JP4927080B2 - 厚い絶縁層の粗さを減少させるための方法 - Google Patents
厚い絶縁層の粗さを減少させるための方法 Download PDFInfo
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Description
a)20nm以上の厚さを有し、2μm×2μmのスキャン幅にわたって3オングストロームRMS以上の粗さを有する絶縁層を、第1のいわゆる「ドナー」基板上に堆積するステップと、
b)内部のガス圧力が0.25Paを超えるチャンバ内で形成されたガスプラズマを用いて、前記絶縁層の自由表面の平滑化処理(smoothing treatment)を行うステップであって、前記プラズマは、無線周波発生器(radiofrequency generator)を用いて生成され、該無線周波発生器は、前記絶縁層に0.6W/cm2よりも大きいパワー密度を印加できるようなパワーで動作し、前記平滑化処理の継続時間は、少なくとも10秒であるようなステップと、
c)前記ドナー基板の内部に原子種を注入することで脆化域を形成し、いわゆる「活性」層と残りの部分とを区切るステップと、
を少なくとも備え、
ステップa)乃至c)は、この順番で行われることを特徴とする方法に関する。
d)前記絶縁層の前記自由表面上への、「レシーバー」と呼ばれる第2の基板の分子結合を行うステップと、
e)前記残りの部分を取り除くステップと、
を備え、
ステップd)及びe)は、ステップc)の後に行われる。
絶縁層2は、ドナー基板1上に、堆積により、特に、気相化学成長により、好ましくは、LPCVDとして知られる減圧下での化学気相成長により形成される。
LPCVD反応器チャンバの内部の圧力は、300mTorrから1.5Torr(即ち40Paから200Pa)であり、好ましくは750mTorr付近(即ち100Pa付近)である。
緻密化アニーリングは、700℃から1000℃の温度での、数分間から数時間の継続時間にわたる、酸化雰囲気中又は中性雰囲気中での熱処理により行われる。
当該処理は、プラズマチャンバを備えるユニットを用いて行われ、当プラズマチャンバの内部では、ガス状雰囲気の圧力及び組成が制御される。いくつかのタイプのそのようなユニットが存在する。
プラズマのRFパワーは高い。そのパワーは、200Wから3000Wであり、200mm(ミリメートル)の直径の基板に対して、少なくとも0.6W/cm2、好ましくは0.6W/cm2〜10W/cm2の範囲のパワー密度を与える。出願人は、プラズマ処理のためのRFパワーが高くなるほど、絶縁層の粗さが低くなることを示した。
任意の汚染を避けるために、例えば「RCA」として知られる化学的処理により、活性化対象の表面の強力な洗浄を行ってもよい。
水酸化アンモニウム(NH4OH)、過酸化水素(H2O2)、及び脱イオン水の混合体を含む、頭字語「SC1」(標準洗浄剤1:standard clean 1)で知られる溶液、による第1の浴(first bath)と、
塩酸(HCl)、過酸化水素(H2O2)、及び脱イオン水の混合体を含む、頭字語「SC2」(標準洗浄剤2:standard clean 2)で知られる溶液、による第2の浴(second bath)と、
を順番に用いて表面を処理する。
活性化プラズマ処理は、レシーバー基板との結合エネルギーを更に増加させるために、有利には、平滑化プラズマよりも低いパワー、例えば、0.2W/cm2から3W/cm2のRFパワー密度、好ましくは、約0.6W/cm2のRFパワー密度で行われる。
以上のように処理された絶縁層の粗さを中央と端部の双方で調べるために、種々の平滑化プラズマ(SP)処理パラメータを変化させながら、いくつかの基板について試験を行った。
薄いひずみシリコン層とシリコン支持層との間に挿入された平滑化されたTEOS酸化膜を備えるsSOI(straind Silicon On Insulator)基板について、他の補足的な試験を行った。この場合、平滑化パワーは、直径200mmのウェーハに対して約60秒間、約1000Wとした。これは、3W/cm2のパワー密度に相当する。平滑化中に使用したガス圧力は、50mTorr(約7Pa)であった。
a:大きな非転写域(1.5mmよりも大きな直径)
b:小さな非転写域(0.5mmと1.5mmとの間の直径)
c:微小な非転写域(0.5mmよりも小さな直径)
d:ブリスタ
e:微小なブリスタ
f:点腐食(ウェーハ端部の非転写域)
を意味する。
平滑化プラズマが結合時間(bonding time)に及ぼす効果を調べるために、他の試験を行った。
直径200mmの複数のsSOIウェーハについて、試験を行った。これらの基板は、強い表面トポロジーを有するひずみシリコン層を備え、且つ、該ひずみシリコン層上に、1650オングストローム(165nm)程度の厚さ(1600オングストロームから1700オングストローム、160nmから170nmの厚さ)のシリコン酸化層がTEOS LPCVD堆積により堆積されたような、ドナー基板で形成されていた。
Claims (10)
