JP5625232B2 - 熱型赤外線固体撮像素子 - Google Patents
熱型赤外線固体撮像素子 Download PDFInfo
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- JP5625232B2 JP5625232B2 JP2008273564A JP2008273564A JP5625232B2 JP 5625232 B2 JP5625232 B2 JP 5625232B2 JP 2008273564 A JP2008273564 A JP 2008273564A JP 2008273564 A JP2008273564 A JP 2008273564A JP 5625232 B2 JP5625232 B2 JP 5625232B2
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Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
- H01L27/14649—Infrared imagers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
- G01J5/023—Particular leg structure or construction or shape; Nanotubes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
- G01J5/024—Special manufacturing steps or sacrificial layers or layer structures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
Description
2 第1支持部
3 第2支持部
4 梁
5 第1コンタクト部
6 第2コンタクト部
7 スリット
10 読出回路付Si基板
11 接続電極
12 第1絶縁膜
13 第1配線
14 第2配線
15 第2絶縁膜
16 第3絶縁膜
17 ボロメータ薄膜
18 第4絶縁膜
19 第3配線
20 第5絶縁膜
21 第1犠牲層
22 第2犠牲層
Claims (7)
- 信号読出のための集積回路が形成され、該集積回路との接続電極を備えた基板と、赤外線を吸収することにより加熱される赤外線吸収部、該赤外線吸収部からの熱によって温度が変化して前記赤外線吸収部の温度変化を検出する温度検出部、及び、該温度検出部と電気的に接続された電極部を備え、前記基板の一側の面上に間隔を空けて配置されるダイアフラムと、前記ダイアフラムを前記基板の前記一側の面から浮かせて支持し、前記基板の前記接続電極に前記ダイアフラムの前記電極部を電気的に接続する配線を構成するように少なくとも一部が導電性材料により形成された一対の支持部と、を少なくとも有する画素が、複数配置された熱型赤外線固体撮像素子において、
前記一対の支持部は、各々、前記ダイアフラムと同階層に設けられ、前記ダイアフラムと繋がる第1支持部と、前記ダイアフラムと前記基板との間の階層に設けられた第2支持部と、を有し、前記第2支持部は、基板と平行方向への少なくとも1回以上の折返し点を有する梁と、前記梁の一端部に設けられた第1コンタクト部と、前記梁の他端部に設けられた第2コンタクト部と、から成り、前記一対の支持部の前記梁及び前記第2コンタクト部は、前記第1支持部と前記第2支持部の第1コンタクト部との間で機械的・電気的接続が形成され、且つ、前記第2支持部の第2コンタクト部と前記接続電極との間で機械的・電気的接続が形成されており、
前記画素が、ダイアフラム長及びダイアフラム間ギャップのピッチでアレイ状に配置され、各々の画素の前記第2支持部の梁及び前記第2コンタクト部が、他の画素のダイアフラム下に存在することを特徴とする熱型赤外線固体撮像素子。 - 前記ダイアフラムと第1支持部は、一部で繋がっていることを特徴とする請求項1に記載の熱型赤外線固体撮像素子。
- 前記一対の支持部の前記梁及び前記第2コンタクト部は、前記ダイアフラムを挟んで外ダイアフラムの両外側に配置されていることを特徴とする請求項1又は2に記載の熱型赤外線固体撮像素子。
- 更に、前記第2支持部と前記基板との間にn階層(n≧1の整数)の支持部を有し、
前記第2支持部の前記第2コンタクト部と1つ下の階層の前記支持部の第1コンタクト部との間で、機械的・電気的接続が形成され、 nが2以上の場合は、所定の階層の前記支持部の第2コンタクト部と1つ下の階層の前記支持部の第1コンタクト部との間で、順次、機械的・電気的接続が形成され、
最も下の階層の前記支持部の第2コンタクト部と前記接続電極との間で機械的・電気的接続が形成されていることを特徴とする請求項1乃至3のいずれか1項に記載の熱型赤外線固体撮像素子。 - 前記第1コンタクト部及び前記第2コンタクト部の底部に、前記梁に配置される配線とは異なる金属膜が形成されていることを特徴とする請求項1乃至4のいずれか1項に記載の熱型赤外線固体撮像素子。
- 前記梁の幅が、前記ダイアフラム側から前記第2コンタクト側に向かって徐々に狭く又は広くなるように形成されている請求項1乃至5のいずれか1項に記載の熱型赤外線固体撮像素子。
- 前記梁の幅が、部分的に狭く又は広くなるように形成されている請求項1乃至5のいずれか1項に記載の熱型赤外線固体撮像素子。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008273564A JP5625232B2 (ja) | 2008-10-23 | 2008-10-23 | 熱型赤外線固体撮像素子 |
US13/123,939 US20110198720A1 (en) | 2008-10-23 | 2009-10-06 | Thermal-type infrared solid-state imaging element |
PCT/JP2009/067426 WO2010047224A1 (ja) | 2008-10-23 | 2009-10-06 | 熱型赤外線固体撮像素子 |
Applications Claiming Priority (1)
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JP2008273564A JP5625232B2 (ja) | 2008-10-23 | 2008-10-23 | 熱型赤外線固体撮像素子 |
Publications (2)
Publication Number | Publication Date |
