JP5908030B2 - 貫通電極を有する半導体パッケージ及びその製造方法 - Google Patents
貫通電極を有する半導体パッケージ及びその製造方法 Download PDFInfo
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- JP5908030B2 JP5908030B2 JP2014125069A JP2014125069A JP5908030B2 JP 5908030 B2 JP5908030 B2 JP 5908030B2 JP 2014125069 A JP2014125069 A JP 2014125069A JP 2014125069 A JP2014125069 A JP 2014125069A JP 5908030 B2 JP5908030 B2 JP 5908030B2
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Landscapes
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- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Dicing (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
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| US14/264,120 US9245771B2 (en) | 2013-06-21 | 2014-04-29 | Semiconductor packages having through electrodes and methods for fabricating the same |
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| JP2017073472A (ja) * | 2015-10-07 | 2017-04-13 | 株式会社ディスコ | 半導体装置の製造方法 |
| US10872879B2 (en) | 2015-11-12 | 2020-12-22 | Amkor Technology Singapore Holding Pte. Ltd. | Semiconductor package and manufacturing method thereof |
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| US10204893B2 (en) | 2016-05-19 | 2019-02-12 | Invensas Bonding Technologies, Inc. | Stacked dies and methods for forming bonded structures |
| US9922845B1 (en) * | 2016-11-03 | 2018-03-20 | Micron Technology, Inc. | Semiconductor package and fabrication method thereof |
| US10879212B2 (en) | 2017-05-11 | 2020-12-29 | Invensas Bonding Technologies, Inc. | Processed stacked dies |
| US20180358398A1 (en) * | 2017-06-13 | 2018-12-13 | Xintec Inc. | Chip package and manufacturing method thereof |
| US10217720B2 (en) | 2017-06-15 | 2019-02-26 | Invensas Corporation | Multi-chip modules formed using wafer-level processing of a reconstitute wafer |
| US12068246B2 (en) * | 2017-11-30 | 2024-08-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Redistribution layer layouts on integrated circuits and methods for manufacturing the same |
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| US11276676B2 (en) | 2018-05-15 | 2022-03-15 | Invensas Bonding Technologies, Inc. | Stacked devices and methods of fabrication |
| US10727204B2 (en) * | 2018-05-29 | 2020-07-28 | Advances Micro Devices, Inc. | Die stacking for multi-tier 3D integration |
| US11158606B2 (en) | 2018-07-06 | 2021-10-26 | Invensas Bonding Technologies, Inc. | Molded direct bonded and interconnected stack |
| US11462419B2 (en) | 2018-07-06 | 2022-10-04 | Invensas Bonding Technologies, Inc. | Microelectronic assemblies |
| CN108831861A (zh) * | 2018-08-09 | 2018-11-16 | 苏州晶方半导体科技股份有限公司 | 堆叠式芯片封装方法及封装结构 |
| US10950529B2 (en) * | 2018-08-30 | 2021-03-16 | Advanced Semiconductor Engineering Korea, Inc. | Semiconductor device package |
| US20220406765A9 (en) * | 2018-10-02 | 2022-12-22 | Micron Technology, Inc. | Semiconductor device packages having stacked semiconductor dice |
| US12198997B2 (en) * | 2018-10-26 | 2025-01-14 | Nepes Co., Ltd. | Semiconductor package comprising first molding layer and second molding layer with different thermal expansion coefficients |
| WO2020150159A1 (en) | 2019-01-14 | 2020-07-23 | Invensas Bonding Technologies, Inc. | Bonded structures |
| US11296053B2 (en) | 2019-06-26 | 2022-04-05 | Invensas Bonding Technologies, Inc. | Direct bonded stack structures for increased reliability and improved yield in microelectronics |
| KR102722905B1 (ko) | 2019-07-25 | 2024-10-30 | 삼성전자주식회사 | 반도체 패키지 및 그의 제조 방법 |
| US12080672B2 (en) | 2019-09-26 | 2024-09-03 | Adeia Semiconductor Bonding Technologies Inc. | Direct gang bonding methods including directly bonding first element to second element to form bonded structure without adhesive |
| JP7488116B2 (ja) * | 2020-06-03 | 2024-05-21 | 株式会社ディスコ | 電極形成方法 |
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| US11728273B2 (en) | 2020-09-04 | 2023-08-15 | Adeia Semiconductor Bonding Technologies Inc. | Bonded structure with interconnect structure |
| US11764177B2 (en) | 2020-09-04 | 2023-09-19 | Adeia Semiconductor Bonding Technologies Inc. | Bonded structure with interconnect structure |
| US20220165669A1 (en) * | 2020-11-25 | 2022-05-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device structure, stacked semiconductor device structure and method of manufacturing semiconductor device structure |
| CN113035825A (zh) * | 2021-02-02 | 2021-06-25 | 日月光半导体制造股份有限公司 | 半导体封装结构及其形成方法 |
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| CN104241229B (zh) | 2017-10-13 |
| KR102077153B1 (ko) | 2020-02-14 |
| US9245771B2 (en) | 2016-01-26 |
| US20140377909A1 (en) | 2014-12-25 |
| JP2015005748A (ja) | 2015-01-08 |
| KR20150000064A (ko) | 2015-01-02 |
| CN104241229A (zh) | 2014-12-24 |
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