JP5226087B2 - 基板を介してヒートスプレッダ及び補強材を接地する方法、装置及びフリップチップパッケージ - Google Patents
基板を介してヒートスプレッダ及び補強材を接地する方法、装置及びフリップチップパッケージ Download PDFInfo
- Publication number
- JP5226087B2 JP5226087B2 JP2010548652A JP2010548652A JP5226087B2 JP 5226087 B2 JP5226087 B2 JP 5226087B2 JP 2010548652 A JP2010548652 A JP 2010548652A JP 2010548652 A JP2010548652 A JP 2010548652A JP 5226087 B2 JP5226087 B2 JP 5226087B2
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- JP
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- Prior art keywords
- substrate
- ground terminal
- heat spreader
- holes
- die
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/50—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor for integrated circuit devices, e.g. power bus, number of leads
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/10—Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49833—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers the chip support structure consisting of a plurality of insulating substrates
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/552—Protection against radiation, e.g. light or electromagnetic waves
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73253—Bump and layer connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L24/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01057—Lanthanum [La]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1515—Shape
- H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1517—Multilayer substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16195—Flat cap [not enclosing an internal cavity]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3025—Electromagnetic shielding
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Health & Medical Sciences (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Wire Bonding (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/038,911 US7968999B2 (en) | 2008-02-28 | 2008-02-28 | Process of grounding heat spreader/stiffener to a flip chip package using solder and film adhesive |
| US12/038,911 | 2008-02-28 | ||
| PCT/US2008/012957 WO2009108171A1 (en) | 2008-02-28 | 2008-11-20 | Process of grounding heat spreader/stiffener to a flip chip package using solder and film adhesive |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011513970A JP2011513970A (ja) | 2011-04-28 |
| JP2011513970A5 JP2011513970A5 (enExample) | 2012-03-08 |
| JP5226087B2 true JP5226087B2 (ja) | 2013-07-03 |
Family
ID=41012540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010548652A Expired - Fee Related JP5226087B2 (ja) | 2008-02-28 | 2008-11-20 | 基板を介してヒートスプレッダ及び補強材を接地する方法、装置及びフリップチップパッケージ |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7968999B2 (enExample) |
| EP (1) | EP2248165B1 (enExample) |
| JP (1) | JP5226087B2 (enExample) |
| KR (1) | KR101177039B1 (enExample) |
| CN (1) | CN101960586B (enExample) |
| TW (1) | TWI379364B (enExample) |
| WO (1) | WO2009108171A1 (enExample) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090321925A1 (en) * | 2008-06-30 | 2009-12-31 | Gealer Charles A | Injection molded metal ic package stiffener and package-to-package interconnect frame |
| US8247900B2 (en) * | 2009-12-29 | 2012-08-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Flip chip package having enhanced thermal and mechanical performance |
| US9254532B2 (en) | 2009-12-30 | 2016-02-09 | Intel Corporation | Methods of fabricating low melting point solder reinforced sealant and structures formed thereby |
| US20110292612A1 (en) * | 2010-05-26 | 2011-12-01 | Lsi Corporation | Electronic device having electrically grounded heat sink and method of manufacturing the same |
| US8823407B2 (en) | 2012-03-01 | 2014-09-02 | Integrated Device Technology, Inc. | Test assembly for verifying heat spreader grounding in a production test |
| US9041192B2 (en) * | 2012-08-29 | 2015-05-26 | Broadcom Corporation | Hybrid thermal interface material for IC packages with integrated heat spreader |
| US8946871B2 (en) | 2012-11-07 | 2015-02-03 | Lsi Corporation | Thermal improvement of integrated circuit packages |
| US9607951B2 (en) | 2013-08-05 | 2017-03-28 | Mediatek Singapore Pte. Ltd. | Chip package |
| US9282649B2 (en) * | 2013-10-08 | 2016-03-08 | Cisco Technology, Inc. | Stand-off block |
| US9735043B2 (en) | 2013-12-20 | 2017-08-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor packaging structure and process |
| CN105514080B (zh) * | 2014-10-11 | 2018-12-04 | 意法半导体有限公司 | 具有再分布层和加强件的电子器件及相关方法 |
