JP5171277B2 - シリコンウェーハの熱処理方法及び該方法で処理したシリコンウェーハ - Google Patents
シリコンウェーハの熱処理方法及び該方法で処理したシリコンウェーハ Download PDFInfo
- Publication number
- JP5171277B2 JP5171277B2 JP2008005928A JP2008005928A JP5171277B2 JP 5171277 B2 JP5171277 B2 JP 5171277B2 JP 2008005928 A JP2008005928 A JP 2008005928A JP 2008005928 A JP2008005928 A JP 2008005928A JP 5171277 B2 JP5171277 B2 JP 5171277B2
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- Prior art keywords
- silicon wafer
- wafer
- oxygen
- silicon
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 92
- 229910052710 silicon Inorganic materials 0.000 title claims description 91
- 239000010703 silicon Substances 0.000 title claims description 91
- 238000000034 method Methods 0.000 title claims description 84
- 238000010438 heat treatment Methods 0.000 title claims description 38
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 57
- 239000001301 oxygen Substances 0.000 claims description 57
- 229910052760 oxygen Inorganic materials 0.000 claims description 56
- 230000008569 process Effects 0.000 claims description 49
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 26
- 238000001816 cooling Methods 0.000 claims description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 17
- 230000006911 nucleation Effects 0.000 claims description 15
- 238000001556 precipitation Methods 0.000 claims description 13
- 229910052757 nitrogen Inorganic materials 0.000 claims description 12
- 238000010899 nucleation Methods 0.000 claims description 11
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 10
- 239000007858 starting material Substances 0.000 claims description 9
- 235000012239 silicon dioxide Nutrition 0.000 claims description 8
- 239000000377 silicon dioxide Substances 0.000 claims description 8
- 229910052681 coesite Inorganic materials 0.000 claims description 6
- 229910052906 cristobalite Inorganic materials 0.000 claims description 6
- 229910052682 stishovite Inorganic materials 0.000 claims description 6
- 229910052905 tridymite Inorganic materials 0.000 claims description 6
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 113
- 239000013078 crystal Substances 0.000 description 32
- 239000010410 layer Substances 0.000 description 24
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 22
- 230000007547 defect Effects 0.000 description 17
- 239000001257 hydrogen Substances 0.000 description 14
- 229910052739 hydrogen Inorganic materials 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 13
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 12
- 229910052786 argon Inorganic materials 0.000 description 11
- 238000005498 polishing Methods 0.000 description 11
- 238000000137 annealing Methods 0.000 description 9
- 238000009792 diffusion process Methods 0.000 description 9
- 238000011109 contamination Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 230000008034 disappearance Effects 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 230000002159 abnormal effect Effects 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000002344 surface layer Substances 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000005247 gettering Methods 0.000 description 3
