KR101564675B1 - 판재 반송 시스템 - Google Patents

판재 반송 시스템 Download PDF

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Publication number
KR101564675B1
KR101564675B1 KR1020147011849A KR20147011849A KR101564675B1 KR 101564675 B1 KR101564675 B1 KR 101564675B1 KR 1020147011849 A KR1020147011849 A KR 1020147011849A KR 20147011849 A KR20147011849 A KR 20147011849A KR 101564675 B1 KR101564675 B1 KR 101564675B1
Authority
KR
South Korea
Prior art keywords
delivery device
sheet material
conveying
plate glass
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020147011849A
Other languages
English (en)
Korean (ko)
Other versions
KR20140085482A (ko
Inventor
모리마사 쿠게
히데유키 타나카
카즈노리 타카하라
케이지 츠지타
Original Assignee
카와사키 주코교 카부시키 카이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 카와사키 주코교 카부시키 카이샤 filed Critical 카와사키 주코교 카부시키 카이샤
Publication of KR20140085482A publication Critical patent/KR20140085482A/ko
Application granted granted Critical
Publication of KR101564675B1 publication Critical patent/KR101564675B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
KR1020147011849A 2011-11-14 2012-11-12 판재 반송 시스템 Expired - Fee Related KR101564675B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2011-248753 2011-11-14
JP2011248753A JP5931409B2 (ja) 2011-11-14 2011-11-14 板材の搬送システム
PCT/JP2012/007241 WO2013073156A1 (ja) 2011-11-14 2012-11-12 板材の搬送システム

Publications (2)

Publication Number Publication Date
KR20140085482A KR20140085482A (ko) 2014-07-07
KR101564675B1 true KR101564675B1 (ko) 2015-10-30

Family

ID=48429252

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020147011849A Expired - Fee Related KR101564675B1 (ko) 2011-11-14 2012-11-12 판재 반송 시스템

Country Status (6)

Country Link
JP (1) JP5931409B2 (enExample)
KR (1) KR101564675B1 (enExample)
CN (1) CN103906692B (enExample)
IN (1) IN2014CN03271A (enExample)
TW (1) TWI480216B (enExample)
WO (1) WO2013073156A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3049943B1 (fr) * 2016-04-06 2020-08-28 Saint Gobain Dispositif de convoyage et de maintien de feuilles de verre notamment dans une installation de lavage, et procede de mise en oeuvre
FR3079507A1 (fr) * 2018-03-29 2019-10-04 Saint-Gobain Glass France Ensemble de convoyage ameliore

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005145650A (ja) 2003-11-14 2005-06-09 Daifuku Co Ltd 搬送装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6481558B1 (en) * 1998-12-18 2002-11-19 Asyst Technologies, Inc. Integrated load port-conveyor transfer system
JP2001151318A (ja) * 1999-09-13 2001-06-05 Press Gijutsu Kenkyusho:Kk 加工用送り装置
JP3887549B2 (ja) * 2001-07-16 2007-02-28 東京エレクトロン株式会社 基板搬送装置
JP2004154893A (ja) * 2002-11-06 2004-06-03 Mitsubishi Materials Techno Corp 板硝子の研磨方法および研磨装置
JP4626205B2 (ja) * 2004-07-28 2011-02-02 シンフォニアテクノロジー株式会社 基板の受渡し方法、及びその装置
JP4800611B2 (ja) * 2004-12-13 2011-10-26 コーニングジャパン株式会社 板材収納方法および装置
JP4849969B2 (ja) * 2006-06-15 2012-01-11 東京エレクトロン株式会社 基板処理システムおよび基板搬送方法
JP2008302487A (ja) * 2007-06-11 2008-12-18 Olympus Corp 基板吸着装置及び基板搬送装置並びに外観検査装置
JP5162640B2 (ja) * 2010-10-06 2013-03-13 川崎重工業株式会社 板ガラスの搬送装置とそれを備えた面取り装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005145650A (ja) 2003-11-14 2005-06-09 Daifuku Co Ltd 搬送装置

Also Published As

Publication number Publication date
CN103906692A (zh) 2014-07-02
IN2014CN03271A (enExample) 2015-07-03
TW201318943A (zh) 2013-05-16
WO2013073156A1 (ja) 2013-05-23
TWI480216B (zh) 2015-04-11
CN103906692B (zh) 2016-01-06
JP5931409B2 (ja) 2016-06-08
KR20140085482A (ko) 2014-07-07
JP2013103797A (ja) 2013-05-30

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