JP4742826B2 - 赤外線検知素子の製造方法 - Google Patents
赤外線検知素子の製造方法 Download PDFInfo
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- JP4742826B2 JP4742826B2 JP2005330371A JP2005330371A JP4742826B2 JP 4742826 B2 JP4742826 B2 JP 4742826B2 JP 2005330371 A JP2005330371 A JP 2005330371A JP 2005330371 A JP2005330371 A JP 2005330371A JP 4742826 B2 JP4742826 B2 JP 4742826B2
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- thermopile
- infrared
- silicon oxide
- polysilicon
- film
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- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 229920005591 polysilicon Polymers 0.000 claims description 59
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 52
- 239000000758 substrate Substances 0.000 claims description 31
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 30
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 30
- 230000001681 protective effect Effects 0.000 claims description 22
- 239000004065 semiconductor Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 7
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 25
- 238000005530 etching Methods 0.000 description 19
- 238000005452 bending Methods 0.000 description 13
- 150000004767 nitrides Chemical class 0.000 description 9
- 238000010521 absorption reaction Methods 0.000 description 8
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 230000005484 gravity Effects 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000009466 transformation Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- XUIMIQQOPSSXEZ-NJFSPNSNSA-N silicon-30 atom Chemical compound [30Si] XUIMIQQOPSSXEZ-NJFSPNSNSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0203—Containers; Encapsulations, e.g. encapsulation of photodiodes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
- G01J5/023—Particular leg structure or construction or shape; Nanotubes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
- G01J5/024—Special manufacturing steps or sacrificial layers or layer structures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/09—Devices sensitive to infrared, visible or ultraviolet radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
- H01L27/14649—Infrared imagers
Description
次に、図5の製造工程を示す断面図を参照して、図3に示す赤外線検知素子の製造方法について説明する。図5に示す素子の断面は、図1のa−a線に沿った断面を表している。
2…赤外線吸収部
3,60,80,120…梁
30,31,81,82,121,122…ポリシリコン
32,83,123…保護膜
32a,60a…基部
32b,60b,81a,82a…突起部
50,110…犠牲層
51,111…エッチングストッパー
52,112…窒化膜
53,113a,113b…シリコン酸化膜
54,115…アルミ配線
54,114,116…スリット
55,117…空隙
Claims (1)
- 半導体基板上に犠牲層を形成する第1の工程と、
前記犠牲層の上に、赤外線を受光する赤外線受光部を形成する第2の工程と、
前記赤外線受光部の温度上昇を検出するサーモパイルの基部となる第1のポリシリコン抵抗膜を形成する第3の工程と、
前記第1のポリシリコン抵抗膜を覆うように前記サーモパイルの保護膜となる第1のシリコン酸化膜を形成する第4の工程と、
前記第1のポリシリコン抵抗膜上の前記第1のシリコン酸化膜を選択的に除去し、前記第1のシリコン酸化膜が除去された前記第1のポリシリコン抵抗膜上に、前記サーモパイルの突起部となる第2のポリシリコン抵抗膜を形成し、断面形状が少なくとも一つ以上の突起部を有するサーモパイルを形成する第5の工程と、
前記第2のポリシリコン抵抗膜を覆うように前記サーモパイルの保護膜となる第2のシリコン酸化膜を形成し、前記第1のシリコン酸化膜と前記第2のシリコン酸化膜を貫通するスリットを形成し、前記半導体基板に対して前記赤外線受光部を支持し、前記サーモパイルを被覆して前記サーモパイルと前記保護膜とで構成された梁を形成する第6の工程と、
前記スリットを介して、前記半導体基板、前記犠牲層を選択的に除去し、前記半導体基板と前記赤外線受光部との間に空間を形成し、前記半導体基板と前記赤外線受光部とを分離する第7の工程と
