JP4937605B2 - 弾性境界波デバイス - Google Patents
弾性境界波デバイス Download PDFInfo
- Publication number
- JP4937605B2 JP4937605B2 JP2006061693A JP2006061693A JP4937605B2 JP 4937605 B2 JP4937605 B2 JP 4937605B2 JP 2006061693 A JP2006061693 A JP 2006061693A JP 2006061693 A JP2006061693 A JP 2006061693A JP 4937605 B2 JP4937605 B2 JP 4937605B2
- Authority
- JP
- Japan
- Prior art keywords
- medium
- oxide film
- silicon oxide
- acoustic wave
- wave device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000463 material Substances 0.000 claims description 40
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 67
- 229910052814 silicon oxide Inorganic materials 0.000 description 67
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 44
- 239000000758 substrate Substances 0.000 description 26
- 230000004044 response Effects 0.000 description 25
- 238000010897 surface acoustic wave method Methods 0.000 description 7
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000010949 copper Substances 0.000 description 4
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000011358 absorbing material Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/25—Constructional features of resonators using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/0222—Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Description
12 電極
14 酸化シリコン膜
16 酸化アルミニウム膜
20 吸音部
22a、22b、22c、22d、22e 凸部
Claims (4)
- 圧電性を有する第1媒質と、
該第1媒質上に設けられた弾性波を励振する電極と、
前記第1媒質と異なる材料からなり、前記第1媒質上に前記電極を覆うように設けられた第2媒質と、
前記第2媒質上に設けられた複数の凸部と、を具備し、
前記複数の凸部は異なる幅および間隔を有し、
前記第1媒質および前記第2媒質とは異なる材料からなり、前記第2媒質と前記凸部との間に設けられた第3媒質を具備することを特徴とする弾性境界波デバイス。 - 前記凸部は前記第3媒質と同じ材料からなることを特徴とする請求項1記載の弾性境界波デバイス。
- 前記凸部は前記第2媒質と同じ材料からなることを特徴とする請求項1記載の弾性境界波デバイス。
- 圧電性を有する第1媒質と、
該第1媒質上に設けられた弾性波を励振する電極と、
前記第1媒質と異なる材料からなり、前記第1媒質上に前記電極を覆うように設けられた第2媒質と、
前記第2媒質上に設けられた凸部と、
前記第1媒質および前記第2媒質とは異なる材料からなり、前記第2媒質と前記凸部との間に設けられた第3媒質と、
を具備し、
前記凸部は複数設けられ、複数の前記凸部の一部は前記第2媒質と同じ材料からなり、複数の前記凸部のうち他の一部は前記第3媒質と同じ材料からなることを特徴とする弾性境界波デバイス。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006061693A JP4937605B2 (ja) | 2006-03-07 | 2006-03-07 | 弾性境界波デバイス |
KR20070021012A KR100856218B1 (ko) | 2006-03-07 | 2007-03-02 | 탄성 경계파 디바이스 |
US11/714,157 US20070210676A1 (en) | 2006-03-07 | 2007-03-06 | Elastic boundary wave device |
CNB200710086021XA CN100559710C (zh) | 2006-03-07 | 2007-03-07 | 弹性边界波器件 |
US12/431,427 US7830067B2 (en) | 2006-03-07 | 2009-04-28 | Elastic boundary wave device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006061693A JP4937605B2 (ja) | 2006-03-07 | 2006-03-07 | 弾性境界波デバイス |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007243473A JP2007243473A (ja) | 2007-09-20 |
JP4937605B2 true JP4937605B2 (ja) | 2012-05-23 |
Family
ID=38478231
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006061693A Active JP4937605B2 (ja) | 2006-03-07 | 2006-03-07 | 弾性境界波デバイス |
Country Status (4)
Country | Link |
---|---|
US (2) | US20070210676A1 (ja) |
JP (1) | JP4937605B2 (ja) |
KR (1) | KR100856218B1 (ja) |
CN (1) | CN100559710C (ja) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4760911B2 (ja) * | 2006-09-21 | 2011-08-31 | 株式会社村田製作所 | 弾性境界波装置 |
CN101569100A (zh) * | 2006-12-25 | 2009-10-28 | 株式会社村田制作所 | 弹性边界波装置 |
