JP5286584B2 - 絶対位置測長型エンコーダ - Google Patents
絶対位置測長型エンコーダ Download PDFInfo
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- JP5286584B2 JP5286584B2 JP2007161776A JP2007161776A JP5286584B2 JP 5286584 B2 JP5286584 B2 JP 5286584B2 JP 2007161776 A JP2007161776 A JP 2007161776A JP 2007161776 A JP2007161776 A JP 2007161776A JP 5286584 B2 JP5286584 B2 JP 5286584B2
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- 238000005259 measurement Methods 0.000 claims description 31
- 238000012545 processing Methods 0.000 claims description 27
- 230000010354 integration Effects 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 description 24
- 238000003491 array Methods 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000003786 synthesis reaction Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000012935 Averaging Methods 0.000 description 6
- 238000000926 separation method Methods 0.000 description 6
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 3
- 238000010408 sweeping Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34776—Absolute encoders with analogue or digital scales
- G01D5/34784—Absolute encoders with analogue or digital scales with only analogue scales or both analogue and incremental scales
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2454—Encoders incorporating incremental and absolute signals
- G01D5/2455—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on the same encoder
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2454—Encoders incorporating incremental and absolute signals
- G01D5/2458—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on separate encoders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/249—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using pulse code
- G01D5/2492—Pulse stream
- G01D5/2495—Pseudo-random code
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
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Description
図1は、本発明の第1の実施の形態に係る絶対位置測長型光電式エンコーダの全体構成を示す概略図である。この実施の形態の絶対位置測長型光電式エンコーダは、発光素子11と、スケール12と、レンズ13と、フォトダイオードアレイ14と、信号処理回路20とを備えて構成されている。
次に、本発明の第2の実施の形態に係る絶対位置測長型光電式エンコーダを、図5〜図8を参照して説明する。第1の実施の形態と同一の構成要素については、図5〜図8において同一の符号を付し、以下ではその詳細な説明は省略する。
次に、本発明の第3の実施の形態に係る絶対位置測長型光電式エンコーダを、図9〜図12を参照して説明する。第1の実施の形態と同一の構成要素については、図9〜図12において同一の符号を付し、以下ではその詳細な説明は省略する。
次に、本発明の第4の実施の形態に係る絶対位置測長型光電式エンコーダを、図13〜図15を参照して説明する。上記実施の形態と同一の構成要素については、図13〜図15において同一の符号を付し、以下ではその詳細な説明は省略する。
以上、発明の実施の形態を説明したが、本発明はこれらに限定されるものではなく、発明の趣旨を逸脱しない範囲内において、種々の変更、追加等が可能である。例えば、上記実施の形態では、透過型の光電式エンコーダを例にとって説明したが、図16に示すように、スケール12からの反射型の光学系として、発光素子11をレンズ13や受光素子アレイ14と同じ側に配置してもよい。
Claims (6)
- 第1の周期で等間隔に形成された第1明暗パターンからなる第1インクリメンタルパターンを有する第1インクリメンタルトラックと、絶対位置を表現したアブソリュートパターンを有するアブソリュートトラックと、前記第1周期よりも大きい第2の周期で等間隔に形成された第2明暗パターンからなる第2インクリメンタルパターンを有する第2インクリメンタルトラックとを形成されたスケールと、
このスケールに測定光を照射する光源と、
前記スケールで反射又は透過した前記測定光を受光する受光器と、
前記受光器の受光信号を処理して前記スケールの絶対位置を検出する信号処理回路と
を備え、
前記信号処理回路は、位置基準信号を生成し、前記位置基準信号が、前記第1インクリメンタルパターンのピッチと前記第2インクリメンタルパターンのピッチとの最小公倍数から成る周期を有し、かつ、前記信号処理回路は、前記アブソリュートパターンから得られた信号に基づいて、前記スケールが、前記位置基準信号の周期の何番目にあるかを判定し、この判定結果、前記第2インクリメンタルパターンから得られた信号、及び前記第1インクリメンタルパターンから得られた信号に基づいて、前記スケールの絶対位置を検出するものである
ことを特徴とする絶対位置測長型エンコーダ。 - 前記アブソリュートパターンと、前記第2インクリメンタルパターンとは、同一のトラック上に形成されており、前記第2インクリメンタルパターンと前記アブソリュートパターンとが統合されていることを特徴とする請求項1に記載の絶対位置測長型エンコーダ。
- 前記第2インクリメンタルパターンと前記アブソリュートパターンとの統合は、前記アブソリュートパターンと前記第2インクリメンタルパターンとが共存する箇所にのみパターンが形成されることにより行われることを特徴とする請求項2に記載の絶対位置測長型エンコーダ。
- 第1の周期で等間隔に形成された第1明暗パターンからなる第1インクリメンタルパターンを有する第1インクリメンタルトラックと、絶対位置を表現したアブソリュートパターンを有するアブソリュートトラックと、前記第1インクリメンタルトラックの上下に挟むように配置され、前記第1周期よりも大きい第2の周期で等間隔に形成された第2明暗パターンからなる第2インクリメンタルパターンを有する第2インクリメンタルトラックとを形成されたスケールと、
このスケールに測定光を照射する光源と、
前記スケールで反射又は透過した前記測定光を受光する受光器と、
前記受光器の受光信号を処理して前記スケールの絶対位置を検出する信号処理回路と
を備え、
