JP5556072B2 - 半導体装置、その製造方法、ミリ波誘電体内伝送装置 - Google Patents
半導体装置、その製造方法、ミリ波誘電体内伝送装置 Download PDFInfo
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- JP5556072B2 JP5556072B2 JP2009164506A JP2009164506A JP5556072B2 JP 5556072 B2 JP5556072 B2 JP 5556072B2 JP 2009164506 A JP2009164506 A JP 2009164506A JP 2009164506 A JP2009164506 A JP 2009164506A JP 5556072 B2 JP5556072 B2 JP 5556072B2
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Description
2.第2の実施形態(ミリ波誘電体内伝送装置200:構成例、組立例、内部構成 例、拡大構成例、シミュレーションモデル例、特性例)
3.第3の実施形態(ミリ波誘電体内伝送装置300:構成例)
4.第4の実施形態(半導体パッケージ20c:構成例、形成例
ミリ波誘電体内伝送装置400:構成例および組立例)
5.第5の実施形態(ミリ波誘電体内伝送装置500:構成例および形成例)
6.第6の実施形態(ミリ波誘電体内伝送システム600:構成例
電子機器201,202の形成例)
7.第7の実施形態(同一パッケージ内の複数の半導体チップ間のミリ波伝送)
8.第8の実施形態(第7の実施形態+異なるパッケージ間のミリ波伝送)
9.変形例(第1変形例〜第4変形例)
[半導体パッケージ20の構成例]
図1を参照して、本発明に係る第1の実施形態としての半導体パッケージ20の構成例について説明する。図1に示す半導体パッケージ20は、半導体装置の一例を構成するものである。半導体パッケージ20は映画映像や、コンピュータ画像などを搬送する搬送周波数が30GHz乃至300GHzのミリ波帯の信号を高速に伝送するミリ波誘電体内伝送システムに適用可能なものである。ミリ波誘電体内伝送システムにはデジタル記録再生装置、地上波テレビ受像機、携帯電話機、ゲーム機、コンピュータ、通信装置などが含まれる。
図2を参照して、半導体パッケージ20の内部構成例について説明する。図2に示す半導体チップ30は、LSI機能部201、信号生成部202および双方向のアンテナ結合部203を有して構成される。アンテナ結合部203は信号結合部の一例またはその一部を構成し、ここにアンテナ結合部203とは、狭義的には半導体チップ30内の電子回路と、チップ内またはチップ外に配置されるアンテナとを結合する部分をいう。広義的には、当該半導体チップ30と誘電体伝送路21とを信号結合する部分をいう。
続いて、図3(A)〜図3(E)を参照して、半導体パッケージ20の形成例について説明する。まず、図3(A)に示すインターポーザ基板4(ダイ)上に、ミリ波帯通信可能な半導体チップ30を形成する。半導体チップ30には、図2に示した送信および受信系を半導体集積回路に一体化したシステムLSIを使用する。送信系はLSI機能部201、パラレルシリアル変換回路34、変調回路35、周波数変換回路36、増幅器37、アンテナ切り替え部38を有し、受信系は増幅器44、周波数変換回路45、復調回路46およびシリアルパラレル変換回路47を有している。半導体チップ30は、従来から自明な製造方法によりインターポーザ基板4上に実装すればよい。
[ミリ波誘電体内伝送装置200の構成例]
この実施形態では、図4に示すように、誘電体伝送路付きのシャーシ11をミリ波誘電体内伝送可能な2つの半導体パッケージ20a,20bで挟み込んで積層したものである。
