JP6320149B2 - アブソリュートエンコーダ - Google Patents
アブソリュートエンコーダ Download PDFInfo
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- JP6320149B2 JP6320149B2 JP2014087591A JP2014087591A JP6320149B2 JP 6320149 B2 JP6320149 B2 JP 6320149B2 JP 2014087591 A JP2014087591 A JP 2014087591A JP 2014087591 A JP2014087591 A JP 2014087591A JP 6320149 B2 JP6320149 B2 JP 6320149B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34776—Absolute encoders with analogue or digital scales
- G01D5/34792—Absolute encoders with analogue or digital scales with only digital scales or both digital and incremental scales
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- G—PHYSICS
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- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24457—Failure detection
- G01D5/24466—Comparison of the error value to a threshold
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- G—PHYSICS
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- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
- G01D5/24495—Error correction using previous values
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2454—Encoders incorporating incremental and absolute signals
- G01D5/2455—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on the same encoder
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- G—PHYSICS
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- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/249—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using pulse code
- G01D5/2492—Pulse stream
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/249—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using pulse code
- G01D5/2492—Pulse stream
- G01D5/2495—Pseudo-random code
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
- G01D5/34715—Scale reading or illumination devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34776—Absolute encoders with analogue or digital scales
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Description
図1は、第1実施形態のアブソリュートエンコーダの構成とその信号処理アルゴリズムの説明図である。発光素子LEDから射出された光束は、コリメータレンズLNSによって平行光束にされ、マーク配列を有するスケールSCLを照明する。スケールSCLのマーク配列は例えば、1,0の符号に対応する格子パターンで表される。格子パターンは、透過率又は反射率の大小によって形成される。具体的には例えば、スケールSCLには、透過部と非透過部の格子パターンのうちの透過部に、選択的に半透過膜が設けられている。透過光は、エンコーダヘッドEHの受光素子アレイPDA上に投影される。半透過膜の付与のルールとして、例えば16ビットのM系列符号が用いられる。エンコーダヘッドEHは、スケールのマーク配列の一部を検出し、それに対応するデータ列を出力する検出部として機能する。なお、エンコーダヘッドEHの駆動はエンコーダヘッド制御部CTLによって制御される。
(1)スケール上に少々の欠陥(傷・ゴミ)があっても、正しい絶対位置情報を出力し続けることができる。
(2)スケールの欠陥(傷、ゴミ)の情報が参照データに反映されるので、何度も繰り返し使用する場合は、データの不一致に対する対策(書換)を毎回する必要がなく、高速に動作させることができる。
(3)スケールの欠陥情報を含む参照データが更新されていくので、欠陥情報を取り出すことで、品質管理を行うことができる。例えば欠陥率が規定値を超えたときがクリーニング、交換等の時期との判断を行うことができる。
図8は、第2実施形態のアブソリュートエンコーダの構成とその信号処理アルゴリズムの説明図である。符号データを取得するまでの工程は、第1実施形態と同じである。
第1及び第2実施形態では、最初はスケールに傷やごみが無い状態で正しく測定が開始される場合を仮定した。しかし実際には、スケールに傷・ゴミがある箇所から開始される場合もあるため、以下の処理を追加してもよい。
上述の実施形態は、本発明の主旨の範囲内で、種々の変形および変更が可能である。変形、変更可能な態様の例を以下に示す。
Claims (10)
- マーク配列を有するスケールと、
前記マーク配列の一部を検出し、該一部に対応するデータ列を出力する検出部と、
複数の符号列のそれぞれと前記スケールの絶対位置との対応関係を示す情報を記憶する記憶部と、
前記記憶部と接続された処理部と、を有し、
前記処理部は、
前記データ列と、前記情報における前記複数の符号列の一部としての複数の符号列のそれぞれとの間の相関度に基づいて、前記データ列の誤りを検出し、
前記誤りに基づいて、前記情報における前記複数の符号列の一部としての複数の符号列の書換えを行い、
前記データ列と前記情報とに基づいて、前記絶対位置の情報を出力する
ことを特徴とするアブソリュートエンコーダ。 - 前記処理部は、
前記データ列に関して符号列を探索して、前記データ列との相関度が最も高い符号列に対応する前記絶対位置を決定し、
前記決定された絶対位置に対応する前記符号列の前記データ列に対する不一致箇所を特定することにより誤りを検出し、
前記決定された絶対位置に対応する前記符号列の前記データ列に対する不一致箇所と、前記決定された絶対位置に隣接する複数の絶対位置に対応する複数の符号列それぞれの前記不一致箇所に対応する箇所とに、前記データ列を用いて前記書換えを行う
ことを特徴とする請求項1に記載のアブソリュートエンコーダ。 - 前記処理部は、前記データ列の所定数の上位ビットおよび所定数の下位ビットにおける誤りを検出することを特徴とする請求項1または請求項2に記載のアブソリュートエンコーダ。
- 前記複数の符号列は、M系列符号から順次シフトして切り出して得た複数の符号列であり、
複数の前記絶対位置が、昇順または降順の複数の2進符号で表されていることを特徴とする請求項1乃至3のうちいずれか1項に記載のアブソリュートエンコーダ。 - 前記絶対位置は、前記記憶部のアドレスによって表されていることを特徴とする請求項4に記載のアブソリュートエンコーダ。
- 前記処理部は、前記相関度に基づいて、エラーを出力することを特徴とする請求項1乃至5のうちいずれか1項に記載のアブソリュートエンコーダ。
- 前記情報は、前記複数の符号列のそれぞれについて、前記書換えを行われた回数の情報を含むことを特徴とする請求項1乃至6のうちいずれか1項に記載のアブソリュートエンコーダ。
- 前記処理部は、前記回数の情報を出力することを特徴とする請求項7に記載のアブソリュートエンコーダ。
- 前記処理部は、前記相関度としてハミング距離を用いることを特徴とする請求項1乃至8のうちいずれか1項に記載のアブソリュートエンコーダ。
- 前記マーク配列は、間隙をもって配列された互いに特性の異なる複数種類のマークを含むことを特徴とする請求項1乃至9のうちいずれか1項に記載のアブソリュートエンコーダ。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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JP2014087591A JP6320149B2 (ja) | 2014-04-21 | 2014-04-21 | アブソリュートエンコーダ |
EP15001094.0A EP2937671B1 (en) | 2014-04-21 | 2015-04-15 | Absolute encoder |
US14/689,329 US9810555B2 (en) | 2014-04-21 | 2015-04-17 | Absolute encoder that provides increased accuracy against defect in scale thereof |
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JP2014087591A JP6320149B2 (ja) | 2014-04-21 | 2014-04-21 | アブソリュートエンコーダ |
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JP2015206688A JP2015206688A (ja) | 2015-11-19 |
JP2015206688A5 JP2015206688A5 (ja) | 2017-06-15 |
JP6320149B2 true JP6320149B2 (ja) | 2018-05-09 |
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JP2014087591A Active JP6320149B2 (ja) | 2014-04-21 | 2014-04-21 | アブソリュートエンコーダ |
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US (1) | US9810555B2 (ja) |
EP (1) | EP2937671B1 (ja) |
JP (1) | JP6320149B2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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US9792688B2 (en) * | 2015-10-02 | 2017-10-17 | Mitsubishi Electric Corporation | Position detection device |
CN106918307B (zh) * | 2017-01-25 | 2019-02-22 | 哈尔滨理工大学 | 一种可靠的绝对模拟码检索方法 |
DE102017102494A1 (de) * | 2017-02-08 | 2018-08-09 | Beckhoff Automation Gmbh | Positionsbestimmung eines beweglichen Elements |
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