| US9460980B2 (en) * | 2015-02-18 | 2016-10-04 | Qualcomm Incorporated | Systems, apparatus, and methods for heat dissipation |
| JP6569375B2 (ja) * | 2015-08-11 | 2019-09-04 | 株式会社ソシオネクスト | 半導体装置、半導体装置の製造方法及び電子装置 |
| US20170053858A1 (en) * | 2015-08-20 | 2017-02-23 | Intel Corporation | Substrate on substrate package |
| US20170170087A1 (en) | 2015-12-14 | 2017-06-15 | Intel Corporation | Electronic package that includes multiple supports |
| US20170287799A1 (en) * | 2016-04-01 | 2017-10-05 | Steven A. Klein | Removable ic package stiffener |
| CN107708328A (zh) * | 2017-06-27 | 2018-02-16 | 安徽华东光电技术研究所 | 提高芯片充分接地和散热的焊接方法 |
| JP6579396B2 (ja) * | 2017-07-18 | 2019-09-25 | 株式会社ダイレクト・アール・エフ | 半導体装置、及び基板 |
| US20190206839A1 (en) * | 2017-12-29 | 2019-07-04 | Intel Corporation | Electronic device package |
| US11081450B2 (en) * | 2019-09-27 | 2021-08-03 | Intel Corporation | Radiation shield around a component on a substrate |
| CN115116860B (zh) * | 2022-06-17 | 2025-10-28 | 北京比特大陆科技有限公司 | 芯片封装方法及芯片 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5736074A (en) * | 1995-06-30 | 1998-04-07 | Micro Fab Technologies, Inc. | Manufacture of coated spheres |
| JP3437369B2 (ja) | 1996-03-19 | 2003-08-18 | 松下電器産業株式会社 | チップキャリアおよびこれを用いた半導体装置 |
| JP2770820B2 (ja) * | 1996-07-01 | 1998-07-02 | 日本電気株式会社 | 半導体装置の実装構造 |
| US6051888A (en) * | 1997-04-07 | 2000-04-18 | Texas Instruments Incorporated | Semiconductor package and method for increased thermal dissipation of flip-chip semiconductor package |
| US6011304A (en) * | 1997-05-05 | 2000-01-04 | Lsi Logic Corporation | Stiffener ring attachment with holes and removable snap-in heat sink or heat spreader/lid |
| US6114761A (en) | 1998-01-20 | 2000-09-05 | Lsi Logic Corporation | Thermally-enhanced flip chip IC package with extruded heatspreader |
| JP2000114413A (ja) * | 1998-09-29 | 2000-04-21 | Sony Corp | 半導体装置、その製造方法および部品の実装方法 |
| US6985363B2 (en) * | 2000-10-02 | 2006-01-10 | Matsushita Electric Industrial Co., Ltd. | Card type recording medium and production method therefor |
| US6639321B1 (en) | 2000-10-06 | 2003-10-28 | Lsi Logic Corporation | Balanced coefficient of thermal expansion for flip chip ball grid array |
| US6407334B1 (en) * | 2000-11-30 | 2002-06-18 | International Business Machines Corporation | I/C chip assembly |
| US6528892B2 (en) | 2001-06-05 | 2003-03-04 | International Business Machines Corporation | Land grid array stiffener use with flexible chip carriers |
| KR100394809B1 (ko) | 2001-08-09 | 2003-08-14 | 삼성전자주식회사 | 반도체 패키지 및 그 제조 방법 |
| US6472762B1 (en) | 2001-08-31 | 2002-10-29 | Lsi Logic Corporation | Enhanced laminate flipchip package using a high CTE heatspreader |
| US6854633B1 (en) * | 2002-02-05 | 2005-02-15 | Micron Technology, Inc. | System with polymer masking flux for fabricating external contacts on semiconductor components |
| US6987032B1 (en) * | 2002-07-19 | 2006-01-17 | Asat Ltd. | Ball grid array package and process for manufacturing same |
| JP4639600B2 (ja) * | 2004-02-04 | 2011-02-23 | 凸版印刷株式会社 | 半導体パッケージ |
| JP2006013029A (ja) * | 2004-06-24 | 2006-01-12 | Toppan Printing Co Ltd | 半導体パッケージ |
| US7451432B2 (en) * | 2004-10-01 | 2008-11-11 | Microsoft Corporation | Transformation of componentized and extensible workflow to a declarative format |
| JP4860994B2 (ja) * | 2005-12-06 | 2012-01-25 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
-
2008
- 2008-02-28 US US12/038,911 patent/US7968999B2/en active Active
- 2008-11-10 TW TW097143311A patent/TWI379364B/zh not_active IP Right Cessation
- 2008-11-20 CN CN2008801275042A patent/CN101960586B/zh active Active
- 2008-11-20 JP JP2010548652A patent/JP5226087B2/ja not_active Expired - Fee Related
- 2008-11-20 KR KR1020107018929A patent/KR101177039B1/ko active Active
- 2008-11-20 WO PCT/US2008/012957 patent/WO2009108171A1/en not_active Ceased
- 2008-11-20 EP EP08872772.2A patent/EP2248165B1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| TWI379364B (en) | 2012-12-11 |
| EP2248165B1 (en) | 2017-01-18 |
| JP2011513970A (ja) | 2011-04-28 |
| CN101960586B (zh) | 2012-07-18 |
| KR101177039B1 (ko) | 2012-08-27 |
| KR20100126708A (ko) | 2010-12-02 |
| EP2248165A4 (en) | 2012-04-18 |
| WO2009108171A1 (en) | 2009-09-03 |
| TW200937539A (en) | 2009-09-01 |
| US20090218680A1 (en) | 2009-09-03 |
| US7968999B2 (en) | 2011-06-28 |
| CN101960586A (zh) | 2011-01-26 |
| EP2248165A1 (en) | 2010-11-10 |
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