JP5194393B2 - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法 Download PDF

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Publication number
JP5194393B2
JP5194393B2 JP2006174429A JP2006174429A JP5194393B2 JP 5194393 B2 JP5194393 B2 JP 5194393B2 JP 2006174429 A JP2006174429 A JP 2006174429A JP 2006174429 A JP2006174429 A JP 2006174429A JP 5194393 B2 JP5194393 B2 JP 5194393B2
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JP
Japan
Prior art keywords
film
forming
fluorine
heat treatment
wiring
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2006174429A
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English (en)
Japanese (ja)
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JP2008004841A (ja
JP2008004841A5 (https=
Inventor
正弘 堀込
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Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2006174429A priority Critical patent/JP5194393B2/ja
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to PCT/JP2007/061450 priority patent/WO2007148535A1/ja
Priority to KR1020087029046A priority patent/KR20090003368A/ko
Priority to EP07744793A priority patent/EP2034517A4/en
Priority to CNA2007800206271A priority patent/CN101461043A/zh
Priority to US12/305,049 priority patent/US20090134518A1/en
Priority to TW096122758A priority patent/TW200811953A/zh
Publication of JP2008004841A publication Critical patent/JP2008004841A/ja
Priority to IL195951A priority patent/IL195951A0/en
Publication of JP2008004841A5 publication Critical patent/JP2008004841A5/ja
Application granted granted Critical
Publication of JP5194393B2 publication Critical patent/JP5194393B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/425—Barrier, adhesion or liner layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/40—Formation of materials, e.g. in the shape of layers or pillars of conductive or resistive materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6326—Deposition processes
    • H10P14/6328—Deposition from the gas or vapour phase
    • H10P14/6334—Deposition from the gas or vapour phase using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
    • H10P14/6336—Deposition from the gas or vapour phase using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/65—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by treatments performed before or after the formation of the materials
    • H10P14/6502—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by treatments performed before or after the formation of the materials of treatments performed before formation of the materials
    • H10P14/6506—Formation of intermediate materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/032—Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers
    • H10W20/033—Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers in openings in dielectrics
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/032—Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers
    • H10W20/033—Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers in openings in dielectrics
    • H10W20/035—Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers in openings in dielectrics combinations of barrier, adhesion or liner layers, e.g. multi-layered barrier layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/45—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their insulating parts
    • H10W20/47—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their insulating parts comprising two or more dielectric layers having different properties, e.g. different dielectric constants
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/45—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their insulating parts
    • H10W20/48—Insulating materials thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/68—Organic materials, e.g. photoresists
    • H10P14/683—Organic materials, e.g. photoresists carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC
    • H10P14/687—Organic materials, e.g. photoresists carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC the materials being fluorocarbon compounds, e.g. (CHxFy) n or polytetrafluoroethylene

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  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP2006174429A 2006-06-23 2006-06-23 半導体装置の製造方法 Expired - Fee Related JP5194393B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2006174429A JP5194393B2 (ja) 2006-06-23 2006-06-23 半導体装置の製造方法
KR1020087029046A KR20090003368A (ko) 2006-06-23 2007-06-06 반도체 장치 및 반도체 장치의 제조 방법
EP07744793A EP2034517A4 (en) 2006-06-23 2007-06-06 SEMICONDUCTOR COMPONENT AND SEMICONDUCTOR COMPONENT MANUFACTURING METHOD
CNA2007800206271A CN101461043A (zh) 2006-06-23 2007-06-06 半导体装置及半导体装置的制造方法
PCT/JP2007/061450 WO2007148535A1 (ja) 2006-06-23 2007-06-06 半導体装置及び半導体装置の製造方法
US12/305,049 US20090134518A1 (en) 2006-06-23 2007-06-06 Semiconductor device and manufacturing method of semiconductor device
TW096122758A TW200811953A (en) 2006-06-23 2007-06-23 Semiconductor device and semiconductor device manufacturing method
IL195951A IL195951A0 (en) 2006-06-23 2008-12-15 Semiconductor device and manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006174429A JP5194393B2 (ja) 2006-06-23 2006-06-23 半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JP2008004841A JP2008004841A (ja) 2008-01-10
JP2008004841A5 JP2008004841A5 (https=) 2009-08-13
JP5194393B2 true JP5194393B2 (ja) 2013-05-08

Family

ID=38833277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006174429A Expired - Fee Related JP5194393B2 (ja) 2006-06-23 2006-06-23 半導体装置の製造方法

