JP5003683B2 - ガラスセラミック組成物、ガラスセラミック焼結体および積層セラミック電子部品 - Google Patents
ガラスセラミック組成物、ガラスセラミック焼結体および積層セラミック電子部品 Download PDFInfo
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- JP5003683B2 JP5003683B2 JP2008528810A JP2008528810A JP5003683B2 JP 5003683 B2 JP5003683 B2 JP 5003683B2 JP 2008528810 A JP2008528810 A JP 2008528810A JP 2008528810 A JP2008528810 A JP 2008528810A JP 5003683 B2 JP5003683 B2 JP 5003683B2
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- glass ceramic
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- 239000000919 ceramic Substances 0.000 title claims description 110
- 239000006112 glass ceramic composition Substances 0.000 title claims description 91
- 239000002241 glass-ceramic Substances 0.000 title claims description 84
- 239000011521 glass Substances 0.000 claims description 101
- 239000000843 powder Substances 0.000 claims description 64
- 239000004020 conductor Substances 0.000 claims description 57
- 238000010304 firing Methods 0.000 claims description 40
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Inorganic materials [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 claims description 30
- IATRAKWUXMZMIY-UHFFFAOYSA-N strontium oxide Inorganic materials [O-2].[Sr+2] IATRAKWUXMZMIY-UHFFFAOYSA-N 0.000 claims description 28
- 229910002367 SrTiO Inorganic materials 0.000 claims description 23
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims description 22
- 239000000292 calcium oxide Substances 0.000 claims description 22
- 239000005388 borosilicate glass Substances 0.000 claims description 21
- 239000011777 magnesium Substances 0.000 claims description 19
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 16
- 229910018068 Li 2 O Inorganic materials 0.000 claims description 14
- 229910004283 SiO 4 Inorganic materials 0.000 claims description 14
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 13
- 239000000654 additive Substances 0.000 claims description 12
- 230000000996 additive effect Effects 0.000 claims description 12
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 claims description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 7
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 7
- 229910007472 ZnO—B2O3—SiO2 Inorganic materials 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 239000010949 copper Substances 0.000 claims description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 7
- 229910052737 gold Inorganic materials 0.000 claims description 7
- 239000010931 gold Substances 0.000 claims description 7
- 229910052709 silver Inorganic materials 0.000 claims description 7
- 239000004332 silver Substances 0.000 claims description 7
- 229910052796 boron Inorganic materials 0.000 claims description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 3
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- AOWKSNWVBZGMTJ-UHFFFAOYSA-N calcium titanate Chemical compound [Ca+2].[O-][Ti]([O-])=O AOWKSNWVBZGMTJ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052839 forsterite Inorganic materials 0.000 claims description 3
- 229910052749 magnesium Inorganic materials 0.000 claims description 3
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 claims description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- 239000011701 zinc Substances 0.000 claims description 3
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 2
- 229910052744 lithium Inorganic materials 0.000 claims description 2
- 238000009413 insulation Methods 0.000 description 35
- 239000000758 substrate Substances 0.000 description 26
