JP5226087B2 - 基板を介してヒートスプレッダ及び補強材を接地する方法、装置及びフリップチップパッケージ - Google Patents
基板を介してヒートスプレッダ及び補強材を接地する方法、装置及びフリップチップパッケージ Download PDFInfo
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- JP5226087B2 JP5226087B2 JP2010548652A JP2010548652A JP5226087B2 JP 5226087 B2 JP5226087 B2 JP 5226087B2 JP 2010548652 A JP2010548652 A JP 2010548652A JP 2010548652 A JP2010548652 A JP 2010548652A JP 5226087 B2 JP5226087 B2 JP 5226087B2
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- heat spreader
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W40/00—Arrangements for thermal protection or thermal control
- H10W40/10—Arrangements for heating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W42/00—Arrangements for protection of devices
- H10W42/20—Arrangements for protection of devices protecting against electromagnetic or particle radiation, e.g. light, X-rays, gamma-rays or electrons
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
- H10W76/60—Seals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/401—Package configurations characterised by multiple insulating or insulated package substrates, interposers or RDLs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
- H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
- H10W70/68—Shapes or dispositions thereof
- H10W70/682—Shapes or dispositions thereof comprising holes having chips therein
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
- H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
- H10W70/68—Shapes or dispositions thereof
- H10W70/685—Shapes or dispositions thereof comprising multiple insulating layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/072—Connecting or disconnecting of bump connectors
- H10W72/07251—Connecting or disconnecting of bump connectors characterised by changes in properties of the bump connectors during connecting
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/874—On different surfaces
- H10W72/877—Bump connectors and die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
- H10W74/15—Encapsulations, e.g. protective coatings characterised by their shape or disposition on active surfaces of flip-chip devices, e.g. underfills
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
- H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
Landscapes
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Wire Bonding (AREA)
Description
Claims (22)
- 基板を介してヒートスプレッダ及び補強材を接地する方法であって、
接着フィルムを基板に張り付ける工程であって、前記接着フィルムが前記基板の多数の接地端子領域に対応する多数の第1の穴を有する環状リングとしてパターンニングされ、前記接地端子領域が電気的な接地を提供するように構成される工程と、
補強材を前記接着フィルムに張り付ける工程であって、前記補強材が前記接着フィルムの前記多数の第1の穴と前記基板の前記接地端子領域とに対応する多数の第2の穴を有し、前記接地端子領域が前記第1及び第2の穴を介して露出される工程と、
集積回路を含むダイを前記接着フィルムの前記環状リングの内部の前記基板に張り付ける工程と、
