JP6309541B2 - 自動鉱物識別を実行する方法 - Google Patents

自動鉱物識別を実行する方法 Download PDF

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JP6309541B2
JP6309541B2 JP2015550194A JP2015550194A JP6309541B2 JP 6309541 B2 JP6309541 B2 JP 6309541B2 JP 2015550194 A JP2015550194 A JP 2015550194A JP 2015550194 A JP2015550194 A JP 2015550194A JP 6309541 B2 JP6309541 B2 JP 6309541B2
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JP2016505848A (ja
JP2016505848A5 (enExample
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マイケル・ディー・スミス
カート・メーラー
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エフ・イ−・アイ・カンパニー
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • G01N23/2252—Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/203—Measuring back scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/072—Investigating materials by wave or particle radiation secondary emission combination of measurements, 2 kinds of secondary emission
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/079—Investigating materials by wave or particle radiation secondary emission incident electron beam and measuring excited X-rays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/305—Accessories, mechanical or electrical features computer simulations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/32—Accessories, mechanical or electrical features adjustments of elements during operation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/40—Imaging
    • G01N2223/418—Imaging electron microscope
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/60—Specific applications or type of materials
    • G01N2223/616—Specific applications or type of materials earth materials

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2015550194A 2012-12-28 2013-12-26 自動鉱物識別を実行する方法 Active JP6309541B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/730,358 US9194829B2 (en) 2012-12-28 2012-12-28 Process for performing automated mineralogy
US13/730,358 2012-12-28
PCT/IB2013/061349 WO2014102733A1 (en) 2012-12-28 2013-12-26 Process for performing automated mineralogy

Publications (3)

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JP2016505848A JP2016505848A (ja) 2016-02-25
JP2016505848A5 JP2016505848A5 (enExample) 2017-02-09
JP6309541B2 true JP6309541B2 (ja) 2018-04-11

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US (1) US9194829B2 (enExample)
EP (1) EP2939008B1 (enExample)
JP (1) JP6309541B2 (enExample)
CN (1) CN104870986B (enExample)
WO (1) WO2014102733A1 (enExample)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2503538B (en) * 2012-03-27 2015-09-09 Micromass Ltd A method of mass spectrometry and a mass spectrometer
DE102014102684A1 (de) * 2014-02-28 2015-09-03 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Verfahren zur Messung eines Messobjektes mittels Röntgenfluoreszenz
JP6361871B2 (ja) * 2014-07-07 2018-07-25 住友金属鉱山株式会社 データ処理装置、データ処理プログラム、データ処理方法および処理条件決定方法
CZ2014852A3 (cs) * 2014-12-03 2016-05-18 Advacam S.R.O. Způsob rentgenové nanoradiografie a nanotomografie a zařízení k provádění tohoto způsobu
US9719950B2 (en) 2015-02-25 2017-08-01 Fei Company Sample-specific reference spectra library
JP6507992B2 (ja) * 2015-10-26 2019-05-08 住友金属鉱山株式会社 試料フレームおよび試料の分析方法
JP6622061B2 (ja) * 2015-11-04 2019-12-18 日本電子株式会社 荷電粒子線装置
JP6500752B2 (ja) * 2015-11-09 2019-04-17 住友金属鉱山株式会社 全自動鉱物分析装置と微小部ｘ線回折装置とを用いた、鉱石中に存在する鉱物粒子の同定方法
JP6500753B2 (ja) * 2015-11-09 2019-04-17 住友金属鉱山株式会社 全自動鉱物分析装置と顕微レーザーラマン分光装置とを用いた、鉱石中に存在する鉱物粒子の同定方法
JP6747321B2 (ja) * 2016-03-22 2020-08-26 住友金属鉱山株式会社 金属酸化物の粉体に含まれた異物の分析方法
