TWI480216B - Sheet conveyance system - Google Patents

Sheet conveyance system Download PDF

Info

Publication number
TWI480216B
TWI480216B TW101142316A TW101142316A TWI480216B TW I480216 B TWI480216 B TW I480216B TW 101142316 A TW101142316 A TW 101142316A TW 101142316 A TW101142316 A TW 101142316A TW I480216 B TWI480216 B TW I480216B
Authority
TW
Taiwan
Prior art keywords
delivery device
sheet
conveying
plate
plate glass
Prior art date
Application number
TW101142316A
Other languages
English (en)
Chinese (zh)
Other versions
TW201318943A (zh
Inventor
Morimasa Kuge
Hideyuki Tanaka
Kazunori Takahara
Keiji Tsujita
Original Assignee
Kawasaki Heavy Ind Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Heavy Ind Ltd filed Critical Kawasaki Heavy Ind Ltd
Publication of TW201318943A publication Critical patent/TW201318943A/zh
Application granted granted Critical
Publication of TWI480216B publication Critical patent/TWI480216B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
TW101142316A 2011-11-14 2012-11-14 Sheet conveyance system TWI480216B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011248753A JP5931409B2 (ja) 2011-11-14 2011-11-14 板材の搬送システム

Publications (2)

Publication Number Publication Date
TW201318943A TW201318943A (zh) 2013-05-16
TWI480216B true TWI480216B (zh) 2015-04-11

Family

ID=48429252

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101142316A TWI480216B (zh) 2011-11-14 2012-11-14 Sheet conveyance system

Country Status (6)

Country Link
JP (1) JP5931409B2 (enExample)
KR (1) KR101564675B1 (enExample)
CN (1) CN103906692B (enExample)
IN (1) IN2014CN03271A (enExample)
TW (1) TWI480216B (enExample)
WO (1) WO2013073156A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3049943B1 (fr) * 2016-04-06 2020-08-28 Saint Gobain Dispositif de convoyage et de maintien de feuilles de verre notamment dans une installation de lavage, et procede de mise en oeuvre
FR3079507A1 (fr) * 2018-03-29 2019-10-04 Saint-Gobain Glass France Ensemble de convoyage ameliore

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001151318A (ja) * 1999-09-13 2001-06-05 Press Gijutsu Kenkyusho:Kk 加工用送り装置
JP2004154893A (ja) * 2002-11-06 2004-06-03 Mitsubishi Materials Techno Corp 板硝子の研磨方法および研磨装置
JP2006036471A (ja) * 2004-07-28 2006-02-09 Shinko Electric Co Ltd 基板の受渡し方法、及びその装置
CN101323396A (zh) * 2007-06-11 2008-12-17 奥林巴斯株式会社 基板吸附装置和基板搬送装置以及外观检查装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6481558B1 (en) * 1998-12-18 2002-11-19 Asyst Technologies, Inc. Integrated load port-conveyor transfer system
JP3887549B2 (ja) * 2001-07-16 2007-02-28 東京エレクトロン株式会社 基板搬送装置
JP4244006B2 (ja) 2003-11-14 2009-03-25 株式会社ダイフク 搬送装置
JP4800611B2 (ja) * 2004-12-13 2011-10-26 コーニングジャパン株式会社 板材収納方法および装置
JP4849969B2 (ja) * 2006-06-15 2012-01-11 東京エレクトロン株式会社 基板処理システムおよび基板搬送方法
JP5162640B2 (ja) * 2010-10-06 2013-03-13 川崎重工業株式会社 板ガラスの搬送装置とそれを備えた面取り装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001151318A (ja) * 1999-09-13 2001-06-05 Press Gijutsu Kenkyusho:Kk 加工用送り装置
JP2004154893A (ja) * 2002-11-06 2004-06-03 Mitsubishi Materials Techno Corp 板硝子の研磨方法および研磨装置
JP2006036471A (ja) * 2004-07-28 2006-02-09 Shinko Electric Co Ltd 基板の受渡し方法、及びその装置
CN101323396A (zh) * 2007-06-11 2008-12-17 奥林巴斯株式会社 基板吸附装置和基板搬送装置以及外观检查装置

Also Published As

Publication number Publication date
CN103906692A (zh) 2014-07-02
IN2014CN03271A (enExample) 2015-07-03
TW201318943A (zh) 2013-05-16
WO2013073156A1 (ja) 2013-05-23
CN103906692B (zh) 2016-01-06
JP5931409B2 (ja) 2016-06-08
KR101564675B1 (ko) 2015-10-30
KR20140085482A (ko) 2014-07-07
JP2013103797A (ja) 2013-05-30

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