JP4925644B2 - 塗布機構、欠陥修正装置、塗布方法、および液晶表示パネル用カラーフィルタの欠陥修正方法 - Google Patents

塗布機構、欠陥修正装置、塗布方法、および液晶表示パネル用カラーフィルタの欠陥修正方法 Download PDF

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JP4925644B2
JP4925644B2 JP2005324987A JP2005324987A JP4925644B2 JP 4925644 B2 JP4925644 B2 JP 4925644B2 JP 2005324987 A JP2005324987 A JP 2005324987A JP 2005324987 A JP2005324987 A JP 2005324987A JP 4925644 B2 JP4925644 B2 JP 4925644B2
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JP
Japan
Prior art keywords
tip
needle
defect
application needle
liquid material
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Expired - Fee Related
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JP2005324987A
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English (en)
Japanese (ja)
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JP2007094341A (ja
Inventor
正弘 猿田
昭浩 山中
昌良 松島
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NTN Corp
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NTN Corp
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Publication date
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Priority to JP2005324987A priority Critical patent/JP4925644B2/ja
Priority to TW095107155A priority patent/TWI394989B/zh
Priority to KR1020060026810A priority patent/KR101286797B1/ko
Publication of JP2007094341A publication Critical patent/JP2007094341A/ja
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Publication of JP4925644B2 publication Critical patent/JP4925644B2/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136259—Repairing; Defects

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Filters (AREA)
  • Liquid Crystal (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
JP2005324987A 2005-03-28 2005-11-09 塗布機構、欠陥修正装置、塗布方法、および液晶表示パネル用カラーフィルタの欠陥修正方法 Expired - Fee Related JP4925644B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2005324987A JP4925644B2 (ja) 2005-03-28 2005-11-09 塗布機構、欠陥修正装置、塗布方法、および液晶表示パネル用カラーフィルタの欠陥修正方法
TW095107155A TWI394989B (zh) 2005-03-28 2006-03-03 塗佈針，使用此塗佈針之塗佈機構，缺陷修正裝置，塗佈方法以及液晶顯示面板用彩色過濾器之缺陷修正方法
KR1020060026810A KR101286797B1 (ko) 2005-03-28 2006-03-24 도포침과, 그것을 이용한 도포 기구, 결함 수정 장치, 도포방법, 및 액정 표시 패널용 칼라 필터의 결함 수정 방법

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2005091526 2005-03-28
JP2005091526 2005-03-28
JP2005251496 2005-08-31
JP2005251496 2005-08-31
JP2005324987A JP4925644B2 (ja) 2005-03-28 2005-11-09 塗布機構、欠陥修正装置、塗布方法、および液晶表示パネル用カラーフィルタの欠陥修正方法

Publications (2)

Publication Number Publication Date
JP2007094341A JP2007094341A (ja) 2007-04-12
JP4925644B2 true JP4925644B2 (ja) 2012-05-09

Family

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Family Applications (1)

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JP2005324987A Expired - Fee Related JP4925644B2 (ja) 2005-03-28 2005-11-09 塗布機構、欠陥修正装置、塗布方法、および液晶表示パネル用カラーフィルタの欠陥修正方法

Country Status (3)

Country Link
JP (1) JP4925644B2 (ko)
KR (1) KR101286797B1 (ko)
TW (1) TWI394989B (ko)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5263861B2 (ja) * 2007-05-31 2013-08-14 Ｎｔｎ株式会社 欠陥修正装置
JP5099688B2 (ja) * 2007-11-13 2012-12-19 Ｎｔｎ株式会社 液状材料塗布装置およびそれを用いた欠陥修正装置
JP4883535B2 (ja) * 2007-11-27 2012-02-22 レーザーテック株式会社 欠陥修正装置、欠陥修正方法、及びパターン基板の製造方法
JP2009268982A (ja) * 2008-05-08 2009-11-19 Ntn Corp 塗布針と、それを用いた塗布機構、欠陥修正装置、および塗布方法
JP4982527B2 (ja) 2009-06-08 2012-07-25 株式会社東芝 成膜装置及び成膜方法
WO2012008191A1 (ja) * 2010-07-14 2012-01-19 シャープ株式会社 カラーフィルタ基板の製造方法
JP5826472B2 (ja) * 2010-09-03 2015-12-02 芝浦メカトロニクス株式会社 ペースト塗布装置及びペースト塗布方法
JP6050624B2 (ja) * 2012-06-28 2016-12-21 Ntn株式会社 塗布具、塗布機構、塗布装置および塗布方法
JP6242122B2 (ja) * 2013-02-01 2017-12-06 Ntn株式会社 塗布ユニットと、それを用いた塗布装置および塗布方法
JP6011376B2 (ja) * 2013-02-04 2016-10-19 大日本印刷株式会社 タッチパネルセンサの断線修正装置及び断線修正方法
JP6333323B2 (ja) 2016-08-29 2018-05-30 Ntn株式会社 塗布装置および塗布方法
CN114401796A (zh) * 2019-09-12 2022-04-26 国立大学法人大阪大学 涂布装置和涂布方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3034392B2 (ja) * 1992-12-07 2000-04-17 ポーラ化成工業株式会社 液体充填ノズル
JP2983879B2 (ja) * 1995-04-24 1999-11-29 エヌティエヌ株式会社 基板の欠陥修正方法および欠陥修正装置
JP3338285B2 (ja) * 1996-03-29 2002-10-28 エヌティエヌ株式会社 欠陥修正装置
JP4247931B2 (ja) * 1998-06-30 2009-04-02 富士通テン株式会社 転写ピン
JP2000088863A (ja) * 1998-09-11 2000-03-31 Nippon Laser Denshi Kk 微量分注装置の分注用針体
JP4419212B2 (ja) * 1999-06-07 2010-02-24 東レ株式会社 プラズマディスプレイ用部材の製造方法
JP4327387B2 (ja) * 2001-09-17 2009-09-09 シャープ株式会社 ノズルヘッドと液晶吐出装置及び液晶表示パネルの製造方法
JP4231670B2 (ja) * 2002-08-20 2009-03-04 大日本印刷株式会社 カラーフィルタの欠陥修正装置
JP2004077904A (ja) * 2002-08-20 2004-03-11 Dainippon Printing Co Ltd カラーフィルタの製造方法
JP2004105842A (ja) * 2002-09-18 2004-04-08 Canon Inc 液体の塗布方法及び塗布装置
JP2004290962A (ja) * 2003-03-11 2004-10-21 Seiko Epson Corp 薄膜形成装置、電子光学装置及び電子機器
JP4247890B2 (ja) * 2003-08-12 2009-04-02 東京エレクトロン株式会社 塗布ノズル及び塗布装置
TWM257890U (en) * 2004-06-23 2005-03-01 Shong I Copper Co Ltd Improved design of shower head

Also Published As

Publication number Publication date
KR20060103857A (ko) 2006-10-04
TW200639445A (en) 2006-11-16
JP2007094341A (ja) 2007-04-12
KR101286797B1 (ko) 2013-07-17
TWI394989B (zh) 2013-05-01

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