前記ダイがヒートスプレッダに電気的に接続されるように、前記ヒートスプレッダを前記ダイと前記補強材とに張り付ける工程であって、前記ヒートスプレッダが前記基板の前記接地端子領域に電気的に接続されるように、前記ヒートスプレッダが前記補強材に張り付けられる工程と、
を備える方法。 - 前記第2の穴の内部にはんだペーストを刷り込む工程をさらに備える請求項1に記載の方法。
- 前記第2の穴の内部にはんだペーストを施す工程をさらに備える請求項1に記載の方法。
- 前記第2の穴の内部にフラックスを施す工程と、
前記第2の穴の内部にはんだボールを置く工程と、
をさらに備える請求項1に記載の方法。 - 前記第2の穴の中にフラックスコーティングされたはんだボールを置く工程をさらに備える請求項1に記載の方法。
- 前記ダイが電気的に導電性の材料を用いて前記ヒートスプレッダに張り付けられる請求項1に記載の方法。
- 電気的な接地を提供するように構成された多数の接地端子領域を有する基板と、
前記基板の前記多数の接地端子領域に対応する多数の第1の穴を有する補強材と、
前記多数の接地端子領域と前記多数の第1の穴とに対応する多数の第2の穴を有する環状リングとしてパターンニングされた接着フィルムであって、前記接地端子領域が前記第1及び第2の穴を介して露出されるように、前記補強材を前記基板に機械的に張り付けるように構成された接着フィルムと、
前記接着フィルムの前記環状リングの内部の前記基板に電気的に張り付けるように構成されたダイであって、前記ダイがヒートスプレッダに電気的に張り付けられ、前記ヒートスプレッダが前記接地端子領域に電気的に接続されるように、前記ヒートスプレッダが前記補強材に張り付けられたダイと、
を備えた装置。 - 前記接地端子領域が金属でコーティングされた請求項7に記載の装置。
- 前記第1及び第2の穴の内部にはんだペーストをさらに備える請求項7に記載の装置。
- 前記第1及び第2の穴の内部にフラックスとはんだボールとをさらに備える請求項7に記載の装置。
- はんだが前記第1及び第2の穴を介して前記補強材を前記接地端子領域に電気的に接続する請求項7に記載の装置。
- はんだが前記第1及び第2の穴を介して前記補強材とヒートスプレッダとを前記接地端子領域に電気的に接続する請求項7に記載の装置。
- 前記ダイを前記基板に機械的及び電気的に接続するように構成されたはんだバンプのエリアアレイ接続配線をさらに備える請求項7に記載の装置。
- 前記ダイが電気的に導電性の材料によって前記ヒートスプレッダに張り付けられる請求項7に記載の装置。
- 前記基板の反対側の前記ダイの面が前記ヒートスプレッダ、前記補強材、及び前記接地端子領域を含む電気的に導電性の接続経路を介して電気的に接地される請求項7に記載の装置。
- 電気的な接地を提供するように構成された多数の接地端子領域を有する基板と、
前記基板の前記多数の接地端子領域に対応する多数の第1の穴を有する補強材と、
前記多数の接地端子領域と前記多数の第1の穴とに対応する多数の第2の穴を有する環状リングとしてパターンニングされた接着フィルムであって、前記接地端子領域が前記第1及び第2の穴を介して露出されるように、前記補強材を前記基板に機械的に張り付けるように構成された接着フィルムと、
前記接着フィルムの前記環状リングの内部の前記基板に電気的に接続されたダイと、
前記ダイ、前記補強材、及び前記接地端子領域に電気的に接続されたヒートスプレッダと、
を備える、集積回路をパッケージしたフリップチップパッケージ。 - 前記第1及び第2の穴の内部にはんだペーストをさらに備える請求項16に記載の集積回路をパッケージしたフリップチップパッケージ。
- 前記第1及び第2の穴の内部にフラックスとはんだボールとをさらに備える請求項16に記載の集積回路をパッケージしたフリップチップパッケージ。
- 前記ヒートスプレッダが1つ以上の電気的に導電性の材料を介して前記ダイと前記接地端子領域とに接続される請求項16に記載の集積回路をパッケージしたフリップチップパッケージ。
- 前記ヒートスプレッダが電気的に導電性のエポキシを用いて前記補強材に張り付けられる請求項19に記載の集積回路をパッケージしたフリップチップパッケージ。
- 前記ヒートスプレッダが前記第1及び第2の穴の中のはんだを介して前記補強材に張り付けられる請求項19に記載の集積回路をパッケージしたフリップチップパッケージ。
- 前記ダイが前記補強材の張り付けに先立って前記基板に張り付けられる請求項1に記載の方法。
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/038,911 | 2008-02-28 | ||
| US12/038,911 US7968999B2 (en) | 2008-02-28 | 2008-02-28 | Process of grounding heat spreader/stiffener to a flip chip package using solder and film adhesive |
| PCT/US2008/012957 WO2009108171A1 (en) | 2008-02-28 | 2008-11-20 | Process of grounding heat spreader/stiffener to a flip chip package using solder and film adhesive |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011513970A JP2011513970A (ja) | 2011-04-28 |
| JP2011513970A5 JP2011513970A5 (ja) | 2012-03-08 |
| JP5226087B2 true JP5226087B2 (ja) | 2013-07-03 |
Family
ID=41012540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010548652A Expired - Fee Related JP5226087B2 (ja) | 2008-02-28 | 2008-11-20 | 基板を介してヒートスプレッダ及び補強材を接地する方法、装置及びフリップチップパッケージ |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7968999B2 (ja) |