JP6790880B2 (ja) * 2016-03-22 2020-11-25 住友金属鉱山株式会社 金属酸化物の粉体中の異物の分析方法
JP6747320B2 (ja) * 2016-03-22 2020-08-26 住友金属鉱山株式会社 金属酸化物の粉体に含まれた異物の分析方法
KR101707440B1 (ko) * 2016-11-01 2017-02-20 한국지질자원연구원 가도리니움 화합물을 반응시킨 암석 시료의 전자현미경 이미지를 활용한 공극률 측정방법
JP6972933B2 (ja) * 2016-11-08 2021-11-24 住友金属鉱山株式会社 鉱物粒子の表面分析方法
CN106646846A (zh) * 2017-03-23 2017-05-10 陈忠信 一种物理教学实验用多功能显微镜
JP6823563B2 (ja) * 2017-07-31 2021-02-03 株式会社日立製作所 走査電子顕微鏡および画像処理装置
US10345250B2 (en) * 2017-10-12 2019-07-09 Applied Materials, Inc. Method of inspecting a sample with a charged particle beam device, and charged particle beam device
JP6985112B2 (ja) * 2017-11-14 2021-12-22 Ｊｘ金属株式会社 分析用試料埋込樹脂
CN108398447B (zh) * 2018-03-01 2019-05-24 武汉工程大学 一种金铜矿尾砂中锌元素的崁布特征分析方法
DE102018208647B4 (de) 2018-05-30 2025-08-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Lasermesseinrichtung zur Messung einer Distanz zu einem Objekt sowie Verfahren zum Betreiben derselben
CN109100382B (zh) * 2018-07-27 2021-05-28 北京矿冶科技集团有限公司 Bpma的分区聚焦测量方法
EP3614414A1 (en) * 2018-08-20 2020-02-26 FEI Company Method of examining a sample using a charged particle microscope
CN110988003B (zh) * 2019-11-27 2021-08-13 中科晶源微电子技术（北京）有限公司 用于半导体器件的电子束检测设备、和电子束检测组件
TWI805180B (zh) * 2021-01-21 2023-06-11 日商紐富來科技股份有限公司 電子線描繪裝置及陰極壽命預測方法
JP2022151791A (ja) * 2021-03-26 2022-10-07 日本製鉄株式会社 リン酸塩鉱物の形態別定量分析方法
US11525791B1 (en) * 2021-06-14 2022-12-13 Applied Materials Israel Ltd. SNR for x-ray detectors in SEM systems by using polarization filter
CN113933330B (zh) * 2021-09-23 2024-03-08 包头钢铁（集团）有限责任公司 一种表征稀土在球团矿中分布状态的方法
JP2023068825A (ja) * 2021-11-04 2023-05-18 株式会社日立ハイテク 荷電粒子線装置
US12322568B2 (en) * 2022-09-07 2025-06-03 Kla Corporation Auto-focus sensor implementation for multi-column microscopes
CN115575434A (zh) * 2022-11-18 2023-01-06 矿冶科技集团有限公司 一种工艺矿物学参数定量分析方法

Family Cites Families (100)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3519824A (en) * 1966-03-14 1970-07-07 Unit Process Assemblies Guide for probe assembly of portable radiation backscatter measuring instrument
JPS51119289A (en) 1974-11-29 1976-10-19 Agency Of Ind Science & Technol Method of determining the heterogenous sample of micro-particles
CA1052740A (en) 1976-04-23 1979-04-17 Baxter Travenol Laboratories Device for indexing an array of sample containers
US4242586A (en) 1978-08-08 1980-12-30 Commonwealth Scientific And Industrial Research Organization Specimen holder for electron microscopy and electron diffraction
WO1981003707A1 (en) * 1980-06-11 1981-12-24 Commw Scient Ind Res Org Method and apparatus for material analysis
SE445676B (sv) 1980-07-08 1986-07-07 Stenkvist Bjoern G Forfarande och anordning for beredning av cellprover
US4587424A (en) 1983-08-22 1986-05-06 Schlumberger Technology Corporation Method for investigating the composition of an earth formation traversed by a borehole
US4592082A (en) 1984-08-10 1986-05-27 The United States Of America As Represented By The United States Department Of Energy Quantitative determination of mineral composition by powder X-ray diffraction
JPH0640054B2 (ja) 1985-09-20 1994-05-25 株式会社千代田製作所 電子顕微鏡標本作成用包埋装置
US4807148A (en) 1987-05-29 1989-02-21 Hewlett-Packard Company Deconvolving chromatographic peaks
US4839516A (en) 1987-11-06 1989-06-13 Western Atlas International, Inc. Method for quantitative analysis of core samples
GB2223842B (en) * 1988-09-06 1993-02-03 Shell Int Research Automated mineral identification and rock characterization process
JPH0656748B2 (ja) 1989-11-08 1994-07-27 日本電子株式会社 電子顕微鏡のオートフォーカス方法
