JP5558714B2 - 半導体パッケージ - Google Patents

半導体パッケージ Download PDF

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Publication number
JP5558714B2
JP5558714B2 JP2008532378A JP2008532378A JP5558714B2 JP 5558714 B2 JP5558714 B2 JP 5558714B2 JP 2008532378 A JP2008532378 A JP 2008532378A JP 2008532378 A JP2008532378 A JP 2008532378A JP 5558714 B2 JP5558714 B2 JP 5558714B2
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Japan
Prior art keywords
power
electrode
bidirectional
semiconductor element
power supply
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Expired - Fee Related
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JP2008532378A
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English (en)
Japanese (ja)
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JP2009512999A (ja
JP2009512999A5 (de
Inventor
フー クンツォン
チャー チュワン
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インターナショナル レクティフィアー コーポレイション
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Publication of JP2009512999A5 publication Critical patent/JP2009512999A5/ja
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3121Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
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    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
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    • H01L23/42Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/433Auxiliary members in containers characterised by their shape, e.g. pistons
    • H01L23/4334Auxiliary members in encapsulations
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    • H01L24/84Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a strap connector
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    • H01L2224/293Base material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2224/29338Base material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
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    • H01L2224/401Disposition
    • H01L2224/40151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/40221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/40225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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    • H01L2924/0001Technical content checked by a classifier
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    • H01L2924/01029Copper [Cu]
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    • H01L2924/11Device type
    • H01L2924/13Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304Transistor
    • H01L2924/1306Field-effect transistor [FET]
    • H01L2924/13064High Electron Mobility Transistor [HEMT, HFET [heterostructure FET], MODFET]
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    • H01L2924/1304Transistor
    • H01L2924/1306Field-effect transistor [FET]
    • H01L2924/13091Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
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    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Lead Frames For Integrated Circuits (AREA)
  • Amplifiers (AREA)
JP2008532378A 2005-09-21 2006-09-21 半導体パッケージ Expired - Fee Related JP5558714B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US71924205P 2005-09-21 2005-09-21
US60/719,242 2005-09-21
PCT/US2006/036797 WO2007035862A2 (en) 2005-09-21 2006-09-21 Semiconductor package

Publications (3)

Publication Number Publication Date
JP2009512999A JP2009512999A (ja) 2009-03-26
JP2009512999A5 JP2009512999A5 (de) 2011-09-22
JP5558714B2 true JP5558714B2 (ja) 2014-07-23

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Application Number Title Priority Date Filing Date
JP2008532378A Expired - Fee Related JP5558714B2 (ja) 2005-09-21 2006-09-21 半導体パッケージ

