JP5666417B2 - 液滴吐出ヘッドの製造方法 - Google Patents

液滴吐出ヘッドの製造方法 Download PDF

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Publication number
JP5666417B2
JP5666417B2 JP2011244690A JP2011244690A JP5666417B2 JP 5666417 B2 JP5666417 B2 JP 5666417B2 JP 2011244690 A JP2011244690 A JP 2011244690A JP 2011244690 A JP2011244690 A JP 2011244690A JP 5666417 B2 JP5666417 B2 JP 5666417B2
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JP
Japan
Prior art keywords
nozzle
protective film
film
water
repellent film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011244690A
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English (en)
Japanese (ja)
Other versions
JP2013099880A (ja
JP2013099880A5 (enExample
Inventor
靖和 二瓶
靖和 二瓶
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
Original Assignee
Fujifilm Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Priority to JP2011244690A priority Critical patent/JP5666417B2/ja
Priority to US13/665,460 priority patent/US9090064B2/en
Priority to CN201210439841.3A priority patent/CN103085481B/zh
Publication of JP2013099880A publication Critical patent/JP2013099880A/ja
Publication of JP2013099880A5 publication Critical patent/JP2013099880A5/ja
Application granted granted Critical
Publication of JP5666417B2 publication Critical patent/JP5666417B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1606—Coating the nozzle area or the ink chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2011244690A 2011-11-08 2011-11-08 液滴吐出ヘッドの製造方法 Expired - Fee Related JP5666417B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011244690A JP5666417B2 (ja) 2011-11-08 2011-11-08 液滴吐出ヘッドの製造方法
US13/665,460 US9090064B2 (en) 2011-11-08 2012-10-31 Method of manufacturing liquid droplet ejection head
CN201210439841.3A CN103085481B (zh) 2011-11-08 2012-11-06 液滴喷出头的制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011244690A JP5666417B2 (ja) 2011-11-08 2011-11-08 液滴吐出ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2013099880A JP2013099880A (ja) 2013-05-23
JP2013099880A5 JP2013099880A5 (enExample) 2013-10-24
JP5666417B2 true JP5666417B2 (ja) 2015-02-12

Family

ID=48198828

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011244690A Expired - Fee Related JP5666417B2 (ja) 2011-11-08 2011-11-08 液滴吐出ヘッドの製造方法

Country Status (3)

Country Link
US (1) US9090064B2 (enExample)
JP (1) JP5666417B2 (enExample)
CN (1) CN103085481B (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5350424B2 (ja) * 2011-03-24 2013-11-27 東京エレクトロン株式会社 表面処理方法
JP5939777B2 (ja) * 2011-12-05 2016-06-22 キヤノン株式会社 インクジェット記録ヘッドの製造方法
CN104228337B (zh) * 2013-06-20 2017-02-08 珠海赛纳打印科技股份有限公司 液体喷射头和液体喷射装置
US9919526B2 (en) * 2013-11-29 2018-03-20 Canon Kabushiki Kaisha Method for manufacturing liquid discharge head
CN104439919B (zh) * 2014-10-23 2017-07-07 山东大学 利用低熔点合金辅助加工薄壁挠性元件的方法
JPWO2018110034A1 (ja) * 2016-12-16 2019-10-24 コニカミノルタ株式会社 インクジェットヘッド、インクジェットヘッドの製造方法及びインクジェット記録装置
JP6878157B2 (ja) * 2017-06-09 2021-05-26 富士フイルム株式会社 液滴吐出ヘッドの製造方法、画像形成装置の製造方法、液滴吐出ヘッド及び画像形成装置
JP6953999B2 (ja) * 2017-10-26 2021-10-27 東京エレクトロン株式会社 半導体装置の製造方法及び基板処理装置
KR102631793B1 (ko) * 2018-11-08 2024-02-01 삼성전자주식회사 약액 공급 구조물 및 이를 구비하는 현상장치
CN109701471A (zh) * 2019-02-23 2019-05-03 刘桢炀 一种新型化学法制备纳米材料的方法及系统
CN111152559B (zh) * 2019-02-28 2021-10-12 广东聚华印刷显示技术有限公司 喷墨打印喷嘴、喷墨打印头、喷墨打印装置及显示面板的制备方法
EP4129692B1 (en) 2020-03-30 2025-03-12 FUJIFILM Corporation Liquid discharge structure, liquid discharge head, and liquid discharge apparatus
EP4212343B1 (en) * 2020-09-09 2025-03-19 Konica Minolta, Inc. Inkjet head, production method for inkjet head, and inkjet-recording device
JP2023144937A (ja) * 2022-03-28 2023-10-11 東芝テック株式会社 液体吐出ヘッド

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0654405B2 (ja) * 1986-07-01 1994-07-20 光 竹内 定着用ローラーの製造方法
JP2980451B2 (ja) * 1992-04-22 1999-11-22 キヤノン株式会社 インクジェット記録ヘッド、その製造方法、及びインクジェット記録ヘッドを備えた記録装置
JPH11138824A (ja) * 1997-11-13 1999-05-25 Canon Inc インクジェットヘッドの成形方法
JP4374811B2 (ja) * 2001-08-24 2009-12-02 リコープリンティングシステムズ株式会社 インクジェットプリンタ用ノズルプレートの製造方法
JP4424954B2 (ja) * 2003-09-24 2010-03-03 富士フイルム株式会社 インクジェット記録ヘッド及びインクジェット記録装置
JP2006027163A (ja) * 2004-07-20 2006-02-02 Konica Minolta Photo Imaging Inc インクジェット記録媒体の製造方法
JP2007261070A (ja) * 2006-03-28 2007-10-11 Seiko Epson Corp ノズル形成基板の製造方法及びノズル形成基板
JP2008207399A (ja) * 2007-02-23 2008-09-11 Fujifilm Corp 液体吐出ヘッド及び液体吐出装置並びに液体吐出ヘッドの製造方法
JP4957896B2 (ja) 2007-03-13 2012-06-20 セイコーエプソン株式会社 ノズル形成部材の製造方法及び液体噴射ヘッドの製造方法並びに液体噴射ヘッドユニットの製造方法
WO2010051272A1 (en) * 2008-10-30 2010-05-06 Fujifilm Corporation Non-wetting coating on a fluid ejector
US8262200B2 (en) 2009-09-15 2012-09-11 Fujifilm Corporation Non-wetting coating on a fluid ejector

Also Published As

Publication number Publication date
US20130111753A1 (en) 2013-05-09
CN103085481B (zh) 2016-06-08
US9090064B2 (en) 2015-07-28
JP2013099880A (ja) 2013-05-23
CN103085481A (zh) 2013-05-08

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