US5817462A (en) 1995-02-21 1998-10-06 Applied Spectral Imaging Method for simultaneous detection of multiple fluorophores for in situ hybridization and multicolor chromosome painting and banding
US6018587A (en) 1991-02-21 2000-01-25 Applied Spectral Imaging Ltd. Method for remote sensing analysis be decorrelation statistical analysis and hardware therefor
US5798262A (en) 1991-02-22 1998-08-25 Applied Spectral Imaging Ltd. Method for chromosomes classification
US5991028A (en) 1991-02-22 1999-11-23 Applied Spectral Imaging Ltd. Spectral bio-imaging methods for cell classification
US5157251A (en) 1991-03-13 1992-10-20 Park Scientific Instruments Scanning force microscope having aligning and adjusting means
JPH0587707A (ja) 1991-09-27 1993-04-06 Nikon Corp Ｘ線顕微鏡用の試料カプセル
JP3076118B2 (ja) 1991-11-27 2000-08-14 シスメックス株式会社 粒子計数方法
RU2054660C1 (ru) 1991-12-28 1996-02-20 Алексей Никифорович Никифоров Способ прецизионного экспрессного рентгеноспектрального анализа негомогенных материалов
US5741707A (en) 1992-12-31 1998-04-21 Schlumberger Technology Corporation Method for quantitative analysis of earth samples
EP0827002B1 (de) * 1994-04-11 2004-06-09 Leica Mikroskopie Systeme AG Operationsmikroskopsystem mit Datenaufbereitungseinheit
JP3452278B2 (ja) 1994-06-30 2003-09-29 理学電機株式会社 Ｘ線回折を用いた定性分析方法及び定性分析装置
AUPN226295A0 (en) 1995-04-07 1995-05-04 Technological Resources Pty Limited A method and an apparatus for analysing a material
JP3607023B2 (ja) 1996-05-10 2005-01-05 株式会社堀場製作所 Ｘ線定量分析装置および方法
US5798525A (en) 1996-06-26 1998-08-25 International Business Machines Corporation X-ray enhanced SEM critical dimension measurement
JP3500264B2 (ja) 1997-01-29 2004-02-23 株式会社日立製作所 試料分析装置
JPH1125898A (ja) 1997-05-08 1999-01-29 Hitachi Ltd 電子顕微鏡の分解能評価方法および分解能評価用試料
JPH10312763A (ja) 1997-05-14 1998-11-24 Hitachi Ltd 電子顕微鏡用試料ホールダ
US6058322A (en) 1997-07-25 2000-05-02 Arch Development Corporation Methods for improving the accuracy in differential diagnosis on radiologic examinations
US6093930A (en) 1998-04-02 2000-07-25 International Business Machnines Corporation Automatic probe replacement in a scanning probe microscope
US6466929B1 (en) 1998-11-13 2002-10-15 University Of Delaware System for discovering implicit relationships in data and a method of using the same
JP2000249668A (ja) 1999-03-02 2000-09-14 Jeol Ltd 不均一複合組織試料の定量分析装置
US6341257B1 (en) 1999-03-04 2002-01-22 Sandia Corporation Hybrid least squares multivariate spectral analysis methods
US6140643A (en) 1999-03-09 2000-10-31 Exxonmobil Upstream Research Company Method for identification of unknown substances
US6282301B1 (en) 1999-04-08 2001-08-28 The United States Of America As Represented By The Secretary Of The Army Ares method of sub-pixel target detection
US6674894B1 (en) 1999-04-20 2004-01-06 University Of Utah Research Foundation Method and apparatus for enhancing an image using data optimization and segmentation
US6993170B2 (en) 1999-06-23 2006-01-31 Icoria, Inc. Method for quantitative analysis of blood vessel structure
JP2001006597A (ja) 1999-06-24 2001-01-12 Nec Eng Ltd 試料搭載装置
US6538249B1 (en) * 1999-07-09 2003-03-25 Hitachi, Ltd. Image-formation apparatus using charged particle beams under various focus conditions
JP3527955B2 (ja) 1999-08-26 2004-05-17 理学電機工業株式会社 蛍光ｘ線分析装置
US6377652B1 (en) 2000-01-05 2002-04-23 Abb Automation Inc. Methods and apparatus for determining mineral components in sheet material
US20040252299A9 (en) 2000-01-07 2004-12-16 Lemmo Anthony V. Apparatus and method for high-throughput preparation and spectroscopic classification and characterization of compositions