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 18
- 239000003990 capacitor Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 17
- 239000000203 mixture Substances 0.000 description 14
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 11
- 239000002002 slurry Substances 0.000 description 10
- 239000000395 magnesium oxide Substances 0.000 description 9
- 239000002131 composite material Substances 0.000 description 7
- 238000007606 doctor blade method Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000005245 sintering Methods 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 6
- 239000013078 crystal Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000013067 intermediate product Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 239000011230 binding agent Substances 0.000 description 5
- 239000011575 calcium Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 229910052791 calcium Inorganic materials 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 238000004031 devitrification Methods 0.000 description 4
- 229910052712 strontium Inorganic materials 0.000 description 4
- 230000001629 suppression Effects 0.000 description 4
- 229910020068 MgAl Inorganic materials 0.000 description 3
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 3
- 229910052783 alkali metal Inorganic materials 0.000 description 3
- 150000001340 alkali metals Chemical class 0.000 description 3
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 3
- 150000001342 alkaline earth metals Chemical class 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910052726 zirconium Inorganic materials 0.000 description 3
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 229910052788 barium Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000005340 laminated glass Substances 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 238000009766 low-temperature sintering Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000011812 mixed powder Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 238000004017 vitrification Methods 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 229910017639 MgSi Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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- H—ELECTRICITY
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- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/02—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances
- H01B3/12—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances ceramics
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/062—Glass compositions containing silica with less than 40% silica by weight
- C03C3/064—Glass compositions containing silica with less than 40% silica by weight containing boron
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
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- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
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Description
3 部品本体
8,57 生の積層構造物
10〜20,59 生のガラスセラミック層
21,24,38,40 コイルパターン
22,28,29,34,35,41 引出しパターン
23,25,26,30,32,36,37,39,56,65 ビアホール導体
27,31,33 コンデンサパターン
53,62,63 ガラスセラミック層
54,66 外部導体膜
55,64 内部導体膜
51,61 多層セラミック基板
67 生の複合積層構造物
まず、表1に示す、Li2O、MgO、BaO、CaO、SrO、B2O3、SiO2、ZnOおよびAl2O3の組成比が得られるように、各々の炭酸塩または酸化物粉末を秤量し、これらを十分混合した後、1100〜1400℃の温度で溶融し、水中に投入して急冷した後、湿式粉砕して、ガラス粉末G1〜G30を得た。
実験例2では、CaZrO3の代わりに、Al2O3またはMgAl2O4を用いて、実験例1の場合と同様の工程に従って、円板状の成形体を得、次いで、脱バインダ工程および焼成工程を実施し、焼結体を得ようと試みた。
実験例3では、この発明に係るガラスセラミック組成物において、BaZrO3、SrTiO3およびMg2SiO4の各々のさらなる含有の効果を確認するための実験を行なった。