| EP (1) | EP2248165B1 (ja) |
| JP (1) | JP5226087B2 (ja) |
| KR (1) | KR101177039B1 (ja) |
| CN (1) | CN101960586B (ja) |
| TW (1) | TWI379364B (ja) |
| WO (1) | WO2009108171A1 (ja) |
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| US9735043B2 (en) | 2013-12-20 | 2017-08-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor packaging structure and process |
| CN105514080B (zh) * | 2014-10-11 | 2018-12-04 | 意法半导体有限公司 | 具有再分布层和加强件的电子器件及相关方法 |
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| JP6569375B2 (ja) * | 2015-08-11 | 2019-09-04 | 株式会社ソシオネクスト | 半導体装置、半導体装置の製造方法及び電子装置 |
| US20170053858A1 (en) * | 2015-08-20 | 2017-02-23 | Intel Corporation | Substrate on substrate package |
| US20170170087A1 (en) | 2015-12-14 | 2017-06-15 | Intel Corporation | Electronic package that includes multiple supports |
| US20170287799A1 (en) * | 2016-04-01 | 2017-10-05 | Steven A. Klein | Removable ic package stiffener |
| CN107708328A (zh) * | 2017-06-27 | 2018-02-16 | 安徽华东光电技术研究所 | 提高芯片充分接地和散热的焊接方法 |
| JP6579396B2 (ja) * | 2017-07-18 | 2019-09-25 | 株式会社ダイレクト・アール・エフ | 半導体装置、及び基板 |
| US20190206839A1 (en) * | 2017-12-29 | 2019-07-04 | Intel Corporation | Electronic device package |
| US11081450B2 (en) | 2019-09-27 | 2021-08-03 | Intel Corporation | Radiation shield around a component on a substrate |
| CN115116860B (zh) * | 2022-06-17 | 2025-10-28 | 北京比特大陆科技有限公司 | 芯片封装方法及芯片 |
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| JP2770820B2 (ja) * | 1996-07-01 | 1998-07-02 | 日本電気株式会社 | 半導体装置の実装構造 |
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-
2008
- 2008-02-28 US US12/038,911 patent/US7968999B2/en active Active
- 2008-11-10 TW TW097143311A patent/TWI379364B/zh not_active IP Right Cessation
- 2008-11-20 CN CN2008801275042A patent/CN101960586B/zh active Active
- 2008-11-20 EP EP08872772.2A patent/EP2248165B1/en active Active
- 2008-11-20 JP JP2010548652A patent/JP5226087B2/ja not_active Expired - Fee Related
- 2008-11-20 KR KR1020107018929A patent/KR101177039B1/ko active Active
- 2008-11-20 WO PCT/US2008/012957 patent/WO2009108171A1/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| CN101960586A (zh) | 2011-01-26 |
| US7968999B2 (en) | 2011-06-28 |
| EP2248165B1 (en) | 2017-01-18 |
| EP2248165A1 (en) | 2010-11-10 |
| TWI379364B (en) | 2012-12-11 |
| EP2248165A4 (en) | 2012-04-18 |
| US20090218680A1 (en) | 2009-09-03 |
| CN101960586B (zh) | 2012-07-18 |
| TW200937539A (en) | 2009-09-01 |
| KR20100126708A (ko) | 2010-12-02 |
| KR101177039B1 (ko) | 2012-08-27 |
| WO2009108171A1 (en) | 2009-09-03 |
| JP2011513970A (ja) | 2011-04-28 |
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