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JP2010101756A JP2010101756A (ja) | 2010-05-06 |
JP5625232B2 true JP5625232B2 (ja) | 2014-11-19 |
Family
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JP2008273564A Active JP5625232B2 (ja) | 2008-10-23 | 2008-10-23 | 熱型赤外線固体撮像素子 |
Country Status (3)
Country | Link |
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US (1) | US20110198720A1 (ja) |
JP (1) | JP5625232B2 (ja) |
WO (1) | WO2010047224A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11404475B2 (en) | 2018-11-08 | 2022-08-02 | Mitsubishi Electric Corporation | Semiconductor sensor device and semiconductor sensor device manufacturing method |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5708122B2 (ja) * | 2011-03-25 | 2015-04-30 | 日本電気株式会社 | 熱型赤外線固体撮像素子及びその製造方法 |
CN106935677B (zh) * | 2015-12-31 | 2018-12-11 | 上海丽恒光微电子科技有限公司 | 一种红外探测器及其制备方法 |
CN106935676B (zh) * | 2015-12-31 | 2019-03-26 | 上海丽恒光微电子科技有限公司 | 一种红外探测器及其制备方法 |
DE102016212423B4 (de) * | 2016-07-07 | 2019-03-28 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Strahlungsdetektor und Herstellung |
CN106629578B (zh) * | 2017-02-15 | 2019-07-12 | 浙江大立科技股份有限公司 | 具有微桥结构的红外探测器及其制造方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0743215A (ja) * | 1993-05-24 | 1995-02-14 | Mitsubishi Electric Corp | 赤外線検知素子 |
US5571751A (en) * | 1994-05-09 | 1996-11-05 | National Semiconductor Corporation | Interconnect structures for integrated circuits |
US5688699A (en) * | 1996-01-16 | 1997-11-18 | Raytheon Company | Microbolometer |
JPH11211558A (ja) * | 1998-01-27 | 1999-08-06 | Mitsubishi Electric Corp | センサ及びセンサアレイ |
JP2000292257A (ja) * | 1999-02-04 | 2000-10-20 | Nec Corp | 熱型赤外線センサ |
US6046485A (en) * | 1999-04-01 | 2000-04-04 | Honeywell International Inc. | Large area low mass IR pixel having tailored cross section |
JP3377041B2 (ja) * | 2000-03-10 | 2003-02-17 | 日本電気株式会社 | 熱分離構造を有する熱型赤外線検出器 |
JP3859479B2 (ja) * | 2001-10-17 | 2006-12-20 | 日本電気株式会社 | ボロメータ型赤外線検出器 |
US6958478B2 (en) * | 2003-05-19 | 2005-10-25 | Indigo Systems Corporation | Microbolometer detector with high fill factor and transducers having enhanced thermal isolation |
JP4742826B2 (ja) * | 2005-11-15 | 2011-08-10 | 日産自動車株式会社 | 赤外線検知素子の製造方法 |
-
2008
- 2008-10-23 JP JP2008273564A patent/JP5625232B2/ja active Active
-
2009
- 2009-10-06 US US13/123,939 patent/US20110198720A1/en not_active Abandoned
- 2009-10-06 WO PCT/JP2009/067426 patent/WO2010047224A1/ja active Application Filing
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11404475B2 (en) | 2018-11-08 | 2022-08-02 | Mitsubishi Electric Corporation | Semiconductor sensor device and semiconductor sensor device manufacturing method |
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Publication number | Publication date |
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JP2010101756A (ja) | 2010-05-06 |
WO2010047224A1 (ja) | 2010-04-29 |
US20110198720A1 (en) | 2011-08-18 |
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