JP5309542B2 - 測定装置およびその方法 - Google Patents

測定装置およびその方法 Download PDF

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Publication number
JP5309542B2
JP5309542B2 JP2007314636A JP2007314636A JP5309542B2 JP 5309542 B2 JP5309542 B2 JP 5309542B2 JP 2007314636 A JP2007314636 A JP 2007314636A JP 2007314636 A JP2007314636 A JP 2007314636A JP 5309542 B2 JP5309542 B2 JP 5309542B2
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light
measured
deviation
unit
measuring
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JP2009139176A (ja
JP2009139176A5 (enrdf_load_stackoverflow
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仁 宇佐美
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Nikon Corp
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Nikon Corp
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JP2007314636A 2007-12-05 2007-12-05 測定装置およびその方法 Active JP5309542B2 (ja)

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JP2007314636A JP5309542B2 (ja) 2007-12-05 2007-12-05 測定装置およびその方法

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JP2007314636A JP5309542B2 (ja) 2007-12-05 2007-12-05 測定装置およびその方法

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JP2009139176A JP2009139176A (ja) 2009-06-25
JP2009139176A5 JP2009139176A5 (enrdf_load_stackoverflow) 2011-11-04
JP5309542B2 true JP5309542B2 (ja) 2013-10-09

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5588809B2 (ja) * 2010-09-16 2014-09-10 株式会社ブリヂストン 検査装置および検査方法
JP6028574B2 (ja) * 2013-01-09 2016-11-16 株式会社ニコン 形状測定装置及び構造物製造システム並びに構造物製造方法
JP5930984B2 (ja) * 2013-02-14 2016-06-08 学校法人 埼玉医科大学 形状測定装置
JP6234274B2 (ja) * 2014-02-28 2017-11-22 株式会社日立製作所 内面形状計測方法および装置
JP6690158B2 (ja) * 2015-09-11 2020-04-28 日本電産トーソク株式会社 内面検査装置および位置決め方法

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6130705A (ja) * 1984-07-24 1986-02-13 Rikagaku Kenkyusho 光触針装置
JPH0733996B2 (ja) * 1986-08-26 1995-04-12 三菱電機株式会社 管内面形状検出装置
JPS6358135A (ja) * 1986-08-28 1988-03-12 Mitsubishi Electric Corp 管内面形状測定装置
JPS6358130A (ja) * 1986-08-28 1988-03-12 Mitsubishi Electric Corp 管内面検査装置
JPS63243845A (ja) * 1987-03-31 1988-10-11 Sekiyu Sangyo Katsuseika Center 管内検査装置
JP2584630B2 (ja) * 1987-05-29 1997-02-26 理化学研究所 側面形状計測用光触針の構成
JPS6415642A (en) * 1987-07-09 1989-01-19 Petroleum Energy Center Found Apparatus for inspecting inside of tube
FR2631697B1 (fr) * 1988-05-17 1991-07-26 Hispano Suiza Sa Appareil pour le controle optique du profil interne d'un tube ou d'un alesage
JPH0711412B2 (ja) * 1990-07-05 1995-02-08 住友金属工業株式会社 管体の形状測定装置
JP3066813B2 (ja) * 1991-12-27 2000-07-17 日本電信電話株式会社 走査型管内形状検査装置
JP2947670B2 (ja) * 1992-06-15 1999-09-13 ダイハツ工業株式会社 シリンダブロックのボアの粗残り検査装置
JPH0637709U (ja) * 1992-10-20 1994-05-20 株式会社ワイ・エス・オプティカル シリンダブロックのボアの粗残り検査装置
JPH0743119A (ja) * 1993-07-27 1995-02-10 Nkk Corp 管体の寸法測定装置
JPH07260439A (ja) * 1994-03-18 1995-10-13 Mitsutoyo Corp 内側測定装置及び内側測定方法
JPH08189816A (ja) * 1995-01-10 1996-07-23 Sumitomo Electric Ind Ltd ダイス孔形状測定装置および測定方法
JPH08233545A (ja) * 1995-02-24 1996-09-13 Sumitomo Electric Ind Ltd 穴形状測定方法および測定装置
JPH09236412A (ja) * 1996-02-29 1997-09-09 Nippon Telegr & Teleph Corp <Ntt> 管路内変形計測方法及び装置
JP3633132B2 (ja) * 1996-09-02 2005-03-30 住友電気工業株式会社 光ファイバ被覆用ダイス選別方法
JP2000258141A (ja) * 1999-03-04 2000-09-22 Hitachi Ltd 有底円筒部材の内周面形状検査装置およびその方法、有底円筒部材の加工方法並びに電池の製造方法
JP4464519B2 (ja) * 2000-03-21 2010-05-19 オリンパス株式会社 光イメージング装置
JP4085616B2 (ja) * 2001-11-01 2008-05-14 株式会社日立プラントテクノロジー 内面形状計測方法及びその装置
JP3914530B2 (ja) * 2003-10-16 2007-05-16 株式会社日立製作所 欠陥検査装置
JP4560715B2 (ja) * 2004-07-22 2010-10-13 川村義肢株式会社 石膏型形状計測器
JP2006064512A (ja) * 2004-08-26 2006-03-09 Mitsutoyo Corp 表面性状測定装置
JP4775943B2 (ja) * 2005-08-24 2011-09-21 レーザーテック株式会社 検査装置及び検査方法並びにそれを用いたシリンダブロックの製造方法
JP2007071852A (ja) * 2005-09-02 2007-03-22 Akio Katsuki 深穴測定装置および深穴測定方法
JP2007183145A (ja) * 2006-01-06 2007-07-19 Ntn Corp 筒状内径測定方法および筒状内径測定装置
CN101558281B (zh) * 2006-12-13 2012-02-01 株式会社尼康 测量装置和测量方法

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