JP5925062B2 - 光モジュール及び光モジュールの製造方法 - Google Patents
光モジュール及び光モジュールの製造方法 Download PDFInfo
- Publication number
- JP5925062B2 JP5925062B2 JP2012137219A JP2012137219A JP5925062B2 JP 5925062 B2 JP5925062 B2 JP 5925062B2 JP 2012137219 A JP2012137219 A JP 2012137219A JP 2012137219 A JP2012137219 A JP 2012137219A JP 5925062 B2 JP5925062 B2 JP 5925062B2
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- JP
- Japan
- Prior art keywords
- layer
- substrate
- sub
- optical fiber
- optical module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
- G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
- G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4202—Packages, e.g. shape, construction, internal or external details for coupling an active element with fibres without intermediate optical elements, e.g. fibres with plane ends, fibres with shaped ends, bundles
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/3501—Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
- G02F1/3503—Structural association of optical elements, e.g. lenses, with the non-linear optical device
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/3501—Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
- G02F1/3505—Coatings; Housings; Supports
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/355—Non-linear optics characterised by the materials used
- G02F1/3558—Poled materials, e.g. with periodic poling; Fabrication of domain inverted structures, e.g. for quasi-phase-matching [QPM]
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/02—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 fibre
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/20—LiNbO3, LiTaO3
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
- H01S5/0092—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity
Description
13 にげ溝
20 光ファイバ
30 サブ基板
31 支持層
32 BOX層
33 活性層
34 高さ調整層
35 接合用Au層
36 光ファイバ固定用溝
40 PPLN素子
50 LD素子
60 フレキシブル基板
Claims (4)
- シリコン基板と、
支持層、活性層、前記支持層と前記活性層の間に配置されたBOX層及び、接合用Au層を含む高さ調整層を有するサブ基板と、
光ファイバと、
前記シリコン基板に固定された光学素子と、を有し、
前記サブ基板は、前記活性層と前記BOX層によって形成される固定用溝を有し、
前記光ファイバは、前記固定用溝に固定されており、
前記サブ基板が前記高さ調整層を介して前記シリコン基板に対して位置決めされることによって、前記光ファイバと前記光学素子とが光結合される、
ことを特徴とする光モジュール。 - 前記シリコン基板は、前記接合用Au層と接合するためのAuマイクロバンプを有する、請求項1に記載の光モジュール。
- 基板、前記基板の上に接合されたサブ基板及び光学素子を有する光モジュールの製造方法であって、
支持層、活性層及び前記支持層と前記活性層の間に配置されたBOX層を有する基材を用い、エッチングによって前記活性層の一部を除去することによって、前記活性層と前記BOX層によって形成される固定用溝を有するサブ基板を形成し、
前記活性層の上部に、前記活性層の高さを調整するための接合用Au層を含む高さ調整層を成膜し、
前記固定用溝に光ファイバを固定し、
前記サブ基板が前記高さ調整層を介して前記シリコン基板に対して位置決めされることによって、前記光ファイバと前記光学素子とを光結合させる、
工程を有することを特徴とする光モジュールの製造方法。 - 前記シリコン基板の上に、前記接合用Au層と接合するためのAuマイクロバンプを形成する、工程を更に有する、請求項3に記載の光モジュールの製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012137219A JP5925062B2 (ja) | 2012-06-18 | 2012-06-18 | 光モジュール及び光モジュールの製造方法 |
CN201310242366.5A CN103513345B (zh) | 2012-06-18 | 2013-06-18 | 光模块以及光模块的制造方法 |
US13/920,102 US9046666B2 (en) | 2012-06-18 | 2013-06-18 | Optical module and method for fabricating optical module |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012137219A JP5925062B2 (ja) | 2012-06-18 | 2012-06-18 | 光モジュール及び光モジュールの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014002260A JP2014002260A (ja) | 2014-01-09 |
JP5925062B2 true JP5925062B2 (ja) | 2016-05-25 |
Family
ID=49755993
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012137219A Active JP5925062B2 (ja) | 2012-06-18 | 2012-06-18 | 光モジュール及び光モジュールの製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US9046666B2 (ja) |
JP (1) | JP5925062B2 (ja) |
CN (1) | CN103513345B (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5847473B2 (ja) * | 2011-07-21 | 2016-01-20 | シチズンホールディングス株式会社 | 光モジュール |
JP6384152B2 (ja) * | 2014-07-02 | 2018-09-05 | 富士通株式会社 | 光デバイス及びその製造方法 |
