JP4952585B2 - 接着剤組成物、フィルム状接着剤、接着シート、並びにそれを用いた半導体装置 - Google Patents
接着剤組成物、フィルム状接着剤、接着シート、並びにそれを用いた半導体装置 Download PDFInfo
- Publication number
- JP4952585B2 JP4952585B2 JP2007555005A JP2007555005A JP4952585B2 JP 4952585 B2 JP4952585 B2 JP 4952585B2 JP 2007555005 A JP2007555005 A JP 2007555005A JP 2007555005 A JP2007555005 A JP 2007555005A JP 4952585 B2 JP4952585 B2 JP 4952585B2
- Authority
- JP
- Japan
- Prior art keywords
- adhesive
- adhesive composition
- film
- composition according
- resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 0 C=CCCC1C(C2C(N3*N(C(C4C5C6C(CC=C)=CC4C6)=O)C5=O)=O)C=CC1C2C3=O Chemical compound C=CCCC1C(C2C(N3*N(C(C4C5C6C(CC=C)=CC4C6)=O)C5=O)=O)C=CC1C2C3=O 0.000 description 2
- XQUPVDVFXZDTLT-UHFFFAOYSA-N O=C(C=CC1=O)N1c1ccc(Cc(cc2)ccc2N(C(C=C2)=O)C2=O)cc1 Chemical compound O=C(C=CC1=O)N1c1ccc(Cc(cc2)ccc2N(C(C=C2)=O)C2=O)cc1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
- C09J11/02—Non-macromolecular additives
- C09J11/06—Non-macromolecular additives organic
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/16—Nitrogen-containing compounds
- C08K5/34—Heterocyclic compounds having nitrogen in the ring
- C08K5/3412—Heterocyclic compounds having nitrogen in the ring having one nitrogen atom in the ring
- C08K5/3415—Five-membered rings
- C08K5/3417—Five-membered rings condensed with carbocyclic rings
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J4/00—Adhesives based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond ; adhesives, based on monomers of macromolecular compounds of groups C09J183/00 - C09J183/16
- C09J4/06—Organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond in combination with a macromolecular compound other than an unsaturated polymer of groups C09J159/00 - C09J187/00
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
- C09J7/22—Plastics; Metallised plastics
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
- C09J7/38—Pressure-sensitive adhesives [PSA]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/27—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0657—Stacked arrangements of devices
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/40—Additional features of adhesives in the form of films or foils characterized by the presence of essential components
- C09J2301/408—Additional features of adhesives in the form of films or foils characterized by the presence of essential components additives as essential feature of the adhesive layer
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2423/00—Presence of polyolefin
- C09J2423/006—Presence of polyolefin in the substrate
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2479/00—Presence of polyamine or polyimide
- C09J2479/08—Presence of polyamine or polyimide polyimide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/6834—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used to protect an active side of a device or wafer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/27—Manufacturing methods
- H01L2224/274—Manufacturing methods by blanket deposition of the material of the layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/2919—Material with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32135—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/32145—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/831—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus
- H01L2224/83101—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus as prepeg comprising a layer connector, e.g. provided in an insulating plate member
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83191—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
