JP6084426B2 - 検査装置 - Google Patents

検査装置 Download PDF

Info

Publication number
JP6084426B2
JP6084426B2 JP2012228005A JP2012228005A JP6084426B2 JP 6084426 B2 JP6084426 B2 JP 6084426B2 JP 2012228005 A JP2012228005 A JP 2012228005A JP 2012228005 A JP2012228005 A JP 2012228005A JP 6084426 B2 JP6084426 B2 JP 6084426B2
Authority
JP
Japan
Prior art keywords
probe unit
inspection
probe
unit mechanism
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2012228005A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014081234A5 (ru
JP2014081234A (ja
Inventor
一佳 三浦
一佳 三浦
一也 高木
一也 高木
公士 夏堀
公士 夏堀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micronics Japan Co Ltd
Original Assignee
Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronics Japan Co Ltd filed Critical Micronics Japan Co Ltd
Priority to JP2012228005A priority Critical patent/JP6084426B2/ja
Priority to CN201310481443.2A priority patent/CN103728505B/zh
Publication of JP2014081234A publication Critical patent/JP2014081234A/ja
Publication of JP2014081234A5 publication Critical patent/JP2014081234A5/ja
Application granted granted Critical
Publication of JP6084426B2 publication Critical patent/JP6084426B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Liquid Crystal (AREA)
  • Measuring Leads Or Probes (AREA)
JP2012228005A 2012-10-15 2012-10-15 検査装置 Active JP6084426B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012228005A JP6084426B2 (ja) 2012-10-15 2012-10-15 検査装置
CN201310481443.2A CN103728505B (zh) 2012-10-15 2013-10-15 检查装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012228005A JP6084426B2 (ja) 2012-10-15 2012-10-15 検査装置

Publications (3)

Publication Number Publication Date
JP2014081234A JP2014081234A (ja) 2014-05-08
JP2014081234A5 JP2014081234A5 (ru) 2015-09-17
JP6084426B2 true JP6084426B2 (ja) 2017-02-22

Family

ID=50452666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012228005A Active JP6084426B2 (ja) 2012-10-15 2012-10-15 検査装置

Country Status (2)

Country Link
JP (1) JP6084426B2 (ru)
CN (1) CN103728505B (ru)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104393837A (zh) * 2014-11-28 2015-03-04 苏州晟成光伏设备有限公司 高位el检查机放电触头连接机构
JP6422376B2 (ja) * 2015-03-06 2018-11-14 三菱電機株式会社 半導体装置検査用治具
KR102614075B1 (ko) * 2017-12-26 2023-12-14 주식회사 탑 엔지니어링 기판 검사 장치
KR102202035B1 (ko) * 2020-09-03 2021-01-12 주식회사 프로이천 오토 프로브장치
KR102202033B1 (ko) * 2020-09-03 2021-01-12 주식회사 프로이천 캠승강식 오토 프로브장치

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59100600A (ja) * 1982-11-30 1984-06-09 九州日本電気株式会社 半導体素子製造用自動選別装置
JPS59100599A (ja) * 1982-11-30 1984-06-09 九州日本電気株式会社 半導体素子製造用自動選別装置
JPS61272946A (ja) * 1985-05-28 1986-12-03 Nec Corp 半導体検査装置
JPH03252571A (ja) * 1990-03-01 1991-11-11 Tokyo Electron Ltd 基板の検査装置
JPH04177849A (ja) * 1990-11-13 1992-06-25 Nec Kyushu Ltd プロービング装置
JP2000180807A (ja) * 1998-12-15 2000-06-30 Micronics Japan Co Ltd 液晶基板の検査装置
JP3480925B2 (ja) * 2000-09-12 2003-12-22 株式会社双晶テック ディスプレイパネル又はプローブブロックの支持枠体
JP3457938B2 (ja) * 2000-10-16 2003-10-20 株式会社双晶テック 表示基板又は回路基板の検査装置における表示基板又は回路基板の交換方法
JP2002222839A (ja) * 2001-01-29 2002-08-09 Advantest Corp プローブカード
TWI231964B (en) * 2003-03-10 2005-05-01 Phicom Corp LCD panel auto gripping apparatus and method for use in a panel carrier for an automatic probe unit
JP4490066B2 (ja) * 2003-09-18 2010-06-23 株式会社日本マイクロニクス 表示用パネルの検査装置
CN1731203A (zh) * 2005-03-09 2006-02-08 飞而康公司 液晶显示器面板的检查装置及其检查方法
KR20060109194A (ko) * 2005-04-15 2006-10-19 삼성전자주식회사 액정표시패널의 검사방법
KR100611608B1 (ko) * 2005-11-15 2006-08-11 주식회사 코디에스 평판형 디스플레이 검사 방법 및 평판형 디스플레이 검사용유닛
JP2007285727A (ja) * 2006-04-12 2007-11-01 Tokyo Cathode Laboratory Co Ltd プローブカード配置ユニット及びプローブカードを有する測定装置
JP4808135B2 (ja) * 2006-11-09 2011-11-02 株式会社日本マイクロニクス プローブ位置合わせ方法及び可動式プローブユニット機構並びに検査装置
JP2010122092A (ja) * 2008-11-20 2010-06-03 Toshiba Corp プローブカード
JP5631114B2 (ja) * 2010-08-24 2014-11-26 株式会社日本マイクロニクス 平板状被検査体の検査装置

Also Published As

Publication number Publication date
CN103728505A (zh) 2014-04-16
CN103728505B (zh) 2016-06-22
JP2014081234A (ja) 2014-05-08

Similar Documents

Publication Publication Date Title
JP6084426B2 (ja) 検査装置
KR101500523B1 (ko) 기판 검사 장치
KR101616564B1 (ko) 프로브 이동장치
KR101752765B1 (ko) 전자부품 실장장치
US20130050691A1 (en) Inspection apparatus and inspection method for light emitting device
JPWO2007015300A1 (ja) 電子部品製造装置、電子部品製造装置の制御方法並びに制御プログラム
KR101374529B1 (ko) 프로브 장치 및 프로브 장치의 프로브 카드 장착 방법
JP5511790B2 (ja) 位置補正機能を有するハンドラ
US20220276037A1 (en) Surface shape measuring device and surface shape measuring method
JP4574222B2 (ja) 基板検査用接触子、これを用いた基板検査用治具及び基板検査装置
JP2013068510A (ja) 基板検査装置および補正情報取得方法
KR20150129935A (ko) 기판 검사 장치 및 기판 검사 방법
KR20110038668A (ko) 부품 실장 시스템
CN111679148A (zh) 测试装置
JP5123753B2 (ja) 基板固定装置および基板検査装置
JP6147750B2 (ja) 対基板作業システム、作業手順最適化プログラム、作業台数決定プログラム
JP2008014767A (ja) 基板検査装置
KR100399534B1 (ko) 엘시디 패널 점등 테스트 시스템
KR100809600B1 (ko) 웨이퍼 검사장치
US11119122B2 (en) Position correction method, inspection apparatus, and probe card
CN107102249B (zh) 一种飞针测试机测试轴的自动避让方法
JP4546227B2 (ja) 膜厚抵抗測定装置
JP3190612U (ja) 検査装置
JP5544460B2 (ja) 電気特性検査装置、外置きユニット用搬送装置、及び電子部品搬送装置
JP2002071753A (ja) ハンドラ

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150730

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20150730

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20160527

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20160608

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160805

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20160824

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20161121

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20161129

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20161228

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20170125

R150 Certificate of patent or registration of utility model

Ref document number: 6084426

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250