JP5524194B2 - トレンチ処理およびポリシリコンドーピング領域を持つ裏面コンタクト型太陽電池用の構造 - Google Patents
トレンチ処理およびポリシリコンドーピング領域を持つ裏面コンタクト型太陽電池用の構造 Download PDFInfo
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- JP5524194B2 JP5524194B2 JP2011513521A JP2011513521A JP5524194B2 JP 5524194 B2 JP5524194 B2 JP 5524194B2 JP 2011513521 A JP2011513521 A JP 2011513521A JP 2011513521 A JP2011513521 A JP 2011513521A JP 5524194 B2 JP5524194 B2 JP 5524194B2
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- solar cell
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims description 58
- 229920005591 polysilicon Polymers 0.000 title claims description 58
- 238000012545 processing Methods 0.000 title description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 54
- 239000000758 substrate Substances 0.000 claims description 29
- 239000000377 silicon dioxide Substances 0.000 claims description 27
- 235000012239 silicon dioxide Nutrition 0.000 claims description 27
- 229910052751 metal Inorganic materials 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 23
- 238000002161 passivation Methods 0.000 claims description 20
- 239000002019 doping agent Substances 0.000 claims description 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- 239000010703 silicon Substances 0.000 claims description 13
- 238000009792 diffusion process Methods 0.000 claims description 11
- 239000010410 layer Substances 0.000 description 83
- 238000000034 method Methods 0.000 description 43
- 229910052581 Si3N4 Inorganic materials 0.000 description 28
- 230000008569 process Effects 0.000 description 28
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 28
- 230000015556 catabolic process Effects 0.000 description 25
- 230000002441 reversible effect Effects 0.000 description 24
- 238000004519 manufacturing process Methods 0.000 description 23
- 230000015572 biosynthetic process Effects 0.000 description 19
- 238000005530 etching Methods 0.000 description 12
- 235000012431 wafers Nutrition 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- 230000008901 benefit Effects 0.000 description 7
- 238000000151 deposition Methods 0.000 description 7
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000000969 carrier Substances 0.000 description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 4
- 230000002829 reductive effect Effects 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 3
- 238000005215 recombination Methods 0.000 description 3
- 230000006798 recombination Effects 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 2
- 230000006399 behavior Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 238000007788 roughening Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H—ELECTRICITY
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- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/14—Photovoltaic cells having only PN homojunction potential barriers
- H10F10/146—Back-junction photovoltaic cells, e.g. having interdigitated base-emitter regions on the back side
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- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
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- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
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- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
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- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/16—Photovoltaic cells having only PN heterojunction potential barriers
- H10F10/164—Photovoltaic cells having only PN heterojunction potential barriers comprising heterojunctions with Group IV materials, e.g. ITO/Si or GaAs/SiGe photovoltaic cells
- H10F10/165—Photovoltaic cells having only PN heterojunction potential barriers comprising heterojunctions with Group IV materials, e.g. ITO/Si or GaAs/SiGe photovoltaic cells the heterojunctions being Group IV-IV heterojunctions, e.g. Si/Ge, SiGe/Si or Si/SiC photovoltaic cells
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- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/16—Photovoltaic cells having only PN heterojunction potential barriers
- H10F10/164—Photovoltaic cells having only PN heterojunction potential barriers comprising heterojunctions with Group IV materials, e.g. ITO/Si or GaAs/SiGe photovoltaic cells
- H10F10/165—Photovoltaic cells having only PN heterojunction potential barriers comprising heterojunctions with Group IV materials, e.g. ITO/Si or GaAs/SiGe photovoltaic cells the heterojunctions being Group IV-IV heterojunctions, e.g. Si/Ge, SiGe/Si or Si/SiC photovoltaic cells
- H10F10/166—Photovoltaic cells having only PN heterojunction potential barriers comprising heterojunctions with Group IV materials, e.g. ITO/Si or GaAs/SiGe photovoltaic cells the heterojunctions being Group IV-IV heterojunctions, e.g. Si/Ge, SiGe/Si or Si/SiC photovoltaic cells the Group IV-IV heterojunctions being heterojunctions of crystalline and amorphous materials, e.g. silicon heterojunction [SHJ] photovoltaic cells