- H01L2224/83855—Hardening the adhesive by curing, i.e. thermosetting
- H01L2224/83856—Pre-cured adhesive, i.e. B-stage adhesive
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
- H01L2224/8388—Hardening the adhesive by cooling, e.g. for thermoplastics or hot-melt adhesives
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/0651—Wire or wire-like electrical connections from device to substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
- H01L23/3128—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation the substrate having spherical bumps for external connection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01009—Fluorine [F]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01012—Magnesium [Mg]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01015—Phosphorus [P]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01019—Potassium [K]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0102—Calcium [Ca]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01023—Vanadium [V]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01027—Cobalt [Co]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0104—Zirconium [Zr]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01047—Silver [Ag]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01051—Antimony [Sb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01057—Lanthanum [La]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01067—Holmium [Ho]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01074—Tungsten [W]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01075—Rhenium [Re]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01084—Polonium [Po]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/049—Nitrides composed of metals from groups of the periodic table
- H01L2924/0495—5th Group
- H01L2924/04953—TaN
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/0665—Epoxy resin
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/078—Adhesive characteristics other than chemical
- H01L2924/07802—Adhesive characteristics other than chemical not being an ohmic electrical conductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/10251—Elemental semiconductors, i.e. Group IV
- H01L2924/10253—Silicon [Si]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/157—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2924/15738—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950 C and less than 1550 C
- H01L2924/15747—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
- H01L2924/3511—Warping
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2852—Adhesive compositions
- Y10T428/2896—Adhesive compositions including nitrogen containing condensation polymer [e.g., polyurethane, polyisocyanate, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31721—Of polyimide
Description
<2>前記(B)ビスアリルナジイミドが、下記構造式(II)および/または(III)で示されることを特徴とする上記<1>に記載の接着剤組成物。
<4>さらに、(D)マレイミド化合物および/または単官能縮合多環オキサジン化合物を含有してなることを特徴とする上記<1>〜<3>のいずれかに記載の接着剤組成物。
<7>前記一般式(VII)で表される単官能縮合多環オキサジン化合物が、下記一般式(VIII)で示される化合物であることを特徴とする上記<6>に記載の接着剤組成物。
<8>さらに、(E)エポキシ樹脂を含有してなることを特徴とする上記<1>〜<7>のいずれかに記載の接着剤組成物。
<12>前記ポリイミド樹脂のTgが、100℃以下であることを特徴とする上記<10>又は<11>に記載の接着剤組成物。
上記一般式(I)中のR1は、好ましくは、ベンゼン残基、トルエン残基、キシレン残基、ナフタレン残基、直鎖、分岐、若しくは環状アルキル基、又はこれらの混合基が挙げられ、さらに好ましくは下記構造式(Ia)、(Ib)、(Ic)に示すいずれか1種以上の2価の有機基が挙げられる。
中でも、下記構造式(II)で示される液状のヘキサメチレン型ビスアリルナジイミドや下記構造(III)で示される低融点(融点:約40℃)固体状のキシリレン型ビスアリルナジイミドは、接着剤組成物を構成する異種成分間の相溶化剤としても作用し、接着剤組成物のBステージでの良好な熱時流動性を付与できる点で、より好ましい。特に、固体状のキシリレン型ビスアリルナジイミドは、良好な熱時流動性に加えて、室温におけるフィルム表面の粘着性の上昇を抑制することもでき、接着剤の取扱い性が向上する。なお、これらのビスアリルナジイミドは単独で、又は二種類以上を組み合わせて用いることができる。
