JP5930595B2 - 振動型アクチュエータ、振動子及び振動子の製造方法 - Google Patents

振動型アクチュエータ、振動子及び振動子の製造方法 Download PDF

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Publication number
JP5930595B2
JP5930595B2 JP2011062858A JP2011062858A JP5930595B2 JP 5930595 B2 JP5930595 B2 JP 5930595B2 JP 2011062858 A JP2011062858 A JP 2011062858A JP 2011062858 A JP2011062858 A JP 2011062858A JP 5930595 B2 JP5930595 B2 JP 5930595B2
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Prior art keywords
vibrator
contact
protrusion
vibration
elastic body
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Japanese (ja)
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JP2011234608A5 (enExample
JP2011234608A (ja
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篤史 木村
篤史 木村
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Canon Inc
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Canon Inc
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/0015—Driving devices, e.g. vibrators using only bending modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0065—Friction interface
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12—Constructional details
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/18—Ferrous alloys, e.g. steel alloys containing chromium
    • C22C38/40—Ferrous alloys, e.g. steel alloys containing chromium with nickel
    • C22C38/42—Ferrous alloys, e.g. steel alloys containing chromium with nickel with copper
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
    • C23C26/02—Coating not provided for in groups C23C2/00 - C23C24/00 applying molten material to the substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2011062858A 2010-04-06 2011-03-22 振動型アクチュエータ、振動子及び振動子の製造方法 Active JP5930595B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011062858A JP5930595B2 (ja) 2010-04-06 2011-03-22 振動型アクチュエータ、振動子及び振動子の製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010087891 2010-04-06
JP2010087891 2010-04-06
JP2011062858A JP5930595B2 (ja) 2010-04-06 2011-03-22 振動型アクチュエータ、振動子及び振動子の製造方法

Publications (3)

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JP2011234608A JP2011234608A (ja) 2011-11-17
JP2011234608A5 JP2011234608A5 (enExample) 2014-05-08
JP5930595B2 true JP5930595B2 (ja) 2016-06-08

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Country Link
US (3) US8981619B2 (enExample)
EP (1) EP2375463B1 (enExample)
JP (1) JP5930595B2 (enExample)
CN (1) CN102215010B (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12149187B2 (en) 2020-04-13 2024-11-19 Canon Kabushiki Kaisha Vibration wave motor and imaging apparatus and electronic apparatus including vibration wave motor
EP4485790A1 (en) 2023-06-26 2025-01-01 Canon Kabushiki Kaisha Vibration-type actuator and electronic apparatus

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JP5627258B2 (ja) * 2010-03-23 2014-11-19 キヤノン株式会社 振動型アクチュエータおよびその製造方法
JP5930595B2 (ja) * 2010-04-06 2016-06-08 キヤノン株式会社 振動型アクチュエータ、振動子及び振動子の製造方法
JP6214232B2 (ja) * 2013-06-20 2017-10-18 キヤノン株式会社 振動型アクチュエータ、交換用レンズ、撮像装置、及び自動ステージ
KR101514531B1 (ko) * 2013-07-12 2015-04-22 삼성전기주식회사 진동발생장치
JP6261279B2 (ja) * 2013-10-16 2018-01-17 キヤノン株式会社 振動型駆動装置の振動子、振動型駆動装置、交換レンズ、撮像装置、自動ステージ
JP6271963B2 (ja) 2013-11-21 2018-01-31 キヤノン株式会社 振動型アクチュエータ
JP2015192468A (ja) * 2014-03-27 2015-11-02 株式会社フコク 振動アクチュエータのステータ及び振動アクチュエータ
EP3127231A4 (en) * 2014-04-02 2018-01-03 PCB Motor Aps A stator and a motor
JP6465587B2 (ja) * 2014-08-22 2019-02-06 キヤノン株式会社 振動子ユニット、振動型アクチュエータ及び撮像装置
JP6485118B2 (ja) 2015-03-04 2019-03-20 セイコーエプソン株式会社 圧電駆動装置及びロボット
JP6602041B2 (ja) * 2015-04-24 2019-11-06 キヤノン株式会社 振動体、振動型駆動装置、画像形成装置、ロボット、及び雲台装置
JP6539117B2 (ja) 2015-05-29 2019-07-03 キヤノン株式会社 振動波モータ
EP3760020B1 (en) 2015-10-12 2023-07-12 Applied Quantum Energies, LLC Apparatus for treating agricultural matter
JP6828342B2 (ja) * 2016-09-23 2021-02-10 セイコーエプソン株式会社 圧電アクチュエーター、圧電モーター、ロボット、電子部品搬送装置、プリンターおよび圧電アクチュエーターの製造方法
JP6836129B2 (ja) * 2016-09-26 2021-02-24 セイコーエプソン株式会社 駆動装置、圧電モーター、電子部品搬送装置およびロボット
DE102018210909A1 (de) * 2017-09-21 2019-03-21 Robert Bosch Gmbh Verfahren zur Herstellung von Kameramodulen und einer Kameramodulgruppe
US11336210B2 (en) 2019-01-17 2022-05-17 Canon Kabushiki Kaisha Vibration type actuator and manufacturing method of vibration type actuator
JP2021100291A (ja) * 2019-12-19 2021-07-01 キヤノン株式会社 振動波モータ及びそれを有する電子機器
JP7016898B2 (ja) * 2020-02-19 2022-02-07 キヤノン株式会社 振動型モータ、レンズ装置、および、電子機器

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JP5930595B2 (ja) * 2010-04-06 2016-06-08 キヤノン株式会社 振動型アクチュエータ、振動子及び振動子の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12149187B2 (en) 2020-04-13 2024-11-19 Canon Kabushiki Kaisha Vibration wave motor and imaging apparatus and electronic apparatus including vibration wave motor
EP4485790A1 (en) 2023-06-26 2025-01-01 Canon Kabushiki Kaisha Vibration-type actuator and electronic apparatus

Also Published As

Publication number Publication date
CN102215010A (zh) 2011-10-12
US20110241488A1 (en) 2011-10-06
EP2375463A1 (en) 2011-10-12
CN102215010B (zh) 2014-06-18
US20170310246A1 (en) 2017-10-26
US20150155798A1 (en) 2015-06-04
US10770991B2 (en) 2020-09-08
EP2375463B1 (en) 2018-06-13
JP2011234608A (ja) 2011-11-17
US8981619B2 (en) 2015-03-17

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