JP5721962B2 - Soi基板の作製方法 - Google Patents
Soi基板の作製方法 Download PDFInfo
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- JP5721962B2 JP5721962B2 JP2010093842A JP2010093842A JP5721962B2 JP 5721962 B2 JP5721962 B2 JP 5721962B2 JP 2010093842 A JP2010093842 A JP 2010093842A JP 2010093842 A JP2010093842 A JP 2010093842A JP 5721962 B2 JP5721962 B2 JP 5721962B2
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- 239000000758 substrate Substances 0.000 title claims description 340
- 238000000034 method Methods 0.000 title claims description 79
- 238000004519 manufacturing process Methods 0.000 title claims description 46
- 238000010438 heat treatment Methods 0.000 claims description 112
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 59
- 229910052760 oxygen Inorganic materials 0.000 claims description 59
- 239000001301 oxygen Substances 0.000 claims description 59
- 239000004065 semiconductor Substances 0.000 claims description 47
- 150000002500 ions Chemical class 0.000 claims description 40
- 239000012298 atmosphere Substances 0.000 claims description 39
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 38
- 229910052757 nitrogen Inorganic materials 0.000 claims description 19
- 230000001678 irradiating effect Effects 0.000 claims description 14
- 239000012300 argon atmosphere Substances 0.000 claims description 9
- 239000000460 chlorine Substances 0.000 claims description 8
- 238000005498 polishing Methods 0.000 claims description 8
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 7
- 229910052801 chlorine Inorganic materials 0.000 claims description 7
- 239000010410 layer Substances 0.000 description 96
- 230000008569 process Effects 0.000 description 47
- 239000007789 gas Substances 0.000 description 39
- 238000011282 treatment Methods 0.000 description 36
- 230000007547 defect Effects 0.000 description 29
- 238000000926 separation method Methods 0.000 description 27
- 230000008929 regeneration Effects 0.000 description 25
- 238000011069 regeneration method Methods 0.000 description 25
- 239000012535 impurity Substances 0.000 description 22
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 17
- 229910052710 silicon Inorganic materials 0.000 description 17
- 239000010703 silicon Substances 0.000 description 17
- 238000004381 surface treatment Methods 0.000 description 16
- 239000011521 glass Substances 0.000 description 15
- 239000001257 hydrogen Substances 0.000 description 14
- 229910052739 hydrogen Inorganic materials 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 12
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 12
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 11
- 238000009832 plasma treatment Methods 0.000 description 11
- 125000004429 atom Chemical group 0.000 description 10
- 238000005530 etching Methods 0.000 description 10
- 239000000126 substance Substances 0.000 description 10
- 238000005468 ion implantation Methods 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 229910052581 Si3N4 Inorganic materials 0.000 description 7
- 239000013078 crystal Substances 0.000 description 7
- 230000003647 oxidation Effects 0.000 description 7
- 238000007254 oxidation reaction Methods 0.000 description 7
- 230000009467 reduction Effects 0.000 description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 7
- 229910052786 argon Inorganic materials 0.000 description 6
- 229910052736 halogen Inorganic materials 0.000 description 6
- 150000002367 halogens Chemical class 0.000 description 6
- 238000010884 ion-beam technique Methods 0.000 description 6
- 229910052814 silicon oxide Inorganic materials 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 150000001768 cations Chemical class 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 4
- 230000005283 ground state Effects 0.000 description 4
- 125000004430 oxygen atom Chemical group O* 0.000 description 4
- 238000007517 polishing process Methods 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 125000001309 chloro group Chemical group Cl* 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 229910001385 heavy metal Inorganic materials 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 238000009616 inductively coupled plasma Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 229910021332 silicide Inorganic materials 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 239000005407 aluminoborosilicate glass Substances 0.000 description 2
- 239000005354 aluminosilicate glass Substances 0.000 description 2
- 229910052788 barium Inorganic materials 0.000 description 2
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 229910052800 carbon group element Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000001678 elastic recoil detection analysis Methods 0.000 description 2
- 230000005281 excited state Effects 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 150000002366 halogen compounds Chemical class 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- -1 hydrogen ions Chemical class 0.000 description 2