また、上記(C)2官能以上の(メタ)アクリレート化合物の配合量は、前記(B)ビスアリルナジイミド100重量部に対して、1〜250重量部が好ましく、5〜200重量部がより好ましく、10〜100重量部が特に好ましい。この配合量が1重量部未満では、ビスアリルナジイミドの低温硬化性を付与できなくなる傾向にあり、また、250重量部を超えると、アウトガス量が多くなると共に、耐熱性が損なわれる傾向にある。
上記構造式(X)で表される脂肪族ジアミンは、具体的には、1,2−ジアミノエタン、1,3−ジアミノプロパン、1,4−ジアミノブタン、1,5−ジアミノペンタン、1,6−ジアミノヘキサン、1,7−ジアミノヘプタン、1,8−ジアミノオクタン、1,9−ジアミノノナン、1,10−ジアミノデカン、1,11−ジアミノウンデカン、1,12−ジアミノドデカン、1,2−ジアミノシクロヘキサンなどが挙げられる。
より具体的には、上記式(12)中、<pが1のとき>、1,1,3,3−テトラメチル−1,3−ビス(4−アミノフェニル)ジシロキサン、1,1,3,3−テトラフェノキシ−1,3−ビス(4−アミノエチル)ジシロキサン、1,1,3,3−テトラフェニル−1,3−ビス(2−アミノエチル)ジシロキサン、1,1,3,3−テトラフェニル−1,3−ビス(3−アミノプロピル)ジシロキサン、1,1,3,3−テトラメチル−1,3−ビス(2−アミノエチル)ジシロキサン、1,1,3,3−テトラメチル−1,3−ビス(3−アミノプロピル)ジシロキサン、1,1,3,3−テトラメチル−1,3−ビス(3−アミノブチル)ジシロキサン、1,3−ジメチル−1,3−ジメトキシ−1,3−ビス(4−アミノブチル)ジシロキサン等があり、<pが2のとき>、1,1,3,3,5,5−ヘキサメチル−1,5−ビス(4−アミノフェニル)トリシロキサン、1,1,5,5−テトラフェニル−3,3−ジメチル−1,5−ビス(3−アミノプロピル)トリシロキサン、1,1,5,5−テトラフェニル−3,3−ジメトキシ−1,5−ビス(4−アミノブチル)トリシロキサン、1,1,5,5−テトラフェニル−3,3−ジメトキシ−1,5−ビス(5−アミノペンチル)トリシロキサン、1,1,5,5−テトラメチル−3,3−ジメトキシ−1,5−ビス(2−アミノエチル)トリシロキサン、1,1,5,5−テトラメチル−3,3−ジメトキシ−1,5−ビス(4−アミノブチル)トリシロキサン、1,1,5,5−テトラメチル−3,3−ジメトキシ−1,5−ビス(5−アミノペンチル)トリシロキサン、1,1,3,3,5,5−ヘキサメチル−1,5−ビス(3−アミノプロピル)トリシロキサン、1,1,3,3,5,5−ヘキサエチル−1,5−ビス(3−アミノプロピル)トリシロキサン、1,1,3,3,5,5−ヘキサプロピル−1,5−ビス(3−アミノプロピル)トリシロキサンなどのシロキサンジアミンが挙げられる。
前記式(V)中のR5は芳香族環および/または直鎖、分岐若しくは環状脂肪族炭化水素を含む2価の有機基であれば、特に限定されることはないが、好ましくは、ベンゼン残基、トルエン残基、キシレン残基、ナフタレン残基、直鎖、分岐、若しくは環状アルキル基、又はこれらの混合基が挙げられ、より好ましくは、前記構造式(Ia)、(Ib)、(Ic)または下記構造式(Id)に示すいずれか1種以上の2価の有機基が挙げられる。
中でも、本発明の接着剤組成物のCステージでの耐熱性及び高温接着力を有効に付与できる点で、下記構造式(Va)のビスマレイミド化合物および/または前記一般式(VI)のノボラック型マレイミド化合物が好ましく用いられる。
上記一般式(VII)中の〔A〕で示される隣接する炭素原子をオキサジン環と共有して縮合環を形成する単環又は縮合多環芳香族炭化水素環としては、例えば、ベンゼン環、ナフタレン環、アントラセン環などが挙げられ、中でもベンゼン環が好ましい。また、R1及びR2としては、たとえば、水素原子、メチル基、エチル基、プロピル基、イソプロピル基、n−ブチル基、sec−ブチル基、t−ブチル基、ペンチル基、ヘキシル基、オクチル、デシル基、ドデシル基等の鎖状アルキル基、シクロペンチル基、シクロヘキシル基、シクロヘプチル基、シクロペンテニル基、シクロヘキセニル基等の環状アルキル基、ベンジル基、フェネチル基等のアリール基置換アルキル基、メトキシ基置換アルキル基、エトキシ基置換アルキル基、ブトキシ基置換アルキル基等のアルコキシ基置換アルキル基、ジメチルアミノ基、ジエチルアミノ基等のアミノ基置換アルキル基、水酸基置換アルキル基、ビニル基、アリル基、ブテニル基等のアルケニル基、フェニル基、ナフチル基、ビフェニル基等の無置換アリール基、トリル基、ジメチルフェニル基、エチルフェニル基、ブチルフェニル基、t−ブチルフェニル基、ジメチルナフチル基等のアルキル基置換アリール基、メトキシフェニル基、エトキシフェニル基、ブトキシフェニル基、t−ブトキシフェニル基、メトキシナフチル基等のアルコキシ基置換アリール基などが挙げられ、中でも水素原子、メチル基、フェニル基、トリル基、アリル基が好ましい。また、上記一般式(VII)中のnは0又は1〜4の整数を示し、0又は1であることが好ましい。
本発明のフィルム状接着剤は、例えば、上記したような本発明の接着剤組成物を有機溶媒中で混合、混練してワニスを調製した後、基材フィルム上に当該ワニスの層を形成させ、加熱乾燥した後に基材フィルムを除去することで得ることができる。なお、上記の混合、混練は、通常の攪拌機、らいかい機、三本ロール、ボールミル等の分散機を適宜、組み合わせて行うことができる。また、上記加熱乾燥の条件は、使用した溶媒が充分に揮散する条件であれば特に制限はないが、通常50〜200℃で、0.1〜90分間加熱して行う。上記有機溶媒、即ちワニス溶剤は、本発明の接着剤組成物を均一に溶解、混練又は分散できるものであれば制限はなく、例えば、ジメチルホルムアミド、ジメチルアセトアミド、N―メチル−2−ピロリドン、ジメチルスルホキシド、ジエチレングリコールジメチルエーテル、トルエン、ベンゼン、キシレン、メチルエチルケトン、メチルイソブチルケトン、テトラヒドロフラン、エチルセロソルブ、エチルセロソルブアセテート、ブチルセロソルブ、ジオキサン、シクロヘキサノン、酢酸エチル等が挙げられる。
本発明の接着剤組成物およびフィルム状接着剤は、IC、LSI等の半導体素子と、42アロイリードフレーム、銅リードフレーム等のリードフレーム;ポリイミド樹脂、エポキシ樹脂等のプラスチックフィルム;ガラス不織布等基材にポリイミド樹脂、エポキシ樹脂等のプラスチックを含浸、硬化させたもの;半導体搭載用支持部材;などの被着体と、を貼り合せるためのダイボンディング用接着材料として用いることができる。中でも、表面に有機レジスト層を具備してなる有機基板、表面に配線有する有機基板等の表面に凹凸を有する有機基板と半導体素子とを接着するためのダイボンディング用接着材料として好適に用いられる。
(PI−1)
温度計、攪拌機、冷却管、及び窒素流入管を装着した300mLフラスコ中に、1,12−ジアミノドデカン2.71g(0.045mol)、ポリエーテルジアミン(BASF製、D2000(分子量:1923))5.77g(0.01mol)、1,3−ビス(3−アミノプロピル)テトラメチルジシロキサン(信越化学製、LP−7100)3.35g(0.045mol)、及びN−メチル−2−ピロリドン113gを仕込んだ反応液を攪拌した。1,12−ジアミノドデカン及びポリエーテルジアミンが溶解した後、フラスコを氷浴中で冷却しながら、予め無水酢酸で再結晶精製した4,4’−(4,4’−イソプロピリデンジフェノキシ)ビス(フタル酸二無水物)15.62g(0.1mol)(DSCによる吸熱開始温度と吸熱ピーク温度の差:5.0℃)を少量ずつ添加した。室温で8時間反応させた後、キシレン75.5gを加え、窒素ガスを吹き込みながら180℃で加熱することにより、水と共にキシレンを共沸除去した。その反応液を大量の水中に注ぎ、沈澱したポリマーを濾過により採り、乾燥してポリイミド樹脂(PI−1)を得た。得られたポリイミド樹脂のGPCを測定したところ、ポリスチレン換算で、Mw=53800、Mn=17300であった。また、得られたポリイミド樹脂のTgは、22℃であった。