続いて、図5(A)〜図5(C)を参照して、ミリ波誘電体内伝送装置200の製造方法について説明する。この例で、図4に示したようなミリ波誘電体内伝送装置200を製造する場合、まず、半導体パッケージ20a,20bを形成する。半導体パッケージ20aは、一方のインターポーザ基板4上にミリ波帯通信可能な半導体チップ30を設ける。その後、半導体チップ30にアンテナ構造32を接続する。更に、インターポーザ基板4上の半導体チップ30とアンテナ構造32とにモールド樹脂8を覆って絶縁する。これにより、ミリ波誘電体内伝送可能な半導体パッケージ20aを形成することができる(図3参照)。
図6を参照して、ミリ波誘電体内伝送装置200の内部構成例について説明する。図6に示すミリ波誘電体内伝送装置200は、半導体パッケージ20a、誘電体伝送路21および半導体パッケージ20bを有して構成される。
図7を参照して、図4に示したミリ波誘電体内伝送装置200の拡大構成例について説明する。図7に示すミリ波誘電体内伝送装置200によれば、半導体パッケージ20a,20bの各々のアンテナ構造32には、アンテナ39としてパッチアンテナが使用される。半導体パッケージ20aにおいて、アンテナ39は、半導体チップ30上に積載されており、半導体チップ表面に形成されたアンテナ端子31と直接、あるいはボンディングワイヤを介して接続される。アンテナ39が半導体チップ30の表面に構成されているので、誘電体伝送路21と直接接触する構造を採ることができる。半導体パッケージ20bも半導体パッケージ20aと同様に構成されている。
図8を参照して、ミリ波誘電体内伝送装置200の通過特性および反射特性検証用のシミュレーションモデル例について説明する。図8に示すシミュレーションモデルは、図7に示したミリ波誘電体内伝送装置200の構成例を採っている。表1は、シミュレーションモデルに設定するパラメータをまとめたものである。
図9を参照して、ミリ波誘電体内伝送装置200のシミュレーション特性例について説明する。図9に示すシミュレーション特性例によれば、図8に示したミリ波誘電体内伝送装置200のシミュレーションモデルに与えられるアンテナ端子31間の通過特性例および反射特性例を示している。
[ミリ波誘電体内伝送装置300の構成例]
図10を参照して、第3の実施形態としてのミリ波誘電体内伝送装置300の構成例について説明する。この実施形態では、第2の実施形態で半導体パッケージ20a,20b間に設けられていたシャーシ11が省略され、誘電体伝送路21がモールド樹脂8および粘弾性素材16のみから構成されるものである。
[半導体パッケージ20cの構成例]
続いて、図11を参照しながら第4の実施形態としての半導体パッケージ20cの構成例について説明する。この例で、アンテナ構造32’がインターポーザ基板4の半導体チップ30に並設される。アンテナ構造32’を有する半導体パッケージ20cがパッケージ・オン・パッケージ構造(Package-On-Package:以下POP構造という)のミリ波誘電体内伝送装置400の構造を提供するようになる。
続いて、図12(A)〜図12(D)を参照しながらPOP構造のミリ波誘電体内伝送装置400を構成する半導体パッケージ20cの形成例について説明する。この例では、図11に示したような半導体パッケージ20cを形成する場合、まず、図12(A)に示すインターポーザ基板4上にミリ波帯通信可能な半導体チップ30およびアンテナ構造32’を形成する。
図13を参照して、POP構造のミリ波誘電体内伝送装置400の構成例について説明する。図13に示すミリ波誘電体内伝送装置400は、図11に示した半導体パッケージ20cを2段以上積み重ねた構造とする。当該ミリ波誘電体内伝送装置400は、2個の半導体パッケージ20c,20d間を突起電極9で接続して、POP構造のミリ波誘電体内伝送装置400を構成するようにしたものである。換言すると、ミリ波誘電体内伝送装置400は、複数の半導体パッケージ20c,20dなどを実装用の基板10上に一体化したものである。半導体パッケージ20c,20dの内部構成例については図2を参照されたい。
続いて、図14(A)〜(C)を参照しながら、POP構造のミリ波誘電体内伝送装置400の組立例について説明する。この例では、図13に示した積層構造のミリ波誘電体内伝送装置400を組み立てる場合を前提とする。
[ミリ波誘電体内伝送装置500の構成例]