US7108970B2 (en) 2000-01-07 2006-09-19 Transform Pharmaceuticals, Inc. Rapid identification of conditions, compounds, or compositions that inhibit, prevent, induce, modify, or reverse transitions of physical state
US6470335B1 (en) 2000-06-01 2002-10-22 Sas Institute Inc. System and method for optimizing the structure and display of complex data filters
JP2002189005A (ja) 2000-10-10 2002-07-05 Nippon Light Metal Co Ltd Ｅｐｍａ法による金属間化合物の厚さ測定方法及びこの方法を用いた金属間化合物の立体形状測定方法
US6724940B1 (en) 2000-11-24 2004-04-20 Canadian Space Agency System and method for encoding multidimensional data using hierarchical self-organizing cluster vector quantization
US7761270B2 (en) 2000-12-29 2010-07-20 Exxonmobil Upstream Research Co. Computer system and method having a facility management logic architecture
US6658208B2 (en) * 2001-01-30 2003-12-02 Olympus Optical Co., Ltd. Focal-length adjusting unit for photographing apparatuses
US20050037515A1 (en) 2001-04-23 2005-02-17 Nicholson Jeremy Kirk Methods for analysis of spectral data and their applications osteoporosis
JP4015450B2 (ja) 2001-05-18 2007-11-28 高砂香料工業株式会社 光学活性アルコールの製造方法
US6584413B1 (en) 2001-06-01 2003-06-24 Sandia Corporation Apparatus and system for multivariate spectral analysis
US6687620B1 (en) 2001-08-01 2004-02-03 Sandia Corporation Augmented classical least squares multivariate spectral analysis
JP4497923B2 (ja) 2001-12-05 2010-07-07 ザ ジェイ． デビッド グラッドストーン インスティテューツ ロボット顕微鏡検査システム
GB0201362D0 (en) 2002-01-22 2002-03-13 Renishaw Plc Reversible sample holder
US6658143B2 (en) 2002-04-29 2003-12-02 Amersham Biosciences Corp. Ray-based image analysis for biological specimens
US6835931B2 (en) 2002-05-15 2004-12-28 Edax Inc. Chemical prefiltering for phase differentiation via simultaneous energy dispersive spectrometry and electron backscatter diffraction
US20040027350A1 (en) 2002-08-08 2004-02-12 Robert Kincaid Methods and system for simultaneous visualization and manipulation of multiple data types
US6888920B2 (en) 2002-09-03 2005-05-03 Basil Eric Blank Low-cost, high precision goniometric stage for x-ray diffractography
US7243030B2 (en) 2002-10-25 2007-07-10 Liposcience, Inc. Methods, systems and computer programs for deconvolving the spectral contribution of chemical constituents with overlapping signals
JP2004151045A (ja) 2002-11-01 2004-05-27 Hitachi High-Technologies Corp 電子顕微鏡またはｘ線分析装置及び試料の分析方法
US7400770B2 (en) 2002-11-06 2008-07-15 Hrl Laboratories Method and apparatus for automatically extracting geospatial features from multispectral imagery suitable for fast and robust extraction of landmarks
US20040147830A1 (en) 2003-01-29 2004-07-29 Virtualscopics Method and system for use of biomarkers in diagnostic imaging
WO2005029016A2 (en) 2003-03-13 2005-03-31 University Of Florida Material identification employing a grating spectrometer
US7132652B1 (en) 2003-03-25 2006-11-07 Kla-Tencor Technologies Corporation Automatic classification of defects using pattern recognition applied to X-ray spectra
US8060173B2 (en) 2003-08-01 2011-11-15 Dexcom, Inc. System and methods for processing analyte sensor data
CN100498309C (zh) 2003-09-28 2009-06-10 中国石油化工股份有限公司 利用x-射线荧光法分析催化裂化催化剂中金属含量的方法
CA2542107A1 (en) 2003-10-23 2005-05-12 Liposcience, Inc. Methods, systems and computer programs for assessing chd risk using mathematical models that consider in vivo concentration gradients of ldl particle subclasses of discrete size