温度計、攪拌機、冷却管、及び窒素流入管を装着した300mLフラスコ中に、1,12−ジアミノドデカン2.10g(0.035mol)、ポリエーテルジアミン(BASF製、D2000(分子量:1923))17.31g(0.03mol)、1,3−ビス(3−アミノプロピル)テトラメチルジシロキサン(信越化学製、LP−7100)2.61g(0.035mol)、及びN−メチル−2−ピロリドン113gを仕込んだ反応液を攪拌した。1,12−ジアミノドデカン、及びポリエーテルジアミンが溶解した後、フラスコを氷浴中で冷却しながら、予め無水酢酸からの再結晶により精製した4,4’−(4,4’−イソプロピリデンジフェノキシ)ビス(フタル酸二無水物)15.62g(0.1mol)(DSCによる吸熱開始温度と吸熱ピーク温度の差:5.0℃)を少量ずつ添加した。室温で8時間反応させた後、キシレン75.5gを加え、窒素ガスを吹き込みながら180℃で加熱することにより、水と共にキシレンを共沸除去した。その反応液を大量の水中に注ぎ、沈澱したポリマーを濾過により採り、乾燥してポリイミド樹脂(PI−2)を得た。得られたポリイミド樹脂のGPCを測定したところ、ポリスチレン換算で、Mw=70000、Mn=20800であった。また、得られたポリイミド樹脂のTgは53℃であった。
温度計、攪拌機、冷却管、及び窒素流入管を装着した300mLフラスコ中に、ポリエーテルジアミン(BASF製、D400(分子量:452.4))32.60g(0.1mol)、及びN−メチル−2−ピロリドン105gを仕込んだ反応液を攪拌した。前記ポリエーテルジアミンが溶解した後、フラスコを氷浴中で冷却しながら、予め無水酢酸で再結晶精製した4,4’−(4,4’−イソプロピリデンジフェノキシ)ビス(フタル酸二無水物)37.40g(0.1mol)(DSCによる吸熱開始温度と吸熱ピーク温度の差:5.0℃)を少量ずつ添加した。窒素ガスを吹き込みながら170℃で5時間加熱することにより、発生する水を留去した。その反応液を大量の水中に注ぎ、沈澱したポリマーを濾過により採り、乾燥してポリイミド樹脂(PI−3)を得た。得られたポリイミド樹脂のGPCを測定したところ、ポリスチレン換算で、Mw=72000、Mn=34000であった。また、得られたポリイミド樹脂のTgは、37℃であった。
温度計、攪拌機及び塩化カルシウム管を備えた300mlフラスコに、2,2−ビス(4−アミノフェノキシフェニル)プロパン6.83g(0.05モル)、4,9−ジオキサデカン−1,12−ジアミン3.40g(0.05モル)、及びN−メチル−2−ピロリドン110.5gを仕込み攪拌した。ジアミンの溶解後、フラスコを氷浴中で冷却しながら、予め無水酢酸で再結晶精製したデカメチレンビストリメリテート二無水物17.40g(0.10モル)(DSCによる発熱開始温度と発熱ピーク温度の差:5.0℃)を少量ずつ添加した。室温で8時間反応させたのち、キシレン74gを加え、窒素ガスを吹き込みながら180℃で加熱し、水と共にキシレンを共沸除去した。その反応液を大量の水中に注ぎ、沈澱したポリマーを濾過により採り、乾燥してポリイミド樹脂(PI−3)を得た。得られたポリイミドのGPCを測定した結果、ポリスチレン換算で、Mw=88600、Mn=28900であった。また、得られたポリイミドのTgは73℃であった。
温度計、攪拌機、冷却管、及び窒素流入管を備えた300mlフラスコに、2,2−ビス(4−アミノフェノキシフェニル)プロパン13.67g(0.1mol)、及びN−メチル−2−ピロリドン124gを仕込み攪拌した。ジアミンの溶解後、フラスコを氷浴中で冷却しながら、予め無水酢酸で再結晶精製したデカメチレンビストリメリテート二無水物(DSCによる吸熱開始温度と吸熱ピークの差:5℃)17.40g(0.1mol)(DSCによる吸熱開始温度と吸熱ピーク温度の差:5.0℃)を少量ずつ添加した。室温で8時間反応させたのち、キシレン83gを加え、窒素ガスを吹き込みながら180℃で加熱し、水と共にキシレンを共沸除去した。その反応液を大量の水中に注ぎ、沈澱したポリマーを濾過により採り、乾燥してポリイミド樹脂(PI−4)を得た。得られたポリイミドのGPCを測定した結果、ポリスチレン換算で、Mw=121000、Mn=22800であった。また、得られたポリイミド樹脂のTgは120℃であった。
上記で得た各ポリイミド樹脂PI−1〜PI−5を用い、下記表1および2の配合表に示す通り、接着剤組成物ワニスを調製した。なお、下記表1、2において、種々の記号は下記のとおりである。
TPPK:東京化成、テトラフェニルホスホニウムテトラフェニルボラート
NMP:関東化学、N−メチル−2−ピロリドン
MEK:関東科学、メチルエチルケトン
HP−P1:水島合金鉄、窒化ホウ素(平均粒子径:1.0μm、最大粒子径:5.1μm)
上記で調製した実施例1〜9、及び比較例1〜8の各接着剤組成物ワニスを塗布厚40μmとなるように基材(50μm厚PET基材フィルム、表面剥離処理)上に塗布し、オーブン中で80℃、30分、続いて、ワニス溶媒がMEK単独、又はNMP/MEK混合溶媒の場合は120℃、30分、ワニス溶媒がNMP単独の場合は150℃、30分、それぞれ加熱し、基材付きのフィルム状接着剤を得た。各フィルム状接着剤の特性評価結果を下記表3、4に示す。なお、評価項目と評価方法は以下の通りである。
使用前(硬化前、以下、Bステージという)のフィルム状接着剤(硬化前)について、レオメトリックス製粘弾性アナライザーRSA−2を用いて、フィルム状接着剤サイズ35mm(長さ)×10mm(幅)×40μm(厚み)、昇温速度5℃/min、周波数1Hz、測定温度−150〜300℃の条件で、Tg付近のtanδピーク温度を測定し、これをフィルム状接着剤の主分散温度とした。
基材付きフィルム状接着剤を5inch、300μm厚のシリコンウェハの裏面に、ロールと支持体とを有する装置を用いて25℃、40℃、50℃、60℃、70℃、80℃、90℃、100℃、110℃、120℃、130℃、140℃、150℃、160℃、170℃、180℃のいずれかのロール温度、線圧:4kgf/cm、送り速度:0.5m/minの条件でラミネートし、ついで、基材をフィルム状接着剤からはく離し、フィルム状接着剤付きウェハを得た。その後、フィルム状接着剤のウェハと接する面の反対面に、基材フィルム上に感圧型の粘着剤層を有する粘着再剥離型のダイシングシート(電気化学工業製AD−80H、厚み80μm)を、当該粘着剤層とフィルム状接着剤面が接するようにラミネートした。その後、ダイサーを用いて、ダイシング速度10mm/sec、回転数30000rpmの条件で、シリコンウェハを5mm×5mmサイズにダイシングしたときのチップ飛びの有無を観測し、上記チップ飛びが全チップ数量の10%以下のときをチップ飛び「無」とし、チップ飛び「無」を確保できる最も低いラミネート温度をウェハ裏面貼付温度とした。尚、ウェハ端部のチップ切り出し残部の飛びは評価の対象外とした。
10mm×10mm×40μm厚サイズの基材付きフィルム状接着剤(使用前フィルム)をサンプルとし、これを2枚のスライドグラス(MATSUNAMI製、76mm×26mm×1.0〜1.2mm厚)の間に挟み、180℃の熱盤上で100kgf/cm2の面圧をかけ、90sec加熱圧着した後の上記基材フィルム4辺からの接着剤はみ出し量を、目盛り付き光学顕微鏡でそれぞれ計測したときの平均値をフロー量とした。
Bステージ状態のフィルム状接着剤(40μm厚)の塗工した上面について、レスカ製プローブタッキング試験機を用いて、JISZ0237−1991に記載の方法(プローブ直径5.1mm、引き剥がし速度10mm/s、接触荷重100gf/cm2、接触時間1s)により、40℃におけるタック力(粘着力)を測定した。
Bステージ状態のフィルム状接着剤について、レオメトリックス製粘弾性アナライザーRSA−2を用いて、接着剤層サイズ35mm(長さ)×10mm(幅)×40μm(厚み)、昇温速度5℃/min、周波数1Hz、測定温度−150〜300℃の条件で測定し、25℃における貯蔵弾性率を見積もった。
Bステージ状態の40μm厚フィルム状接着剤を3〜7枚重ねて貼り合せて、100〜300μmμ厚に調整したフィルムについて、レオメトリック サイエンティフィック製、回転型レオメーターARESを用いて、平行円板(直径8mm)に前記フィルムサンプルをサンプル厚みより2〜5μm小さなギャップ幅で挟み、周波数1Hz、歪み5%、昇温速度5/分、測定温度30℃〜300℃の条件で測定したときの100℃における複素粘度の値を100℃溶融粘度とした。
Cステージ状態のフィルム状接着剤(フィルム調製後、オーブン中で180℃5時間の条件で加熱硬化)について、レオメトリックス製粘弾性アナライザーRSA−2を用いて、接着剤層サイズ35mm(長さ)×10mm(幅)×40μm(厚み)、昇温速度5℃/min、周波数1Hz、測定温度−150〜300℃の条件で測定し、260℃における貯蔵弾性率を見積もった。