- 229910052756 noble gas Inorganic materials 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 238000004886 process control Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 238000007788 roughening Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 238000010583 slow cooling Methods 0.000 description 2
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000000877 morphologic effect Effects 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000004151 rapid thermal annealing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000003325 tomography Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/322—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
- H01L21/3221—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of silicon bodies, e.g. for gettering
- H01L21/3225—Thermally inducing defects using oxygen present in the silicon body for intrinsic gettering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
- Y10T117/1088—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
該熱処理を、例えばポリシング後に行うことができる。このことは、特に、熱処理を、ウェーハ表面を粗面化しないか又は僅かに粗面化するにすぎない雰囲気下で、例えば酸素含有雰囲気下で実施する際に適当である。
Claims (7)
- 酸素濃度が5・10 17 at/cm 3 以上7・10 17 at/cm 3 未満であるシリコンウェーハを少なくとも一時的に酸素含有雰囲気に曝し、その際熱処理を、不等式:
- 前記方法のための出発物質として、160nm未満の平均COP直径を有するシリコンウェーハを使用する、請求項1記載の方法。
- シリコンウェーハの裏側面を少なくとも冷却過程中、窒素含有雰囲気に曝す、請求項1または2記載の方法。
- シリコンウェーハを熱処理後にポリシングする、請求項1から3までのいずれか1項記載の方法。
- 請求項1に記載の方法を用いて製造されたシリコンウェーハであって、バルク内に少なくとも107cm-3の酸素析出のための核形成中心の密度、及びウェーハ表側面に少なくとも1μmの厚さを有する核形成中心不含のゾーン、並びにウェーハ厚さの少なくとも50%に相当する深さまで10000cm-3未満のCOP密度を有することを特徴とするシリコンウェーハ。
- 空孔濃度の非対称プロフィールを有する、請求項5記載のシリコンウェーハ。
- 窒素を含有し、その際窒素濃度がウェーハ面に対して垂直な任意のグレードに沿って一定でない、請求項5記載のシリコンウェーハ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10205084A DE10205084B4 (de) | 2002-02-07 | 2002-02-07 | Verfahren zur thermischen Behandlung einer Siliciumscheibe sowie dadurch hergestellte Siliciumscheibe |
DE10205084.8 | 2002-02-07 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003029617A Division JP2003297840A (ja) | 2002-02-07 | 2003-02-06 | シリコンウェーハの熱処理方法及び該方法で処理したシリコンウェーハ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008135773A JP2008135773A (ja) | 2008-06-12 |
JP5171277B2 true JP5171277B2 (ja) | 2013-03-27 |
Family
ID=27618401
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003029617A Withdrawn JP2003297840A (ja) | 2002-02-07 | 2003-02-06 | シリコンウェーハの熱処理方法及び該方法で処理したシリコンウェーハ |
JP2008005928A Expired - Lifetime JP5171277B2 (ja) | 2002-02-07 | 2008-01-15 | シリコンウェーハの熱処理方法及び該方法で処理したシリコンウェーハ |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003029617A Withdrawn JP2003297840A (ja) | 2002-02-07 | 2003-02-06 | シリコンウェーハの熱処理方法及び該方法で処理したシリコンウェーハ |
Country Status (6)
Country | Link |
---|---|
US (1) | US6803331B2 (ja) |
JP (2) | JP2003297840A (ja) |
KR (1) | KR100547216B1 (ja) |
CN (1) | CN1217393C (ja) |
DE (1) | DE10205084B4 (ja) |
