JP5877643B2 - 高純度又は超高純度の化学物質の取り扱い及び輸送のための大型樽 - Google Patents
高純度又は超高純度の化学物質の取り扱い及び輸送のための大型樽 Download PDFInfo
- Publication number
- JP5877643B2 JP5877643B2 JP2010530369A JP2010530369A JP5877643B2 JP 5877643 B2 JP5877643 B2 JP 5877643B2 JP 2010530369 A JP2010530369 A JP 2010530369A JP 2010530369 A JP2010530369 A JP 2010530369A JP 5877643 B2 JP5877643 B2 JP 5877643B2
- Authority
- JP
- Japan
- Prior art keywords
- barrel
- purity
- empty
- liters
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D88/00—Large containers
- B65D88/02—Large containers rigid
- B65D88/12—Large containers rigid specially adapted for transport
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
- B67D7/0277—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure
- B67D7/0283—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure specially adapted for transferring liquids of high purity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/70—Containers, packaging elements or packages, specially adapted for particular articles or materials for materials not otherwise provided for
- B65D85/84—Containers, packaging elements or packages, specially adapted for particular articles or materials for materials not otherwise provided for for corrosive chemicals
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/4673—Plural tanks or compartments with parallel flow
- Y10T137/4857—With manifold or grouped outlets
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/86187—Plural tanks or compartments connected for serial flow
- Y10T137/86196—Separable with valved-connecting passage
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/86493—Multi-way valve unit
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/86493—Multi-way valve unit
- Y10T137/86558—Plural noncommunicating flow paths
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Stackable Containers (AREA)
- Chemical Vapour Deposition (AREA)
Description
Claims (10)
- クロロシラン又はモノシランを受容している樽(1)であって、接続ユニット(2)を備えている形式のものにおいて、
前記樽は少なくとも850リットルの内部容積を有しており、かつ前記接続ユニット(2)は少なくとも1つの遮断機構(6)を含み、
前記樽及び前記接続ユニットを形成する材料は、特殊鋼316Lであり、
前記樽は、円筒状の周壁(3)及び、該円筒状の周壁の両側に、湾曲された底部(4a)及び湾曲された上方の終端閉鎖部(4b)を有し、
前記特殊鋼は電解研磨されており、
前記接続ユニットは、2つの遮断機構(6)若しくは2つより多い遮断機構(6)を含む1つの方向制御装置(5)を有し、
前記遮断機構は弁(6a,6b,6c)若しくはコックであることを特徴とする、樽。 - 前記樽は約1130リットル、又は20000リットルの内部容積を有している請求項1に記載の樽。
- 前記遮断機構はダイヤフラム弁である請求項1又は2に記載の樽。
- 前記方向制御装置に対応して浸漬管(7)を配置してある請求項1から3のいずれか1項に記載の樽。
- 前記接続ユニットは蒸留装置に接続されるようになっている請求項1から4のいずれか1項に記載の樽。
- 前記接続ユニットは保護装置(8)内に配置されている請求項1から5のいずれか1項に記載の樽。
- 前記樽は支持部(9)を有している請求項1から6のいずれか1項に記載の樽。
- 請求項1から7のいずれか1項に記載の樽をクロロシラン又はモノシランの製造のための装置に接続するためのアダプター。
- 請求項1から7のいずれか1項に記載の樽をクロロシラン又はモノシランの消費のための装置に接続するためのアダプター。
- クロロシラン又はモノシランを貯蔵及び/又は取り扱い及び/又は輸送する、請求項1から7のいずれか1項に記載の樽の使用方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007050573.8 | 2007-10-23 | ||
DE200710050573 DE102007050573A1 (de) | 2007-10-23 | 2007-10-23 | Großgebinde zur Handhabung und für den Transport von hochreinen und ultra hochreinen Chemikalien |
PCT/EP2008/061017 WO2009053134A1 (de) | 2007-10-23 | 2008-08-22 | Grossgebinde zur handhabung und für den transport von hochreinen und ultra hochreinen chemikalien |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011500470A JP2011500470A (ja) | 2011-01-06 |
JP5877643B2 true JP5877643B2 (ja) | 2016-03-08 |
Family
ID=40039824
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010530369A Ceased JP5877643B2 (ja) | 2007-10-23 | 2008-08-22 | 高純度又は超高純度の化学物質の取り扱い及び輸送のための大型樽 |
Country Status (11)
Country | Link |
---|---|
US (1) | US8485361B2 (ja) |
EP (1) | EP2195262B1 (ja) |
JP (1) | JP5877643B2 (ja) |
KR (1) | KR20100083154A (ja) |
CN (2) | CN101439786A (ja) |
BR (1) | BRPI0818114A2 (ja) |
CA (1) | CA2702622A1 (ja) |
DE (1) | DE102007050573A1 (ja) |
RU (1) | RU2503605C9 (ja) |
UA (1) | UA104577C2 (ja) |
WO (1) | WO2009053134A1 (ja) |
Families Citing this family (23)
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DE102006003464A1 (de) * | 2006-01-25 | 2007-07-26 | Degussa Gmbh | Verfahren zur Erzeugung einer Siliciumschicht auf einer Substratoberfläche durch Gasphasenabscheidung |