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- H10F71/121—The active layers comprising only Group IV materials
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- H10F77/16—Material structures, e.g. crystalline structures, film structures or crystal plane orientations
- H10F77/162—Non-monocrystalline materials, e.g. semiconductor particles embedded in insulating materials
- H10F77/164—Polycrystalline semiconductors
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- H10F77/20—Electrodes
- H10F77/206—Electrodes for devices having potential barriers
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- H10F77/20—Electrodes
- H10F77/206—Electrodes for devices having potential barriers
- H10F77/211—Electrodes for devices having potential barriers for photovoltaic cells
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- H10F77/206—Electrodes for devices having potential barriers
- H10F77/211—Electrodes for devices having potential barriers for photovoltaic cells
- H10F77/219—Arrangements for electrodes of back-contact photovoltaic cells
- H10F77/227—Arrangements for electrodes of back-contact photovoltaic cells for emitter wrap-through [EWT] photovoltaic cells, e.g. interdigitated emitter-base back-contacts
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- H10F77/30—Coatings
- H10F77/306—Coatings for devices having potential barriers
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- H10F77/70—Surface textures, e.g. pyramid structures
- H10F77/703—Surface textures, e.g. pyramid structures of the semiconductor bodies, e.g. textured active layers
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- H10F77/70—Surface textures, e.g. pyramid structures
- H10F77/707—Surface textures, e.g. pyramid structures of the substrates or of layers on substrates, e.g. textured ITO layer on a glass substrate
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- H10F77/93—Interconnections
- H10F77/933—Interconnections for devices having potential barriers
- H10F77/935—Interconnections for devices having potential barriers for photovoltaic devices or modules
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/546—Polycrystalline silicon PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Energy (AREA)
- Photovoltaic Devices (AREA)
- Sustainable Development (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US6092108P | 2008-06-12 | 2008-06-12 | |
| US61/060,921 | 2008-06-12 | ||
| US12/392,923 | 2009-02-25 | ||
| US12/392,923 US7851698B2 (en) | 2008-06-12 | 2009-02-25 | Trench process and structure for backside contact solar cells with polysilicon doped regions |
| PCT/US2009/042135 WO2009151809A1 (en) | 2008-06-12 | 2009-04-29 | Trench process and structure for backside contact solar cells with polysilicon doped regions |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014080106A Division JP5780565B2 (ja) | 2008-06-12 | 2014-04-09 | 太陽電池の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011523231A JP2011523231A (ja) | 2011-08-04 |
| JP2011523231A5 JP2011523231A5 (enExample) | 2012-05-17 |
| JP5524194B2 true JP5524194B2 (ja) | 2014-06-18 |
Family
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Family Applications (5)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011513521A Active JP5524194B2 (ja) | 2008-06-12 | 2009-04-29 | トレンチ処理およびポリシリコンドーピング領域を持つ裏面コンタクト型太陽電池用の構造 |
| JP2011513520A Active JP5625167B2 (ja) | 2008-06-12 | 2009-04-29 | ポリシリコンドープ領域を有するバックコンタクト型太陽電池のトレンチ構造 |
| JP2014080106A Active JP5780565B2 (ja) | 2008-06-12 | 2014-04-09 | 太陽電池の製造方法 |
| JP2014137839A Active JP5860101B2 (ja) | 2008-06-12 | 2014-07-03 | ポリシリコンドープ領域を有するバックコンタクト型太陽電池のトレンチプロセス及び構造 |
| JP2015246766A Active JP6148319B2 (ja) | 2008-06-12 | 2015-12-17 | ポリシリコンドープ領域を有するバックコンタクト型太陽電池のトレンチプロセス及び構造 |
Family Applications After (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011513520A Active JP5625167B2 (ja) | 2008-06-12 | 2009-04-29 | ポリシリコンドープ領域を有するバックコンタクト型太陽電池のトレンチ構造 |
| JP2014080106A Active JP5780565B2 (ja) | 2008-06-12 | 2014-04-09 | 太陽電池の製造方法 |
| JP2014137839A Active JP5860101B2 (ja) | 2008-06-12 | 2014-07-03 | ポリシリコンドープ領域を有するバックコンタクト型太陽電池のトレンチプロセス及び構造 |
| JP2015246766A Active JP6148319B2 (ja) | 2008-06-12 | 2015-12-17 | ポリシリコンドープ領域を有するバックコンタクト型太陽電池のトレンチプロセス及び構造 |
Country Status (10)
| Country | Link |
|---|---|
| US (15) | US7851698B2 (enExample) |
| EP (4) | EP3065184B1 (enExample) |
| JP (5) | JP5524194B2 (enExample) |
| KR (2) | KR101466753B1 (enExample) |
| CN (4) | CN102057497B (enExample) |
| AU (2) | AU2009257973B2 (enExample) |
| ES (1) | ES2979023T3 (enExample) |
| MY (2) | MY177509A (enExample) |
| PL (1) | PL3065184T3 (enExample) |
| WO (2) | WO2009151809A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014160843A (ja) * | 2008-06-12 | 2014-09-04 | Sunpower Corp | 太陽電池の製造方法及び太陽電池 |
Families Citing this family (165)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2014160843A (ja) * | 2008-06-12 | 2014-09-04 | Sunpower Corp | 太陽電池の製造方法及び太陽電池 |
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Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |