JP5783620B2 - 誘導性構造 - Google Patents
誘導性構造 Download PDFInfo
- Publication number
- JP5783620B2 JP5783620B2 JP2013515362A JP2013515362A JP5783620B2 JP 5783620 B2 JP5783620 B2 JP 5783620B2 JP 2013515362 A JP2013515362 A JP 2013515362A JP 2013515362 A JP2013515362 A JP 2013515362A JP 5783620 B2 JP5783620 B2 JP 5783620B2
- Authority
- JP
- Japan
- Prior art keywords
- forming
- coil
- conductive layer
- present
- core structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F17/0013—Printed inductances with stacked layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/04—Fixed inductances of the signal type with magnetic core
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/24—Magnetic cores
- H01F27/26—Fastening parts of the core together; Fastening or mounting the core on casing or support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
- H01F41/046—Printed circuit coils structurally combined with ferromagnetic material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5227—Inductive arrangements or effects of, or between, wiring layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/64—Impedance arrangements
- H01L23/645—Inductive arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F2017/0086—Printed inductances on semiconductor substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/2804—Printed windings
- H01F2027/2819—Planar transformers with printed windings, e.g. surrounded by two cores and to be mounted on printed circuit
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49073—Electromagnet, transformer or inductor by assembling coil and core
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Integrated Circuits (AREA)
- Coils Or Transformers For Communication (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/816,788 US8410576B2 (en) | 2010-06-16 | 2010-06-16 | Inductive structure and method of forming the inductive structure with an attached core structure |
| US12/816,788 | 2010-06-16 | ||
| PCT/US2011/038483 WO2011159458A2 (en) | 2010-06-16 | 2011-05-30 | Inductive structure |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013535107A JP2013535107A (ja) | 2013-09-09 |
| JP2013535107A5 JP2013535107A5 (enExample) | 2014-06-19 |
| JP5783620B2 true JP5783620B2 (ja) | 2015-09-24 |
Family
ID=45328493
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013515362A Active JP5783620B2 (ja) | 2010-06-16 | 2011-05-30 | 誘導性構造 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8410576B2 (enExample) |
| EP (1) | EP2583287B1 (enExample) |
| JP (1) | JP5783620B2 (enExample) |
| CN (1) | CN102934180B (enExample) |
| TW (1) | TWI549279B (enExample) |
| WO (1) | WO2011159458A2 (enExample) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6219719B2 (ja) * | 2010-10-23 | 2017-10-25 | ポップ テスト エルエルシー | 体液内の特定の成分のレベルを検出、検査、および監視するための装置および調合物、ならびに方法 |
| US8686722B2 (en) * | 2011-08-26 | 2014-04-01 | National Semiconductor Corporation | Semiconductor fluxgate magnetometer |
| FR2979790B1 (fr) * | 2011-09-07 | 2013-10-11 | Commissariat Energie Atomique | Capteur de courant |
| US8525281B2 (en) * | 2011-10-19 | 2013-09-03 | Texas Instruments Incorporated | Z-axis semiconductor fluxgate magnetometer |
| US8803648B2 (en) | 2012-05-03 | 2014-08-12 | Qualcomm Mems Technologies, Inc. | Three-dimensional multilayer solenoid transformer |
| WO2014071813A1 (zh) | 2012-11-08 | 2014-05-15 | 南通富士通微电子股份有限公司 | 半导体器件的封装件和封装方法 |