を有することを特徴とする赤外線検知素子の製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005330371A JP4742826B2 (ja) | 2005-11-15 | 2005-11-15 | 赤外線検知素子の製造方法 |
US11/598,196 US7687774B2 (en) | 2005-11-15 | 2006-11-13 | Infrared ray sensing element and method of producing the same |
CN2006101451691A CN1967181B (zh) | 2005-11-15 | 2006-11-15 | 红外线传感元件和制造该红外线传感元件的方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005330371A JP4742826B2 (ja) | 2005-11-15 | 2005-11-15 | 赤外線検知素子の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007139455A JP2007139455A (ja) | 2007-06-07 |
JP4742826B2 true JP4742826B2 (ja) | 2011-08-10 |
Family
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Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005330371A Active JP4742826B2 (ja) | 2005-11-15 | 2005-11-15 | 赤外線検知素子の製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7687774B2 (ja) |
JP (1) | JP4742826B2 (ja) |
CN (1) | CN1967181B (ja) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4730791B2 (ja) * | 2007-04-18 | 2011-07-20 | 株式会社小糸製作所 | 車両用前照灯装置 |
JP2009174917A (ja) * | 2008-01-22 | 2009-08-06 | Oki Semiconductor Co Ltd | 赤外線検出素子、及び赤外線検出素子の製造方法 |
JP5645240B2 (ja) | 2009-03-31 | 2014-12-24 | パナソニックIpマネジメント株式会社 | 赤外線アレイセンサ |
JP5081116B2 (ja) * | 2008-09-25 | 2012-11-21 | パナソニック株式会社 | 赤外線センサおよび赤外線センサモジュール |
EP2339305A4 (en) | 2008-09-25 | 2012-07-25 | Panasonic Corp | INFRARED SENSOR |
US20110175145A1 (en) * | 2008-09-25 | 2011-07-21 | Koji Tsuji | Infrared Sensor |
JP5261102B2 (ja) * | 2008-09-25 | 2013-08-14 | パナソニック株式会社 | 赤外線センサおよび赤外線センサモジュール |
JP5625232B2 (ja) * | 2008-10-23 | 2014-11-19 | 日本電気株式会社 | 熱型赤外線固体撮像素子 |
US8275412B2 (en) * | 2008-12-31 | 2012-09-25 | Motorola Mobility Llc | Portable electronic device having directional proximity sensors based on device orientation |
US20100271312A1 (en) * | 2009-04-22 | 2010-10-28 | Rachid Alameh | Menu Configuration System and Method for Display on an Electronic Device |
US8304733B2 (en) | 2009-05-22 | 2012-11-06 | Motorola Mobility Llc | Sensing assembly for mobile device |
US8391719B2 (en) | 2009-05-22 | 2013-03-05 | Motorola Mobility Llc | Method and system for conducting communication between mobile devices |
US8788676B2 (en) * | 2009-05-22 | 2014-07-22 | Motorola Mobility Llc | Method and system for controlling data transmission to or from a mobile device |
US8619029B2 (en) * | 2009-05-22 | 2013-12-31 | Motorola Mobility Llc | Electronic device with sensing assembly and method for interpreting consecutive gestures |
US8294105B2 (en) * | 2009-05-22 | 2012-10-23 | Motorola Mobility Llc | Electronic device with sensing assembly and method for interpreting offset gestures |
US8269175B2 (en) * | 2009-05-22 | 2012-09-18 | Motorola Mobility Llc | Electronic device with sensing assembly and method for detecting gestures of geometric shapes |
US8542186B2 (en) | 2009-05-22 | 2013-09-24 | Motorola Mobility Llc | Mobile device with user interaction capability and method of operating same |
US8344325B2 (en) | 2009-05-22 | 2013-01-01 | Motorola Mobility Llc | Electronic device with sensing assembly and method for detecting basic gestures |
