JP6328556B2 - プロセスチャンバに結合された流量コントローラをモニタする方法 - Google Patents

プロセスチャンバに結合された流量コントローラをモニタする方法 Download PDF

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Publication number
JP6328556B2
JP6328556B2 JP2014533371A JP2014533371A JP6328556B2 JP 6328556 B2 JP6328556 B2 JP 6328556B2 JP 2014533371 A JP2014533371 A JP 2014533371A JP 2014533371 A JP2014533371 A JP 2014533371A JP 6328556 B2 JP6328556 B2 JP 6328556B2
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flow controller
flow
controller
value
gas
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JP2014528606A (ja
Inventor
バラレイブ エヌ． モハメド，
バラレイブ エヌ． モハメド，
ジョン ダブリュ． レイン，
ジョン ダブリュ． レイン，
マリウス グレーゴール，
マリウス グレーゴール，
ダン ジョセフ ヒーリー，
ダン ジョセフ ヒーリー，
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Applied Materials Inc
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Applied Materials Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/15—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters specially adapted for gas meters
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0623—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the set value given to the control element
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Flow Control (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP2014533371A 2011-09-29 2012-09-28 プロセスチャンバに結合された流量コントローラをモニタする方法 Active JP6328556B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201161540817P 2011-09-29 2011-09-29
US61/540,817 2011-09-29
US13/627,659 US9772629B2 (en) 2011-09-29 2012-09-26 Methods for monitoring a flow controller coupled to a process chamber
US13/627,659 2012-09-26
PCT/US2012/057830 WO2013049512A2 (en) 2011-09-29 2012-09-28 Methods for monitoring a flow controller coupled to a process chamber

Related Child Applications (1)

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JP2017199297A Division JP6789909B2 (ja) 2011-09-29 2017-10-13 プロセスチャンバに結合された流量コントローラをモニタする方法

Publications (2)

Publication Number Publication Date
JP2014528606A JP2014528606A (ja) 2014-10-27
JP6328556B2 true JP6328556B2 (ja) 2018-05-23

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JP2014533371A Active JP6328556B2 (ja) 2011-09-29 2012-09-28 プロセスチャンバに結合された流量コントローラをモニタする方法
JP2017199297A Active JP6789909B2 (ja) 2011-09-29 2017-10-13 プロセスチャンバに結合された流量コントローラをモニタする方法
JP2019186493A Active JP6912540B2 (ja) 2011-09-29 2019-10-10 プロセスチャンバに結合された流量コントローラをモニタする方法

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JP2017199297A Active JP6789909B2 (ja) 2011-09-29 2017-10-13 プロセスチャンバに結合された流量コントローラをモニタする方法
JP2019186493A Active JP6912540B2 (ja) 2011-09-29 2019-10-10 プロセスチャンバに結合された流量コントローラをモニタする方法

Country Status (6)

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US (2) US9772629B2 (enExample)
JP (3) JP6328556B2 (enExample)
KR (1) KR102062593B1 (enExample)
CN (1) CN103930972B (enExample)
TW (1) TWI583927B (enExample)
WO (1) WO2013049512A2 (enExample)

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JP6996289B2 (ja) * 2016-12-26 2022-01-17 株式会社島津製作所 バルブ装置
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US10760944B2 (en) * 2018-08-07 2020-09-01 Lam Research Corporation Hybrid flow metrology for improved chamber matching
JP2020086936A (ja) * 2018-11-26 2020-06-04 株式会社フジキン 流量変化の評価装置、方法、及びコンピュータプログラム
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US11486927B2 (en) * 2020-04-02 2022-11-01 Applied Materials, Inc. Bode fingerprinting for characterizations and failure detections in processing chamber
US11693435B2 (en) * 2020-06-25 2023-07-04 Applied Materials, Inc. Ethercat liquid flow controller communication for substrate processing systems
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US20220084842A1 (en) * 2020-09-11 2022-03-17 Applied Materials, Inc. Antifragile systems for semiconductor processing equipment using multiple special sensors and algorithms
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US12191214B2 (en) * 2021-03-05 2025-01-07 Taiwan Semiconductor Manufacturing Company Limited System and methods for controlling an amount of primer in a primer application gas
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Also Published As

Publication number Publication date
WO2013049512A3 (en) 2013-05-23
WO2013049512A2 (en) 2013-04-04
CN103930972A (zh) 2014-07-16
TW201331558A (zh) 2013-08-01
JP2020038678A (ja) 2020-03-12
KR102062593B1 (ko) 2020-01-06
JP2018037091A (ja) 2018-03-08
TWI583927B (zh) 2017-05-21
US20130092243A1 (en) 2013-04-18
US10222810B2 (en) 2019-03-05
JP2014528606A (ja) 2014-10-27
JP6912540B2 (ja) 2021-08-04
JP6789909B2 (ja) 2020-11-25
CN103930972B (zh) 2017-01-18
KR20140069305A (ko) 2014-06-09
US20180024573A1 (en) 2018-01-25
US9772629B2 (en) 2017-09-26

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