JP6084426B2 - 検査装置 - Google Patents
検査装置 Download PDFInfo
- Publication number
- JP6084426B2 JP6084426B2 JP2012228005A JP2012228005A JP6084426B2 JP 6084426 B2 JP6084426 B2 JP 6084426B2 JP 2012228005 A JP2012228005 A JP 2012228005A JP 2012228005 A JP2012228005 A JP 2012228005A JP 6084426 B2 JP6084426 B2 JP 6084426B2
- Authority
- JP
- Japan
- Prior art keywords
- probe unit
- inspection
- probe
- unit mechanism
- inspected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000007689 inspection Methods 0.000 title claims description 360
- 239000000523 sample Substances 0.000 claims description 425
- 230000007246 mechanism Effects 0.000 claims description 335
- 238000012423 maintenance Methods 0.000 description 33
- 238000000034 method Methods 0.000 description 23
- 230000008569 process Effects 0.000 description 23
- 238000012360 testing method Methods 0.000 description 19
- 230000032258 transport Effects 0.000 description 15
- 230000008859 change Effects 0.000 description 5
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 238000004070 electrodeposition Methods 0.000 description 3
- 230000001788 irregular Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
Images
Landscapes
- Tests Of Electronic Circuits (AREA)
- Liquid Crystal (AREA)
- Measuring Leads Or Probes (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012228005A JP6084426B2 (ja) | 2012-10-15 | 2012-10-15 | 検査装置 |
CN201310481443.2A CN103728505B (zh) | 2012-10-15 | 2013-10-15 | 检查装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012228005A JP6084426B2 (ja) | 2012-10-15 | 2012-10-15 | 検査装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2014081234A JP2014081234A (ja) | 2014-05-08 |
JP2014081234A5 JP2014081234A5 (ru) | 2015-09-17 |
JP6084426B2 true JP6084426B2 (ja) | 2017-02-22 |
Family
ID=50452666
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012228005A Active JP6084426B2 (ja) | 2012-10-15 | 2012-10-15 | 検査装置 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP6084426B2 (ru) |
CN (1) | CN103728505B (ru) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104393837A (zh) * | 2014-11-28 | 2015-03-04 | 苏州晟成光伏设备有限公司 | 高位el检查机放电触头连接机构 |
JP6422376B2 (ja) * | 2015-03-06 | 2018-11-14 | 三菱電機株式会社 | 半導体装置検査用治具 |
KR102614075B1 (ko) * | 2017-12-26 | 2023-12-14 | 주식회사 탑 엔지니어링 | 기판 검사 장치 |
KR102202035B1 (ko) * | 2020-09-03 | 2021-01-12 | 주식회사 프로이천 | 오토 프로브장치 |
KR102202033B1 (ko) * | 2020-09-03 | 2021-01-12 | 주식회사 프로이천 | 캠승강식 오토 프로브장치 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59100600A (ja) * | 1982-11-30 | 1984-06-09 | 九州日本電気株式会社 | 半導体素子製造用自動選別装置 |
JPS59100599A (ja) * | 1982-11-30 | 1984-06-09 | 九州日本電気株式会社 | 半導体素子製造用自動選別装置 |
JPS61272946A (ja) * | 1985-05-28 | 1986-12-03 | Nec Corp | 半導体検査装置 |
JPH03252571A (ja) * | 1990-03-01 | 1991-11-11 | Tokyo Electron Ltd | 基板の検査装置 |
JPH04177849A (ja) * | 1990-11-13 | 1992-06-25 | Nec Kyushu Ltd | プロービング装置 |
JP2000180807A (ja) * | 1998-12-15 | 2000-06-30 | Micronics Japan Co Ltd | 液晶基板の検査装置 |
JP3480925B2 (ja) * | 2000-09-12 | 2003-12-22 | 株式会社双晶テック | ディスプレイパネル又はプローブブロックの支持枠体 |
JP3457938B2 (ja) * | 2000-10-16 | 2003-10-20 | 株式会社双晶テック | 表示基板又は回路基板の検査装置における表示基板又は回路基板の交換方法 |
JP2002222839A (ja) * | 2001-01-29 | 2002-08-09 | Advantest Corp | プローブカード |
TWI231964B (en) * | 2003-03-10 | 2005-05-01 | Phicom Corp | LCD panel auto gripping apparatus and method for use in a panel carrier for an automatic probe unit |
JP4490066B2 (ja) * | 2003-09-18 | 2010-06-23 | 株式会社日本マイクロニクス | 表示用パネルの検査装置 |
CN1731203A (zh) * | 2005-03-09 | 2006-02-08 | 飞而康公司 | 液晶显示器面板的检查装置及其检查方法 |
KR20060109194A (ko) * | 2005-04-15 | 2006-10-19 | 삼성전자주식회사 | 액정표시패널의 검사방법 |
KR100611608B1 (ko) * | 2005-11-15 | 2006-08-11 | 주식회사 코디에스 | 평판형 디스플레이 검사 방법 및 평판형 디스플레이 검사용유닛 |
JP2007285727A (ja) * | 2006-04-12 | 2007-11-01 | Tokyo Cathode Laboratory Co Ltd | プローブカード配置ユニット及びプローブカードを有する測定装置 |
JP4808135B2 (ja) * | 2006-11-09 | 2011-11-02 | 株式会社日本マイクロニクス | プローブ位置合わせ方法及び可動式プローブユニット機構並びに検査装置 |
JP2010122092A (ja) * | 2008-11-20 | 2010-06-03 | Toshiba Corp | プローブカード |
JP5631114B2 (ja) * | 2010-08-24 | 2014-11-26 | 株式会社日本マイクロニクス | 平板状被検査体の検査装置 |
-
2012
- 2012-10-15 JP JP2012228005A patent/JP6084426B2/ja active Active
-
2013
- 2013-10-15 CN CN201310481443.2A patent/CN103728505B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN103728505A (zh) | 2014-04-16 |
CN103728505B (zh) | 2016-06-22 |
JP2014081234A (ja) | 2014-05-08 |
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