JP5205054B2 - 凹部形成された半導体デバイス - Google Patents
凹部形成された半導体デバイス Download PDFInfo
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- JP5205054B2 JP5205054B2 JP2007529864A JP2007529864A JP5205054B2 JP 5205054 B2 JP5205054 B2 JP 5205054B2 JP 2007529864 A JP2007529864 A JP 2007529864A JP 2007529864 A JP2007529864 A JP 2007529864A JP 5205054 B2 JP5205054 B2 JP 5205054B2
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- 239000004065 semiconductor Substances 0.000 title claims description 71
- 239000010410 layer Substances 0.000 claims description 241
- 239000012212 insulator Substances 0.000 claims description 61
- 238000000034 method Methods 0.000 claims description 30
- 239000011229 interlayer Substances 0.000 claims description 24
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004020 conductor Substances 0.000 description 32
- 230000004888 barrier function Effects 0.000 description 29
- 239000000463 material Substances 0.000 description 27
- 230000008569 process Effects 0.000 description 23
- 229910052751 metal Inorganic materials 0.000 description 17
- 239000002184 metal Substances 0.000 description 17
- 238000012545 processing Methods 0.000 description 17
- 150000001875 compounds Chemical class 0.000 description 9
- 239000000758 substrate Substances 0.000 description 8
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 239000002019 doping agent Substances 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000003631 wet chemical etching Methods 0.000 description 2
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- KXNLCSXBJCPWGL-UHFFFAOYSA-N [Ga].[As].[In] Chemical compound [Ga].[As].[In] KXNLCSXBJCPWGL-UHFFFAOYSA-N 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- FHUGMWWUMCDXBC-UHFFFAOYSA-N gold platinum titanium Chemical compound [Ti][Pt][Au] FHUGMWWUMCDXBC-UHFFFAOYSA-N 0.000 description 1
- ZNKMCMOJCDFGFT-UHFFFAOYSA-N gold titanium Chemical compound [Ti].[Au] ZNKMCMOJCDFGFT-UHFFFAOYSA-N 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- 229910001258 titanium gold Inorganic materials 0.000 description 1
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7782—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET
- H01L29/7783—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET using III-V semiconductor material
- H01L29/7785—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET using III-V semiconductor material with more than one donor layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28575—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising AIIIBV compounds
- H01L21/28587—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising AIIIBV compounds characterised by the sectional shape, e.g. T, inverted T
- H01L21/28593—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising AIIIBV compounds characterised by the sectional shape, e.g. T, inverted T asymmetrical sectional shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66446—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET]
- H01L29/66462—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET] with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Junction Field-Effect Transistors (AREA)
Description
異なる図面における同じ参照符号の使用は、同様な、または、同じアイテムを指示する。同様に、図の要素は、簡素化および明確さのために示されており、必ずしも一定比例尺で描かれていないことを当業者は理解するであろう。たとえば、本発明の実施形態の理解を深めるのに役立つために、図における要素の一部の寸法は、他の要素に対して誇張されてもよい。
Claims (4)
- 半導体構造であって、
第1半導体層と、
前記第1半導体層上に設けられた第2半導体層と、
前記第2半導体層上に設けられ、凹部を有する第3半導体層と、
前記第3半導体層上に設けられ、凹部を有する第4半導体層と、
前記第3半導体層の凹部から露出する前記第2半導体層の部分上に位置するように、前記第3半導体層の凹部内及び前記第4半導体層の凹部内に形成される絶縁体層と、
前記絶縁体層上に設けられる層間絶縁体層と、
前記層間絶縁体層、前記絶縁体層及び前記第2半導体層を貫通するように形成された開口と、
前記第1半導体層に結合するように前記開口内に形成されるゲートと、
前記絶縁体層上に設けられ、前記層間絶縁体層によって覆われるフィールドプレートとを備える半導体構造。 - 前記フィールドプレートは前記層間絶縁体層を介して前記ゲートに隣接している請求項1に記載の半導体構造。
- 前記フィールドプレートは、前記第2半導体層から電気的に絶縁されている請求項1又は2に記載の半導体構造。
- 半導体構造の製造方法であって、
第1半導体層を形成する工程と、