| CN102915986B (zh) | 2012-11-08 | 2015-04-01 | 南通富士通微电子股份有限公司 | 芯片封装结构 |
| WO2014071815A1 (zh) * | 2012-11-08 | 2014-05-15 | 南通富士通微电子股份有限公司 | 半导体器件及其形成方法 |
| KR101983137B1 (ko) * | 2013-03-04 | 2019-05-28 | 삼성전기주식회사 | 파워 인덕터 및 그 제조방법 |
| KR102260374B1 (ko) * | 2015-03-16 | 2021-06-03 | 삼성전기주식회사 | 인덕터 및 인덕터의 제조 방법 |
| JP6507027B2 (ja) * | 2015-05-19 | 2019-04-24 | 新光電気工業株式会社 | インダクタ及びその製造方法 |
| KR102105388B1 (ko) * | 2015-11-20 | 2020-04-28 | 삼성전기주식회사 | 코일 부품 및 그 제조 방법 |
| KR102163056B1 (ko) * | 2015-12-30 | 2020-10-08 | 삼성전기주식회사 | 코일 전자 부품 및 그 제조방법 |
| JP6658681B2 (ja) * | 2017-06-22 | 2020-03-04 | 株式会社村田製作所 | 積層インダクタの製造方法および積層インダクタ |
| US10930425B2 (en) * | 2017-10-25 | 2021-02-23 | Samsung Electro-Mechanics Co., Ltd. | Inductor |
| CN107808756B (zh) * | 2017-11-09 | 2020-03-20 | 西安华为技术有限公司 | 一种平板变压器及开关电源适配器 |
| KR101973448B1 (ko) * | 2017-12-11 | 2019-04-29 | 삼성전기주식회사 | 코일 부품 |
| KR102064041B1 (ko) * | 2017-12-11 | 2020-01-08 | 삼성전기주식회사 | 코일 부품 |
| KR102047595B1 (ko) * | 2017-12-11 | 2019-11-21 | 삼성전기주식회사 | 인덕터 및 그 제조방법 |
| US11398334B2 (en) * | 2018-07-30 | 2022-07-26 | At&S Austria Technologie & Systemtechnik Aktiengesellschaft | Component carrier comprising embedded inductor with an inlay |
| US20210375540A1 (en) * | 2020-05-28 | 2021-12-02 | Texas Instruments Incorporated | Integrated magnetic device with laminate embedded magnetic core |
Family Cites Families (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0461267A (ja) * | 1990-06-29 | 1992-02-27 | Nippon Telegr & Teleph Corp <Ntt> | インダクタンス素子 |
| JPH0582736A (ja) * | 1991-07-15 | 1993-04-02 | Matsushita Electric Ind Co Ltd | インダクタ |
| US5336921A (en) * | 1992-01-27 | 1994-08-09 | Motorola, Inc. | Vertical trench inductor |
| JPH07183458A (ja) * | 1993-12-24 | 1995-07-21 | Toshiba Corp | 半導体装置 |
| JPH09213894A (ja) * | 1996-02-06 | 1997-08-15 | Nippon Telegr & Teleph Corp <Ntt> | 平滑回路素子 |
| US5852866A (en) * | 1996-04-04 | 1998-12-29 | Robert Bosch Gmbh | Process for producing microcoils and microtransformers |
| US5793272A (en) | 1996-08-23 | 1998-08-11 | International Business Machines Corporation | Integrated circuit toroidal inductor |
| JP3580054B2 (ja) * | 1996-10-29 | 2004-10-20 | 富士電機デバイステクノロジー株式会社 | 薄膜磁気素子およびその製造方法 |
| US6083802A (en) * | 1998-12-31 | 2000-07-04 | Winbond Electronics Corporation | Method for forming an inductor |
| US6835576B2 (en) * | 2000-05-02 | 2004-12-28 | Fuji Electric Co., Ltd. | Magnetic thin film, a magnetic component that uses this magnetic thin film, manufacturing methods for the same, and a power conversion device |
| JP2002043520A (ja) * | 2000-07-19 | 2002-02-08 | Sony Corp | 半導体装置及びその製造方法 |
| US6667536B2 (en) * | 2001-06-28 | 2003-12-23 | Agere Systems Inc. | Thin film multi-layer high Q transformer formed in a semiconductor substrate |
| US6639298B2 (en) * | 2001-06-28 | 2003-10-28 | Agere Systems Inc. | Multi-layer inductor formed in a semiconductor substrate |
| US7202152B2 (en) * | 2002-10-24 | 2007-04-10 | Davies Robert B | Semiconductor device with inductive component and method of making |
| US7132297B2 (en) * | 2002-05-07 | 2006-11-07 | Agere Systems Inc. | Multi-layer inductor formed in a semiconductor substrate and having a core of ferromagnetic material |
| JP2004311504A (ja) * | 2003-04-02 | 2004-11-04 | Renesas Technology Corp | 半導体装置およびその製造方法 |
| JP4904813B2 (ja) * | 2003-06-16 | 2012-03-28 | 日本電気株式会社 | 半導体デバイスおよびその製造方法 |