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 230000001172 regenerating effect Effects 0.000 description 2
- 238000005001 rutherford backscattering spectroscopy Methods 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- CSSYLTMKCUORDA-UHFFFAOYSA-N barium(2+);oxygen(2-) Chemical class [O-2].[Ba+2] CSSYLTMKCUORDA-UHFFFAOYSA-N 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 238000005247 gettering Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000011946 reduction process Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
- H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02488—Insulating materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Recrystallisation Techniques (AREA)
- Thin Film Transistor (AREA)
- Element Separation (AREA)
Description
本実施の形態では、SOI基板の作製方法の一例に関して図面を参照して説明する。具体的には、図1を参照してSOI基板の作製工程について説明し、図2および図3を参照して<再生ボンド基板の形成工程>について説明する。
まず、ベース基板100とボンド基板110とを準備する(図1(A)、図1(B)参照)。
次に、分離後のボンド基板200の再生工程について図2および図3を参照して説明する。
上記のようにして形成された再生ボンド基板136は、通常のボンド基板と同様に用いることができる。すなわち、再生ボンド基板136を図1におけるボンド基板110として用いてSOI基板を作製することができる。これにより、SOI基板の製造コストを抑制することができる。詳細については、上記<SOI基板の作製工程>を参照すればよい。
本実施の形態では、SOI基板の作製方法の別の一例に関して説明する。
<SOI基板の作製工程>
本実施の形態では、SOI基板の作製方法の一例について、図面を参照して説明する。なお、上記実施の形態1及び2と重複する部分の説明は省略し、異なる点について詳細に説明する。
はじめに、図4を参照して、第1の態様に係る作製方法について説明する。
・加速電圧 10kV以上100kV以下(好ましくは30kV以上80kV以下)
・ドーズ量 1×1016/cm2以上4×1016/cm2以下
・ビーム電流密度 2μA/cm2以上(好ましくは5μA/cm2以上、より好ましくは10μA/cm2以上)
次に、図5を参照して、第2の態様に係る作製方法を説明する。第2の態様と第1の態様の相違は、ベース基板に絶縁層101を形成する点にある。よって、以下ではこの点について主に説明する。
O2+hν(λ1nm)→O(3P)+O(3P) ・・・ (1)
O(3P)+O2→O3 ・・・ (2)
O3+hν(λ2nm)→O(1D)+O2 ・・・ (3)
O2+hν(λ3nm)→O(1D)+O(3P) ・・・ (4)
O(3P)+O2→O3 ・・・ (5)
O3+hν(λ3nm)→O(1D)+O2 ・・・ (6)
101 絶縁層
110 ボンド基板
112 脆化領域
114 絶縁層
116 半導体層
118 半導体層
130 金属不純物
132 シリサイド
134 酸化膜
136 再生ボンド基板
200 ボンド基板
Claims (5)
- ボンド基板にイオンを照射して、前記ボンド基板中に脆化領域を形成する第1の工程と、
絶縁層を介して前記ボンド基板とベース基板とを貼り合わせる第2の工程と、
前記脆化領域において前記ボンド基板を分離して、前記ベース基板上に前記絶縁層を介して半導体層を形成する第3の工程と、
前記第3の工程後の前記ボンド基板に対して、アルゴン雰囲気において1150℃以上1300℃以下、30分以上960分以下の第1の熱処理を施した後に、酸素及び窒素の混合雰囲気において第2の熱処理を施すことにより再生ボンド基板を形成する第4の工程と、を有し、
前記第2の熱処理における酸素濃度を5体積%未満とし、
前記再生ボンド基板を前記第1の工程におけるボンド基板として再び使用し、
前記イオンは、H+、H2 +、及びH3 +を含み、前記H+、前記H2 +、及び前記H3 +の総量におけるH3 +の割合は、70%以上であるSOI基板の作製方法。 - 請求項1において、
前記第1の工程から前記第3の工程をn回(n≧2)繰り返した後、前記第4の工程を行うSOI基板の作製方法。 - 請求項1または請求項2において、
前記第2の熱処理において前記再生ボンド基板表面に形成された酸化膜を、ベース基板との貼り合わせの際の絶縁層として用いるSOI基板の作製方法。 - 請求項1乃至請求項3のいずれか一において、
前記第3の工程と前記第4の工程の間に、前記脆化領域で分離された前記ボンド基板の表面を研磨する工程を有するSOI基板の作製方法。 - 請求項1乃至請求項4のいずれか一において、
前記第2の熱処理の雰囲気は、酸素及び窒素に加えて塩素を含有するSOI基板の作製方法。
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JP2010093842A JP5721962B2 (ja) | 2009-04-22 | 2010-04-15 | Soi基板の作製方法 |
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JP2009104203 | 2009-04-22 | ||
JP2009104203 | 2009-04-22 | ||
JP2010093842A JP5721962B2 (ja) | 2009-04-22 | 2010-04-15 | Soi基板の作製方法 |
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JP2010272851A JP2010272851A (ja) | 2010-12-02 |
JP2010272851A5 JP2010272851A5 (ja) | 2013-05-16 |
JP5721962B2 true JP5721962B2 (ja) | 2015-05-20 |
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JP2010093842A Expired - Fee Related JP5721962B2 (ja) | 2009-04-22 | 2010-04-15 | Soi基板の作製方法 |
Country Status (5)
Country | Link |
---|---|
US (2) | US8168481B2 (ja) |
JP (1) | JP5721962B2 (ja) |
KR (1) | KR101752350B1 (ja) |
CN (1) | CN101872740B (ja) |
SG (2) | SG183670A1 (ja) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8318588B2 (en) * | 2009-08-25 | 2012-11-27 | Semiconductor Energy Laboratory Co., Ltd. | Method for reprocessing semiconductor substrate, method for manufacturing reprocessed semiconductor substrate, and method for manufacturing SOI substrate |
WO2011043178A1 (en) * | 2009-10-09 | 2011-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Reprocessing method of semiconductor substrate, manufacturing method of reprocessed semiconductor substrate, and manufacturing method of soi substrate |
US9299556B2 (en) * | 2010-12-27 | 2016-03-29 | Shanghai Simgui Technology Co. Ltd. | Method for preparing semiconductor substrate with insulating buried layer gettering process |
US8735263B2 (en) | 2011-01-21 | 2014-05-27 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing SOI substrate |
US9123529B2 (en) | 2011-06-21 | 2015-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for reprocessing semiconductor substrate, method for manufacturing reprocessed semiconductor substrate, and method for manufacturing SOI substrate |
JP2013093434A (ja) * | 2011-10-26 | 2013-05-16 | Semiconductor Energy Lab Co Ltd | 半導体基板の解析方法 |
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SG183670A1 (en) | 2012-09-27 |
CN101872740B (zh) | 2014-05-07 |
KR20100116536A (ko) | 2010-11-01 |
JP2010272851A (ja) | 2010-12-02 |
US8486772B2 (en) | 2013-07-16 |
SG166060A1 (en) | 2010-11-29 |
US8168481B2 (en) | 2012-05-01 |
KR101752350B1 (ko) | 2017-06-29 |
US20100273310A1 (en) | 2010-10-28 |
US20120208348A1 (en) | 2012-08-16 |
CN101872740A (zh) | 2010-10-27 |
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