JP4795893B2 - 基板検知機構および基板収容容器 - Google Patents

基板検知機構および基板収容容器 Download PDF

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Publication number
JP4795893B2
JP4795893B2 JP2006225619A JP2006225619A JP4795893B2 JP 4795893 B2 JP4795893 B2 JP 4795893B2 JP 2006225619 A JP2006225619 A JP 2006225619A JP 2006225619 A JP2006225619 A JP 2006225619A JP 4795893 B2 JP4795893 B2 JP 4795893B2
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JP
Japan
Prior art keywords
substrate
container
optical sensor
support member
glass substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006225619A
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English (en)
Japanese (ja)
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JP2008053302A (ja
Inventor
昇 早川
星児 岡部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2006225619A priority Critical patent/JP4795893B2/ja
Priority to TW096130978A priority patent/TWI445113B/zh
Priority to KR1020070083845A priority patent/KR100868110B1/ko
Priority to CN2007101466117A priority patent/CN101131366B/zh
Publication of JP2008053302A publication Critical patent/JP2008053302A/ja
Application granted granted Critical
Publication of JP4795893B2 publication Critical patent/JP4795893B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133354—Arrangements for aligning or assembling substrates

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2006225619A 2006-08-22 2006-08-22 基板検知機構および基板収容容器 Expired - Fee Related JP4795893B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006225619A JP4795893B2 (ja) 2006-08-22 2006-08-22 基板検知機構および基板収容容器
TW096130978A TWI445113B (zh) 2006-08-22 2007-08-21 A substrate detection mechanism and a substrate storage container
KR1020070083845A KR100868110B1 (ko) 2006-08-22 2007-08-21 기판 검지 기구 및 기판 수용 용기
CN2007101466117A CN101131366B (zh) 2006-08-22 2007-08-22 基板检测机构以及基板收纳容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006225619A JP4795893B2 (ja) 2006-08-22 2006-08-22 基板検知機構および基板収容容器

Publications (2)

Publication Number Publication Date
JP2008053302A JP2008053302A (ja) 2008-03-06
JP4795893B2 true JP4795893B2 (ja) 2011-10-19

Family

ID=39128714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006225619A Expired - Fee Related JP4795893B2 (ja) 2006-08-22 2006-08-22 基板検知機構および基板収容容器

Country Status (4)

Country Link
JP (1) JP4795893B2 (ko)
KR (1) KR100868110B1 (ko)
CN (1) CN101131366B (ko)
TW (1) TWI445113B (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180035661A (ko) * 2016-09-29 2018-04-06 가부시키가이샤 스크린 홀딩스 자세 변경 장치

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100976402B1 (ko) 2008-07-25 2010-08-17 주식회사 에스에프에이 화학 기상 증착 장치
JP5460274B2 (ja) * 2009-12-03 2014-04-02 信越ポリマー株式会社 基板収納容器
KR101326014B1 (ko) 2010-10-06 2013-11-07 엘아이지에이디피 주식회사 기판 트레이 및 기판분리모듈
CN102721692B (zh) * 2012-06-19 2015-11-25 深圳市华星光电技术有限公司 玻璃基板卡匣的检测装置
CN102809539A (zh) * 2012-07-23 2012-12-05 浙江万马电缆股份有限公司 一种中高压电缆半导电屏蔽层破损检测方法及装置
CN102967887A (zh) * 2012-11-13 2013-03-13 深圳市华星光电技术有限公司 一种用于检测空卡匣的检测装置
JP6342299B2 (ja) * 2014-11-04 2018-06-13 株式会社アルバック 基板割れ判定方法
CN112074943A (zh) * 2018-05-15 2020-12-11 瑞士艾发科技 基体真空处理设备及其方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59208741A (ja) * 1983-05-12 1984-11-27 Mitsubishi Electric Corp 半導体ウエ−ハ用吸着チヤツク装置
JPH03280447A (ja) * 1990-03-28 1991-12-11 Tel Varian Ltd 基板有無検出方法
JP3457110B2 (ja) * 1995-12-05 2003-10-14 大日本スクリーン製造株式会社 ウエハの周縁形状検出装置
JPH09246348A (ja) * 1996-03-06 1997-09-19 Nikon Corp 基板搬送装置
JP3468056B2 (ja) * 1997-09-23 2003-11-17 東京エレクトロン株式会社 基板検出装置
JPH11163093A (ja) * 1997-11-28 1999-06-18 Nissin Electric Co Ltd 基板搬送ロボット
JP2004022807A (ja) * 2002-06-17 2004-01-22 Renesas Technology Corp 半導体処理装置およびその調整方法
JP4276440B2 (ja) * 2003-01-06 2009-06-10 東京エレクトロン株式会社 基板検出方法及び装置並びに基板処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180035661A (ko) * 2016-09-29 2018-04-06 가부시키가이샤 스크린 홀딩스 자세 변경 장치
US10395961B2 (en) 2016-09-29 2019-08-27 SCREEN Holdings Co., Ltd. Posture changing device
KR102025472B1 (ko) 2016-09-29 2019-09-25 가부시키가이샤 스크린 홀딩스 자세 변경 장치

Also Published As

Publication number Publication date
TW200818376A (en) 2008-04-16
JP2008053302A (ja) 2008-03-06
KR100868110B1 (ko) 2008-11-10
KR20080018120A (ko) 2008-02-27
CN101131366B (zh) 2011-05-11
TWI445113B (zh) 2014-07-11
CN101131366A (zh) 2008-02-27

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