US8319170B2 (en) | 2009-07-10 | 2012-11-27 | Motorola Mobility Llc | Method for adapting a pulse power mode of a proximity sensor |
US8665227B2 (en) | 2009-11-19 | 2014-03-04 | Motorola Mobility Llc | Method and apparatus for replicating physical key function with soft keys in an electronic device |
DE102010042108B4 (de) * | 2010-01-18 | 2013-10-17 | Heimann Sensor Gmbh | Thermopile-Infrarot-Sensor in monolithischer Si-Mikromechanik |
JP5143176B2 (ja) * | 2010-03-31 | 2013-02-13 | 株式会社東芝 | 赤外線撮像素子およびその製造方法 |
US8963845B2 (en) | 2010-05-05 | 2015-02-24 | Google Technology Holdings LLC | Mobile device with temperature sensing capability and method of operating same |
US8751056B2 (en) | 2010-05-25 | 2014-06-10 | Motorola Mobility Llc | User computer device with temperature sensing capabilities and method of operating same |
US9103732B2 (en) | 2010-05-25 | 2015-08-11 | Google Technology Holdings LLC | User computer device with temperature sensing capabilities and method of operating same |
JP5261447B2 (ja) * | 2010-08-06 | 2013-08-14 | パナソニック株式会社 | 赤外線センサ |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0334478A (ja) * | 1989-06-30 | 1991-02-14 | Nissan Motor Co Ltd | 赤外線センサ |
JPH08285680A (ja) * | 1995-02-16 | 1996-11-01 | Mitsubishi Electric Corp | 赤外線検出装置とその製造方法、および赤外線検出装置製造のためのエッチングモニタ |
JPH11258039A (ja) * | 1998-03-10 | 1999-09-24 | Nissan Motor Co Ltd | 赤外線検出素子及びその製造方法 |
JP2002176204A (ja) * | 2000-12-07 | 2002-06-21 | Ihi Aerospace Co Ltd | 赤外線検出素子 |
JP2004271264A (ja) * | 2003-03-06 | 2004-09-30 | Nec Kyushu Ltd | 赤外線センサー及びその製造方法 |
Family Cites Families (5)
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US6707121B2 (en) * | 1997-03-28 | 2004-03-16 | Interuniversitair Microelektronica Centrum (Imec Vzw) | Micro electro mechanical systems and devices |
JP2000111396A (ja) | 1998-10-06 | 2000-04-18 | Nissan Motor Co Ltd | 赤外線検出素子およびその製造方法 |
JP2001041818A (ja) * | 1999-07-27 | 2001-02-16 | Sharp Corp | ボロメータ型赤外線検知素子およびそれを用いる赤外線イメージセンサ |
CN2703328Y (zh) * | 2003-12-31 | 2005-06-01 | 中国科学技术大学 | 光-机械式微梁阵列热型红外图象传感器 |
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-
2005
- 2005-11-15 JP JP2005330371A patent/JP4742826B2/ja active Active
-
2006
- 2006-11-13 US US11/598,196 patent/US7687774B2/en active Active
- 2006-11-15 CN CN2006101451691A patent/CN1967181B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0334478A (ja) * | 1989-06-30 | 1991-02-14 | Nissan Motor Co Ltd | 赤外線センサ |
JPH08285680A (ja) * | 1995-02-16 | 1996-11-01 | Mitsubishi Electric Corp | 赤外線検出装置とその製造方法、および赤外線検出装置製造のためのエッチングモニタ |
JPH11258039A (ja) * | 1998-03-10 | 1999-09-24 | Nissan Motor Co Ltd | 赤外線検出素子及びその製造方法 |
JP2002176204A (ja) * | 2000-12-07 | 2002-06-21 | Ihi Aerospace Co Ltd | 赤外線検出素子 |
JP2004271264A (ja) * | 2003-03-06 | 2004-09-30 | Nec Kyushu Ltd | 赤外線センサー及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN1967181B (zh) | 2010-08-11 |
JP2007139455A (ja) | 2007-06-07 |
US7687774B2 (en) | 2010-03-30 |
CN1967181A (zh) | 2007-05-23 |
US20070114416A1 (en) | 2007-05-24 |
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