Country Status (8)

Country Link
US (1) US20090134518A1 (https=)
EP (1) EP2034517A4 (https=)
JP (1) JP5194393B2 (https=)
KR (1) KR20090003368A (https=)
CN (1) CN101461043A (https=)
IL (1) IL195951A0 (https=)
TW (1) TW200811953A (https=)
WO (1) WO2007148535A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120049239A (ko) * 2009-06-26 2012-05-16 도쿄엘렉트론가부시키가이샤 플라즈마 처리 방법
JP5364765B2 (ja) 2011-09-07 2013-12-11 東京エレクトロン株式会社 半導体装置及び半導体装置の製造方法
US8691709B2 (en) 2011-09-24 2014-04-08 Tokyo Electron Limited Method of forming metal carbide barrier layers for fluorocarbon films
JP2015195282A (ja) * 2014-03-31 2015-11-05 東京エレクトロン株式会社 成膜方法、半導体製造方法及び半導体装置
JP5778820B1 (ja) * 2014-04-09 2015-09-16 日本特殊陶業株式会社 スパークプラグ
TW201622205A (zh) * 2014-08-04 2016-06-16 吉坤日礦日石能源股份有限公司 具有凹凸圖案之構件的製造方法
WO2016080034A1 (ja) * 2014-11-18 2016-05-26 三菱電機株式会社 信号伝送絶縁デバイス及びパワー半導体モジュール

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03140496A (ja) * 1989-10-25 1991-06-14 Daido Steel Co Ltd 母材の表面着色方法
JP3158598B2 (ja) * 1991-02-26 2001-04-23 日本電気株式会社 半導体装置およびその製造方法
JP4355039B2 (ja) * 1998-05-07 2009-10-28 東京エレクトロン株式会社 半導体装置及び半導体装置の製造方法
JP2000208622A (ja) * 1999-01-12 2000-07-28 Tokyo Electron Ltd 半導体装置及びその製造方法
DE60037395T2 (de) * 1999-03-09 2008-11-27 Tokyo Electron Ltd. Herstellung eines halbleiter-bauelementes
JP4260764B2 (ja) * 1999-03-09 2009-04-30 東京エレクトロン株式会社 半導体装置の製造方法
EP1077479A1 (en) * 1999-08-17 2001-02-21 Applied Materials, Inc. Post-deposition treatment to enchance properties of Si-O-C low K film
JP2004509467A (ja) * 2000-09-18 2004-03-25 エーシーエム　リサーチ，インコーポレイティド 超低誘電率誘電体と金属の組み合わせ
JP3817463B2 (ja) * 2001-11-12 2006-09-06 新光電気工業株式会社 多層配線基板の製造方法
JP2005026386A (ja) * 2003-07-01 2005-01-27 Matsushita Electric Ind Co Ltd 半導体装置
JP4413556B2 (ja) * 2003-08-15 2010-02-10 東京エレクトロン株式会社 成膜方法、半導体装置の製造方法
JP2005109138A (ja) 2003-09-30 2005-04-21 Matsushita Electric Ind Co Ltd 半導体装置の製造方法
JP4715207B2 (ja) * 2004-01-13 2011-07-06 東京エレクトロン株式会社 半導体装置の製造方法及び成膜システム
JP4194521B2 (ja) 2004-04-07 2008-12-10 東京エレクトロン株式会社 半導体装置の製造方法
JP4555143B2 (ja) * 2004-05-11 2010-09-29 東京エレクトロン株式会社 基板の処理方法
US20060113675A1 (en) * 2004-12-01 2006-06-01 Chung-Liang Chang Barrier material and process for Cu interconnect
JP2006190884A (ja) * 2005-01-07 2006-07-20 Toshiba Corp 半導体装置及び半導体装置の製造方法
JP2006135363A (ja) * 2006-02-14 2006-05-25 Renesas Technology Corp 半導体装置および半導体装置の製造方法

Also Published As

Publication number Publication date
WO2007148535A1 (ja) 2007-12-27
JP2008004841A (ja) 2008-01-10
CN101461043A (zh) 2009-06-17
IL195951A0 (en) 2009-09-01
US20090134518A1 (en) 2009-05-28
KR20090003368A (ko) 2009-01-09
EP2034517A1 (en) 2009-03-11
EP2034517A4 (en) 2010-07-21
TW200811953A (en) 2008-03-01

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