JP5715570B2 - 被覆工具 - Google Patents
被覆工具 Download PDFInfo
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- JP5715570B2 JP5715570B2 JP2011539411A JP2011539411A JP5715570B2 JP 5715570 B2 JP5715570 B2 JP 5715570B2 JP 2011539411 A JP2011539411 A JP 2011539411A JP 2011539411 A JP2011539411 A JP 2011539411A JP 5715570 B2 JP5715570 B2 JP 5715570B2
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 82
- 150000002736 metal compounds Chemical class 0.000 claims description 74
- 239000002245 particle Substances 0.000 claims description 44
- 239000011248 coating agent Substances 0.000 claims description 34
- 238000000576 coating method Methods 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 25
- 239000013078 crystal Substances 0.000 claims description 23
- 239000000463 material Substances 0.000 claims description 19
- 150000004767 nitrides Chemical class 0.000 claims description 18
- 229910052782 aluminium Inorganic materials 0.000 claims description 13
- 230000008520 organization Effects 0.000 claims description 13
- 229910052739 hydrogen Inorganic materials 0.000 claims description 12
- 229910052719 titanium Inorganic materials 0.000 claims description 12
- 239000011817 metal compound particle Substances 0.000 claims description 11
- 239000002994 raw material Substances 0.000 claims description 11
- 239000000203 mixture Substances 0.000 claims description 10
- 238000005229 chemical vapour deposition Methods 0.000 claims description 9
- 229910052757 nitrogen Inorganic materials 0.000 claims description 7
- 229910052721 tungsten Inorganic materials 0.000 claims description 7
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims description 6
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 6
- 229910052715 tantalum Inorganic materials 0.000 claims description 6
- 229910052804 chromium Inorganic materials 0.000 claims description 5
- 229910052750 molybdenum Inorganic materials 0.000 claims description 5
- 229910052758 niobium Inorganic materials 0.000 claims description 5
- 229910052720 vanadium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052735 hafnium Inorganic materials 0.000 claims description 4
- 239000006104 solid solution Substances 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 230000003647 oxidation Effects 0.000 claims description 3
- 238000007254 oxidation reaction Methods 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 239000007789 gas Substances 0.000 claims 2
- 238000002441 X-ray diffraction Methods 0.000 description 29
- 238000005520 cutting process Methods 0.000 description 26
- 230000007423 decrease Effects 0.000 description 11
- 238000000034 method Methods 0.000 description 9
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 8
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 7
- 238000012360 testing method Methods 0.000 description 7
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 238000005299 abrasion Methods 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 239000011195 cermet Substances 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 102000002262 Thromboplastin Human genes 0.000 description 2
- 108010000499 Thromboplastin Proteins 0.000 description 2