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US (1) US7304372B2 (de)
JP (1) JP5558714B2 (de)
DE (1) DE112006002488B4 (de)
TW (1) TWI372450B (de)
WO (1) WO2007035862A2 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7804131B2 (en) * 2006-04-28 2010-09-28 International Rectifier Corporation Multi-chip module
DE102007007142B4 (de) * 2007-02-09 2008-11-13 Infineon Technologies Ag Nutzen, Halbleiterbauteil sowie Verfahren zu deren Herstellung
US20110134607A1 (en) * 2009-12-07 2011-06-09 Schnetker Ted R Solid state switch arrangement
US8482019B2 (en) * 2010-01-28 2013-07-09 Infineon Technologies Ag Electronic light emitting device and method for fabricating the same
US8853707B2 (en) * 2011-05-04 2014-10-07 International Rectifier Corporation High voltage cascoded III-nitride rectifier package with etched leadframe
US8853706B2 (en) 2011-05-04 2014-10-07 International Rectifier Corporation High voltage cascoded III-nitride rectifier package with stamped leadframe
US8546849B2 (en) * 2011-05-04 2013-10-01 International Rectifier Corporation High voltage cascoded III-nitride rectifier package utilizing clips on package surface
US8698293B2 (en) * 2012-05-25 2014-04-15 Infineon Technologies Ag Multi-chip package and method of manufacturing thereof
US9576887B2 (en) * 2012-10-18 2017-02-21 Infineon Technologies Americas Corp. Semiconductor package including conductive carrier coupled power switches
US9171837B2 (en) 2012-12-17 2015-10-27 Nxp B.V. Cascode circuit
US9202811B2 (en) * 2012-12-18 2015-12-01 Infineon Technologies Americas Corp. Cascode circuit integration of group III-N and group IV devices
US9870978B2 (en) * 2013-02-28 2018-01-16 Altera Corporation Heat spreading in molded semiconductor packages
JP6211829B2 (ja) 2013-06-25 2017-10-11 株式会社東芝 半導体装置
US9443787B2 (en) 2013-08-09 2016-09-13 Infineon Technologies Austria Ag Electronic component and method
US9362240B2 (en) 2013-12-06 2016-06-07 Infineon Technologies Austria Ag Electronic device
US9653386B2 (en) * 2014-10-16 2017-05-16 Infineon Technologies Americas Corp. Compact multi-die power semiconductor package
KR20150108685A (ko) * 2014-03-18 2015-09-30 삼성전기주식회사 반도체모듈 패키지 및 그 제조 방법
JP2016099127A (ja) * 2014-11-18 2016-05-30 富士電機株式会社 パワー半導体モジュールの製造方法及びその中間組立ユニット
US10490478B2 (en) 2016-07-12 2019-11-26 Industrial Technology Research Institute Chip packaging and composite system board
CN106505058A (zh) * 2016-12-05 2017-03-15 嘉盛半导体(苏州)有限公司 半导体多芯片模块系统
KR102153159B1 (ko) * 2017-06-12 2020-09-08 매그나칩 반도체 유한회사 전력 반도체의 멀티칩 패키지
US20200168533A1 (en) * 2018-11-26 2020-05-28 Texas Instruments Incorporated Multi-die package with multiple heat channels
US11948855B1 (en) 2019-09-27 2024-04-02 Rockwell Collins, Inc. Integrated circuit (IC) package with cantilever multi-chip module (MCM) heat spreader
CN115548014B (zh) * 2021-05-25 2023-12-29 英诺赛科(苏州)科技有限公司 氮化物基双向切换器件和其制造方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS564275A (en) * 1979-06-25 1981-01-17 Fujitsu Ltd Semiconductor device
CH668667A5 (de) * 1985-11-15 1989-01-13 Bbc Brown Boveri & Cie Leistungshalbleitermodul.
JPS62119471A (ja) * 1985-11-20 1987-05-30 Fujitsu Ltd 双方向トランジスタのシミユレーシヨンモデル化方式
US5077595A (en) * 1990-01-25 1991-12-31 Mitsubishi Denki Kabushiki Kaisha Semiconductor device
US5382916A (en) * 1991-10-30 1995-01-17 Harris Corporation Differential voltage follower
JPH06112744A (ja) * 1992-09-30 1994-04-22 Nec Ic Microcomput Syst Ltd 利得制御増幅器
US5446300A (en) * 1992-11-04 1995-08-29 North American Philips Corporation Semiconductor device configuration with multiple HV-LDMOS transistors and a floating well circuit
US5532512A (en) * 1994-10-03 1996-07-02 General Electric Company Direct stacked and flip chip power semiconductor device structures
JPH09162399A (ja) * 1995-12-12 1997-06-20 Toshiba Corp 半導体装置
JPH09283756A (ja) * 1996-04-18 1997-10-31 Toyota Autom Loom Works Ltd アナログスイッチ
JPH10117139A (ja) * 1996-10-09 1998-05-06 Fujitsu Ltd 半導体論理回路
WO2000028664A2 (en) * 1998-11-12 2000-05-18 Broadcom Corporation Fully integrated tuner architecture
JP3259703B2 (ja) * 1998-12-28 2002-02-25 日本電気株式会社 マイクロ波増幅回路
JP2000307413A (ja) * 1999-04-19 2000-11-02 Sony Corp 電圧変換回路及び通信回路網
JP3851760B2 (ja) * 2000-07-04 2006-11-29 松下電器産業株式会社 半導体装置、その実装方法、電子回路装置の製造方法及び該製造方法により製造された電子回路装置
US6858922B2 (en) * 2001-01-19 2005-02-22 International Rectifier Corporation Back-to-back connected power semiconductor device package
JP3616343B2 (ja) * 2001-03-27 2005-02-02 松下電器産業株式会社 高周波スイッチ回路およびそれを用いた通信端末装置
JP4031971B2 (ja) * 2001-12-27 2008-01-09 富士通日立プラズマディスプレイ株式会社 パワーモジュール
US6686656B1 (en) * 2003-01-13 2004-02-03 Kingston Technology Corporation Integrated multi-chip chip scale package
JP2005011986A (ja) * 2003-06-19 2005-01-13 Sanyo Electric Co Ltd 半導体装置
JP4559777B2 (ja) * 2003-06-26 2010-10-13 株式会社東芝 半導体装置及びその製造方法
US7465997B2 (en) * 2004-02-12 2008-12-16 International Rectifier Corporation III-nitride bidirectional switch

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TWI372450B (en) 2012-09-11
US20070063216A1 (en) 2007-03-22
JP2009512999A (ja) 2009-03-26
DE112006002488B4 (de) 2014-05-28
US7304372B2 (en) 2007-12-04
WO2007035862A3 (en) 2009-04-30
TW200717728A (en) 2007-05-01
DE112006002488T5 (de) 2008-07-17
WO2007035862A2 (en) 2007-03-29

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