前記第1半導体層上に第2半導体層を形成する工程と、
前記第2半導体層上に第3半導体層を形成する工程と、
前記第3半導体層上に第4半導体層を形成する工程と、
前記第4半導体層に凹部を形成する工程と、
前記第3半導体層に凹部を形成する工程と、
前記第3半導体層の凹部から露出する前記第2半導体層の部分上に位置するように、前記第3半導体層の凹部内及び前記第4半導体層の凹部内に絶縁体層を形成する工程と、
前記絶縁体層上に層間絶縁体層を形成する工程と、
前記層間絶縁体層、前記絶縁体層及び前記第2半導体層を貫通するように開口を形成する工程と、
前記第1半導体層に結合するように前記開口内にゲートを形成する工程と、
前記絶縁体層上に、前記層間絶縁体層によって覆われるフィールドプレートを形成する工程とを備える方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/925,855 | 2004-08-25 | ||
US10/925,855 US7229903B2 (en) | 2004-08-25 | 2004-08-25 | Recessed semiconductor device |
PCT/US2005/026064 WO2006025971A1 (en) | 2004-08-25 | 2005-07-22 | Recessed semiconductor device |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2008511172A JP2008511172A (ja) | 2008-04-10 |
JP2008511172A5 JP2008511172A5 (ja) | 2008-09-04 |
JP5205054B2 true JP5205054B2 (ja) | 2013-06-05 |
Family
ID=35941808
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007529864A Active JP5205054B2 (ja) | 2004-08-25 | 2005-07-22 | 凹部形成された半導体デバイス |
Country Status (5)
Country | Link |
---|---|
US (1) | US7229903B2 (ja) |
JP (1) | JP5205054B2 (ja) |
CN (1) | CN101002336A (ja) |
TW (1) | TWI402986B (ja) |
WO (1) | WO2006025971A1 (ja) |
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US9773877B2 (en) * | 2004-05-13 | 2017-09-26 | Cree, Inc. | Wide bandgap field effect transistors with source connected field plates |
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US11791385B2 (en) * | 2005-03-11 | 2023-10-17 | Wolfspeed, Inc. | Wide bandgap transistors with gate-source field plates |
JP2008021766A (ja) * | 2006-07-12 | 2008-01-31 | Nippon Telegr & Teleph Corp <Ntt> | 電界効果型トランジスタおよびその製造方法 |
JP4304198B2 (ja) | 2006-09-15 | 2009-07-29 | 株式会社東芝 | 半導体装置 |
JP5105160B2 (ja) * | 2006-11-13 | 2012-12-19 | クリー インコーポレイテッド | トランジスタ |
US9647103B2 (en) * | 2007-05-04 | 2017-05-09 | Sensor Electronic Technology, Inc. | Semiconductor device with modulated field element isolated from gate electrode |
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CN101740388B (zh) * | 2008-11-10 | 2011-05-11 | 中芯国际集成电路制造(上海)有限公司 | 金属半导体场效应晶体管的制造方法 |
US8008977B2 (en) * | 2009-04-14 | 2011-08-30 | Triquint Semiconductor, Inc. | Field-plated transistor including feedback resistor |
US8754496B2 (en) * | 2009-04-14 | 2014-06-17 | Triquint Semiconductor, Inc. | Field effect transistor having a plurality of field plates |
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US8884308B2 (en) * | 2011-11-29 | 2014-11-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | High electron mobility transistor structure with improved breakdown voltage performance |
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KR101903509B1 (ko) * | 2012-07-11 | 2018-10-05 | 한국전자통신연구원 | 전계효과형 화합물반도체소자의 제조방법 |
US9142626B1 (en) * | 2013-04-23 | 2015-09-22 | Hrl Laboratories, Llc | Stepped field plate wide bandgap field-effect transistor and method |
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JP6496149B2 (ja) * | 2015-01-22 | 2019-04-03 | ローム株式会社 | 半導体装置および半導体装置の製造方法 |
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2004
- 2004-08-25 US US10/925,855 patent/US7229903B2/en active Active
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2005
- 2005-07-22 CN CNA2005800270156A patent/CN101002336A/zh active Pending
- 2005-07-22 JP JP2007529864A patent/JP5205054B2/ja active Active
- 2005-07-22 WO PCT/US2005/026064 patent/WO2006025971A1/en active Application Filing
- 2005-08-10 TW TW094127146A patent/TWI402986B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
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US7229903B2 (en) | 2007-06-12 |
CN101002336A (zh) | 2007-07-18 |
TWI402986B (zh) | 2013-07-21 |
JP2008511172A (ja) | 2008-04-10 |
TW200620657A (en) | 2006-06-16 |
US20060043416A1 (en) | 2006-03-02 |
WO2006025971A1 (en) | 2006-03-09 |
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