WO2005050563A2 (en) 2003-11-17 2005-06-02 Aureon Biosciences Corporation Pathological tissue mapping
US20070279629A1 (en) 2004-01-07 2007-12-06 Jacob Grun Method and apparatus for identifying a substance using a spectral library database
JP4407337B2 (ja) 2004-03-25 2010-02-03 株式会社島津製作所 クロマトグラフ質量分析装置
US7132651B2 (en) * 2004-04-23 2006-11-07 Framatome Anp, Inc. In-situ BWR and PWR CRUD flake analysis method and tool
JP4164470B2 (ja) * 2004-05-18 2008-10-15 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
US7490009B2 (en) 2004-08-03 2009-02-10 Fei Company Method and system for spectroscopic data analysis
US7804059B2 (en) 2004-08-11 2010-09-28 Jordan Valley Semiconductors Ltd. Method and apparatus for accurate calibration of VUV reflectometer
JP4231831B2 (ja) * 2004-08-30 2009-03-04 株式会社日立ハイテクノロジーズ 走査型電子顕微鏡
US7597852B2 (en) 2004-09-03 2009-10-06 Symyx Solutions, Inc. Substrate for sample analyses
GB0512945D0 (en) 2005-06-24 2005-08-03 Oxford Instr Analytical Ltd Method and apparatus for material identification
JP4426519B2 (ja) * 2005-11-11 2010-03-03 株式会社日立ハイテクノロジーズ 光学的高さ検出方法、電子線測定装置および電子線検査装置
DE102005061687B4 (de) * 2005-12-21 2008-04-10 Carl Zeiss Nts Gmbh Verfahren und Vorrichtung zur Abstandsmessung sowie Verwendung des Verfahrens und der Vorrichtung zur Topographiebestimmung
EP1863066A1 (en) 2006-05-29 2007-12-05 FEI Company Sample carrier and sample holder
US8804897B2 (en) 2006-07-21 2014-08-12 Areva Inc. Integrated method to analyze crystals in deposits
ES2422295T5 (es) 2006-07-24 2017-06-15 Becton Dickinson And Company Aparato y método para realizar un ensayo utilizando partículas magnéticas
US7930106B2 (en) 2006-11-30 2011-04-19 Gen-Probe Incorporated Quantitative method employing adjustment of pre-defined master calibration curves
GB0712052D0 (en) * 2007-06-21 2007-08-01 Oxford Instr Molecular Biotool Method for quantitive analysis of a material
JP4659004B2 (ja) * 2007-08-10 2011-03-30 株式会社日立ハイテクノロジーズ 回路パターン検査方法、及び回路パターン検査システム
JP4859250B2 (ja) 2007-08-31 2012-01-25 キヤノン株式会社 検査物に関する距離調整装置及び方法、検査装置及び方法
RU2518230C2 (ru) 2008-02-06 2014-06-10 Эф-И-Ай КАМПАНИ Способ и система для анализа данных спектра
DE102008001812B4 (de) 2008-05-15 2013-05-29 Carl Zeiss Microscopy Gmbh Positioniereinrichtung für ein Teilchenstrahlgerät
JP2010087070A (ja) * 2008-09-30 2010-04-15 Hitachi High-Technologies Corp 走査電子顕微鏡に用いられるレシピの診断装置
US8947520B2 (en) * 2009-01-22 2015-02-03 Hitachi High-Technologies Corporation Electron microscope
JP2011113640A (ja) 2009-11-24 2011-06-09 Fuji Electric Holdings Co Ltd 分析用試料の保持方法及び分析装置用試料ホルダー
JP5325802B2 (ja) * 2010-01-28 2013-10-23 株式会社日立ハイテクノロジーズ 観察方法および観察装置
DE202010010932U1 (de) 2010-04-19 2011-10-07 Witec Wissenschaftliche Instrumente Und Technologie Gmbh Vorrichtung zur Abbildung einer Probenoberfläche
US8773570B2 (en) * 2010-06-17 2014-07-08 Panasonic Corporation Image processing apparatus and image processing method
JP5450357B2 (ja) * 2010-11-19 2014-03-26 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
EP2605005A1 (en) 2011-12-14 2013-06-19 FEI Company Clustering of multi-modal data
EP2584362A1 (en) * 2011-10-18 2013-04-24 FEI Company Scanning method for scanning a sample with a probe
US8716673B2 (en) 2011-11-29 2014-05-06 Fei Company Inductively coupled plasma source as an electron beam source for spectroscopic analysis

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WO2014102733A1 (en) 2014-07-03
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EP2939008A4 (en) 2015-12-30
US20140183357A1 (en) 2014-07-03
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