DE102007012383B4 (de) * | 2007-03-14 | 2011-12-29 | Epcos Ag | Mit geführten akustischen Volumenwellen arbeitendes Bauelement |
JP4920750B2 (ja) | 2007-08-14 | 2012-04-18 | 太陽誘電株式会社 | 弾性境界波装置 |
JP4995923B2 (ja) * | 2007-11-19 | 2012-08-08 | 太陽誘電株式会社 | 弾性境界波デバイス、およびそれを用いた通信機 |
DE102008016613B4 (de) * | 2008-04-01 | 2010-04-15 | Epcos Ag | Verfahren zur Herstellung eines elektrischen Bauelements mit mindestens einer dielektrischen Schicht und ein elektrisches Bauelement mit mindestens einer dielektrischen Schicht |
JP5125729B2 (ja) * | 2008-04-28 | 2013-01-23 | パナソニック株式会社 | 弾性波素子と、これを用いたフィルタ及び電子機器 |
JP5339582B2 (ja) * | 2008-07-31 | 2013-11-13 | 太陽誘電株式会社 | 弾性波デバイス |
US7939987B1 (en) * | 2008-10-23 | 2011-05-10 | Triquint Semiconductor, Inc. | Acoustic wave device employing reflective elements for confining elastic energy |
JP4841640B2 (ja) * | 2009-03-25 | 2011-12-21 | 太陽誘電株式会社 | 弾性波デバイスおよびその製造方法 |
WO2010131606A1 (ja) * | 2009-05-12 | 2010-11-18 | 株式会社村田製作所 | 弾性境界波装置 |
US8085117B1 (en) * | 2009-07-29 | 2011-12-27 | Triquint Semiconductor, Inc. | Slotted boundary acoustic wave device |
KR20110054841A (ko) * | 2009-11-18 | 2011-05-25 | 삼성모바일디스플레이주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
DE112010005279B4 (de) * | 2010-02-17 | 2017-03-30 | Murata Manufacturing Co., Ltd. | Vorrichtung für elastische Wellen |
KR101623099B1 (ko) * | 2010-12-24 | 2016-05-20 | 가부시키가이샤 무라타 세이사쿠쇼 | 탄성파 장치 및 그 제조 방법 |
WO2015098678A1 (ja) * | 2013-12-27 | 2015-07-02 | 株式会社村田製作所 | 弾性波装置 |
CN104868873A (zh) * | 2015-05-27 | 2015-08-26 | 上海交通大学 | 一种多层复合结构声表面波器件基底 |
JP6658867B2 (ja) * | 2016-03-16 | 2020-03-04 | 株式会社村田製作所 | 複合フィルタ装置 |
KR102076960B1 (ko) | 2016-03-31 | 2020-02-13 | 가부시키가이샤 무라타 세이사쿠쇼 | 복합 필터 장치, 고주파 프론트엔드 회로 및 통신 장치 |
US20180041186A1 (en) * | 2016-08-04 | 2018-02-08 | Skyworks Filter Solutions Japan Co., Ltd. | Surface acoustic wave elements with protective films |
US9970993B1 (en) * | 2017-02-16 | 2018-05-15 | Ford Global Technologies, Llc | Sensor system for measuring battery internal state |
JP2018157564A (ja) | 2017-03-16 | 2018-10-04 | スカイワークス ソリューションズ, インコーポレイテッドSkyworks Solutions, Inc. | 酸窒化ケイ素膜により覆われたインターディジタル電極を含む弾性波デバイス |
CN113726305B (zh) * | 2020-05-25 | 2024-03-08 | 厦门市三安集成电路有限公司 | 表面声波装置 |
CN112737537A (zh) * | 2020-12-25 | 2021-04-30 | 广东广纳芯科技有限公司 | 一种双层poi结构声表面波谐振器及制造方法 |
CN114362709B (zh) * | 2021-12-03 | 2024-04-05 | 中国科学院上海微系统与信息技术研究所 | 一种声学谐振器及其制备方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4998552A (ja) * | 1973-01-20 | 1974-09-18 | ||
DE2460631C3 (de) * | 1974-12-20 | 1979-04-05 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Kuhlkörper zur Fremdkuhlung von Thyristoren |
JPS52153647A (en) * | 1976-06-17 | 1977-12-20 | Victor Co Of Japan Ltd | Elastic surface wave element |
US4617487A (en) * | 1984-09-22 | 1986-10-14 | Alps Electric Co., Ltd. | Piezoelectric elastic surface wave element with film of tantalum pentoxide or silicon nitride |
JPH0821830B2 (ja) | 1990-07-24 | 1996-03-04 | 株式会社村田製作所 | 表面波装置 |
JP2712842B2 (ja) | 1991-01-11 | 1998-02-16 | 株式会社村田製作所 | 表面波装置およびその製造方法 |
JPH06112764A (ja) | 1992-09-30 | 1994-04-22 | Hitachi Ltd | 弾性境界波装置 |
