JP6183080B2 - 炭化珪素半導体装置およびその製造方法 - Google Patents
炭化珪素半導体装置およびその製造方法 Download PDFInfo
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 161
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 160
- 239000004065 semiconductor Substances 0.000 title claims description 99
- 238000004519 manufacturing process Methods 0.000 title claims description 47
- 238000000034 method Methods 0.000 claims description 45
- 238000010894 electron beam technology Methods 0.000 claims description 20
- 239000012535 impurity Substances 0.000 claims description 20
- 239000000969 carrier Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000005468 ion implantation Methods 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 238000003763 carbonization Methods 0.000 claims 2
- 239000010410 layer Substances 0.000 description 45
- 210000000746 body region Anatomy 0.000 description 44
- 239000000758 substrate Substances 0.000 description 22
- 229910052782 aluminium Inorganic materials 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 9
- 239000011229 interlayer Substances 0.000 description 9
- 230000006798 recombination Effects 0.000 description 9
- 238000005215 recombination Methods 0.000 description 9
- 239000010931 gold Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000001773 deep-level transient spectroscopy Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 102100031920 Dihydrolipoyllysine-residue succinyltransferase component of 2-oxoglutarate dehydrogenase complex, mitochondrial Human genes 0.000 description 1
- 101000992065 Homo sapiens Dihydrolipoyllysine-residue succinyltransferase component of 2-oxoglutarate dehydrogenase complex, mitochondrial Proteins 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 description 1
- LKTZODAHLMBGLG-UHFFFAOYSA-N alumanylidynesilicon;$l^{2}-alumanylidenesilylidenealuminum Chemical compound [Si]#[Al].[Si]#[Al].[Al]=[Si]=[Al] LKTZODAHLMBGLG-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910021334 nickel silicide Inorganic materials 0.000 description 1
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 229910021341 titanium silicide Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0642—Isolation within the component, i.e. internal isolation
- H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
- H01L21/0455—Making n or p doped regions or layers, e.g. using diffusion
- H01L21/046—Making n or p doped regions or layers, e.g. using diffusion using ion implantation
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
- H01L21/3242—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering for the formation of PN junctions without addition of impurities
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66053—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide
- H01L29/66068—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
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Description
まず、本発明の実施形態の内容を列記して説明する。
[本願発明の実施形態の詳細]
次に、本発明の実施形態の具体例を図面を参照しつつ説明する。なお、以下の図面において同一または相当する部分には同一の参照番号を付し、その説明は繰り返さない。
まず、本発明の一実施形態である実施形態1に係るSiC半導体装置の構造について説明する。図1を参照して、本実施形態に係るSiC半導体装置1は、プレーナ型のMOSFETであり、SiC基板10と、SiC層11と、ゲート絶縁膜20と、ゲート電極30と、ソース電極40(第2電極)と、ドレイン電極50(第1電極)と、層間絶縁膜60と、ソース配線41と、ドレイン配線51とを主に備えている。SiC層11は、ドリフト領域12(第1導電型領域)と、ボディ領域13(第2導電型領域)と、ソース領域14と、コンタクト領域15とを主に含んでいる。