TW (1) | TW593795B (ja) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004073057A1 (ja) * | 2003-02-14 | 2004-08-26 | Sumitomo Mitsubishi Silicon Corporation | シリコンウェーハの製造方法 |
DE10336271B4 (de) | 2003-08-07 | 2008-02-07 | Siltronic Ag | Siliciumscheibe und Verfahren zu deren Herstellung |
KR100531552B1 (ko) * | 2003-09-05 | 2005-11-28 | 주식회사 하이닉스반도체 | 실리콘 웨이퍼 및 그 제조방법 |
US7041226B2 (en) * | 2003-11-04 | 2006-05-09 | Lexmark International, Inc. | Methods for improving flow through fluidic channels |
US7371283B2 (en) * | 2004-11-23 | 2008-05-13 | Siltron Inc. | Method and apparatus of growing silicon single crystal and silicon wafer fabricated thereby |
JP5188673B2 (ja) * | 2005-06-09 | 2013-04-24 | 株式会社Sumco | Igbt用のシリコンウェーハ及びその製造方法 |
JP4760729B2 (ja) * | 2006-02-21 | 2011-08-31 | 株式会社Sumco | Igbt用のシリコン単結晶ウェーハ及びigbt用のシリコン単結晶ウェーハの製造方法 |
JP2010040587A (ja) * | 2008-07-31 | 2010-02-18 | Covalent Materials Corp | シリコンウェーハの製造方法 |
US8476149B2 (en) * | 2008-07-31 | 2013-07-02 | Global Wafers Japan Co., Ltd. | Method of manufacturing single crystal silicon wafer from ingot grown by Czocharlski process with rapid heating/cooling process |
JP5560546B2 (ja) * | 2008-08-28 | 2014-07-30 | 株式会社Sumco | シリコンウェーハ及びその製造方法 |
JP2010056316A (ja) * | 2008-08-28 | 2010-03-11 | Sumco Corp | シリコンウェーハ及びその製造方法 |
JP5578172B2 (ja) * | 2009-04-13 | 2014-08-27 | 信越半導体株式会社 | アニールウエーハの製造方法およびデバイスの製造方法 |
JP5515406B2 (ja) * | 2009-05-15 | 2014-06-11 | 株式会社Sumco | シリコンウェーハおよびその製造方法 |
US8999864B2 (en) | 2009-06-03 | 2015-04-07 | Global Wafers Japan Co., Ltd. | Silicon wafer and method for heat-treating silicon wafer |
JP2011035129A (ja) * | 2009-07-31 | 2011-02-17 | Covalent Materials Corp | シリコンウェーハ |
JP5455449B2 (ja) * | 2009-06-03 | 2014-03-26 | グローバルウェーハズ・ジャパン株式会社 | シリコンウェーハの熱処理方法 |
EP2309038B1 (en) * | 2009-10-08 | 2013-01-02 | Siltronic AG | production method of an epitaxial wafer |
JP2016504759A (ja) * | 2012-11-19 | 2016-02-12 | サンエディソン・セミコンダクター・リミテッドSunEdison Semiconductor Limited | 熱処理により不活性な酸素析出核を活性化する高析出密度ウエハの製造 |
JP6052189B2 (ja) * | 2014-01-16 | 2016-12-27 | 信越半導体株式会社 | シリコン単結晶ウェーハの熱処理方法 |
JP6052188B2 (ja) | 2014-01-16 | 2016-12-27 | 信越半導体株式会社 | シリコン単結晶ウェーハの熱処理方法 |
JP6711320B2 (ja) | 2017-06-26 | 2020-06-17 | 株式会社Sumco | シリコンウェーハ |
EP3428325B1 (en) * | 2017-07-10 | 2019-09-11 | Siltronic AG | Semiconductor wafer made of single-crystal silicon and process for the production thereof |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6249629A (ja) * | 1986-03-24 | 1987-03-04 | Sony Corp | 半導体装置 |
DE19637182A1 (de) * | 1996-09-12 | 1998-03-19 | Wacker Siltronic Halbleitermat | Verfahren zur Herstellung von Halbleiterscheiben aus Silicium mit geringer Defektdichte |
US6503594B2 (en) * | 1997-02-13 | 2003-01-07 | Samsung Electronics Co., Ltd. | Silicon wafers having controlled distribution of defects and slip |
US5994761A (en) | 1997-02-26 | 1999-11-30 | Memc Electronic Materials Spa | Ideal oxygen precipitating silicon wafers and oxygen out-diffusion-less process therefor |
JP3407629B2 (ja) * | 1997-12-17 | 2003-05-19 | 信越半導体株式会社 | シリコン単結晶ウエーハの熱処理方法ならびにシリコン単結晶ウエーハ |
