CN103085481B - 液滴喷出头的制造方法 - Google Patents
液滴喷出头的制造方法 Download PDFInfo
- Publication number
- CN103085481B CN103085481B CN201210439841.3A CN201210439841A CN103085481B CN 103085481 B CN103085481 B CN 103085481B CN 201210439841 A CN201210439841 A CN 201210439841A CN 103085481 B CN103085481 B CN 103085481B
- Authority
- CN
- China
- Prior art keywords
- nozzle
- diaphragm
- hydrophobic membrane
- jetting head
- manufacture method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims abstract description 64
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 34
- 230000002209 hydrophobic effect Effects 0.000 claims abstract description 101
- 239000012528 membrane Substances 0.000 claims abstract description 90
- 239000000463 material Substances 0.000 claims abstract description 45
- 239000000758 substrate Substances 0.000 claims abstract description 25
- -1 polysiloxanes Polymers 0.000 claims abstract description 23
- 239000002131 composite material Substances 0.000 claims abstract description 21
- 239000004568 cement Substances 0.000 claims abstract description 20
- 239000000203 mixture Substances 0.000 claims abstract description 19
- 229920001296 polysiloxane Polymers 0.000 claims abstract description 18
- 230000008569 process Effects 0.000 claims abstract description 14
- 230000001681 protective effect Effects 0.000 claims abstract description 11
- 230000001678 irradiating effect Effects 0.000 claims abstract description 10
- 239000000853 adhesive Substances 0.000 claims abstract description 6
- 230000001070 adhesive effect Effects 0.000 claims abstract description 6
- 239000007788 liquid Substances 0.000 claims description 20
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 16
- 229910000077 silane Inorganic materials 0.000 claims description 16
- 229910052731 fluorine Inorganic materials 0.000 claims description 10
- 239000011737 fluorine Substances 0.000 claims description 10
- 230000006837 decompression Effects 0.000 claims description 7
- 238000001704 evaporation Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 abstract description 20
- 239000000976 ink Substances 0.000 description 71
- 239000012530 fluid Substances 0.000 description 32
- 238000007667 floating Methods 0.000 description 20
- 238000005755 formation reaction Methods 0.000 description 18
- 238000001035 drying Methods 0.000 description 17
- 239000007921 spray Substances 0.000 description 12
- 239000007789 gas Substances 0.000 description 11
- 239000003795 chemical substances by application Substances 0.000 description 10
- 230000035611 feeding Effects 0.000 description 10
- 206010040844 Skin exfoliation Diseases 0.000 description 9
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 8
- 239000000049 pigment Substances 0.000 description 8
- 238000004040 coloring Methods 0.000 description 7
- 229910052736 halogen Inorganic materials 0.000 description 6
- 150000002367 halogens Chemical class 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 230000005499 meniscus Effects 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 238000005406 washing Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 210000000078 claw Anatomy 0.000 description 3
- 238000000280 densification Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229920005573 silicon-containing polymer Polymers 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 2
- 150000001336 alkenes Chemical class 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000003344 environmental pollutant Substances 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 231100000719 pollutant Toxicity 0.000 description 2
- 229920006267 polyester film Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- PLXMOAALOJOTIY-FPTXNFDTSA-N Aesculin Natural products OC[C@@H]1[C@@H](O)[C@H](O)[C@@H](O)[C@H](O)[C@H]1Oc2cc3C=CC(=O)Oc3cc2O PLXMOAALOJOTIY-FPTXNFDTSA-N 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 206010016322 Feeling abnormal Diseases 0.000 description 1
- 241000549556 Nanos Species 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000007774 anilox coating Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000010009 beating Methods 0.000 description 1
- 238000006664 bond formation reaction Methods 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000001687 destabilization Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000008394 flocculating agent Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- 238000003032 molecular docking Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 238000005011 time of flight secondary ion mass spectroscopy Methods 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/1433—Structure of nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1606—Coating the nozzle area or the ink chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-244690 | 2011-11-08 | ||