続いて、図15を参照しながら、第5の実施形態としてのミリ波誘電体内伝送装置500の構成例について説明する。第5の実施形態は、水平方向にズレて配置されている複数の半導体パッケージ20間のデータ転送をミリ波で行なう点に特徴がある。図示した例では、半導体チップ30を各々有する2つの半導体パッケージ20e,20fが同一の実装用の基板10に並設して実装され、領域画定用のシャーシ11内に形成された誘電体伝送路21を介して通信処理を実行できるようにした。半導体パッケージ20e,20fの内部構成例については図2を参照されたい。
続いて、図16〜図18を参照して、ミリ波誘電体内伝送装置500の形成例について説明する。図16(A)は、基板10における端子電極5の形成例を示す平面図であり、図16(B)は、図16(A)に示した基板10のX1−X1矢視断面図である。この例では、実装用の基板10と、シャーシ11と、2つの半導体パッケージ20e,20fとを用いて、図15に示したミリ波誘電体内伝送装置500を組み立てる場合を前提とする。
[ミリ波誘電体内伝送システム600の構成例]
続いて、図19(A)および図19(B)を参照して、第6の実施形態としてのミリ波誘電体内伝送システム600の構成例について説明する。図19(A)に示すミリ波誘電体内伝送システム600は、2つの電子機器601,602の各々に、ミリ波誘電体内伝送可能な半導体パッケージ20gなどが実装される。当該システム600では、図19(B)に示すように2つの電子機器601,602の所定部位を接触させてミリ波の信号Sを伝送するようになされる。
i.一方の電子機器601が、携帯電話機やデジタルカメラ、ビデオカメラ、ゲーム機、リモートコントローラ、髭剃り器などのバッテリー駆動機器である場合、他方の電子機器602は、そのバッテリー充電器や、画像処理などを行なうベース・ステーションなどとなるものである。
次に、図20(A),(B)および図21(A),(B)を参照して、ミリ波誘電体内伝送システム600に使用される電子機器601,602の製造方法について説明する。この実施形態では、何れ電子機器601,602に適用する場合も、半導体パッケージ20g,20hをそれらの筐体12aなどの内壁面側に実装する場合を例に挙げる。
図22〜図28は、第7の実施形態としての半導体パッケージ20j(本例ではミリ波誘電体内伝送装置と等価)を説明する図である。ここで、図22は、第7の実施形態に対する比較例を説明する図である。図23は、第7の実施形態の半導体パッケージ20jの構成概要を説明する図である。図24は、第7の実施形態の半導体パッケージ20jで使用されるアンテナ構造の具体例を説明する図である。図25は、図24に示したアンテナ構造が適用された第7の実施形態の半導体パッケージ20jの具体例を説明する図である。図26〜図28は、図25に示した第7の実施形態の半導体パッケージ20jにおけるシミュレーション特性例を示す図である。
図22には、第7の実施形態を適用しない比較例の半導体パッケージ1xが示されている。半導体パッケージ1xは、複数(図では3つ)のシステムLSIとしての半導体チップ2_1,2_2,2_3を1つのパッケージ内に並列に配置したマルチ・チップ・パッケージとなっている。半導体チップ2_1,2_2,2_3の表面には複数のパッド電極3が形成されている。
図23には、第7の実施形態の構成概要が示されている。図23(A)は平面模式図であり、図23(B)は断面模式図である。
図24〜図28には、半導体パッケージ20jで使用されるアンテナ構造の具体例と特性例が示されている。
図29〜図33は、第8の実施形態としてのミリ波誘電体内伝送システム600k(電子機器)を説明する図である。ここで、図29は、第8の実施形態に対する比較例を説明する図である。図30は、第8の実施形態のミリ波誘電体内伝送システム600kの構成概要を説明する図である。図31〜図33は、図30に示した第8の実施形態のミリ波誘電体内伝送システム600kにおけるシミュレーション特性例を示す図である。
