JP6071181B2 - エンコーダおよびこれを備えた装置 - Google Patents
エンコーダおよびこれを備えた装置 Download PDFInfo
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- JP6071181B2 JP6071181B2 JP2011227200A JP2011227200A JP6071181B2 JP 6071181 B2 JP6071181 B2 JP 6071181B2 JP 2011227200 A JP2011227200 A JP 2011227200A JP 2011227200 A JP2011227200 A JP 2011227200A JP 6071181 B2 JP6071181 B2 JP 6071181B2
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- 238000001514 detection method Methods 0.000 claims description 169
- 238000000034 method Methods 0.000 claims description 81
- 230000008569 process Effects 0.000 claims description 81
- 230000000737 periodic effect Effects 0.000 claims description 48
- 238000005070 sampling Methods 0.000 claims description 30
- 238000012545 processing Methods 0.000 claims description 20
- 230000008859 change Effects 0.000 claims description 13
- 239000011295 pitch Substances 0.000 description 26
- 230000003287 optical effect Effects 0.000 description 14
- 238000010586 diagram Methods 0.000 description 6
- 238000003384 imaging method Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000012937 correction Methods 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34776—Absolute encoders with analogue or digital scales
- G01D5/34792—Absolute encoders with analogue or digital scales with only digital scales or both digital and incremental scales
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34776—Absolute encoders with analogue or digital scales
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Optical Transform (AREA)
Description
11,11′ 第1の周期パターン
12,12′ 第2の周期パターン
20 センサ
21 光源
22,23 受光部
30 位置検出部
Claims (5)
- 第1の周期パターンおよび該第1の周期パターンよりも粗い周期を有する第2の周期パターンが設けられたスケールと、
該スケールとの相対移動が可能であるとともに、複数の読み取り用の素子における組み合わせを変化させることで前記第1の周期パターンを読み取って前記第1の周期パターンに応じた変化周期を有する第1の信号を出力する第1の検出状態と前記第2の周期パターンを読み取って前記第2の周期パターンに応じた変化周期を有する第2の信号を出力する第2の検出状態との間での切り替えが可能な検出部と、
前記第1および第2の検出状態に設定した前記検出部からそれぞれ取り込んだ前記第1および第2の信号の双方を用いて第1の絶対位置を算出する第1の処理を行った後、前記第1および第2の検出状態のうち一方の検出状態に設定した前記検出部から取り込んだ、前記第1および第2の信号のうち一方の信号を用いて相対移動量を算出し、該相対移動量と前記第1の絶対位置とを用いて第2の絶対位置を算出する第2の処理を行う処理部とを有し、
前記処理部は、前記第1および第2の検出状態のうち、前記第1の処理において最後に設定した検出状態と同じ検出状態の前記検出部から前記一方の信号を取り込んで前記第2の処理を行うことを特徴とするエンコーダ。 - 前記処理部は、前記第1の処理において、前記第1の検出状態を最後に設定することを特徴とする請求項1に記載のエンコーダ。
- 前記処理部は、前記第1の処理において、前記第1の検出状態を最初と最後に設定することを特徴とする請求項1に記載のエンコーダ。
- 前記処理部は、前記第1の処理において、
前記第1および第2の信号を複数の時刻にてサンプリングして前記スケールと前記検出部との相対移動速度を求め、
前記第1および第2の信号のそれぞれの位相を求め、
該相対移動速度と前記時刻を用いて補正した前記位相から前記第1の絶対位置を算出することを特徴とする請求項1から3のいずれか1項に記載のエンコーダ。 - 請求項1から4のいずれか1項に記載のエンコーダと、
該エンコーダを用いて位置が検出される可動部材とを有することを特徴とする装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011227200A JP6071181B2 (ja) | 2011-10-14 | 2011-10-14 | エンコーダおよびこれを備えた装置 |
EP12188101.5A EP2581713B1 (en) | 2011-10-14 | 2012-10-11 | Encoder and apparatus using the same |
US13/650,805 US8993955B2 (en) | 2011-10-14 | 2012-10-12 | Encoder and apparatus using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011227200A JP6071181B2 (ja) | 2011-10-14 | 2011-10-14 | エンコーダおよびこれを備えた装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013088191A JP2013088191A (ja) | 2013-05-13 |
JP6071181B2 true JP6071181B2 (ja) | 2017-02-01 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011227200A Active JP6071181B2 (ja) | 2011-10-14 | 2011-10-14 | エンコーダおよびこれを備えた装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8993955B2 (ja) |
EP (1) | EP2581713B1 (ja) |
JP (1) | JP6071181B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018194738A (ja) * | 2017-05-19 | 2018-12-06 | キヤノン株式会社 | 位置計測装置、リソグラフィ装置、および物品製造方法 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5968062B2 (ja) * | 2012-05-02 | 2016-08-10 | キヤノン株式会社 | 位置検出エンコーダおよびこれを用いた装置 |
JP5948654B2 (ja) * | 2012-07-17 | 2016-07-06 | パナソニックIpマネジメント株式会社 | 位置検出装置 |
JP6207208B2 (ja) * | 2013-04-12 | 2017-10-04 | キヤノン株式会社 | 位置検出手段 |
JP6114638B2 (ja) * | 2013-06-07 | 2017-04-12 | 株式会社ミツトヨ | エンコーダ |
JP6533360B2 (ja) * | 2013-10-30 | 2019-06-19 | キヤノン株式会社 | 位置検出装置及びそれを有するレンズ装置及び撮影装置 |
JP6334892B2 (ja) * | 2013-10-30 | 2018-05-30 | キヤノン株式会社 | 位置検出装置及びそれを有するレンズ装置及び撮影装置 |
JP6666019B2 (ja) | 2014-11-11 | 2020-03-13 | キヤノン株式会社 | 位置検出装置、レンズ装置、撮像装置、および指令装置 |
US10215596B2 (en) * | 2015-01-16 | 2019-02-26 | Canon Kabushiki Kaisha | Position detection apparatus, lens apparatus, image pickup system, machine tool apparatus, exposure apparatus, position detection method, and non-transitory computer-readable storage medium which are capable of detecting reference position with high accuracy |
JP6415408B2 (ja) * | 2015-08-28 | 2018-10-31 | キヤノン株式会社 | 出力装置、レンズ装置及びシステム |
JP2018036090A (ja) * | 2016-08-30 | 2018-03-08 | キヤノンプレシジョン株式会社 | エンコーダおよびこれを備えた装置 |
US9877042B1 (en) * | 2017-05-26 | 2018-01-23 | Mitutoyo Corporation | Position encoder sample timing system |
DE102017113614B4 (de) * | 2017-06-20 | 2021-04-29 | Carl Zeiss Smt Gmbh | Positionssensorvorrichtung zum Ermitteln einer Position eines beweglichen Objektes |
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-
2011
- 2011-10-14 JP JP2011227200A patent/JP6071181B2/ja active Active
-
2012
- 2012-10-11 EP EP12188101.5A patent/EP2581713B1/en active Active
- 2012-10-12 US US13/650,805 patent/US8993955B2/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018194738A (ja) * | 2017-05-19 | 2018-12-06 | キヤノン株式会社 | 位置計測装置、リソグラフィ装置、および物品製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US8993955B2 (en) | 2015-03-31 |
EP2581713B1 (en) | 2018-12-12 |
EP2581713A2 (en) | 2013-04-17 |
US20130099105A1 (en) | 2013-04-25 |
JP2013088191A (ja) | 2013-05-13 |
EP2581713A3 (en) | 2017-09-27 |
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