| JP2011244690A JP5666417B2 (ja) | 2011-11-08 | 2011-11-08 | 液滴吐出ヘッドの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103085481A CN103085481A (zh) | 2013-05-08 |
| CN103085481B true CN103085481B (zh) | 2016-06-08 |
Family
ID=48198828
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210439841.3A Expired - Fee Related CN103085481B (zh) | 2011-11-08 | 2012-11-06 | 液滴喷出头的制造方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9090064B2 (enExample) |
| JP (1) | JP5666417B2 (enExample) |
| CN (1) | CN103085481B (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5350424B2 (ja) * | 2011-03-24 | 2013-11-27 | 東京エレクトロン株式会社 | 表面処理方法 |
| JP5939777B2 (ja) * | 2011-12-05 | 2016-06-22 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
| CN104228337B (zh) * | 2013-06-20 | 2017-02-08 | 珠海赛纳打印科技股份有限公司 | 液体喷射头和液体喷射装置 |
| US9919526B2 (en) * | 2013-11-29 | 2018-03-20 | Canon Kabushiki Kaisha | Method for manufacturing liquid discharge head |
| CN104439919B (zh) * | 2014-10-23 | 2017-07-07 | 山东大学 | 利用低熔点合金辅助加工薄壁挠性元件的方法 |
| JPWO2018110034A1 (ja) * | 2016-12-16 | 2019-10-24 | コニカミノルタ株式会社 | インクジェットヘッド、インクジェットヘッドの製造方法及びインクジェット記録装置 |
| JP6878157B2 (ja) * | 2017-06-09 | 2021-05-26 | 富士フイルム株式会社 | 液滴吐出ヘッドの製造方法、画像形成装置の製造方法、液滴吐出ヘッド及び画像形成装置 |
| JP6953999B2 (ja) * | 2017-10-26 | 2021-10-27 | 東京エレクトロン株式会社 | 半導体装置の製造方法及び基板処理装置 |
| KR102631793B1 (ko) * | 2018-11-08 | 2024-02-01 | 삼성전자주식회사 | 약액 공급 구조물 및 이를 구비하는 현상장치 |
| CN109701471A (zh) * | 2019-02-23 | 2019-05-03 | 刘桢炀 | 一种新型化学法制备纳米材料的方法及系统 |
| CN111152559B (zh) * | 2019-02-28 | 2021-10-12 | 广东聚华印刷显示技术有限公司 | 喷墨打印喷嘴、喷墨打印头、喷墨打印装置及显示面板的制备方法 |
| EP4129692B1 (en) | 2020-03-30 | 2025-03-12 | FUJIFILM Corporation | Liquid discharge structure, liquid discharge head, and liquid discharge apparatus |
| EP4212343B1 (en) * | 2020-09-09 | 2025-03-19 | Konica Minolta, Inc. | Inkjet head, production method for inkjet head, and inkjet-recording device |
| JP2023144937A (ja) * | 2022-03-28 | 2023-10-11 | 東芝テック株式会社 | 液体吐出ヘッド |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0567101A2 (en) * | 1992-04-22 | 1993-10-27 | Canon Kabushiki Kaisha | Ink jet head, recording appartus provided with such a head, and method for manufacturing head |
| JPH11138824A (ja) * | 1997-11-13 | 1999-05-25 | Canon Inc | インクジェットヘッドの成形方法 |
| JP2003063014A (ja) * | 2001-08-24 | 2003-03-05 | Hitachi Koki Co Ltd | インクジェットプリンタ用ノズルプレートの製造方法 |
| JP2007261070A (ja) * | 2006-03-28 | 2007-10-11 | Seiko Epson Corp | ノズル形成基板の製造方法及びノズル形成基板 |
| JP2008207399A (ja) * | 2007-02-23 | 2008-09-11 | Fujifilm Corp | 液体吐出ヘッド及び液体吐出装置並びに液体吐出ヘッドの製造方法 |
| JP2008221653A (ja) * | 2007-03-13 | 2008-09-25 | Seiko Epson Corp | ノズル形成部材の製造方法及び液体噴射ヘッドの製造方法並びに液体噴射ヘッドユニットの製造方法 |
| CN102202900A (zh) * | 2008-10-30 | 2011-09-28 | 富士胶片株式会社 | 流体喷射器上的非湿润涂层 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0654405B2 (ja) * | 1986-07-01 | 1994-07-20 | 光 竹内 | 定着用ローラーの製造方法 |
| JP4424954B2 (ja) * | 2003-09-24 | 2010-03-03 | 富士フイルム株式会社 | インクジェット記録ヘッド及びインクジェット記録装置 |
| JP2006027163A (ja) * | 2004-07-20 | 2006-02-02 | Konica Minolta Photo Imaging Inc | インクジェット記録媒体の製造方法 |
| US8262200B2 (en) | 2009-09-15 | 2012-09-11 | Fujifilm Corporation | Non-wetting coating on a fluid ejector |
-
2011
- 2011-11-08 JP JP2011244690A patent/JP5666417B2/ja not_active Expired - Fee Related
-
2012
- 2012-10-31 US US13/665,460 patent/US9090064B2/en not_active Expired - Fee Related
- 2012-11-06 CN CN201210439841.3A patent/CN103085481B/zh not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0567101A2 (en) * | 1992-04-22 | 1993-10-27 | Canon Kabushiki Kaisha | Ink jet head, recording appartus provided with such a head, and method for manufacturing head |
| JPH05293964A (ja) * | 1992-04-22 | 1993-11-09 | Canon Inc | インクジェット記録ヘッド、その製造方法、及びインクジェット記録ヘッドを備えた記録装置 |
| JPH11138824A (ja) * | 1997-11-13 | 1999-05-25 | Canon Inc | インクジェットヘッドの成形方法 |
| JP2003063014A (ja) * | 2001-08-24 | 2003-03-05 | Hitachi Koki Co Ltd | インクジェットプリンタ用ノズルプレートの製造方法 |
| JP2007261070A (ja) * | 2006-03-28 | 2007-10-11 | Seiko Epson Corp | ノズル形成基板の製造方法及びノズル形成基板 |
| JP2008207399A (ja) * | 2007-02-23 | 2008-09-11 | Fujifilm Corp | 液体吐出ヘッド及び液体吐出装置並びに液体吐出ヘッドの製造方法 |
| JP2008221653A (ja) * | 2007-03-13 | 2008-09-25 | Seiko Epson Corp | ノズル形成部材の製造方法及び液体噴射ヘッドの製造方法並びに液体噴射ヘッドユニットの製造方法 |
| CN102202900A (zh) * | 2008-10-30 | 2011-09-28 | 富士胶片株式会社 | 流体喷射器上的非湿润涂层 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20130111753A1 (en) | 2013-05-09 |
| US9090064B2 (en) | 2015-07-28 |
| JP5666417B2 (ja) | 2015-02-12 |
| JP2013099880A (ja) | 2013-05-23 |
| CN103085481A (zh) | 2013-05-08 |
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