JP6197619B2 - 電子装置及び電子装置の製造方法 - Google Patents

電子装置及び電子装置の製造方法 Download PDF

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JP6197619B2
JP6197619B2 JP2013254372A JP2013254372A JP6197619B2 JP 6197619 B2 JP6197619 B2 JP 6197619B2 JP 2013254372 A JP2013254372 A JP 2013254372A JP 2013254372 A JP2013254372 A JP 2013254372A JP 6197619 B2 JP6197619 B2 JP 6197619B2
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Prior art keywords
terminal
electronic component
bonding material
circuit board
semiconductor package
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JP2013254372A
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Japanese (ja)
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JP2015115363A5 (enExample
JP2015115363A (ja
Inventor
浩三 清水
浩三 清水
作山 誠樹
誠樹 作山
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Fujitsu Ltd
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Fujitsu Ltd
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Priority to JP2013254372A priority Critical patent/JP6197619B2/ja
Priority to US14/532,032 priority patent/US9490232B2/en
Priority to CN201710096783.1A priority patent/CN107424983A/zh
Priority to CN201611027509.0A priority patent/CN107039379A/zh
Priority to CN201410708719.0A priority patent/CN104701281B/zh
Priority to CN201710096431.6A priority patent/CN106887418A/zh
Publication of JP2015115363A publication Critical patent/JP2015115363A/ja
Priority to US15/142,690 priority patent/US9530745B2/en
Priority to US15/271,744 priority patent/US9761552B2/en
Priority to US15/351,992 priority patent/US9812418B2/en
Publication of JP2015115363A5 publication Critical patent/JP2015115363A5/ja
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    • H10W40/20—Arrangements for cooling
    • H10W40/22—Arrangements for cooling characterised by their shape, e.g. having conical or cylindrical projections
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    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
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    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
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    • B23K3/00—Tools, devices or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B23K3/08—Auxiliary devices therefor
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    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
    • B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering or brazing
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    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24—Selection of soldering or welding materials proper
    • B23K35/26—Selection of soldering or welding materials proper with the principal constituent melting at less than 400°C
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    • B23K35/24—Selection of soldering or welding materials proper
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    • H10W74/114—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations
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    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
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    • B23K2101/00—Articles made by soldering, welding or cutting
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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Wire Bonding (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
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US14/532,032 US9490232B2 (en) 2013-12-09 2014-11-04 Electronic apparatus and method for fabricating the same
CN201710096783.1A CN107424983A (zh) 2013-12-09 2014-11-26 电子设备及其制造方法
CN201611027509.0A CN107039379A (zh) 2013-12-09 2014-11-26 电子设备及其制造方法
CN201410708719.0A CN104701281B (zh) 2013-12-09 2014-11-26 电子设备及其制造方法
CN201710096431.6A CN106887418A (zh) 2013-12-09 2014-11-26 电子设备及其制造方法
US15/142,690 US9530745B2 (en) 2013-12-09 2016-04-29 Electronic apparatus and method for fabricating the same
US15/271,744 US9761552B2 (en) 2013-12-09 2016-09-21 Electronic apparatus and method for fabricating the same
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Families Citing this family (7)

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Publication number Priority date Publication date Assignee Title
JP6061276B2 (ja) * 2014-08-29 2017-01-18 インターナショナル・ビジネス・マシーンズ・コーポレーションInternational Business Machines Corporation 金属層間のはんだ接合の形成方法
CN105575924B (zh) * 2014-10-15 2018-07-03 台达电子工业股份有限公司 功率模块
JP6806520B2 (ja) * 2016-10-17 2021-01-06 ラピスセミコンダクタ株式会社 半導体装置および配線基板の設計方法
JP7251446B2 (ja) * 2019-10-28 2023-04-04 株式会社オートネットワーク技術研究所 伝熱部材付基板及び伝熱部材付基板の製造方法
JP7526642B2 (ja) * 2020-11-20 2024-08-01 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
CN113544844A (zh) * 2020-12-28 2021-10-22 英诺赛科(苏州)科技有限公司 半导体封装及其制造方法
CN117280459A (zh) * 2021-12-29 2023-12-22 华为技术有限公司 芯片封装结构及其制备方法、电子设备