- 239000002313 adhesive film Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 230000006911 nucleation Effects 0.000 description 2
- 238000010899 nucleation Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical class O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001722 carbon compounds Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003610 charcoal Substances 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000002447 crystallographic data Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000009837 dry grinding Methods 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 102220259718 rs34120878 Human genes 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 238000001238 wet grinding Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T407/00—Cutters, for shaping
- Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Chemical Vapour Deposition (AREA)
Description
、
但し、I(hkl)=(hkl)反射の測定強度、Io(hkl)=ASTM標準パワーパターン回折データの標準強度、n=反射の数、(hkl)反射は(012)、(104)、(110)、(113)、(024)、(116)である、ことを特徴とする被覆物体がある(例えば、特許文献1参照。)。しかし、この被覆物体は、耐チッピング性を要する加工、特に鋼の切削加工において十分な性能を示すことができないという問題がある。
1試料当たり5個のサンプルを用意し、ロックウェル硬度測定機を用いてサンプル表面にロックウェル圧子を印加荷重60kgfで押し込み、基材からの被膜の剥離を調べるという密着性評価試験を行なった。その結果を表10に示した。
切削速度:220m/min
切込み:2mm
送り:0.35mm/rev
切削形態:湿式(水溶性エマルジョン使用)
1回の切削時間:15min
試験回数:5回
Claims (15)
- 基材とその表面に被膜が被覆された被覆工具において、被膜の少なくとも1層がα型酸化アルミニウム膜であり、α型酸化アルミニウム膜の平均膜厚が0.5〜10μmであり、α型酸化アルミニウム膜内のα型酸化アルミニウム粒子の平均粒径が0.5〜1.5μmであり、以下の数1で表される、α型酸化アルミニウム膜の(012)面の組織化係数TCA(012)と、以下の数2で表される、α型酸化アルミニウム膜の(104)面の組織化係数TCA(104)が、TCA(104)/TCA(012)≧2.0を満足し、α型酸化アルミニウム膜が柱状晶であり、
基材とα型酸化アルミニウム膜との間にB1型金属化合物膜があり、B1型金属化合物膜内のB1型金属化合物粒子の平均粒径が0.15〜0.3μmであり、B1型金属化合物膜内のB1型金属化合物粒子の最大粒径が1.0μm以下であり、以下の数3で表される、B1型金属化合物膜の(422)面の組織化係数TCB(422)と、以下の数4で表される、B1型金属化合物膜の(311)面の組織化係数TCB(311)が、TCB(422)/TCB(311)≧1.5を満足し、
B1型金属化合物膜が柱状晶であることを特徴とする被覆工具。
- 被膜が、α型酸化アルミニウム膜単独、または、Ti、Zr、Hf、V、Nb、Ta、Cr、Mo、W、Al、Siの炭化物、窒化物、酸化物、炭窒化物、炭酸化物、窒酸化物、炭窒酸化物、ホウ化物およびこれらの相互固溶体の1種または2種以上の金属化合物膜とα型酸化アルミニウム膜とからなる請求項1に記載の被覆工具。
- TCA(104)/TCA(012)が4.0以上である請求項1または2に記載の被覆工具。
- TCA(104)/TCA(012)が6.0以上である請求項1または2に記載の被覆工具。
- B1型金属化合物膜がTiの炭窒化物からなる金属化合物膜である請求項1〜4のいずれか1項に記載の被覆工具。
- B1型金属化合物膜の平均膜厚が3μm〜20μmである請求項1〜5のいずれか1項に記載の被覆工具。
- 基材とB1型金属化合物膜との間に最下膜があり、最下膜が、Tiの窒化物、炭窒化物の1種または2種からなる金属化合物膜である請求項1〜6のいずれか1項に記載の被覆工具。
- 最下膜の平均膜厚が0.1μm〜1μmである請求項7に記載の被覆工具。
- B1型金属化合物膜とα型酸化アルミニウム膜との間に密着膜があり、密着膜が、Tiの炭酸化物、窒酸化物、炭窒酸化物、TiとAlとを含む炭酸化物、窒酸化物、炭窒酸化物の中の少なくとも1種からなる金属化合物膜である請求項1〜8のいずれか1項に記載の被覆工具。
- 密着膜が、TiCO、TiNO、TiCNO、TiAlCO、TiAlNO及びTiAlCNOから成る群より選択された少なくとも1種である請求項9に記載の被覆工具。
- 密着膜が、TiとAlとを含む炭酸化物、窒酸化物、炭窒酸化物の中の少なくとも1種からなる金属化合物膜である請求項9に記載の被覆工具。
- 密着膜の平均膜厚が0.3μm〜2μmである請求項9〜11のいずれか1に記載の被覆工具。
- α型酸化アルミニウム膜の表面に外膜が被覆され、外膜が、Tiの窒化物、炭窒化物の1種または2種からなる金属化合物膜である請求項1〜12のいずれか1項に記載の被覆工具。
- 外膜の平均膜厚が0.1μm〜2μmである請求項13に記載の被覆工具。
- α型酸化アルミニウム膜が、化学蒸着法により形成されたものであり、原料ガス組成がAlCl3:2.1〜5.0mol%、CO2:2.5〜4.0mol%、HCl:2.0〜3.0mol%、H2:残りとし、温度:990〜1000℃、圧力:60〜80hPaとする第1段階の被覆条件で形成された膜厚0.1〜0.3μmの被膜、および原料ガス組成がAlCl3:2.1〜5.0mol%、CO2:2.5〜4.0mol%、HCl:2.0〜3.0mol%、H2S:0.28〜0.45mol%、H2:残りとし、温度:990〜1000℃、圧力:60〜80hPaとする第2段階の被覆条件で形成された膜厚0.4〜9.9μmの被膜からなる請求項1〜14のいずれか1項に記載の被覆工具。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011539411A JP5715570B2 (ja) | 2009-11-06 | 2010-11-08 | 被覆工具 |
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US (1) | US8747990B2 (ja) |
EP (1) | EP2497590B1 (ja) |
