JP5125729B2 - 弾性波素子と、これを用いたフィルタ及び電子機器 - Google Patents
弾性波素子と、これを用いたフィルタ及び電子機器 Download PDFInfo
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- JP5125729B2 JP5125729B2 JP2008116807A JP2008116807A JP5125729B2 JP 5125729 B2 JP5125729 B2 JP 5125729B2 JP 2008116807 A JP2008116807 A JP 2008116807A JP 2008116807 A JP2008116807 A JP 2008116807A JP 5125729 B2 JP5125729 B2 JP 5125729B2
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- wave
- dielectric layer
- thickness
- piezoelectric substrate
- displacement distribution
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- 239000000758 substrate Substances 0.000 claims description 24
- 229910013641 LiNbO 3 Inorganic materials 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 4
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 description 36
- 238000010586 diagram Methods 0.000 description 10
- 238000010521 absorption reaction Methods 0.000 description 4
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000001902 propagating effect Effects 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000010897 surface acoustic wave method Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/0222—Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Description
以下、本発明の実施の形態1における弾性波素子について図面を参照しながら説明する。
2 第1の誘電体層
3 IDT電極
4 第2の誘電体層
5 吸音層
Claims (3)
- 圧電基板と、
前記圧電基板上方に設けられたIDT電極と、
前記IDT電極上方に設けられた酸化ケイ素からなる第1の誘電体層と、
前記第1の誘電体層上方に設けられた窒化ケイ素または窒化アルミからなる第2の誘電体層と、
前記第2の誘電体層上方に設けられた吸音層とを備え、
前記第2の誘電体層の膜厚が前記圧電基板における擬似弾性波の動作中心周波数での波長をλとしたときに0.4λ〜0.7λの範囲内にあり、
前記第1の誘電体層の膜厚が前記圧電基板における擬似弾性波の動作中心周波数での波長をλとしたときに0.1λ〜0.3λの範囲内にあり、
前記IDT電極がCuからなり、
前記圧電基板が回転Y板のカット角度が−10度以上+30度以下の範囲で弾性波がX軸方向あるいは前記X軸方向に対して±5度の範囲で伝搬するLiNbO 3 基板である、
弾性波素子。 - 請求項1に記載の弾性波素子を用いたフィルタ。
- 請求項1に記載の弾性波素子を用いた電子機器。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008116807A JP5125729B2 (ja) | 2008-04-28 | 2008-04-28 | 弾性波素子と、これを用いたフィルタ及び電子機器 |
US12/428,591 US7982365B2 (en) | 2008-04-28 | 2009-04-23 | Elastic wave device and filter and electronic equipment using the device |
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JP2008116807A JP5125729B2 (ja) | 2008-04-28 | 2008-04-28 | 弾性波素子と、これを用いたフィルタ及び電子機器 |
Publications (2)
Publication Number | Publication Date |
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JP2009267905A JP2009267905A (ja) | 2009-11-12 |
JP5125729B2 true JP5125729B2 (ja) | 2013-01-23 |
Family
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JP2008116807A Active JP5125729B2 (ja) | 2008-04-28 | 2008-04-28 | 弾性波素子と、これを用いたフィルタ及び電子機器 |
Country Status (2)
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US (1) | US7982365B2 (ja) |
JP (1) | JP5125729B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7213115B2 (ja) | 2019-03-25 | 2023-01-26 | 大和ハウス工業株式会社 | 杭の施工管理方法、杭の施工管理システム、及び杭の施工管理システムを構成する携帯端末 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7928633B2 (en) * | 2007-05-25 | 2011-04-19 | Panasonic Corporation | Elastic wave element containing a silicon oxide film and a silicon nitride oxide film |
WO2009054121A1 (ja) * | 2007-10-23 | 2009-04-30 | Panasonic Corporation | 弾性境界波装置 |
DE102008016613B4 (de) * | 2008-04-01 | 2010-04-15 | Epcos Ag | Verfahren zur Herstellung eines elektrischen Bauelements mit mindestens einer dielektrischen Schicht und ein elektrisches Bauelement mit mindestens einer dielektrischen Schicht |
JP5170311B2 (ja) * | 2009-06-25 | 2013-03-27 | 株式会社村田製作所 | 弾性表面波センサー |
WO2011074464A1 (ja) * | 2009-12-15 | 2011-06-23 | 株式会社村田製作所 | 弾性境界波装置 |
JP2011135468A (ja) * | 2009-12-25 | 2011-07-07 | Murata Mfg Co Ltd | 弾性境界波装置及びその製造方法 |
WO2013047433A1 (ja) * | 2011-09-30 | 2013-04-04 | 株式会社村田製作所 | 弾性波装置 |
KR102067310B1 (ko) * | 2012-07-30 | 2020-01-16 | 스카이워크스 필터 솔루션즈 재팬 씨오., 엘티디. | 탄성파 소자와 이것을 사용한 안테나 공용기 |
US20180041186A1 (en) * | 2016-08-04 | 2018-02-08 | Skyworks Filter Solutions Japan Co., Ltd. | Surface acoustic wave elements with protective films |
JP2018157564A (ja) | 2017-03-16 | 2018-10-04 | スカイワークス ソリューションズ, インコーポレイテッドSkyworks Solutions, Inc. | 酸窒化ケイ素膜により覆われたインターディジタル電極を含む弾性波デバイス |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1998052279A1 (fr) * | 1997-05-12 | 1998-11-19 | Hitachi, Ltd. | Dispositif a onde elastique |
WO2005069486A1 (ja) * | 2004-01-19 | 2005-07-28 | Murata Manufacturing Co., Ltd. | 弾性境界波装置 |
WO2005083881A1 (ja) * | 2004-03-02 | 2005-09-09 | Murata Manufacturing Co., Ltd. | 弾性表面波装置 |
DE102004037819B4 (de) * | 2004-08-04 | 2021-12-16 | Snaptrack, Inc. | Elektroakustisches Bauelement mit geringen Verlusten |
EP1879291A4 (en) * | 2005-04-25 | 2012-02-22 | Murata Manufacturing Co | ACOUSTIC ONBOARD DEVICE |
JP2007267366A (ja) * | 2006-02-28 | 2007-10-11 | Fujitsu Media Device Kk | 弾性境界波素子、共振器およびフィルタ |
JP4937605B2 (ja) * | 2006-03-07 | 2012-05-23 | 太陽誘電株式会社 | 弾性境界波デバイス |
-
2008
- 2008-04-28 JP JP2008116807A patent/JP5125729B2/ja active Active
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2009
- 2009-04-23 US US12/428,591 patent/US7982365B2/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7213115B2 (ja) | 2019-03-25 | 2023-01-26 | 大和ハウス工業株式会社 | 杭の施工管理方法、杭の施工管理システム、及び杭の施工管理システムを構成する携帯端末 |
Also Published As
Publication number | Publication date |
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US20090267449A1 (en) | 2009-10-29 |
US7982365B2 (en) | 2011-07-19 |
JP2009267905A (ja) | 2009-11-12 |
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