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5883150U (ja) * 1981-11-30 1983-06-06 株式会社日立製作所 半導体集積回路装置
TW258829B (enExample) * 1994-01-28 1995-10-01 Ibm
JPH10270498A (ja) * 1997-03-27 1998-10-09 Toshiba Corp 電子装置の製造方法
JPH11307565A (ja) * 1998-04-24 1999-11-05 Mitsubishi Electric Corp 半導体装置の電極およびその製造方法ならびに半導体装置
JP2001351946A (ja) * 2000-06-05 2001-12-21 Mitsubishi Electric Corp 半導体装置
JP2001358458A (ja) 2000-06-12 2001-12-26 Hitachi Ltd Pbフリーはんだ接続を有する電子機器
JP2002076606A (ja) 2000-06-12 2002-03-15 Hitachi Ltd 電子機器および半導体装置
JP2002151551A (ja) * 2000-11-10 2002-05-24 Hitachi Ltd フリップチップ実装構造、その実装構造を有する半導体装置及び実装方法
JP4656275B2 (ja) * 2001-01-15 2011-03-23 日本電気株式会社 半導体装置の製造方法
JP4152596B2 (ja) 2001-02-09 2008-09-17 新日鉄マテリアルズ株式会社 ハンダ合金、ハンダボール及びハンダバンプを有する電子部材
US6805974B2 (en) 2002-02-15 2004-10-19 International Business Machines Corporation Lead-free tin-silver-copper alloy solder composition
US7015590B2 (en) * 2003-01-10 2006-03-21 Samsung Electronics Co., Ltd. Reinforced solder bump structure and method for forming a reinforced solder bump
JP4791685B2 (ja) 2003-05-22 2011-10-12 シャープ株式会社 導電性ボール、電極構造、電子部品の電極の形成方法、電子部品ならびに電子機器
JP2007242783A (ja) 2006-03-07 2007-09-20 Fujikura Ltd 半導体装置及び電子装置
WO2007138922A1 (ja) * 2006-05-29 2007-12-06 Nec Corporation 電子部品、半導体パッケージ及び電子機器
JP4946262B2 (ja) * 2006-08-18 2012-06-06 富士通セミコンダクター株式会社 半導体素子の実装方法及び半導体装置の製造方法
KR100876646B1 (ko) * 2007-04-27 2009-01-09 한국과학기술원 취성파괴 방지를 위한 무전해 NiXP로 표면처리된전자부품의 접합 방법
JP2009054790A (ja) * 2007-08-27 2009-03-12 Oki Electric Ind Co Ltd 半導体装置
TWI359714B (en) * 2008-11-25 2012-03-11 Univ Yuan Ze Method for inhibiting the formation of palladium-n
US8308052B2 (en) * 2010-11-24 2012-11-13 Taiwan Semiconductor Manufacturing Company, Ltd. Thermal gradient reflow for forming columnar grain structures for solder bumps
US9704793B2 (en) * 2011-01-04 2017-07-11 Napra Co., Ltd. Substrate for electronic device and electronic device
JP5899768B2 (ja) * 2011-09-30 2016-04-06 富士通株式会社 半導体パッケージ、配線基板ユニット、及び電子機器
JP2013080844A (ja) * 2011-10-04 2013-05-02 Fujitsu Ltd 基板モジュールの製造方法、基板モジュール及び基板モジュール組立体
JP6165411B2 (ja) * 2011-12-26 2017-07-19 富士通株式会社 電子部品及び電子機器
JP6061369B2 (ja) * 2012-01-30 2017-01-18 凸版印刷株式会社 配線基板およびその製造方法、ならびにはんだ付き配線基板の製造方法
CN102936669B (zh) * 2012-11-28 2014-09-10 一远电子科技有限公司 一种低熔点无铅焊料合金

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