP2012054395A (ja) * | 2010-09-01 | 2012-03-15 | Nec Corp | 半導体パッケージ |
| US9006580B2 (en) * | 2011-06-09 | 2015-04-14 | Ngk Spark Plug Co., Ltd. | Method of manufacturing multilayer wiring substrate, and multilayer wiring substrate |
| JP5808586B2 (ja) * | 2011-06-21 | 2015-11-10 | 新光電気工業株式会社 | インターポーザの製造方法 |
| JP6081693B2 (ja) | 2011-09-12 | 2017-02-15 | 新光電気工業株式会社 | 配線基板及び配線基板の製造方法 |
| JP5941735B2 (ja) * | 2012-04-10 | 2016-06-29 | 新光電気工業株式会社 | 配線基板の製造方法及び配線基板 |
| JPWO2013161527A1 (ja) * | 2012-04-26 | 2015-12-24 | 日本特殊陶業株式会社 | 多層配線基板及びその製造方法 |
| KR101412225B1 (ko) * | 2012-08-10 | 2014-06-25 | 이비덴 가부시키가이샤 | 배선판 및 그 제조 방법 |
| KR101420543B1 (ko) * | 2012-12-31 | 2014-08-13 | 삼성전기주식회사 | 다층기판 |
| US9000302B2 (en) * | 2013-04-17 | 2015-04-07 | Shinko Electric Industries Co., Ltd. | Wiring board |
| JP5662551B1 (ja) * | 2013-12-20 | 2015-01-28 | 新光電気工業株式会社 | 配線基板、半導体装置及び配線基板の製造方法 |
| JP6298722B2 (ja) * | 2014-06-10 | 2018-03-20 | 新光電気工業株式会社 | 配線基板、半導体装置及び配線基板の製造方法 |
| JP6332680B2 (ja) * | 2014-06-13 | 2018-05-30 | 新光電気工業株式会社 | 配線基板及びその製造方法 |
| JP6375159B2 (ja) * | 2014-07-07 | 2018-08-15 | 新光電気工業株式会社 | 配線基板、半導体パッケージ |
| JP6324876B2 (ja) * | 2014-07-16 | 2018-05-16 | 新光電気工業株式会社 | 配線基板、半導体装置及び配線基板の製造方法 |
| US9520352B2 (en) * | 2014-12-10 | 2016-12-13 | Shinko Electric Industries Co., Ltd. | Wiring board and semiconductor device |
-
2014
- 2014-03-25 JP JP2014062735A patent/JP6341714B2/ja active Active
-
2015
- 2015-03-20 US US14/663,921 patent/US10978383B2/en active Active
-
2021
- 2021-03-15 US US17/201,631 patent/US11430725B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2015185773A (ja) | 2015-10-22 |
| US10978383B2 (en) | 2021-04-13 |
| US11430725B2 (en) | 2022-08-30 |
| US20150282323A1 (en) | 2015-10-01 |
| US20210202361A1 (en) | 2021-07-01 |
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