JP5931409B2 - 板材の搬送システム - Google Patents

板材の搬送システム Download PDF

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Publication number
JP5931409B2
JP5931409B2 JP2011248753A JP2011248753A JP5931409B2 JP 5931409 B2 JP5931409 B2 JP 5931409B2 JP 2011248753 A JP2011248753 A JP 2011248753A JP 2011248753 A JP2011248753 A JP 2011248753A JP 5931409 B2 JP5931409 B2 JP 5931409B2
Authority
JP
Japan
Prior art keywords
plate material
delivery device
plate glass
unit
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2011248753A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013103797A (ja
Inventor
守正 久下
守正 久下
田中　秀幸
秀幸 田中
一典 高原
一典 高原
京史 辻田
京史 辻田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kawasaki Motors Ltd
Original Assignee
Kawasaki Jukogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Jukogyo KK filed Critical Kawasaki Jukogyo KK
Priority to JP2011248753A priority Critical patent/JP5931409B2/ja
Priority to IN3271CHN2014 priority patent/IN2014CN03271A/en
Priority to CN201280053236.0A priority patent/CN103906692B/zh
Priority to PCT/JP2012/007241 priority patent/WO2013073156A1/ja
Priority to KR1020147011849A priority patent/KR101564675B1/ko
Priority to TW101142316A priority patent/TWI480216B/zh
Publication of JP2013103797A publication Critical patent/JP2013103797A/ja
Application granted granted Critical
Publication of JP5931409B2 publication Critical patent/JP5931409B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
JP2011248753A 2011-11-14 2011-11-14 板材の搬送システム Active JP5931409B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2011248753A JP5931409B2 (ja) 2011-11-14 2011-11-14 板材の搬送システム
IN3271CHN2014 IN2014CN03271A (enExample) 2011-11-14 2012-11-12
CN201280053236.0A CN103906692B (zh) 2011-11-14 2012-11-12 板材的搬运系统
PCT/JP2012/007241 WO2013073156A1 (ja) 2011-11-14 2012-11-12 板材の搬送システム
KR1020147011849A KR101564675B1 (ko) 2011-11-14 2012-11-12 판재 반송 시스템
TW101142316A TWI480216B (zh) 2011-11-14 2012-11-14 Sheet conveyance system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011248753A JP5931409B2 (ja) 2011-11-14 2011-11-14 板材の搬送システム

Publications (2)

Publication Number Publication Date
JP2013103797A JP2013103797A (ja) 2013-05-30
JP5931409B2 true JP5931409B2 (ja) 2016-06-08

Family

ID=48429252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011248753A Active JP5931409B2 (ja) 2011-11-14 2011-11-14 板材の搬送システム

Country Status (6)

Country Link
JP (1) JP5931409B2 (enExample)
KR (1) KR101564675B1 (enExample)
CN (1) CN103906692B (enExample)
IN (1) IN2014CN03271A (enExample)
TW (1) TWI480216B (enExample)
WO (1) WO2013073156A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3049943B1 (fr) * 2016-04-06 2020-08-28 Saint Gobain Dispositif de convoyage et de maintien de feuilles de verre notamment dans une installation de lavage, et procede de mise en oeuvre
FR3079507A1 (fr) * 2018-03-29 2019-10-04 Saint-Gobain Glass France Ensemble de convoyage ameliore

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6481558B1 (en) * 1998-12-18 2002-11-19 Asyst Technologies, Inc. Integrated load port-conveyor transfer system
JP2001151318A (ja) * 1999-09-13 2001-06-05 Press Gijutsu Kenkyusho:Kk 加工用送り装置
JP3887549B2 (ja) * 2001-07-16 2007-02-28 東京エレクトロン株式会社 基板搬送装置
JP2004154893A (ja) * 2002-11-06 2004-06-03 Mitsubishi Materials Techno Corp 板硝子の研磨方法および研磨装置
JP4244006B2 (ja) 2003-11-14 2009-03-25 株式会社ダイフク 搬送装置
JP4626205B2 (ja) * 2004-07-28 2011-02-02 シンフォニアテクノロジー株式会社 基板の受渡し方法、及びその装置
JP4800611B2 (ja) * 2004-12-13 2011-10-26 コーニングジャパン株式会社 板材収納方法および装置
JP4849969B2 (ja) * 2006-06-15 2012-01-11 東京エレクトロン株式会社 基板処理システムおよび基板搬送方法
JP2008302487A (ja) * 2007-06-11 2008-12-18 Olympus Corp 基板吸着装置及び基板搬送装置並びに外観検査装置
JP5162640B2 (ja) * 2010-10-06 2013-03-13 川崎重工業株式会社 板ガラスの搬送装置とそれを備えた面取り装置

Also Published As

Publication number Publication date
CN103906692A (zh) 2014-07-02
IN2014CN03271A (enExample) 2015-07-03
TW201318943A (zh) 2013-05-16
WO2013073156A1 (ja) 2013-05-23
TWI480216B (zh) 2015-04-11
CN103906692B (zh) 2016-01-06
KR101564675B1 (ko) 2015-10-30
KR20140085482A (ko) 2014-07-07
JP2013103797A (ja) 2013-05-30

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