| US7262680B2 (en) | 2004-02-27 | 2007-08-28 | Illinois Institute Of Technology | Compact inductor with stacked via magnetic cores for integrated circuits |
| US7462317B2 (en) | 2004-11-10 | 2008-12-09 | Enpirion, Inc. | Method of manufacturing an encapsulated package for a magnetic device |
| JP2006319094A (ja) * | 2005-05-12 | 2006-11-24 | Fujikura Ltd | 半導体装置およびその製造方法 |
| JP2006324509A (ja) * | 2005-05-19 | 2006-11-30 | Fujikura Ltd | 半導体装置およびその製造方法 |
| JP2006351686A (ja) * | 2005-06-14 | 2006-12-28 | Seiko Epson Corp | 半導体装置 |
| US7468899B1 (en) | 2007-01-09 | 2008-12-23 | National Semiconductor Corporation | Apparatus and method for wafer level fabrication of high value inductors on semiconductor integrated circuits |
| US7936246B2 (en) | 2007-10-09 | 2011-05-03 | National Semiconductor Corporation | On-chip inductor for high current applications |
| US7584533B2 (en) | 2007-10-10 | 2009-09-08 | National Semiconductor Corporation | Method of fabricating an inductor structure on an integrated circuit structure |
| US20090140383A1 (en) | 2007-11-29 | 2009-06-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of creating spiral inductor having high q value |
| US20090160592A1 (en) | 2007-12-20 | 2009-06-25 | Hopper Peter J | Helical core on-chip power inductor |
| DE112009000686T5 (de) * | 2008-03-24 | 2011-02-17 | ASIC Advantage Inc., Sunnyvale | Halbleiterpackage mit eingebetteter magnetischer Komponente und Verfahren zur Herstellung |
| US8044755B2 (en) | 2008-04-09 | 2011-10-25 | National Semiconductor Corporation | MEMS power inductor |
| US7705411B2 (en) | 2008-04-09 | 2010-04-27 | National Semiconductor Corporation | MEMS-topped integrated circuit with a stress relief layer |
| US7901981B2 (en) | 2009-02-20 | 2011-03-08 | National Semiconductor Corporation | Integrated circuit micro-module |
| US7902661B2 (en) | 2009-02-20 | 2011-03-08 | National Semiconductor Corporation | Integrated circuit micro-module |
| US7901984B2 (en) | 2009-02-20 | 2011-03-08 | National Semiconductor Corporation | Integrated circuit micro-module |
| US7898068B2 (en) | 2009-02-20 | 2011-03-01 | National Semiconductor Corporation | Integrated circuit micro-module |
| US7843056B2 (en) | 2009-02-20 | 2010-11-30 | National Semiconductor Corporation | Integrated circuit micro-module |
| US7842544B2 (en) | 2009-02-20 | 2010-11-30 | National Semiconductor Corporation | Integrated circuit micro-module |
-
2010
- 2010-06-16 US US12/816,788 patent/US8410576B2/en active Active
-
2011
- 2011-05-30 WO PCT/US2011/038483 patent/WO2011159458A2/en not_active Ceased
- 2011-05-30 JP JP2013515362A patent/JP5783620B2/ja active Active
- 2011-05-30 EP EP11796148.2A patent/EP2583287B1/en active Active
- 2011-05-30 CN CN201180028266.1A patent/CN102934180B/zh active Active
- 2011-06-14 TW TW100120674A patent/TWI549279B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| WO2011159458A2 (en) | 2011-12-22 |
| CN102934180B (zh) | 2016-01-20 |
| EP2583287A4 (en) | 2017-11-15 |
| EP2583287B1 (en) | 2021-03-17 |
| JP2013535107A (ja) | 2013-09-09 |
| US8410576B2 (en) | 2013-04-02 |
| US20110310579A1 (en) | 2011-12-22 |
| WO2011159458A3 (en) | 2012-04-05 |
| EP2583287A2 (en) | 2013-04-24 |
| CN102934180A (zh) | 2013-02-13 |
| TW201222804A (en) | 2012-06-01 |
| TWI549279B (zh) | 2016-09-11 |
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