JP5390213B2 - ボート - Google Patents

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Publication number
JP5390213B2
JP5390213B2 JP2009033960A JP2009033960A JP5390213B2 JP 5390213 B2 JP5390213 B2 JP 5390213B2 JP 2009033960 A JP2009033960 A JP 2009033960A JP 2009033960 A JP2009033960 A JP 2009033960A JP 5390213 B2 JP5390213 B2 JP 5390213B2
Authority
JP
Japan
Prior art keywords
substrate
boat
support
heat treatment
load
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2009033960A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009218583A (ja
Inventor
炳一 李
庸根 趙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tera Semicon Corp
Original Assignee
Tera Semicon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tera Semicon Corp filed Critical Tera Semicon Corp
Publication of JP2009218583A publication Critical patent/JP2009218583A/ja
Application granted granted Critical
Publication of JP5390213B2 publication Critical patent/JP5390213B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H01L21/67309—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by the substrate support
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/54—Arrangements for reducing warping-twist

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Electroluminescent Light Sources (AREA)
JP2009033960A 2008-02-20 2009-02-17 ボート Active JP5390213B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020080015094A KR100951688B1 (ko) 2008-02-20 2008-02-20 열처리 장치
KR10-2008-0015094 2008-02-20

Publications (2)

Publication Number Publication Date
JP2009218583A JP2009218583A (ja) 2009-09-24
JP5390213B2 true JP5390213B2 (ja) 2014-01-15

Family

ID=41039061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009033960A Active JP5390213B2 (ja) 2008-02-20 2009-02-17 ボート

Country Status (4)

Country Link
JP (1) JP5390213B2 (zh)
KR (1) KR100951688B1 (zh)
CN (1) CN101514443B (zh)
TW (1) TW201001600A (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101199954B1 (ko) * 2010-05-31 2012-11-09 주식회사 테라세미콘 기판 처리용 보트
JP6304891B2 (ja) * 2015-02-10 2018-04-04 クアーズテック株式会社 縦型ウエハボート

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2534674Y2 (ja) * 1988-05-25 1997-05-07 国際電気株式会社 縦形ｃｖｄボ−ト
US5054418A (en) * 1989-05-23 1991-10-08 Union Oil Company Of California Cage boat having removable slats
JPH08195352A (ja) * 1995-01-17 1996-07-30 Fuji Electric Co Ltd 半導体製造装置のウエハボート
JPH113865A (ja) * 1997-04-15 1999-01-06 Sumitomo Metal Ind Ltd ウエハー積載用ボート及びその製造方法
JP2000223433A (ja) * 1999-02-04 2000-08-11 Seiko Epson Corp 基板処理装置並びに半導体装置の製造方法及び液晶装置の製造方法
JP3785036B2 (ja) * 2000-10-24 2006-06-14 エスペック株式会社 積載装置のワーク受け
US6488497B1 (en) * 2001-07-12 2002-12-03 Saint-Gobain Ceramics & Plastics, Inc. Wafer boat with arcuate wafer support arms
KR100847814B1 (ko) * 2002-03-18 2008-07-23 엘지디스플레이 주식회사 액정표시소자 제조 공정용 기판 보관 장치
KR100675627B1 (ko) * 2002-10-10 2007-02-01 엘지.필립스 엘시디 주식회사 기판 수납용 카세트
US20070275570A1 (en) * 2004-01-20 2007-11-29 Hitachi Kokusai Electric Inc. Heat Treatment Apparatus

Also Published As

Publication number Publication date
KR100951688B1 (ko) 2010-04-07
KR20090089930A (ko) 2009-08-25
CN101514443A (zh) 2009-08-26
TW201001600A (en) 2010-01-01
JP2009218583A (ja) 2009-09-24
CN101514443B (zh) 2013-04-03

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