図29には、第8の実施形態を適用しない比較例の電子機器700xが示されている。構成としては、図39に示した電子機器700とほぼ同様であり、半導体パッケージ1x_1,1x_2を積層した状態である。つまり、マルチ・チップ・パッケージを2つ上下に配置した構成である。電子機器700xは、半導体パッケージ1x_1,1x_2内に複数(図では2つ)の半導体チップ2_1,2_2が搭載されている点が図39に示した電子機器700と異なる。
図30には、第8の実施形態のミリ波誘電体内伝送システム600k(電子機器)の構成概要が示されている。図30(A)は平面模式図であり、図30(B)は断面模式図である。図25に示した第7の実施形態の半導体パッケージ20jとの対比から分かるように、複数の第7の実施形態の半導体パッケージ20j_1,20j_2をパッケージ間距離hで積層した状態である。つまり、第7の実施形態を適用したマルチ・チップ・パッケージを2つ上下に配置した構成である。
以上、本発明について実施形態を用いて説明したが、本発明の技術的範囲は前記実施形態に記載の範囲には限定されない。発明の要旨を逸脱しない範囲で前記実施形態に多様な変更または改良を加えることができ、そのような変更または改良を加えた形態も本発明の技術的範囲に含まれる。
図34は、第1変形例の半導体パッケージ20p(本例ではミリ波誘電体内伝送装置と等価)を説明する図である。第1変形例は、1つの半導体パッケージ20p内において、基板上に複数の半導体チップ30が、アンテナ構造(アンテナ39)の部分が同軸となるように積層状態で配置され、各半導体チップ30間でミリ波伝送を行なう点に特徴がある。同一パッケージ内での半導体チップ30間でミリ波伝送を行なうものであり、半導体パッケージ20p自体がミリ波誘電体内伝送装置を構成することになる。
図35は、第2変形例の半導体パッケージ20q(本例ではミリ波誘電体内伝送装置と等価)を説明する図である。第2変形例は、第7の実施形態と同様の半導体パッケージ20qを、さらに第1変形例と同様に、実装用の基板10qに搭載している。基板10qも、ミリ波信号伝送可能な誘電体を含む誘電体素材で形成されているものとすることで、ミリ波信号を基板10q内で伝送させるミリ波基板内伝送方式を適用する。
図36は、第3変形例の半導体パッケージ20rとミリ波誘電体内伝送システム600rを説明する図である。第3変形例は、複数の半導体パッケージ20r間のデータ転送において、第1変形例や第2変形例で示したミリ波基板内伝送方式に自由空間伝送を併用する点に特徴がある。1つの半導体パッケージ20r内に搭載される半導体チップ30の数は不問である。
図37は、第4変形例のミリ波誘電体内伝送システム600sを説明する図である。第4変形例は、第5の実施形態と同様に、水平方向にズレて配置されている複数の半導体パッケージ20間のデータ転送をミリ波で行なう点に特徴がある。第5の実施形態との相違点は、各半導体パッケージ20異なる実装用の基板10_1,10_2に実装されている点である。ミリ波信号伝送路21sとしては、自由空間伝送路以外のものであればよく、たとえば、誘電体素材で形成された誘電体伝送路を適用するのがよい。誘電体伝送路は、たとえば、第5の実施形態のように、領域画定用のシャーシ11内に形成された誘電体伝送路でもよい。
Claims (19)
- 基板上に設けられたミリ波帯通信可能な半導体チップと、
前記半導体チップに接続されたアンテナ構造と、
前記半導体チップを覆う絶縁部材と、
ミリ波信号伝送可能な誘電体を含んでいる誘電体素材で構成され、前記アンテナ構造に整合されたミリ波伝送部材と、
を備え、
前記ミリ波伝送部材は、
前記半導体チップに接続されたアンテナ構造に整合される貫通部を有した領域画定用の部材と、
前記部材の貫通部内に設けられた前記誘電体素材と、
を有する、
半導体装置。 - 前記半導体チップに接続されたアンテナ構造は、
前記半導体チップ上に設けられる、
請求項1に記載の半導体装置。 - 前記半導体チップに接続されたアンテナ構造にはパッチアンテナが備えられる、
請求項2に記載の半導体装置。 - 前記半導体チップは、
入力信号を信号処理してミリ波の信号を生成する第1の信号生成部と、
当該半導体チップと前記アンテナ構造とを結合する部分であって、前記第1の信号生成部によって生成された前記ミリ波の信号を前記ミリ波伝送部材に送信するとともに、当該ミリ波伝送部材から前記ミリ波の信号を受信する双方向の信号結合部と、
前記信号結合部によって受信した前記ミリ波の信号を信号処理して出力信号を生成する第2の信号生成部と、
をを有する、
請求項3に記載の半導体装置。 - 前記第1の信号生成部には、パラレルの入力信号をシリアルの出力信号に変換する第1の信号変換部を有し、
前記第2の信号生成部には、シリアルの入力信号をパラレルの出力信号に変換する第2の信号変換部を有する、
請求項4に記載の半導体装置。 - 前記アンテナ構造は、前記半導体チップに並設される、
請求項1に記載の半導体装置。 - 一方の基板上に設けられたミリ波帯通信可能な半導体チップ、前記半導体チップに接続されたアンテナ構造、および、ミリ波信号を通過可能な誘電体を含み前記半導体チップを覆う絶縁部材を有したミリ波誘電体内伝送可能な第1の半導体装置と、
他方の基板上に設けられたミリ波帯通信可能な半導体チップ、前記半導体チップに接続されたアンテナ構造、および、ミリ波信号を通過可能な誘電体を含み前記半導体チップを覆う絶縁部材を有するミリ波誘電体内伝送可能な第2の半導体装置と、
ミリ波誘電体内伝送可能な誘電体を含んでいる誘電体素材で構成され前記第1の半導体装置と第2の半導体装置との間に設けられたミリ波伝送部材と、
を備え、
前記第1の半導体装置と第2の半導体装置とが当該第1の半導体装置のアンテナ構造と第2の半導体装置のアンテナ構造との間でミリ波信号伝送を実行可能に前記ミリ波伝送部材を介在して実装され、
前記ミリ波伝送部材は、
前記第1および第2の半導体装置の各々のアンテナ構造に整合される貫通部を有した領域画定用の部材と、
前記部材の貫通部内に設けられた誘電体素材と、
を有する、
ミリ波誘電体内伝送装置。 - 前記アンテナ構造は、前記半導体チップ上に設けられ、
前記第1および第2の半導体装置は、各々の前記アンテナ構造が前記ミリ波伝送部材を介在して配置された、
請求項7に記載のミリ波誘電体内伝送装置。 - 前記アンテナ構造にはパッチアンテナが備えられる、
請求項8に記載のミリ波誘電体内伝送装置。 - 一方の基板上に設けられたミリ波帯通信可能な半導体チップ、前記半導体チップに接続されたアンテナ構造、および、ミリ波信号を通過可能な誘電体を含み前記半導体チップを覆う絶縁部材を有したミリ波誘電体内伝送可能な第1の半導体装置と、
他方の基板上に設けられたミリ波帯通信可能な半導体チップ、前記半導体チップに接続されたアンテナ構造、および、ミリ波信号を通過可能な誘電体を含み前記半導体チップを覆う絶縁部材を有するミリ波誘電体内伝送可能な第2の半導体装置と、
ミリ波誘電体内伝送可能な誘電体を含んでいる誘電体素材で構成され前記第1の半導体装置と第2の半導体装置との間に設けられたミリ波伝送部材と、
を備え、
前記第1の半導体装置と第2の半導体装置とが当該第1の半導体装置のアンテナ構造と第2の半導体装置のアンテナ構造との間でミリ波信号伝送を実行可能に前記ミリ波伝送部材を介在して実装され、
前記第1および第2の半導体装置とを接合する部分には、ミリ波誘電体内伝送可能な誘電体を含んだ誘電体素材で構成され、前記ミリ波伝送部材として機能する粘弾性素材が設けられている、
ミリ波誘電体内伝送装置。 - 前記アンテナ構造は、前記半導体チップに並設され、
前記第1および第2の半導体装置は、各々の前記アンテナ構造が前記ミリ波伝送部材を介在して配置された、
請求項10に記載のミリ波誘電体内伝送装置。 - 一方の基板上に設けられたミリ波帯通信可能な半導体チップ、前記半導体チップに接続されたアンテナ構造、および、ミリ波信号を通過可能な誘電体を含み前記半導体チップを覆う絶縁部材を有したミリ波誘電体内伝送可能な第1の半導体装置と、
他方の基板上に設けられたミリ波帯通信可能な半導体チップ、前記半導体チップに接続されたアンテナ構造、および、ミリ波信号を通過可能な誘電体を含み前記半導体チップを覆う絶縁部材を有するミリ波誘電体内伝送可能な第2の半導体装置と、
ミリ波誘電体内伝送可能な誘電体を含んでいる誘電体素材で構成され前記第1の半導体装置と第2の半導体装置との間に設けられたミリ波伝送部材と、
を備え、
前記第1の半導体装置と第2の半導体装置とが当該第1の半導体装置のアンテナ構造と第2の半導体装置のアンテナ構造との間でミリ波信号伝送を実行可能に前記ミリ波伝送部材を介在して実装され、
前記半導体チップを各々有する第1および第2の半導体装置を並設して実装するための実装用の基板を更に備え、
前記ミリ波伝送部材が前記実装用の基板に設けられ、
前記実装用の基板のミリ波伝送部材において、前記第1の半導体装置のアンテナ構造と前記第2の半導体装置のアンテナ構造との間で、当該ミリ波伝送部材を介したミリ波の信号を伝送し、
前記ミリ波伝送部材は、前記実装用の基板に設けられた領域画定用の溝部または貫通部にミリ波誘電体内伝送可能な誘電体を含んだ誘電体素材を充填して構成された、
ミリ波誘電体内伝送装置。 - 前記アンテナ構造は、前記半導体チップを封止する絶縁部材の表面に引き出される、
請求項12に記載のミリ波誘電体内伝送装置。 - 前記絶縁部材は、ミリ波信号を通過可能な誘電体を含んでいる、
請求項7ないし請求項13のいずれか1項に記載のミリ波誘電体内伝送装置。 - 基板上にミリ波帯通信可能な半導体チップを形成する工程と、
前記基板上に形成された半導体チップにアンテナ構造を接続する工程と、
絶縁部材で、前記半導体チップを覆って絶縁する工程と、
ミリ波信号伝送可能な誘電体を含んでいる誘電体素材で、前記アンテナ構造にミリ波伝送部材を整合する工程と、
を有し、
前記アンテナ構造にミリ波伝送部材を整合する際に、
前記絶縁部材に領域画定用の部材を形成する工程と、
前記領域画定用の部材に、前記アンテナ構造に整合される貫通部を形成する工程と、
前記部材の貫通部内に誘電体素材を設けてミリ波伝送部材を形成する工程と、
を有する、
半導体装置の製造方法。 - 基板上に設けられたミリ波帯通信可能な半導体チップと、
前記半導体チップに接続されたアンテナ構造と、
ミリ波信号伝送可能な誘電体を含んでいる誘電体素材で構成され、前記アンテナ構造に整合されたミリ波伝送部材と、
を備え、
複数の前記半導体チップが前記アンテナ構造の部分が同軸となるように積層状に設けられており、
前記複数の半導体チップを接合する部分には、ミリ波誘電体内伝送可能な誘電体を含んだ誘電体素材で構成され前記ミリ波伝送部材として機能する粘弾性素材が設けられている、
半導体装置。 - 請求項16に記載の複数の半導体装置と、
前記複数の半導体装置の間でミリ波帯での情報伝送が可能なミリ波信号伝送路と、
を備え、
前記複数の半導体装置の間では、ベースバンド信号をミリ波信号に変換してから、このミリ波信号を前記ミリ波信号伝送路を介して伝送するように構成されている、
ミリ波誘電体内伝送装置。 - ミリ波信号伝送可能な誘電体を含んでいる誘電体素材で構成され前記ミリ波信号伝送路として機能する実装用の基板を備え、
前記複数の半導体装置が同一の前記実装用の基板上に並設されている、
請求項17に記載のミリ波誘電体内伝送装置。 - 前記ミリ波信号伝送路は、ミリ波信号を伝送路中に閉じ込めつつミリ波信号を伝送させる構造を持つ、
請求項17に記載のミリ波誘電体内伝送装置。
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TW201030929A (en) | 2010-08-16 |
CN104201162B (zh) | 2018-01-19 |
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TWI436468B (zh) | 2014-05-01 |
CN104201162A (zh) | 2014-12-10 |
US20150137336A1 (en) | 2015-05-21 |
EP2375444A1 (en) | 2011-10-12 |
JP2010183055A (ja) | 2010-08-19 |
CN102272919A (zh) | 2011-12-07 |
KR20110102384A (ko) | 2011-09-16 |
RU2011126997A (ru) | 2013-01-10 |
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