DE102007007874A1 (de) | 2007-02-14 | 2008-08-21 | Evonik Degussa Gmbh | Verfahren zur Herstellung höherer Silane |
DE102007059170A1 (de) * | 2007-12-06 | 2009-06-10 | Evonik Degussa Gmbh | Katalysator und Verfahren zur Dismutierung von Wasserstoff enthaltenden Halogensilanen |
DE102008002537A1 (de) * | 2008-06-19 | 2009-12-24 | Evonik Degussa Gmbh | Verfahren zur Entfernung von Bor enthaltenden Verunreinigungen aus Halogensilanen sowie Anlage zur Durchführung des Verfahrens |
DE102008054537A1 (de) * | 2008-12-11 | 2010-06-17 | Evonik Degussa Gmbh | Entfernung von Fremdmetallen aus Siliciumverbindungen durch Adsorption und/oder Filtration |
DE102009027730A1 (de) | 2009-07-15 | 2011-01-27 | Evonik Degussa Gmbh | Verahren und Verwendung von aminofunktionellen Harzen zur Dismutierung von Halogensilanen und zur Entfernung von Fremdmetallen |
DE102009053804B3 (de) | 2009-11-18 | 2011-03-17 | Evonik Degussa Gmbh | Verfahren zur Herstellung von Hydridosilanen |
DE102010002342A1 (de) | 2010-02-25 | 2011-08-25 | Evonik Degussa GmbH, 45128 | Verwendung der spezifischen Widerstandsmessung zur indirekten Bestimmung der Reinheit von Silanen und Germanen und ein entsprechendes Verfahren |
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DE202011050795U1 (de) * | 2011-07-22 | 2011-09-12 | Holger Blum | Behälter für flüssige Chemikalien |
DE102012204902A1 (de) | 2012-03-27 | 2013-10-02 | Evonik Degussa Gmbh | Gebinde zur Handhabung und für den Transport von hochreinen und ultra hochreinen Chemikalien |
JP6353182B2 (ja) * | 2012-05-08 | 2018-07-04 | 株式会社日本触媒 | 密閉容器及び梱包体 |
JP6275373B2 (ja) * | 2012-08-28 | 2018-02-07 | 株式会社日本触媒 | シリコン膜形成方法、およびシリコン膜形成装置 |
KR101565298B1 (ko) * | 2012-11-27 | 2015-11-03 | 주식회사 엘지화학 | 무기화합물의 제조장치 및 이를 사용한 무기화합물의 제조방법 |
AU2014236334B2 (en) | 2013-03-14 | 2018-04-05 | Bio-Rad Laboratories, Inc. | Bottle pressurization delivery system |
JP6153825B2 (ja) * | 2013-09-04 | 2017-06-28 | 株式会社日本触媒 | 水素化シラン化合物の保管方法 |
JP6163057B2 (ja) * | 2013-09-05 | 2017-07-12 | 株式会社日本触媒 | 水素化シラン化合物用装置の洗浄方法、およびこの方法により洗浄された水素化シラン化合物用装置 |
JP6420702B2 (ja) | 2015-03-25 | 2018-11-07 | 株式会社トクヤマ | 液状化学物質のためのタンク |
EP4092154A1 (en) * | 2015-06-16 | 2022-11-23 | Versum Materials US, LLC | Processes for depositing silicon-containing films using same |
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-
2007
- 2007-10-23 DE DE200710050573 patent/DE102007050573A1/de not_active Withdrawn
-
2008
- 2008-08-22 UA UAA201006135A patent/UA104577C2/ru unknown
- 2008-08-22 JP JP2010530369A patent/JP5877643B2/ja not_active Ceased
- 2008-08-22 WO PCT/EP2008/061017 patent/WO2009053134A1/de active Application Filing
- 2008-08-22 EP EP08787418.6A patent/EP2195262B1/de not_active Not-in-force
- 2008-08-22 US US12/738,799 patent/US8485361B2/en active Active
- 2008-08-22 BR BRPI0818114A patent/BRPI0818114A2/pt not_active IP Right Cessation
- 2008-08-22 KR KR1020107008780A patent/KR20100083154A/ko active Search and Examination
- 2008-08-22 CA CA 2702622 patent/CA2702622A1/en not_active Abandoned
- 2008-08-22 RU RU2010120439/12A patent/RU2503605C9/ru not_active IP Right Cessation
- 2008-10-22 CN CNA2008101714766A patent/CN101439786A/zh active Pending
- 2008-10-22 CN CN201410411005.3A patent/CN104289482A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
UA104577C2 (ru) | 2014-02-25 |
KR20100083154A (ko) | 2010-07-21 |
CN104289482A (zh) | 2015-01-21 |
BRPI0818114A2 (pt) | 2015-09-08 |
EP2195262B1 (de) | 2015-11-18 |
EP2195262A1 (de) | 2010-06-16 |
RU2010120439A (ru) | 2011-11-27 |
JP2011500470A (ja) | 2011-01-06 |
CN101439786A (zh) | 2009-05-27 |
DE102007050573A1 (de) | 2009-04-30 |
US8485361B2 (en) | 2013-07-16 |
WO2009053134A1 (de) | 2009-04-30 |
RU2503605C2 (ru) | 2014-01-10 |
RU2503605C9 (ru) | 2014-07-20 |
CA2702622A1 (en) | 2009-04-30 |
US20100270296A1 (en) | 2010-10-28 |
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