JP2017194513A (ja) * | 2016-04-19 | 2017-10-26 | 株式会社フジクラ | 光学デバイス、光変調器、及び光学デバイスの製造方法 |
WO2018214008A1 (zh) * | 2017-05-23 | 2018-11-29 | 华为技术有限公司 | 一种光模块结构及其制作方法 |
CN109994461B (zh) * | 2017-12-30 | 2021-10-08 | 苏州旭创科技有限公司 | 光学组件、光模块及其封装方法 |
US11215762B2 (en) * | 2018-08-15 | 2022-01-04 | Advanced Semiconductor Engineering, Inc. | Optical device package and method for manufacturing the same |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
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CA1255382A (en) * | 1984-08-10 | 1989-06-06 | Masao Kawachi | Hybrid optical integrated circuit with alignment guides |
US4702547A (en) * | 1986-07-28 | 1987-10-27 | Tektronix, Inc. | Method for attaching an optical fiber to a substrate to form an optical fiber package |
JPH07198995A (ja) * | 1993-12-31 | 1995-08-01 | Sumitomo Metal Mining Co Ltd | 光コネクタ装置 |
JPH07249798A (ja) * | 1994-03-09 | 1995-09-26 | Fujitsu Ltd | 光部品固定装置及びその製造方法 |
JPH0829638A (ja) * | 1994-05-12 | 1996-02-02 | Fujitsu Ltd | 光導波路・光ファイバ接続構造及び光導波路・光ファイバ接続方法並びに光導波路・光ファイバ接続に使用される光導波路基板及び同基板の製造方法並びに光導波路・光ファイバ接続に使用されるファイバ基板付き光ファイバ |
US5568892A (en) * | 1994-06-16 | 1996-10-29 | Lucent Technologies Inc. | Alignment and bonding techniques |
JP2817778B2 (ja) * | 1995-08-21 | 1998-10-30 | 日本電気株式会社 | 光モジュール及びその製造方法 |
JP2964941B2 (ja) * | 1996-01-12 | 1999-10-18 | 日本電気株式会社 | 光デバイスの製造方法及び実装構造 |
US6130444A (en) * | 1998-02-27 | 2000-10-10 | Nec Corporation | Optical fiber secured with a photosetting resin covered with a UV light-transmissive plate |
JPH11295551A (ja) * | 1998-04-16 | 1999-10-29 | Nhk Spring Co Ltd | 光デバイス用光導波路モジュール |
JP3235571B2 (ja) * | 1998-09-03 | 2001-12-04 | 日本電気株式会社 | 活性層と位置決めマークとの相対位置を測定する測定方法 |
JP2000098188A (ja) * | 1998-09-18 | 2000-04-07 | Fujitsu Ltd | 光モジュール |
SE513575C2 (sv) * | 1999-02-19 | 2000-10-02 | Ericsson Telefon Ab L M | Metod och anordning för passiv upplinjering av minst en optofiber till minst en optisk anordning |
JP2002107508A (ja) | 2000-07-26 | 2002-04-10 | Comoc:Kk | マイクロレンズアレイおよびマイクロレンズアレイを用いた表示装置 |
JP4008649B2 (ja) * | 2000-09-27 | 2007-11-14 | 沖電気工業株式会社 | 光学装置 |
EP1298474A1 (en) * | 2001-09-27 | 2003-04-02 | Agilent Technologies, Inc. (a Delaware corporation) | A package for opto-electrical components |
SE519760C2 (sv) * | 2001-09-27 | 2003-04-08 | Optillion Ab | Anordning och metod för upplinjering av en optisk lins eller fiber |
GB0123741D0 (en) * | 2001-10-03 | 2001-11-21 | Qinetiq Ltd | Mounting of optical components |
JP2005055613A (ja) * | 2003-08-01 | 2005-03-03 | Sumitomo Electric Ind Ltd | 光モジュール |
US7784670B2 (en) * | 2004-01-22 | 2010-08-31 | Bondtech Inc. | Joining method and device produced by this method and joining unit |
JP5018760B2 (ja) * | 2008-02-28 | 2012-09-05 | 株式会社デンソー | 超音波接合方法 |
JP5730026B2 (ja) * | 2010-01-27 | 2015-06-03 | シチズンホールディングス株式会社 | レーザ光源 |
JP5582868B2 (ja) * | 2010-05-14 | 2014-09-03 | シチズンホールディングス株式会社 | 光デバイス |
JP5636319B2 (ja) * | 2011-03-18 | 2014-12-03 | シチズンホールディングス株式会社 | 光モジュールの製造方法 |
JP5847473B2 (ja) * | 2011-07-21 | 2016-01-20 | シチズンホールディングス株式会社 | 光モジュール |
JP2013092758A (ja) * | 2011-10-04 | 2013-05-16 | Citizen Holdings Co Ltd | 光デバイス及び光デバイスの製造方法 |
-
2012
- 2012-06-18 JP JP2012137219A patent/JP5925062B2/ja active Active
-
2013
- 2013-06-18 US US13/920,102 patent/US9046666B2/en not_active Expired - Fee Related
- 2013-06-18 CN CN201310242366.5A patent/CN103513345B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20130336614A1 (en) | 2013-12-19 |
CN103513345B (zh) | 2017-09-05 |
JP2014002260A (ja) | 2014-01-09 |
US9046666B2 (en) | 2015-06-02 |
CN103513345A (zh) | 2014-01-15 |
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