JP5217239B2 - 露光方法及び装置、メンテナンス方法、並びにデバイス製造方法 - Google Patents

露光方法及び装置、メンテナンス方法、並びにデバイス製造方法 Download PDF

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JP5217239B2
JP5217239B2 JP2007132800A JP2007132800A JP5217239B2 JP 5217239 B2 JP5217239 B2 JP 5217239B2 JP 2007132800 A JP2007132800 A JP 2007132800A JP 2007132800 A JP2007132800 A JP 2007132800A JP 5217239 B2 JP5217239 B2 JP 5217239B2
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liquid
substrate
exposure
cleaning
during
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JP2008283156A (ja
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勝志 中野
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Nikon Corp
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Nikon Corp
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70925—Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2007132800A 2006-05-18 2007-05-18 露光方法及び装置、メンテナンス方法、並びにデバイス製造方法 Expired - Fee Related JP5217239B2 (ja)

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JP2007132800A JP5217239B2 (ja) 2006-05-18 2007-05-18 露光方法及び装置、メンテナンス方法、並びにデバイス製造方法

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JP2006139614 2006-05-18
JP2006139614 2006-05-18
JP2006140957 2006-05-19
JP2006140957 2006-05-19
JP2007103343 2007-04-10
JP2007103343 2007-04-10
JP2007132800A JP5217239B2 (ja) 2006-05-18 2007-05-18 露光方法及び装置、メンテナンス方法、並びにデバイス製造方法

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JP2008283156A JP2008283156A (ja) 2008-11-20
JP5217239B2 true JP5217239B2 (ja) 2013-06-19

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JP2012080199A Pending JP2012164992A (ja) 2006-05-18 2012-03-30 露光方法及び装置、メンテナンス方法、並びにデバイス製造方法

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US (2) US8514366B2 (enExample)
EP (1) EP2037486A4 (enExample)
JP (2) JP5217239B2 (enExample)
KR (1) KR20090018024A (enExample)
CN (2) CN102298274A (enExample)
SG (1) SG175671A1 (enExample)
TW (1) TW200805000A (enExample)
WO (1) WO2007135990A1 (enExample)

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US11981143B2 (en) 2018-07-13 2024-05-14 Hewlett-Packard Development Company, L.P. Print liquid supply

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KR20090018024A (ko) 2009-02-19
US20090066922A1 (en) 2009-03-12
CN102298274A (zh) 2011-12-28
TW200805000A (en) 2008-01-16
EP2037486A1 (en) 2009-03-18
SG175671A1 (en) 2011-11-28
CN101410948A (zh) 2009-04-15
EP2037486A4 (en) 2012-01-11
CN101410948B (zh) 2011-10-26
JP2008283156A (ja) 2008-11-20
US8514366B2 (en) 2013-08-20
WO2007135990A1 (ja) 2007-11-29
US20130301019A1 (en) 2013-11-14

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