次に、本発明の他の実施形態である実施形態2について説明する。本実施形態に係るSiC半導体装置の製造方法は、基本的には上記実施形態1のSiC半導体装置の製造方法と同様に実施され、かつ同様の効果を奏する。しかし、本実施形態に係るSiC半導体装置の製造方法は、ドリフト領域内にZ1/2センターを導入するタイミングにおいて上記実施形態1の場合とは異なっている。
次に、本発明のさらに他の実施形態である実施形態3について説明する。本実施形態に係るSiC半導体装置の製造方法は、基本的には上記実施形態1のSiC半導体装置の製造方法と同様に実施され、かつ同様の効果を奏する。しかし、本実施形態に係るSiC半導体装置の製造方法は、ドリフト領域内にZ1/2センターを導入するタイミングにおいて上記実施形態1の場合とは異なっている。
10 炭化珪素(SiC)基板
10A,10B,11A 表面
11 炭化珪素(SiC)層
12 ドリフト領域
12A 接触面
13 ボディ領域
14 ソース領域
15 コンタクト領域
20 ゲート絶縁膜
30 ゲート電極
40 ソース電極
41 ソース配線
50 ドレイン電極
51 ドレイン配線
60 層間絶縁膜
BD ボディダイオード
E 電子
EB 電子線
Ec 下端
Ev 上端
H 正孔
R1,R2 領域
Claims (8)
- 一方の表面を構成する第1導電型領域と、前記一方の表面とは反対側の他方の表面の一部を構成し、前記第1導電型領域と接触する第2導電型領域とを含む炭化珪素層と、
前記第1導電型領域において前記一方の表面側の領域に電気的に接続される第1電極と、
前記第2導電型領域と電気的に接続される第2電極とを備え、
前記第1導電型領域を通過して前記第1電極および前記第2電極の間を移動する主なキャリアが第1導電型のキャリアのみであり、
前記第1導電型領域の全体には、1×1013cm−3以上1×1015cm−3以下の濃度でZ1/2センターが導入されている、炭化珪素半導体装置。 - 前記第1導電型領域では、第1導電型の不純物の濃度が前記Z1/2センターの濃度よりも大きい、請求項1に記載の炭化珪素半導体装置。
- 前記第2導電型領域から前記第1導電型領域に注入される第2導電型のキャリアの寿命は、1μs以下である、請求項1または請求項2に記載の炭化珪素半導体装置。
- 前記第2導電型領域上に形成されるゲート絶縁膜と、
前記ゲート絶縁膜上に形成されるゲート電極とをさらに備え、
前記ゲート電極に電圧を印加して前記第2導電型領域における反転層の形成の有無を制御することにより前記第1導電型のキャリアの移動が制御される、請求項1〜請求項3のいずれか1項に記載の炭化珪素半導体装置。 - 一方の表面を構成する第1導電型領域と、前記一方の表面とは反対側の他方の表面の一部を構成し、前記第1導電型領域と接触する第2導電型領域とを含む炭化珪素層を形成する工程と、
前記第1導電型領域の全体に1×1013cm−3以上1×1015cm−3以下の濃度でZ1/2センターを導入する工程と、
前記第1導電型領域において前記一方の表面側の領域に電気的に接続される第1電極を形成する工程と、
前記第2導電型領域と電気的に接続される第2電極を形成する工程とを備え、
前記第1導電型領域を通過して前記第1電極および前記第2電極の間を移動する主なキャリアが第1導電型のキャリアのみである、炭化珪素半導体装置の製造方法。 - 前記炭化珪素層を加熱する工程をさらに備え、
前記Z1/2センターを導入する工程は、前記炭化珪素層を加熱する工程の後に実施される、請求項5に記載の炭化珪素半導体装置の製造方法。 - 前記Z1/2センターを導入する工程では、電子線照射、中性子線照射およびイオン注入からなる群より選択される少なくとも一の方法により前記第1導電型領域にZ1/2センターが導入される、請求項5または請求項6に記載の炭化珪素半導体装置の製造方法。
- 前記Z1/2センターを導入する工程では、電子線エネルギーが150keV以上200keV以下であり、かつ電子線フルエンスが5×1016cm−2以上4×1017cm−2以下である前記電子線照射により前記第1導電型領域内にZ1/2センターが導入される、請求項7に記載の炭化珪素半導体装置の製造方法。
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US14/917,430 US9887263B2 (en) | 2013-09-09 | 2014-07-16 | Silicon carbide semiconductor device and method of manufacturing the same |
PCT/JP2014/068878 WO2015033673A1 (ja) | 2013-09-09 | 2014-07-16 | 炭化珪素半導体装置およびその製造方法 |
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JP6271356B2 (ja) * | 2014-07-07 | 2018-01-31 | 株式会社東芝 | 半導体装置の製造方法 |
JP6911453B2 (ja) | 2017-03-28 | 2021-07-28 | 富士電機株式会社 | 半導体装置およびその製造方法 |
WO2019083017A1 (ja) * | 2017-10-26 | 2019-05-02 | 株式会社デンソー | 炭化珪素半導体装置およびその製造方法 |
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JP7106881B2 (ja) * | 2018-02-09 | 2022-07-27 | 株式会社デンソー | 炭化珪素基板および炭化珪素半導体装置 |
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JP2010157593A (ja) * | 2008-12-26 | 2010-07-15 | Panasonic Corp | 半導体装置およびその製造方法 |
JPWO2010110253A1 (ja) * | 2009-03-27 | 2012-09-27 | 住友電気工業株式会社 | Mosfetおよびmosfetの製造方法 |
JP2011109018A (ja) * | 2009-11-20 | 2011-06-02 | Kansai Electric Power Co Inc:The | バイポーラ半導体素子 |
JP6119100B2 (ja) * | 2012-02-01 | 2017-04-26 | 住友電気工業株式会社 | 炭化珪素半導体装置 |
JP5814881B2 (ja) * | 2012-07-31 | 2015-11-17 | 株式会社東芝 | トランジスタ及びその製造方法 |
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US11251271B2 (en) | 2019-11-29 | 2022-02-15 | Fuji Electric Co., Ltd. | Silicon carbide semiconductor device and method of manufacturing silicon carbide semiconductor device |
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