前記信号処理回路は、位置基準信号を生成し、前記位置基準信号が前記第1インクリメンタルパターンのピッチと前記第2インクリメンタルパターンのピッチとの最小公倍数から成る周期を有し、かつ、前記信号処理回路は、前記アブソリュートパターンから得られた信号に基づいて、前記スケールが、前記位置基準信号の周期の何番目にあるかを判定し、この判定結果、前記第2インクリメンタルパターンから得られた信号の平均値、及び前記第1インクリメンタルパターンから得られた信号に基づいて、前記スケールの絶対位置を検出する
ことを特徴とする絶対位置測長型エンコーダ。 - 前記アブソリュートパターンと、前記第2インクリメンタルパターンとは、同一のトラック上に形成されており、前記第2インクリメンタルパターンと前記アブソリュートパターンとが統合されていることを特徴とする請求項4に記載の絶対位置測長型エンコーダ。
- 前記第2インクリメンタルパターンと前記アブソリュートパターンとの統合は、前記アブソリュートパターンと前記第2インクリメンタルパターンとが共存する箇所にのみパターンが形成されることにより行われることを特徴とする請求項5に記載の絶対位置測長型エンコーダ。
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JP2007161776A JP5286584B2 (ja) | 2007-06-19 | 2007-06-19 | 絶対位置測長型エンコーダ |
US12/141,529 US7663093B2 (en) | 2007-06-19 | 2008-06-18 | Absolute position encoder having a second incremental track integrated with the absolute track |
EP08158606A EP2006642B1 (en) | 2007-06-19 | 2008-06-19 | Absolute position encoder |
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JP2007161776A JP5286584B2 (ja) | 2007-06-19 | 2007-06-19 | 絶対位置測長型エンコーダ |
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JP5286584B2 true JP5286584B2 (ja) | 2013-09-11 |
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Cited By (1)
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DE102022000396A1 (de) | 2021-02-08 | 2022-08-11 | Mitutoyo Corporation | Verlagerungsmessapparat |
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DE102007035345A1 (de) * | 2006-11-20 | 2008-05-21 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
JP5103267B2 (ja) * | 2008-05-13 | 2012-12-19 | 株式会社ミツトヨ | 絶対位置測長型エンコーダ |
US7875844B2 (en) * | 2008-09-02 | 2011-01-25 | Delta Electronics, Inc. | Absolute-type encoder and method for detecting absolute position |
JP5641746B2 (ja) * | 2010-02-12 | 2014-12-17 | 株式会社ミツトヨ | 光電式エンコーダ |
JP5553667B2 (ja) * | 2010-04-09 | 2014-07-16 | 株式会社ミツトヨ | 光学式基準位置検出型エンコーダ |
JP5553669B2 (ja) * | 2010-04-16 | 2014-07-16 | 株式会社ミツトヨ | 光学式絶対位置測長型エンコーダ |
JP5595148B2 (ja) * | 2010-07-05 | 2014-09-24 | キヤノン株式会社 | アブソリュートエンコーダ |
JP5616741B2 (ja) | 2010-10-08 | 2014-10-29 | 株式会社ミツトヨ | エンコーダ |
EP2477006A1 (en) * | 2011-01-17 | 2012-07-18 | Thomas Baader | High resolution absolute linear encoder |
CN103459991A (zh) * | 2011-01-31 | 2013-12-18 | 维泰克实验室技术股份有限公司 | 具有数字的体积显示的瓶式分配器 |
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US4914437A (en) * | 1986-12-04 | 1990-04-03 | Regents Of The University Of California | Encoder for measuring both incremental and absolute positions of moving elements |
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JPH04295719A (ja) * | 1991-03-25 | 1992-10-20 | Nikon Corp | アブソリュ−ト・エンコ−ダ |
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SE9601551D0 (sv) * | 1996-04-22 | 1996-04-22 | Stridsberg Innovation Ab | A quasi-absolute encoder |
GB0109057D0 (en) * | 2001-04-11 | 2001-05-30 | Renishaw Plc | Absolute postition measurement |
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JP4924878B2 (ja) * | 2006-11-06 | 2012-04-25 | 株式会社ニコン | アブソリュートエンコーダ |
US7507950B2 (en) * | 2006-11-09 | 2009-03-24 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Encoder with a combined position and index track |
JP4960133B2 (ja) * | 2007-04-11 | 2012-06-27 | 株式会社ミツトヨ | 絶対位置測長型エンコーダ |
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2007
- 2007-06-19 JP JP2007161776A patent/JP5286584B2/ja active Active
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2008
- 2008-06-18 US US12/141,529 patent/US7663093B2/en active Active
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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DE102022000396A1 (de) | 2021-02-08 | 2022-08-11 | Mitutoyo Corporation | Verlagerungsmessapparat |
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US20080315076A1 (en) | 2008-12-25 |
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JP2009002702A (ja) | 2009-01-08 |
US7663093B2 (en) | 2010-02-16 |
EP2006642B1 (en) | 2012-12-26 |
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