JP6953999B2 - 半導体装置の製造方法及び基板処理装置 - Google Patents
半導体装置の製造方法及び基板処理装置 Download PDFInfo
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- JP6953999B2 JP6953999B2 JP2017207428A JP2017207428A JP6953999B2 JP 6953999 B2 JP6953999 B2 JP 6953999B2 JP 2017207428 A JP2017207428 A JP 2017207428A JP 2017207428 A JP2017207428 A JP 2017207428A JP 6953999 B2 JP6953999 B2 JP 6953999B2
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Description
次いで、前記保護材が形成された前記基板に対して前記処理を行う工程と、
続いて、酸素濃度が50ppm以下の雰囲気である低酸素雰囲気において前記基板を加熱して前記重合体を解重合して前記保護材を除去する工程と、
を含むことを特徴とする。
前記処理容器内に酸素濃度が50ppm以下の雰囲気である低酸素雰囲気を形成する低酸素雰囲気形成部と、
前記低酸素雰囲気にて前記処理容器内の基板を加熱し、前記重合体を解重合して前記保護材を除去する加熱部と、
を備えたことを特徴とする。
H6XDI及びH6XDAを90℃に加熱した基板に供給した後、当該基板を250℃で5分加熱することで、ポリ尿素膜を形成した。このポリ尿素膜の各部における膜厚の平均値は500nmであった。評価試験1−1として、重量が5mgである上記のポリ尿素膜が形成された基板が載置される室内に、200mL/分でN2ガスを供給し、室内の酸素濃度を50ppm以下の窒素雰囲気とした。そしてこのN2ガス雰囲気中で基板を加熱し、当該基板の温度が室温から上昇して1000℃になるように、10℃/分の昇温速度で上昇させた。この昇温中の基板の重量と、基板の発熱量とを計測した。また、評価試験1−2として、N2ガスの代わりに空気を、室内に200mL/分で供給したことを除いては評価試験1−1と同様の試験を行った。つまり、評価試験1−2は評価試験1−1よりも酸素濃度が高い雰囲気で基板の加熱を行っている。また、評価試験1−1は低酸素雰囲気で基板の加熱を行っている。
10 制御部
14 電極膜
15 保護膜
19 コンタクトホール
3 塗布装置
4 成膜装置
5 エッチング装置
52 排気機構
6 縦型熱処理装置
94 低誘電率膜
95 孔部
96 保護材
Claims (6)
- 半導体装置製造用の基板の表面に重合用の原料を供給し、当該基板に設けられる保護すべき被保護層を当該基板に行われる処理に対して保護するための、尿素結合を有する重合体により構成される保護材を形成する工程と、
次いで、前記保護材が形成された前記基板に対して前記処理を行う工程と、
続いて、酸素濃度が50ppm以下の雰囲気である低酸素雰囲気において前記基板を加熱して前記重合体を解重合して前記保護材を除去する工程と、
を含むことを特徴とする半導体装置の製造方法。 - 前記保護材を除去する工程は、前記基板に保護材が残留しないように300℃よりも高い温度に加熱する工程を含む請求項1記載の半導体装置の製造方法。
- 前記保護材は、前記被保護層の上側に形成される犠牲膜であることを特徴とする請求項1または2記載の半導体装置の製造方法。
- 前記被保護層は半導体装置の導電路を構成する金属膜であり、
前記保護材は当該金属膜に積層されて形成されることを特徴とする請求項3記載の半導体装置の製造方法。 - 前記被保護層は多孔質体であり、前記保護材は多孔質体に埋め込まれて形成されることを特徴とする請求項1または2記載の半導体装置の製造方法。
- 保護すべき被保護層と、基板に行われる処理に対して前記被保護層を保護するための尿素結合を有する重合体により構成される保護材とが形成された半導体装置製造用の基板を格納する処理容器と、
前記処理容器内に酸素濃度が50ppm以下の雰囲気である低酸素雰囲気を形成する低酸素雰囲気形成部と、
前記低酸素雰囲気にて前記処理容器内の基板を加熱し、前記重合体を解重合して前記保護材を除去する加熱部と、
を備えたことを特徴とする基板処理装置。
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