JP5083161B2 - 電子部品の製造方法及び製造装置 - Google Patents

電子部品の製造方法及び製造装置 Download PDF

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Publication number
JP5083161B2
JP5083161B2 JP2008259168A JP2008259168A JP5083161B2 JP 5083161 B2 JP5083161 B2 JP 5083161B2 JP 2008259168 A JP2008259168 A JP 2008259168A JP 2008259168 A JP2008259168 A JP 2008259168A JP 5083161 B2 JP5083161 B2 JP 5083161B2
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Japan
Prior art keywords
resin
sheet resin
temperature
sheet
heating
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JP2008259168A
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English (en)
Japanese (ja)
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JP2009278058A (ja
Inventor
宗一 久米
彰夫 勝部
啓 田中
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Priority to JP2008259168A priority Critical patent/JP5083161B2/ja
Priority to DE102009017763.9A priority patent/DE102009017763B4/de
Priority to CN200910132839XA priority patent/CN101562141B/zh
Publication of JP2009278058A publication Critical patent/JP2009278058A/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/93—Batch processes
    • H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/93—Batch processes
    • H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01005—Boron [B]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01006—Carbon [C]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01013—Aluminum [Al]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01015—Phosphorus [P]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01023—Vanadium [V]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01033—Arsenic [As]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01065—Terbium [Tb]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01068—Erbium [Er]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01073—Tantalum [Ta]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01075—Rhenium [Re]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01079—Gold [Au]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01082—Lead [Pb]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
    • H01L2924/097—Glass-ceramics, e.g. devitrified glass
    • H01L2924/09701—Low temperature co-fired ceramic [LTCC]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/12—Passive devices, e.g. 2 terminal devices
    • H01L2924/1204—Optical Diode
    • H01L2924/12041—LED
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/156—Material
    • H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
    • H01L2924/15787—Ceramics, e.g. crystalline carbides, nitrides or oxides

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
JP2008259168A 2008-04-16 2008-10-06 電子部品の製造方法及び製造装置 Active JP5083161B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008259168A JP5083161B2 (ja) 2008-04-16 2008-10-06 電子部品の製造方法及び製造装置
DE102009017763.9A DE102009017763B4 (de) 2008-04-16 2009-04-16 Verfahren und Vorrichtung zum Herstellen einer elektronischen Komponente
CN200910132839XA CN101562141B (zh) 2008-04-16 2009-04-16 电子器件的制造方法及制造装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008106458 2008-04-16
JP2008106458 2008-04-16
JP2008259168A JP5083161B2 (ja) 2008-04-16 2008-10-06 電子部品の製造方法及び製造装置

Publications (2)

Publication Number Publication Date
JP2009278058A JP2009278058A (ja) 2009-11-26
JP5083161B2 true JP5083161B2 (ja) 2012-11-28

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JP2008259168A Active JP5083161B2 (ja) 2008-04-16 2008-10-06 電子部品の製造方法及び製造装置

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JP (1) JP5083161B2 (zh)
CN (1) CN101562141B (zh)
DE (1) DE102009017763B4 (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5223657B2 (ja) * 2008-12-24 2013-06-26 株式会社村田製作所 電子部品の製造方法及び製造装置
JP2012033885A (ja) * 2010-06-28 2012-02-16 Murata Mfg Co Ltd 電子部品モジュールの製造方法
JP2013153012A (ja) * 2012-01-24 2013-08-08 Murata Mfg Co Ltd 電子部品モジュールの製造方法
JP6422370B2 (ja) * 2015-03-03 2018-11-14 日東電工株式会社 中空型電子デバイス封止用シート、及び、中空型電子デバイスパッケージの製造方法
CN105460888A (zh) 2015-11-19 2016-04-06 博奥生物集团有限公司 一种芯片的封装方法
JP2017105527A (ja) * 2015-12-01 2017-06-15 信越化学工業株式会社 半導体封止用硬化性樹脂シートの梱包方法及び半導体封止用硬化性樹脂シートの梱包体
JP7394839B2 (ja) * 2019-03-29 2023-12-08 太陽ホールディングス株式会社 中空デバイス用ドライフィルム、硬化物および電子部品
TWI820917B (zh) 2022-09-19 2023-11-01 毅力科技有限公司 在電子模組上形成保護膜的方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW569424B (en) * 2000-03-17 2004-01-01 Matsushita Electric Ind Co Ltd Module with embedded electric elements and the manufacturing method thereof
EP1280196A1 (de) * 2001-07-18 2003-01-29 Abb Research Ltd. Verfahren zum Befestigen von elektronischen Bauelementen auf Substraten
JP4186667B2 (ja) * 2003-03-25 2008-11-26 株式会社村田製作所 積層セラミック電子部品の製造方法
JP3870936B2 (ja) * 2003-07-14 2007-01-24 株式会社村田製作所 積層セラミック電子部品
TWI263403B (en) * 2004-01-22 2006-10-01 Murata Manufacturing Co Electronic component manufacturing method
JP2007129077A (ja) * 2005-11-04 2007-05-24 Casio Comput Co Ltd 半導体装置の製造方法及び脱泡装置

Also Published As

Publication number Publication date
JP2009278058A (ja) 2009-11-26
CN101562141B (zh) 2012-02-01
DE102009017763B4 (de) 2014-12-04
CN101562141A (zh) 2009-10-21
DE102009017763A1 (de) 2009-11-05

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