JP (1) | JP5715570B2 (ja) |
KR (1) | KR101395625B1 (ja) |
CN (1) | CN102612417A (ja) |
WO (1) | WO2011055813A1 (ja) |
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US9886231B2 (en) | 2008-03-28 | 2018-02-06 | Kopin Corporation | Head worn wireless computer having high-resolution display suitable for use as a mobile internet device |
JP5768308B2 (ja) * | 2011-03-31 | 2015-08-26 | 住友電工ハードメタル株式会社 | 表面被覆切削工具 |
JP5710008B2 (ja) * | 2011-08-30 | 2015-04-30 | 京セラ株式会社 | 切削工具 |
DE102011053705A1 (de) * | 2011-09-16 | 2013-03-21 | Walter Ag | Schneideinsatz und Verfahren zu dessen Herstellung |
JP5907406B2 (ja) * | 2011-11-30 | 2016-04-26 | 三菱マテリアル株式会社 | 硬質被覆層が高速断続切削ですぐれた耐チッピング性を発揮する表面被覆切削工具 |
RU2493941C1 (ru) * | 2012-09-05 | 2013-09-27 | Нина Алексеевна Корюкина | Режущая пластина |
WO2014136755A1 (ja) * | 2013-03-04 | 2014-09-12 | 株式会社タンガロイ | 被覆切削工具 |
EP3008225B1 (en) * | 2013-06-14 | 2021-08-04 | Sandvik Intellectual Property AB | Coated cutting tool |
CN105916617B (zh) | 2014-01-27 | 2017-07-28 | 株式会社泰珂洛 | 涂层切削刀具 |
JP6419220B2 (ja) * | 2015-01-28 | 2018-11-07 | 京セラ株式会社 | 被覆工具 |
US10066277B2 (en) * | 2015-06-12 | 2018-09-04 | Tungaloy Corporation | Cemented carbide and coated cemented carbide |
KR101737709B1 (ko) * | 2015-12-29 | 2017-05-18 | 한국야금 주식회사 | 절삭공구용 경질피막 |
JP6229911B1 (ja) * | 2016-10-19 | 2017-11-15 | 株式会社タンガロイ | 被覆切削工具 |
JP6210346B1 (ja) * | 2016-11-02 | 2017-10-11 | 株式会社タンガロイ | 被覆切削工具 |
JP6210347B1 (ja) * | 2016-11-04 | 2017-10-11 | 株式会社タンガロイ | 被覆切削工具 |
RU2760426C2 (ru) * | 2017-04-07 | 2021-11-25 | Сандвик Интеллекчуал Проперти Аб | Снабженный покрытием режущий инструмент |
DE112018003209T5 (de) * | 2017-06-21 | 2020-03-19 | Kyocera Corporation | Beschichtetes Werkzeug, Schneidwerkzeug und Herstellungsverfahren eines maschinell bearbeiteten Produkts |
JP6519936B1 (ja) * | 2018-03-16 | 2019-05-29 | 住友電工ハードメタル株式会社 | 表面被覆切削工具及びその製造方法 |
WO2019176201A1 (ja) * | 2018-03-16 | 2019-09-19 | 住友電工ハードメタル株式会社 | 表面被覆切削工具及びその製造方法 |
EP3766614A4 (en) * | 2018-03-16 | 2021-07-14 | Sumitomo Electric Hardmetal Corp. | SURFACE-COATED CUTTING TOOL AND MANUFACTURING METHOD FOR IT |
JP6519935B1 (ja) * | 2018-03-16 | 2019-05-29 | 住友電工ハードメタル株式会社 | 表面被覆切削工具及びその製造方法 |
CN110468387A (zh) * | 2019-09-19 | 2019-11-19 | 成都工具研究所有限公司 | 双结构涂层刀具 |
JP7141601B2 (ja) * | 2019-12-19 | 2022-09-26 | 株式会社タンガロイ | 被覆切削工具 |
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- 2010-11-08 CN CN2010800500638A patent/CN102612417A/zh active Pending
- 2010-11-08 KR KR1020127011761A patent/KR101395625B1/ko active IP Right Grant
- 2010-11-08 EP EP10828371.4A patent/EP2497590B1/en not_active Revoked
- 2010-11-08 WO PCT/JP2010/069791 patent/WO2011055813A1/ja active Application Filing
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Also Published As
Publication number | Publication date |
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KR101395625B1 (ko) | 2014-05-16 |
KR20120073322A (ko) | 2012-07-04 |
CN102612417A (zh) | 2012-07-25 |
EP2497590A4 (en) | 2013-12-11 |
US8747990B2 (en) | 2014-06-10 |
EP2497590A1 (en) | 2012-09-12 |
US20120225247A1 (en) | 2012-09-06 |
WO2011055813A1 (ja) | 2011-05-12 |
EP2497590B1 (en) | 2017-03-01 |
JPWO2011055813A1 (ja) | 2013-03-28 |
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