表面にソルダーレジスト層(厚さ15μm)が付いた有機基板(厚さ0.1mm)にシリコンチップ(半導体素子、5mm×5mm×0.4mm厚)をフィルム状接着剤(5mm×5mm×40μm厚)を用いて、温度:フィルム状接着剤を構成するポリイミド樹脂のTg+100℃、圧力:500gf/chip、時間:3secの条件でダイボンディングした後、トランスファモールドの熱と圧力を想定した条件として、温度:180℃、圧力:5kgf/chip、時間:90secの条件で加熱圧着した。さらに、前記の試験片をオーブン中で180℃、5hの条件で加熱硬化させ、さらに、260℃の熱盤上で20秒加熱した後、図8に示す接着力評価装置(13:リードフレーム、14:プッシュプルゲージ、15:熱盤)を用いて、測定速度:0.5mm/secの条件でシリコンチップとフィルム状接着剤の引き剥がし強度を測定し、このときの値をピール強度とした。
Claims (18)
- 半導体素子を被着体に接着するために用いられる接着剤組成物であって、(A)熱可塑性樹脂、(B)下記一般式(I)で示されるビスアリルナジイミド、及び(C)2官能以上の(メタ)アクリレート化合物を含有してなり、
(C)2官能以上の(メタ)アクリレート化合物が、ジエチレングリコールジアクリレート、トリエチレングリコールジアクリレート、テトラエチレングリコールジアクリレート、トリメチロールプロパンジアクリレート、トリメチロールプロパントリアクリレート、1,4−ブタンジオールジアクリレート、1,6−ヘキサンジオールジアクリレート、ポリエチレングリコールジアクリレート、ポリプロピレングリコールジアクリレート、トリシクロデカンジメチロールジアクリレート、ジトリメチロールプロパンテトラアクリレート、ペンタエリスリトールトリアクリレート、ペンタエリスリトールテトラアクリレート、ジペンタエリスリトールヘキサアクリレート、トリス(β−ヒドロキシエチル)イソシアヌレートのトリアクリレート、ジエチレングリコールジメタクリレート、トリエチレングリコールジメタクリレート、テトラエチレングリコールジメタクリレート、トリメチロールプロパンジメタクリレート、トリメチロールプロパントリメタクリレート、1,4−ブタンジオールジメタクリレート、1,6−ヘキサンジオールジメタクリレート、ポリエチレングリコールジメタクリレート、ポリプロピレングリコールジメタクリレート、トリシクロデカンジメチロールジメタクリレート、ジトリメチロールプロパンテトラメタクリレート、ペンタエリスリトールトリメタクリレート、ペンタエリスリトールテトラメタクリレート、ジペンタエリスリトールヘキサメタクリレート、トリス(β−ヒドロキシエチル)イソシアヌレートのトリメタクリレート、及び下記構造式(IV)で表される2官能(メタ)アクリレートからなる群から選択される1種以上であることを特徴とする接着剤組成物。
- さらに、(D)マレイミド化合物および/または単官能縮合多環オキサジン化合物を含有してなることを特徴とする請求項1または2に記載の接着剤組成物。
- さらに、(E)エポキシ樹脂を含有してなることを特徴とする請求項1〜6のいずれかに記載の接着剤組成物。
- さらに、(F)フィラーを含有してなることを特徴とする請求項1〜7のいずれかに記載の接着剤組成物。
- 前記(A)熱可塑性樹脂が、ポリイミド樹脂であることを特徴とする請求項1〜8のいずれかに記載の接着剤組成物。
- 前記ポリイミド樹脂のTgが、100℃以下であることを特徴とする請求項9又は10に記載の接着剤組成物。
- さらに、(G)光開始剤を含有してなることを特徴とする請求項1〜11のいずれかに記載の接着剤組成物。
- 前記被着体が、配線段差付き有機基板であることを特徴とする請求項1〜12のいずれかに記載の接着剤組成物。
- 請求項1〜13のいずれかに記載の接着剤組成物を用いて形成してなることを特徴とするフィルム状接着剤。
- 請求項14に記載のフィルム状接着剤とダイシングシートとを積層した構造を有してなることを特徴とする接着シート。
- 前記ダイシングシートが、基材フィルム、および該基材フィルム上に設けた放射線硬化型粘着剤層を有してなることを特徴とする請求項15に記載の接着シート。
- 前記ダイシングシートが、ポリオレフィン系フィルムであることを特徴とする請求項15に記載の接着シート。
- 請求項1〜13のいずれかに記載の接着剤組成物、又は請求項14に記載のフィルム状接着剤により、半導体素子と半導体搭載用支持部材、および/または、半導体素子と半導体素子が接着された構造を有してなることを特徴とする半導体装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007555005A JP4952585B2 (ja) | 2006-01-23 | 2007-01-23 | 接着剤組成物、フィルム状接着剤、接着シート、並びにそれを用いた半導体装置 |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006013854 | 2006-01-23 | ||
JP2006013854 | 2006-01-23 | ||
JP2006197324 | 2006-07-19 | ||
JP2006197324 | 2006-07-19 | ||
JP2007555005A JP4952585B2 (ja) | 2006-01-23 | 2007-01-23 | 接着剤組成物、フィルム状接着剤、接着シート、並びにそれを用いた半導体装置 |
PCT/JP2007/050985 WO2007083810A1 (ja) | 2006-01-23 | 2007-01-23 | 接着剤組成物、フィルム状接着剤、接着シート、並びにそれを用いた半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2007083810A1 JPWO2007083810A1 (ja) | 2009-06-18 |
JP4952585B2 true JP4952585B2 (ja) | 2012-06-13 |
Family
ID=38287752
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007555005A Expired - Fee Related JP4952585B2 (ja) | 2006-01-23 | 2007-01-23 | 接着剤組成物、フィルム状接着剤、接着シート、並びにそれを用いた半導体装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20100178501A1 (ja) |
JP (1) | JP4952585B2 (ja) |
KR (1) | KR101014483B1 (ja) |
CN (1) | CN101365765B (ja) |
TW (1) | TW200738841A (ja) |
WO (1) | WO2007083810A1 (ja) |
Families Citing this family (61)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4941120B2 (ja) * | 2006-09-01 | 2012-05-30 | Jnc株式会社 | 液晶配向剤、液晶配向膜及び液晶表示素子 |
US8212370B2 (en) * | 2006-10-04 | 2012-07-03 | Hitachi Chemical Company, Ltd. | Resin paste for die bonding, containing a polyurethaneimide resin and thermosetting resin method for manufacturing semiconductor device, and semiconductor device, using the resin paste |
JP4879073B2 (ja) * | 2007-04-16 | 2012-02-15 | 新日鐵化学株式会社 | 半導体装置の製造方法 |
JP2009068003A (ja) * | 2007-08-20 | 2009-04-02 | Hitachi Chem Co Ltd | 接着剤組成物、フィルム状接着剤、接着剤シート及びそれを用いた半導体装置 |