容量変化率[%]={(C1 −C0 )/C0 }×100の式から求めた。
実験例4では、実験例3で得た第1のガラスセラミック組成物から得られる比較的高誘電率の第1のガラスセラミック層と、以下のようにして作製した第2のガラスセラミック組成物から得られる比較的低誘電率の第2のガラスセラミック層とをともに積層しかつ焼成して、比誘電率の互いに異なる第1および第2のガラスセラミック層を備える積層セラミック電子部品を作製した。
Claims (8)
- CaZrO3系セラミックとLi2O−MgO−ZnO−B2O3−SiO2系ガラスとを含んで構成され、前記Li2O−MgO−ZnO−B2O3−SiO2系ガラスは、全体の1〜12重量%を占めており、かつ、Li2O含有量が3.5〜15重量%、MgO含有量が20〜50重量%、BaO含有量が0〜25重量%、CaO含有量が0〜10重量%、SrO含有量が0〜25重量%、B2O3含有量が16〜29重量%、SiO2含有量が11〜35重量%、ZnO含有量が5〜20重量%、Al2O3含有量が0〜15重量%である、ガラスセラミック組成物。
- さらに、BaZrO3系セラミックを1〜84重量%含み、かつSrTiO3を0〜6重量%含む、請求項1に記載のガラスセラミック組成物。
- 前記BaZrO3系セラミックを1〜30重量%含む、請求項2に記載のガラスセラミック組成物。
- さらに、Mg2SiO4を40重量%以下含む、請求項1ないし3のいずれかに記載のガラスセラミック組成物。
- 請求項1ないし4のいずれかに記載のガラスセラミック組成物を焼成してなる、ガラスセラミック焼結体。
- 請求項1ないし4のいずれかに記載のガラスセラミック組成物を焼成してなる第1のガラスセラミック層を備える、積層セラミック電子部品。
- 前記第1のガラスセラミック層とともに積層される第2のガラスセラミック層をさらに備え、
前記第2のガラスセラミック層は、
フォルステライトを主成分とする第1のセラミック粉末と、
チタン酸カルシウムを主成分とするセラミック粉末、チタン酸ストロンチウムを主成分とするセラミック粉末および酸化チタンを主成分とするセラミック粉末からなる群より選ばれる少なくとも1種からなる第2のセラミック粉末と、
リチウムをLi2 O換算で3〜15重量%、マグネシウムをMgO換算で20〜50重量%、ホウ素をB2 O3 換算で15〜30重量%、ケイ素をSiO2 換算で10〜45重量%、亜鉛をZnO換算で6〜20重量%、および、アルミニウムをAl2 O3 換算で0〜15重量%含む、ホウケイ酸ガラス粉末と
を含む、第2のガラスセラミック組成物を焼成してなるものであり、
前記ホウケイ酸ガラス粉末は、前記第2のガラスセラミック組成物のうちの3重量%以上を占めており、
前記ホウケイ酸ガラス粉末には、酸化カルシウム、酸化バリウムおよび酸化ストロンチウムからなる群より選ばれる少なくとも1種の添加成分が添加されていて、
前記添加成分の含有率を当該ホウケイ酸ガラス粉末に占める割合で表したとき、前記添加成分の含有率の下限は、酸化カルシウム、酸化バリウムおよび酸化ストロンチウムを、それぞれ、CaO、BaOおよびSrOに換算して、合計で2重量%であり、かつ、前記添加成分の含有率の上限は、酸化カルシウムの場合にはCaO換算で15重量%であり、酸化バリウムの場合にはBaO換算で25重量%であり、酸化ストロンチウムの場合にはSrO換算で25重量%である、
請求項6に記載の積層セラミック電子部品。 - 表面および/または内部に、前記ガラスセラミック組成物と同時焼成された金、銀または銅を主成分とする導体パターンをさらに備える、請求項6または7に記載の積層セラミック電子部品。
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PCT/JP2007/065359 WO2008018407A1 (fr) | 2006-08-09 | 2007-08-06 | Composition de vitrocéramique, vitrocéramique frittée, et composants électroniques céramiques stratifiés |
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DE112007001868B4 (de) | 2006-08-09 | 2013-11-07 | Murata Mfg. Co., Ltd. | Glaskeramikzusammensetzung, gesinterter Glaskeramikkörper und elektronische Komponente aus monolithischer Keramik |
DE112009000012B4 (de) * | 2008-03-13 | 2014-11-13 | Murata Manufacturing Co., Ltd. | Glaskeramikzusammensetzung, Glaskeramik-Sinterkörper und keramisches Mehrschicht-Elektronikbauteil |
WO2010058697A1 (ja) * | 2008-11-19 | 2010-05-27 | 株式会社村田製作所 | ガラスセラミック組成物およびガラスセラミック基板 |
JP5435176B2 (ja) * | 2011-05-19 | 2014-03-05 | 株式会社村田製作所 | 複合積層セラミック電子部品 |
US8923794B2 (en) * | 2011-11-02 | 2014-12-30 | Triquint Semiconductor, Inc. | Temperature compensation of acoustic resonators in the electrical domain |
CN104246930B (zh) * | 2012-03-19 | 2018-04-06 | 株式会社村田制作所 | 陶瓷电子部件 |
JP6331573B2 (ja) * | 2013-06-20 | 2018-05-30 | Tdk株式会社 | アモルファス誘電体膜を有する電子部品 |
CN104678146B (zh) * | 2013-11-28 | 2018-02-23 | 北京有色金属研究总院 | 一种基于玻璃陶瓷电容器的小型化全固态电容式分压器 |
CN106536448B (zh) * | 2014-07-09 | 2020-07-17 | 费罗公司 | 中k值ltcc组合物和装置 |
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WO2024043071A1 (ja) * | 2022-08-25 | 2024-02-29 | 株式会社村田製作所 | ガラスセラミックス組成物、ガラスセラミックス焼結体及び電子部品 |
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JP2006181737A (ja) * | 2004-12-24 | 2006-07-13 | Kyocera Corp | 複合セラミックグリーンシート、複合セラミックグリーンシートの製造方法及び多層セラミック基板の製造方法 |
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JP3028503B2 (ja) | 1992-01-31 | 2000-04-04 | 株式会社村田製作所 | 非還元性誘電体磁器組成物 |
US6774077B2 (en) * | 2001-01-24 | 2004-08-10 | Paratek Microwave, Inc. | Electronically tunable, low-loss ceramic materials including a tunable dielectric phase and multiple metal oxide phases |
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