JP6331573B2 - アモルファス誘電体膜を有する電子部品 - Google Patents

アモルファス誘電体膜を有する電子部品 Download PDF

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Publication number
JP6331573B2
JP6331573B2 JP2014068512A JP2014068512A JP6331573B2 JP 6331573 B2 JP6331573 B2 JP 6331573B2 JP 2014068512 A JP2014068512 A JP 2014068512A JP 2014068512 A JP2014068512 A JP 2014068512A JP 6331573 B2 JP6331573 B2 JP 6331573B2
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Japan
Prior art keywords
dielectric film
dielectric
amorphous
thin film
sample
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JP2014068512A
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Japanese (ja)
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JP2015025196A (ja
JP2015025196A5 (enExample
Inventor
俊彦 兼子
俊彦 兼子
早織 武田
早織 武田
ゆき 山下
ゆき 山下
純一 山▲崎▼
純一 山▲崎▼
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TDK Corp
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TDK Corp
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Priority to JP2014068512A priority Critical patent/JP6331573B2/ja
Priority to KR1020140074515A priority patent/KR101843718B1/ko
Priority to US14/310,212 priority patent/US9382163B2/en
Priority to CN201410281264.9A priority patent/CN104240942B/zh
Publication of JP2015025196A publication Critical patent/JP2015025196A/ja
Priority to KR1020160061298A priority patent/KR101729929B1/ko
Publication of JP2015025196A5 publication Critical patent/JP2015025196A5/ja
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    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/80—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple passive components, e.g. resistors, capacitors or inductors
    • H10D86/85—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple passive components, e.g. resistors, capacitors or inductors characterised by only passive components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
    • H01B3/02—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances
    • H01B3/10—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances metallic oxides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/08—Inorganic dielectrics
    • H01G4/12—Ceramic dielectrics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/33—Thin- or thick-film capacitors (thin- or thick-film circuits; capacitors without a potential-jump or surface barrier specially adapted for integrated circuits, details thereof, multistep manufacturing processes therefor)
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/68—Capacitors having no potential barriers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3208—Calcium oxide or oxide-forming salts thereof, e.g. lime
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3213—Strontium oxides or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3215—Barium oxides or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6562—Heating rate

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Composite Materials (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Ceramic Capacitors (AREA)
  • Inorganic Insulating Materials (AREA)
  • Physical Vapour Deposition (AREA)
JP2014068512A 2013-06-20 2014-03-28 アモルファス誘電体膜を有する電子部品 Active JP6331573B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2014068512A JP6331573B2 (ja) 2013-06-20 2014-03-28 アモルファス誘電体膜を有する電子部品
KR1020140074515A KR101843718B1 (ko) 2013-06-20 2014-06-18 아모르퍼스 유전체 막 및 전자 부품
US14/310,212 US9382163B2 (en) 2013-06-20 2014-06-20 Amorphous dielectric film and electronic component
CN201410281264.9A CN104240942B (zh) 2013-06-20 2014-06-20 非晶电介质膜以及电子部件
KR1020160061298A KR101729929B1 (ko) 2013-06-20 2016-05-19 아모르퍼스 유전체 막 및 전자 부품

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013129678 2013-06-20
JP2013129678 2013-06-20
JP2014068512A JP6331573B2 (ja) 2013-06-20 2014-03-28 アモルファス誘電体膜を有する電子部品

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2017158568A Division JP6421847B2 (ja) 2013-06-20 2017-08-21 アモルファス誘電体膜および電子部品

Publications (3)

Publication Number Publication Date
JP2015025196A JP2015025196A (ja) 2015-02-05
JP2015025196A5 JP2015025196A5 (enExample) 2016-12-01
JP6331573B2 true JP6331573B2 (ja) 2018-05-30

Family

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Family Applications (1)

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JP2014068512A Active JP6331573B2 (ja) 2013-06-20 2014-03-28 アモルファス誘電体膜を有する電子部品

Country Status (4)

Country Link
US (1) US9382163B2 (enExample)
JP (1) JP6331573B2 (enExample)
KR (2) KR101843718B1 (enExample)
CN (1) CN104240942B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6451481B2 (ja) * 2015-05-07 2019-01-16 Tdk株式会社 誘電体膜および誘電体素子
JP6249004B2 (ja) * 2015-10-06 2017-12-20 Tdk株式会社 誘電体組成物および電子部品
JP6801517B2 (ja) * 2017-03-02 2020-12-16 Tdk株式会社 誘電体組成物および電子部品
JP6938345B2 (ja) * 2017-11-17 2021-09-22 キヤノン株式会社 トナー
CN111602216A (zh) * 2018-01-19 2020-08-28 三菱电机株式会社 薄层电容器及薄层电容器的制造方法
JP7310550B2 (ja) * 2019-10-31 2023-07-19 Tdk株式会社 誘電体膜、誘電体素子および電子回路基板
CN113012939B (zh) * 2021-02-22 2022-09-09 四川大学 高耐电压低损耗硅基薄膜电容器及其制备方法

Family Cites Families (21)

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JPS5324600A (en) * 1976-08-19 1978-03-07 Murata Manufacturing Co Nonnreducing dielectric ceramic composition
JPH01315124A (ja) * 1988-06-15 1989-12-20 Matsushita Electric Ind Co Ltd 薄膜コンデンサ
US5104690A (en) * 1990-06-06 1992-04-14 Spire Corporation CVD thin film compounds
KR0162876B1 (ko) * 1996-09-11 1998-11-16 박원훈 저온소결이 가능한 온도보상용 마이크로파 유전체 자기조성물
JP3323801B2 (ja) * 1998-02-05 2002-09-09 太陽誘電株式会社 磁器コンデンサ
TW396502B (en) * 1998-10-27 2000-07-01 Prec Instr Devl Ctr Nsc Execut capacitor containing amorphous and poly-crystalline ferroelectric films, its fabrication, and method for forming the amorphous ferroelectric film
JP2000173349A (ja) * 1998-12-02 2000-06-23 Ube Ind Ltd 誘電体薄膜とその製法およびコンデンサ
JP2001077309A (ja) * 1999-08-31 2001-03-23 Toshiba Corp キャパシタ及びその製造方法
US20030013319A1 (en) * 2001-07-10 2003-01-16 Motorola, Inc. Semiconductor structure with selective doping and process for fabrication
JP4354224B2 (ja) * 2003-06-30 2009-10-28 京セラ株式会社 誘電体磁器および積層型電子部品
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JP4670612B2 (ja) * 2005-11-30 2011-04-13 Ｔｄｋ株式会社 誘電体素子とその製造方法
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JP2013112569A (ja) * 2011-11-29 2013-06-10 Tdk Corp 誘電体磁器組成物およびセラミック電子部品

Also Published As

Publication number Publication date
KR20160065059A (ko) 2016-06-08
KR101843718B1 (ko) 2018-03-30
US20140378295A1 (en) 2014-12-25
CN104240942B (zh) 2017-09-05
CN104240942A (zh) 2014-12-24
KR101729929B1 (ko) 2017-04-25
JP2015025196A (ja) 2015-02-05
US9382163B2 (en) 2016-07-05
KR20140147733A (ko) 2014-12-30

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