JPH1168496A (ja) * | 1997-08-11 | 1999-03-09 | Toyo Commun Equip Co Ltd | 弾性表面波デバイスの構造及び製造方法 |
JP2000232333A (ja) | 1999-02-08 | 2000-08-22 | Murata Mfg Co Ltd | 表面波装置 |
JP2001111377A (ja) * | 1999-10-05 | 2001-04-20 | Murata Mfg Co Ltd | 弾性表面波装置及びその製造方法 |
DE112004000499B4 (de) * | 2003-04-18 | 2011-05-05 | Murata Mfg. Co., Ltd., Nagaokakyo-shi | Grenzakustikwellenbauelement |
WO2005069486A1 (ja) * | 2004-01-19 | 2005-07-28 | Murata Manufacturing Co., Ltd. | 弾性境界波装置 |
CN1938946A (zh) * | 2004-03-29 | 2007-03-28 | 株式会社村田制作所 | 声界面波装置的制造方法以及声界面波装置 |
-
2006
- 2006-03-07 JP JP2006061693A patent/JP4937605B2/ja active Active
-
2007
- 2007-03-02 KR KR20070021012A patent/KR100856218B1/ko not_active IP Right Cessation
- 2007-03-06 US US11/714,157 patent/US20070210676A1/en not_active Abandoned
- 2007-03-07 CN CNB200710086021XA patent/CN100559710C/zh not_active Expired - Fee Related
-
2009
- 2009-04-28 US US12/431,427 patent/US7830067B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20090212659A1 (en) | 2009-08-27 |
CN101034879A (zh) | 2007-09-12 |
US7830067B2 (en) | 2010-11-09 |
CN100559710C (zh) | 2009-11-11 |
KR100856218B1 (ko) | 2008-09-03 |
US20070210676A1 (en) | 2007-09-13 |
KR20070092110A (ko) | 2007-09-12 |
JP2007243473A (ja) | 2007-09-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4937605B2 (ja) | 弾性境界波デバイス | |
JP4975377B2 (ja) | 弾性境界波素子、共振器およびフィルタ | |
US8677604B2 (en) | Method of manufacturing boundary acoustic wave device | |
JP4636179B2 (ja) | 弾性表面波装置 | |
JP4497159B2 (ja) | 弾性境界波フィルタ | |
JP4811516B2 (ja) | 弾性境界波装置 | |
JP5137828B2 (ja) | 弾性表面波装置 | |
JPWO2007108269A1 (ja) | 弾性波共振子 | |
JP2008109413A (ja) | 弾性波デバイスおよびフィルタ | |
JP4636178B2 (ja) | 弾性表面波装置 | |
WO2018003282A1 (ja) | 弾性波装置 | |
JPWO2010131450A1 (ja) | アンテナ共用器 | |
JPWO2009139108A1 (ja) | 弾性境界波装置 | |
JP4571200B2 (ja) | 弾性波フィルタ | |
CN110313130B (zh) | 声表面波元件 | |
JP6940012B2 (ja) | フィルタ装置 | |
JP4308398B2 (ja) | 弾性表面波フィルタ | |
JP5045063B2 (ja) | 弾性表面波共振子 | |
WO2011105317A1 (ja) | 弾性波デバイスおよびその製造方法 | |
JP4957074B2 (ja) | 弾性表面波フィルタ装置 | |
JP4055651B2 (ja) | 表面波装置 | |
JP2008103953A (ja) | 弾性表面波素子片 | |
JP2004363824A (ja) | 弾性表面波フィルタ | |
JPH0555871A (ja) | 縦結合多重モードsawフイルタ | |
JP2006121133A (ja) | 弾性表面波デバイス |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20081002 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20100428 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100430 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A712 Effective date: 20100929 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20100930 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110609 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110628 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110801 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20111206 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120111 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120131 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120222 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150302 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4937605 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |