JP2008063130A5 - - Google Patents

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Publication number
JP2008063130A5
JP2008063130A5 JP2006245739A JP2006245739A JP2008063130A5 JP 2008063130 A5 JP2008063130 A5 JP 2008063130A5 JP 2006245739 A JP2006245739 A JP 2006245739A JP 2006245739 A JP2006245739 A JP 2006245739A JP 2008063130 A5 JP2008063130 A5 JP 2008063130A5
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JP
Japan
Prior art keywords
substrate
transfer
rectangular
rectangular substrate
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006245739A
Other languages
English (en)
Japanese (ja)
Other versions
JP5265099B2 (ja
JP2008063130A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006245739A priority Critical patent/JP5265099B2/ja
Priority claimed from JP2006245739A external-priority patent/JP5265099B2/ja
Priority to TW096133454A priority patent/TWI416095B/zh
Priority to CN2007101492516A priority patent/CN101144920B/zh
Priority to KR1020070091423A priority patent/KR101424017B1/ko
Publication of JP2008063130A publication Critical patent/JP2008063130A/ja
Publication of JP2008063130A5 publication Critical patent/JP2008063130A5/ja
Application granted granted Critical
Publication of JP5265099B2 publication Critical patent/JP5265099B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2006245739A 2006-09-11 2006-09-11 基板検査装置 Expired - Fee Related JP5265099B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006245739A JP5265099B2 (ja) 2006-09-11 2006-09-11 基板検査装置
TW096133454A TWI416095B (zh) 2006-09-11 2007-09-07 基板檢查裝置
CN2007101492516A CN101144920B (zh) 2006-09-11 2007-09-07 基板检查装置
KR1020070091423A KR101424017B1 (ko) 2006-09-11 2007-09-10 기판 검사 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006245739A JP5265099B2 (ja) 2006-09-11 2006-09-11 基板検査装置

Publications (3)

Publication Number Publication Date
JP2008063130A JP2008063130A (ja) 2008-03-21
JP2008063130A5 true JP2008063130A5 (enExample) 2009-10-15
JP5265099B2 JP5265099B2 (ja) 2013-08-14

Family

ID=39207522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006245739A Expired - Fee Related JP5265099B2 (ja) 2006-09-11 2006-09-11 基板検査装置

Country Status (4)

Country Link
JP (1) JP5265099B2 (enExample)
KR (1) KR101424017B1 (enExample)
CN (1) CN101144920B (enExample)
TW (1) TWI416095B (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5317618B2 (ja) * 2008-10-06 2013-10-16 株式会社日立ハイテクノロジーズ 表示パネルモジュール組立装置及び基板搬送装置
JP5380225B2 (ja) * 2009-09-24 2014-01-08 株式会社日立ハイテクノロジーズ ガラス基板の検査装置
JP5683333B2 (ja) * 2011-03-10 2015-03-11 東レエンジニアリング株式会社 基板検査装置及び方法
CN102320472B (zh) 2011-06-03 2013-07-10 深圳市华星光电技术有限公司 基板传送系统及传送方法
KR101773494B1 (ko) * 2013-02-26 2017-08-31 가부시키가이샤 아이에이치아이 반송 장치
TWI472767B (zh) * 2014-01-22 2015-02-11 Utechzone Co Ltd Detection device
US10289930B2 (en) * 2017-02-09 2019-05-14 Glasstech, Inc. System and associated for online measurement of the optical characteristics of a glass sheet
KR102140869B1 (ko) * 2018-09-14 2020-08-03 양승현 Pcb기판 이송장치
KR102649083B1 (ko) 2019-01-24 2024-03-20 주식회사 고영테크놀러지 검사 장치용 지그, 검사 장치, 검사 세트 및 이를 이용하는 대상물 검사 방법
CN109926792B (zh) * 2019-04-25 2021-04-06 大族激光科技产业集团股份有限公司 一种激光切割载台
CN112595722B (zh) * 2021-03-02 2021-06-08 苏州天准科技股份有限公司 一种分段式气浮平台、平台模组和检测设备

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0527215A (ja) 1991-07-23 1993-02-05 Toshiba Corp 基板搬送装置
JP2000009661A (ja) * 1998-06-26 2000-01-14 Ntn Corp フラットパネル検査装置
IL131282A (en) * 1999-08-05 2009-02-11 Orbotech Ltd Apparatus and methods for inspection of objects
JP2005010221A (ja) * 2003-06-16 2005-01-13 Kowa:Kk ガラス基板熱処理装置
JP4426276B2 (ja) * 2003-10-06 2010-03-03 住友重機械工業株式会社 搬送装置、塗布システム、及び検査システム
KR101023729B1 (ko) * 2004-06-30 2011-03-25 엘지디스플레이 주식회사 대형 기판을 반송하는 셔틀 및 반송 방법
KR20060007187A (ko) * 2004-07-19 2006-01-24 삼성전자주식회사 기판의 처리방법과 처리장치
TW200614412A (en) * 2004-09-27 2006-05-01 Olympus Corp Macroscopic inspection apparatus and macroscopic inspection method
JP4579670B2 (ja) * 2004-12-16 2010-11-10 芝浦メカトロニクス株式会社 部品の圧着装置及び圧着方法
JP4378301B2 (ja) * 2005-02-28 2009-12-02 東京エレクトロン株式会社 基板処理装置及び基板処理方法及び基板処理プログラム

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