JP2009068004A (ja) * | 2007-08-20 | 2009-04-02 | Hitachi Chem Co Ltd | 接着剤組成物、フィルム状接着剤、接着剤シート及びそれを用いた半導体装置 |
JP2009046629A (ja) * | 2007-08-22 | 2009-03-05 | Hitachi Chem Co Ltd | 接着剤組成物、フィルム状接着剤、及びそれを用いた半導体装置 |
JP5343450B2 (ja) * | 2007-08-29 | 2013-11-13 | 日立化成株式会社 | 半導体素子固定用接着フィルム及び接着シート |
JP5027598B2 (ja) * | 2007-09-10 | 2012-09-19 | 京セラケミカル株式会社 | 接着剤組成物およびそれを用いた半導体装置 |
JP2009084563A (ja) * | 2007-09-13 | 2009-04-23 | Hitachi Chem Co Ltd | 接着剤組成物、フィルム状接着剤、接着シート及び半導体装置 |
JP5484706B2 (ja) * | 2007-10-16 | 2014-05-07 | 日立化成株式会社 | Cof半導体封止用フィルム状接着剤及びその接着剤を用いた半導体装置の製造方法並びに半導体装置 |
JP5092719B2 (ja) * | 2007-12-04 | 2012-12-05 | 日立化成工業株式会社 | 半導体装置及びその製造方法 |
JP2009242656A (ja) * | 2008-03-31 | 2009-10-22 | Ube Ind Ltd | 摩擦材及び摩擦材用樹脂組成物 |
JP2010059387A (ja) * | 2008-08-04 | 2010-03-18 | Hitachi Chem Co Ltd | 接着剤組成物、フィルム状接着剤、接着シート及び半導体装置 |
EP2311921A4 (en) | 2008-08-04 | 2012-02-01 | Hitachi Chemical Co Ltd | ADHESIVE COMPOSITION, FILM TYPE ADHESIVE, ADHESIVE SHEET, AND SEMICONDUCTOR DEVICE |
JP6045772B2 (ja) * | 2008-08-27 | 2016-12-14 | 日立化成株式会社 | 感光性接着剤組成物、フィルム状接着剤、接着シート、接着剤パターン、接着剤層付半導体ウェハ、半導体装置、及び半導体装置の製造方法 |
TWI364827B (en) * | 2008-11-25 | 2012-05-21 | Chipmos Technologies Inc | Chip package and manufacturing method thereof |
JP5439842B2 (ja) * | 2009-02-16 | 2014-03-12 | 日立化成株式会社 | 接着シート及び半導体装置 |
JP5298956B2 (ja) * | 2009-03-02 | 2013-09-25 | 日立化成株式会社 | 感光性樹脂組成物、並びにこれを用いた感光性エレメント、ソルダーレジスト及びプリント配線用基板 |
JP5549841B2 (ja) * | 2009-09-07 | 2014-07-16 | 日立化成株式会社 | 感光性樹脂組成物、永久レジスト用感光性フィルム、レジストパターンの形成方法、プリント配線板及びその製造方法、表面保護膜並びに層間絶縁膜 |
TW201111798A (en) * | 2009-09-29 | 2011-04-01 | Hermes Testing Solutions Inc | Structure for test probe card of integrated circuits |
AU2010306807A1 (en) | 2009-10-15 | 2012-05-03 | Henkel Corporation | Anaerobically curable compositions |
ES2382766T3 (es) * | 2009-11-30 | 2012-06-13 | Hilti Aktiengesellschaft | Composición de mortero de dos componentes adecuada para fines de construcción, su uso y objetos estructurales curados obtenidos mediante la misma |
JP5630636B2 (ja) * | 2010-02-25 | 2014-11-26 | 日立化成株式会社 | 感光性樹脂組成物、永久レジスト用感光性フィルム、レジストパターンの形成方法、プリント配線板及びその製造方法、表面保護膜並びに層間絶縁膜 |
JP5630637B2 (ja) * | 2010-02-26 | 2014-11-26 | 日立化成株式会社 | 感光性樹脂組成物 |
JP2011198844A (ja) * | 2010-03-17 | 2011-10-06 | Sekisui Chem Co Ltd | 電子部品接合用接着フィルム |
KR101062752B1 (ko) * | 2011-03-16 | 2011-09-06 | (주) 래트론 | 초박형 센서소자 및 그 제조방법 |
JP5654912B2 (ja) * | 2011-03-18 | 2015-01-14 | パナソニックIpマネジメント株式会社 | イミド樹脂組成物およびその製造方法、プリプレグ、金属張積層板並びにプリント配線板 |
JP2012241157A (ja) * | 2011-05-23 | 2012-12-10 | Nitto Denko Corp | 半導体装置製造用の接着剤組成物、及び、半導体装置製造用の接着シート |
CN102842512A (zh) * | 2011-06-22 | 2012-12-26 | 日东电工株式会社 | 半导体装置的制造方法 |
US9296928B2 (en) * | 2011-07-28 | 2016-03-29 | Protavic Korea Co., Ltd. | Flexible bismaleimide, benzoxazine, epoxy-anhydride adduct hybrid adhesive |
CN103165544A (zh) * | 2011-12-12 | 2013-06-19 | 日东电工株式会社 | 层叠片、及使用层叠片的半导体装置的制造方法 |
TWI493007B (zh) * | 2012-02-24 | 2015-07-21 | Arakawa Chem Ind | A polyimide-based adhesive composition, a hardened product, an adhesive sheet, a laminate, and a flexible printed substrate |
JP5998762B2 (ja) * | 2012-09-03 | 2016-09-28 | 大日本印刷株式会社 | 粘着剤組成物及び粘着テープ |
US9196559B2 (en) * | 2013-03-08 | 2015-11-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Directly sawing wafers covered with liquid molding compound |
JP5348343B1 (ja) | 2013-04-25 | 2013-11-20 | 東洋インキScホールディングス株式会社 | 感圧式接着剤組成物、及びそれを用いてなる感圧式接着シート |
US10428253B2 (en) * | 2013-07-16 | 2019-10-01 | Hitachi Chemical Company, Ltd | Photosensitive resin composition, film adhesive, adhesive sheet, adhesive pattern, semiconductor wafer with adhesive layer, and semiconductor device |