JP3011178B2 (ja) * | 1998-01-06 | 2000-02-21 | 住友金属工業株式会社 | 半導体シリコンウェーハ並びにその製造方法と熱処理装置 |
TW508378B (en) * | 1998-03-09 | 2002-11-01 | Shinetsu Handotai Kk | A method for producing a silicon single crystal wafer and a silicon single crystal wafer |
DE19823962A1 (de) * | 1998-05-28 | 1999-12-02 | Wacker Siltronic Halbleitermat | Verfahren zur Herstellung eines Einkristalls |
JP3746153B2 (ja) * | 1998-06-09 | 2006-02-15 | 信越半導体株式会社 | シリコンウエーハの熱処理方法 |
JP3711199B2 (ja) * | 1998-07-07 | 2005-10-26 | 信越半導体株式会社 | シリコン基板の熱処理方法 |
US6336968B1 (en) * | 1998-09-02 | 2002-01-08 | Memc Electronic Materials, Inc. | Non-oxygen precipitating czochralski silicon wafers |
JP2000256092A (ja) | 1999-03-04 | 2000-09-19 | Shin Etsu Handotai Co Ltd | シリコンウエーハ |
DE19924649B4 (de) * | 1999-05-28 | 2004-08-05 | Siltronic Ag | Halbleiterscheiben mit Kristallgitter-Defekten und Verfahren zur Herstellung derselben |
DE19925044B4 (de) | 1999-05-28 | 2005-07-21 | Siltronic Ag | Halbleiterscheibe mit Kristallgitter-Defekten und Verfahren zur Herstellung derselben |
JP2001144275A (ja) * | 1999-08-27 | 2001-05-25 | Shin Etsu Handotai Co Ltd | 貼り合わせsoiウエーハの製造方法および貼り合わせsoiウエーハ |
DE19941902A1 (de) | 1999-09-02 | 2001-03-15 | Wacker Siltronic Halbleitermat | Verfahren zur Herstellung von mit Stickstoff dotierten Halbleiterscheiben |
KR100378184B1 (ko) * | 1999-11-13 | 2003-03-29 | 삼성전자주식회사 | 제어된 결함 분포를 갖는 실리콘 웨이퍼, 그의 제조공정및 단결정 실리콘 잉곳의 제조를 위한 초크랄스키 풀러 |
JP2001308101A (ja) * | 2000-04-19 | 2001-11-02 | Mitsubishi Materials Silicon Corp | シリコンウェーハの熱処理方法及びシリコンウェーハ |
DE10024710A1 (de) * | 2000-05-18 | 2001-12-20 | Steag Rtp Systems Gmbh | Einstellung von Defektprofilen in Kristallen oder kristallähnlichen Strukturen |
JP4131077B2 (ja) * | 2000-06-30 | 2008-08-13 | 株式会社Sumco | シリコンウェーハの製造方法 |
JP4567251B2 (ja) * | 2001-09-14 | 2010-10-20 | シルトロニック・ジャパン株式会社 | シリコン半導体基板およびその製造方法 |
KR100423752B1 (ko) * | 2001-11-12 | 2004-03-22 | 주식회사 실트론 | 실리콘 반도체 웨이퍼 및 그 제조 방법 |
-
2002
- 2002-02-07 DE DE10205084A patent/DE10205084B4/de not_active Expired - Lifetime
-
2003
- 2003-02-04 US US10/357,601 patent/US6803331B2/en not_active Expired - Lifetime
- 2003-02-06 KR KR1020030007458A patent/KR100547216B1/ko active IP Right Grant
- 2003-02-06 JP JP2003029617A patent/JP2003297840A/ja not_active Withdrawn
- 2003-02-07 TW TW092102610A patent/TW593795B/zh not_active IP Right Cessation
- 2003-02-08 CN CN031042643A patent/CN1217393C/zh not_active Expired - Lifetime
-
2008
- 2008-01-15 JP JP2008005928A patent/JP5171277B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
TW593795B (en) | 2004-06-21 |
JP2008135773A (ja) | 2008-06-12 |
US6803331B2 (en) | 2004-10-12 |
CN1217393C (zh) | 2005-08-31 |
CN1437229A (zh) | 2003-08-20 |
KR20030067546A (ko) | 2003-08-14 |
TW200303943A (en) | 2003-09-16 |
JP2003297840A (ja) | 2003-10-17 |
KR100547216B1 (ko) | 2006-01-26 |
DE10205084B4 (de) | 2008-10-16 |
US20030148634A1 (en) | 2003-08-07 |
DE10205084A1 (de) | 2003-08-21 |
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