- エレクトロニクス、オプトエレクトロニクス、又は光学の分野で使用するための基板(1)上に堆積された厚い絶縁層(2)の粗さを減少させる方法であって、
20nm以上の厚さを有し、2μm×2μmのスキャン幅にわたって3オングストロームRMS以上の粗さを有する絶縁層(2)を、第1のいわゆる「ドナー」基板(1)上に堆積するステップと、
内部のガス圧力が0.25Paから30Paに設定されたチャンバ内で形成されたガスプラズマを用いて、2μm×2μmのスキャン幅にわたって3オングストロームRMS以上の粗さを有する前記絶縁層(2)の自由表面(20)の平滑化処理(SP)を行うステップであって、前記プラズマは、無線周波発生器RFを用いて生成され、前記無線周波発生器RFは、前記絶縁層(2)に0.6W/cm2から10W/cm2のパワー密度を印加可能なパワーで作動し、前記平滑化処理の継続時間は、10秒から200秒の範囲内であるステップと、
前記ドナー基板(1)の内部に原子種の注入により脆化域(10)を形成し、いわゆる「活性」層(11)と残りの部分(12)とを前記ドナー基板(1)内に定めるステップとを備え、
前記平滑化プラズマ処理(SP)は、前記原子種の注入前に行われることを特徴とする方法。 - 前記絶縁層(2)の前記自由表面(20)上に、第2のいわゆる「レシーバー」基板(3)を接合させることを更に含むことを特徴とする請求項1に記載の方法。
- 前記ドナー基板(1)の前記残りの部分(12)を前記脆化域で切り離し、前記活性層(11)及び前記絶縁層(2)を前記レシーバー基板(3)に転写することを更に含むことを特徴とする請求項2に記載の方法。
- 前記絶縁層(2)の前記自由表面(20)を洗浄し、
前記絶縁層(2)の前記自由表面(20)の活性化プラズマ処理(AP)を行う、
ことを更に含むことを特徴とする請求項3に記載の方法。 - 前記絶縁層(2)の前記活性化プラズマ処理(AP)は、内部のガス圧力が約7Paに設定されたチャンバ内で形成されたガスプラズマを用いて行われ、前記絶縁層(2)の前記自由表面(20)の前記洗浄は、化学的な洗浄を含むことを特徴とする請求項4に記載の方法。
- 前記絶縁層(2)は、窒化膜、酸窒化膜、又は酸化膜であることを特徴とする請求項1乃至5のいずれか1項に記載の方法。
- 前記絶縁層(2)は、減圧化学気相成長法(LPCVD)により堆積される酸化膜であることを特徴とする請求項1乃至6のいずれか1項に記載の方法。
- 前記絶縁層(2)は、テトラエチルオルトシリケートから出発する減圧化学気相成長法(TEOS LPCVD)により得られる二酸化シリコン膜(SiO 2 )であり、40Paから200Paの範囲内の圧力で堆積されることを特徴とする請求項7に記載の方法。
- 前記絶縁層(2)の前記自由表面(20)の前記平滑化処理(SP)は、3Paから13Paの範囲内の前記チャンバ内部のガス圧力で行われ、前記プラズマを形成するのに用いられる前記ガスは、酸素(O 2 )、アルゴン(Ar)、窒素(N 2 )、及びこれらのガスの混合物の中から選択され、前記平滑化処理の前記継続時間は、30秒から120秒の範囲内であることを特徴とする請求項1乃至8のいずれか1項に記載の方法。
- 前記絶縁層(2)の緻密化アニーリングを行うことを含み、前記アニーリングは、700℃から1000℃の温度で、数分間から数時間の継続時間にわたり、酸化雰囲気中又は中性雰囲気中で行われることを特徴とする請求項1乃至9のいずれか1項に記載の方法。
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FR0507573A FR2888663B1 (fr) | 2005-07-13 | 2005-07-13 | Procede de diminution de la rugosite d'une couche epaisse d'isolant |
PCT/EP2006/064169 WO2007006803A1 (fr) | 2005-07-13 | 2006-07-12 | Procede de diminution de la rugosite d'une couche epaisse d'isolant |
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FR2888663A1 (fr) | 2007-01-19 |
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US7446019B2 (en) | 2008-11-04 |
US20070020947A1 (en) | 2007-01-25 |
FR2888663B1 (fr) | 2008-04-18 |
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EP1902463B1 (fr) | 2011-09-14 |
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ATE524828T1 (de) | 2011-09-15 |
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