JP6187126B2 (ja) | 2013-10-15 | 2017-08-30 | デクセリアルズ株式会社 | 電気接続材料 |
CN104877112A (zh) * | 2015-03-03 | 2015-09-02 | 北京理工大学 | 一种降冰片烯酰亚胺的耐热聚合物多孔材料及其制备方法 |
JP6490459B2 (ja) * | 2015-03-13 | 2019-03-27 | 古河電気工業株式会社 | ウェハ固定テープ、半導体ウェハの処理方法および半導体チップ |
KR102579981B1 (ko) | 2015-07-06 | 2023-09-18 | 미츠비시 가스 가가쿠 가부시키가이샤 | 수지 조성물, 프리프레그, 레진 시트, 금속박 피복 적층판 및 프린트 배선판 |
CN107735409B (zh) * | 2015-07-06 | 2020-08-11 | 三菱瓦斯化学株式会社 | 树脂组合物、使用该树脂组合物的预浸料或树脂片以及使用它们的层叠板和印刷电路板 |
KR102288007B1 (ko) * | 2015-07-06 | 2021-08-09 | 미츠비시 가스 가가쿠 가부시키가이샤 | 수지 조성물, 그 수지 조성물을 사용한 프리프레그 또는 레진 시트 그리고 그것들을 사용한 적층판 및 프린트 배선판 |
EP3321320B1 (en) * | 2015-07-06 | 2019-10-02 | Mitsubishi Gas Chemical Company, Inc. | Resin composition, prepreg, resin sheet, metal foil-clad laminate, and printed circuit board |
JP6790591B2 (ja) * | 2015-08-28 | 2020-11-25 | 昭和電工マテリアルズ株式会社 | 緩衝シート、電子部品装置の製造方法及び電子部品装置 |
JP6524972B2 (ja) * | 2015-09-28 | 2019-06-05 | Jsr株式会社 | 対象物の処理方法、仮固定用組成物、半導体装置及びその製造方法 |
EP3359603A1 (en) * | 2015-10-07 | 2018-08-15 | Henkel IP & Holding GmbH | Formulations and the use for 3d tsv packages |
WO2017091284A1 (en) * | 2015-11-23 | 2017-06-01 | Rohm And Haas Company | Thermally reversible polymer crosslinking for pressure sensitive adhesives |
SG11201900449YA (en) * | 2016-07-19 | 2019-02-27 | Hitachi Chemical Co Ltd | Resin composition, laminate sheet, and multilayer printed wiring board |
KR102019468B1 (ko) * | 2016-11-29 | 2019-09-06 | 주식회사 엘지화학 | 반도체용 접착 필름 및 반도체 장치 |
TWI658077B (zh) * | 2016-12-28 | 2019-05-01 | 日商三菱瓦斯化學股份有限公司 | 樹脂組成物、預浸體、疊層板、覆金屬箔疊層板、印刷配線板、及多層印刷配線板 |
JPWO2018168715A1 (ja) * | 2017-03-13 | 2020-01-16 | リンテック株式会社 | 樹脂組成物及び樹脂シート |
CN107353855B (zh) * | 2017-08-01 | 2019-03-29 | 烟台德邦科技有限公司 | 一种低树脂析出的芯片粘合剂及其制备方法 |
EP3778776A4 (en) * | 2018-03-30 | 2021-12-29 | NIPPON STEEL Chemical & Material Co., Ltd. | Thermoplastic resin composition, fiber-reinforced-plastic molding material, and molded article |
JP6930482B2 (ja) * | 2018-04-16 | 2021-09-01 | 味の素株式会社 | 樹脂組成物 |
JP7212829B2 (ja) * | 2018-11-30 | 2023-01-26 | 株式会社レゾナック | 硬化性組成物及びその硬化物、並びに半導体用配線層 |
US20220306793A1 (en) | 2018-12-31 | 2022-09-29 | Zhejiang Xunshi Technology Co., Ltd. | Imide-Terminated Prepolymer, Preparation Method Therefor, Curable Resin Composition, Use Thereof and Dual Curing Method |
JP2020136430A (ja) * | 2019-02-18 | 2020-08-31 | 日立化成株式会社 | 配線層間絶縁層形成用感光性樹脂組成物及びそれを用いた半導体用配線層、半導体用配線層積層体 |
DE102020111288B4 (de) * | 2020-04-24 | 2022-12-08 | Pfinder Kg | Verwendung einer Zusammensetzung zur Herstellung eines geruchs- und emissionsreduzierten Korrosionsschutzmittels zur Hohlraumversiegelung oder zum Unterbodenschutz eines Bauteils |
CN112029458B (zh) * | 2020-08-17 | 2022-04-15 | 南京施瓦乐新材料科技有限公司 | 一种温控变色玻璃用粘合剂及其制备方法 |
CN112873070B (zh) * | 2021-01-21 | 2022-07-05 | 泉州众志新材料科技有限公司 | 一种瓷砖倒角磨片及其生产方法 |
CN115572561A (zh) * | 2022-09-27 | 2023-01-06 | 浙江中特化工有限公司 | 一种不同链长多元胺粘合剂的制备方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000160007A (ja) * | 1998-11-30 | 2000-06-13 | Nitto Denko Corp | 熱融着性ポリイミド樹脂フィルム及びこれを用いた半導体装置並びに多層配線板。 |
JP2001011135A (ja) * | 1999-06-30 | 2001-01-16 | Hitachi Chem Co Ltd | 樹脂ペースト組成物及びこれを用いた半導体装置 |
WO2001082363A1 (en) * | 2000-04-25 | 2001-11-01 | Hitachi Chemical Co., Ltd. | Adhesive for circuit connection, circuit connection method using the same, and circuit connection structure |
JP2001323032A (ja) * | 2000-05-16 | 2001-11-20 | Hitachi Chem Co Ltd | 光硬化性樹脂組成物、これを用いた塗料及びオーバープリントニス |
WO2003018703A1 (fr) * | 2001-08-27 | 2003-03-06 | Hitachi Chemical Co., Ltd. | Feuille adhesive et dispositif semi-conducteur; procede de fabrication |
WO2004045846A1 (ja) * | 2002-11-20 | 2004-06-03 | Tomoegawa Paper Co., Ltd. | フレキシブル金属積層体及び耐熱性接着剤組成物 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3997487B2 (ja) * | 2001-05-30 | 2007-10-24 | 株式会社カネカ | 感光性樹脂組成物及びそれを用いた感光性ドライフィルムレジスト、感光性カバーレイフィルム |
JP4116869B2 (ja) * | 2002-11-20 | 2008-07-09 | 株式会社巴川製紙所 | 耐熱性接着剤組成物及びこれを用いた積層体、並びにフレキシブルプリント基板 |
-
2007
- 2007-01-23 US US12/161,246 patent/US20100178501A1/en not_active Abandoned
- 2007-01-23 CN CN2007800020728A patent/CN101365765B/zh not_active Expired - Fee Related
- 2007-01-23 KR KR1020087016538A patent/KR101014483B1/ko not_active IP Right Cessation
- 2007-01-23 WO PCT/JP2007/050985 patent/WO2007083810A1/ja active Application Filing
- 2007-01-23 TW TW096102571A patent/TW200738841A/zh not_active IP Right Cessation
- 2007-01-23 JP JP2007555005A patent/JP4952585B2/ja not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000160007A (ja) * | 1998-11-30 | 2000-06-13 | Nitto Denko Corp | 熱融着性ポリイミド樹脂フィルム及びこれを用いた半導体装置並びに多層配線板。 |
JP2001011135A (ja) * | 1999-06-30 | 2001-01-16 | Hitachi Chem Co Ltd | 樹脂ペースト組成物及びこれを用いた半導体装置 |
WO2001082363A1 (en) * | 2000-04-25 | 2001-11-01 | Hitachi Chemical Co., Ltd. | Adhesive for circuit connection, circuit connection method using the same, and circuit connection structure |
JP2001323032A (ja) * | 2000-05-16 | 2001-11-20 | Hitachi Chem Co Ltd | 光硬化性樹脂組成物、これを用いた塗料及びオーバープリントニス |
WO2003018703A1 (fr) * | 2001-08-27 | 2003-03-06 | Hitachi Chemical Co., Ltd. | Feuille adhesive et dispositif semi-conducteur; procede de fabrication |
WO2004045846A1 (ja) * | 2002-11-20 | 2004-06-03 | Tomoegawa Paper Co., Ltd. | フレキシブル金属積層体及び耐熱性接着剤組成物 |
Also Published As
Publication number | Publication date |
---|---|
CN101365765A (zh) | 2009-02-11 |
WO2007083810A1 (ja) | 2007-07-26 |
KR101014483B1 (ko) | 2011-02-14 |
CN101365765B (zh) | 2012-05-23 |
TWI333501B (ja) | 2010-11-21 |
KR20080075031A (ko) | 2008-08-13 |
TW200738841A (en) | 2007-10-16 |
JPWO2007083810A1 (ja) | 2009-06-18 |
US20100178501A1 (en) | 2010-07-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4952585B2 (ja) | 接着剤組成物、フィルム状接着剤、接着シート、並びにそれを用いた半導体装置 | |
JP5445455B2 (ja) | 接着剤組成物、フィルム状接着剤、接着シート及び半導体装置 | |
JP5533957B2 (ja) | フィルム状接着剤、接着シート及び半導体装置 | |
JP5343450B2 (ja) | 半導体素子固定用接着フィルム及び接着シート | |
JP5664455B2 (ja) | 接着剤組成物、接着シート及び半導体装置 | |
JP5553108B2 (ja) | 接着剤組成物、接着シート及び半導体装置 | |
JP5803123B2 (ja) | 半導体用粘接着シート、それを用いた半導体ウエハ、半導体装置及び半導体装置の製造方法 | |
JP5439841B2 (ja) | 接着剤組成物、接着シート及び半導体装置 | |
JP2009084563A (ja) | 接着剤組成物、フィルム状接着剤、接着シート及び半導体装置 | |
JP2010278324A (ja) | 接着剤組成物、接着シート及び半導体装置 | |
JP2011042730A (ja) | 接着剤組成物、フィルム状接着剤、接着シート及び半導体装置 | |
JP5332419B2 (ja) | 感光性接着剤組成物、フィルム状接着剤、接着シート、接着剤パターン、接着剤層付半導体ウェハ、半導体装置、及び、半導体装置の製造方法 | |
JP2006144022A (ja) | フィルム状接着剤、接着シート及び半導体装置 | |
JP5439842B2 (ja) | 接着シート及び半導体装置 | |
JP5899622B2 (ja) | 半導体用粘接着シート、半導体用粘接着シートの製造方法、半導体ウエハ、半導体装置及び半導体装置の製造方法 | |
JP5655885B2 (ja) | 接着剤組成物、フィルム状接着剤、接着剤シート及びそれを用いた半導体装置 | |
JP5499564B2 (ja) | 接着剤組成物、フィルム状接着剤、接着シート及び半導体装置 | |
JP2010059387A (ja) | 接着剤組成物、フィルム状接着剤、接着シート及び半導体装置 | |
JP5732881B2 (ja) | 半導体用接着フィルム、接着シート、半導体ウエハ及び半導体装置 | |
JP2009068004A (ja) | 接着剤組成物、フィルム状接着剤、接着剤シート及びそれを用いた半導体装置 | |
JP5439818B2 (ja) | 接着剤組成物、フィルム状接着剤、接着シート及び半導体装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110830 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20111031 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20111122 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120214 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120227 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150323 Year of fee payment: 3 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150323 Year of fee payment: 3 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
LAPS | Cancellation because of no payment of annual fees |