JP4728811B2 - セラミックス焼結体、セラミックス焼結体の製造方法、金属蒸着用発熱体 - Google Patents
セラミックス焼結体、セラミックス焼結体の製造方法、金属蒸着用発熱体 Download PDFInfo
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- JP4728811B2 JP4728811B2 JP2005516254A JP2005516254A JP4728811B2 JP 4728811 B2 JP4728811 B2 JP 4728811B2 JP 2005516254 A JP2005516254 A JP 2005516254A JP 2005516254 A JP2005516254 A JP 2005516254A JP 4728811 B2 JP4728811 B2 JP 4728811B2
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- sintered body
- ceramic sintered
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- boron nitride
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- 239000000919 ceramic Substances 0.000 title claims description 53
- 238000010438 heat treatment Methods 0.000 title claims description 19
- 229910052751 metal Inorganic materials 0.000 title claims description 19
- 239000002184 metal Substances 0.000 title claims description 19
- 238000007740 vapor deposition Methods 0.000 title claims description 12
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 69
- 229910052582 BN Inorganic materials 0.000 claims description 63
- 239000000843 powder Substances 0.000 claims description 61
- 238000005245 sintering Methods 0.000 claims description 25
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 22
- 239000001301 oxygen Substances 0.000 claims description 22
- 229910052760 oxygen Inorganic materials 0.000 claims description 22
- 239000011575 calcium Substances 0.000 claims description 17
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 14
- 239000002994 raw material Substances 0.000 claims description 13
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 12
- 229910052791 calcium Inorganic materials 0.000 claims description 12
- QYEXBYZXHDUPRC-UHFFFAOYSA-N B#[Ti]#B Chemical compound B#[Ti]#B QYEXBYZXHDUPRC-UHFFFAOYSA-N 0.000 claims description 10
- 229910033181 TiB2 Inorganic materials 0.000 claims description 10
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- 238000000034 method Methods 0.000 claims description 10
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- 229940043430 calcium compound Drugs 0.000 claims description 8
- 150000001674 calcium compounds Chemical class 0.000 claims description 8
- 230000001186 cumulative effect Effects 0.000 claims description 8
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 6
- 230000001590 oxidative effect Effects 0.000 claims description 6
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- 238000002441 X-ray diffraction Methods 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 230000007797 corrosion Effects 0.000 description 26
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- 239000012071 phase Substances 0.000 description 17
- 239000002245 particle Substances 0.000 description 15
- 235000012255 calcium oxide Nutrition 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 9
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- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 8
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- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 6
- 229910010413 TiO 2 Inorganic materials 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
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- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 2
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- ZCCIPPOKBCJFDN-UHFFFAOYSA-N calcium nitrate Chemical compound [Ca+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O ZCCIPPOKBCJFDN-UHFFFAOYSA-N 0.000 description 2
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical class [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 2
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- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 238000007088 Archimedes method Methods 0.000 description 1
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- 238000012360 testing method Methods 0.000 description 1
- 238000003826 uniaxial pressing Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/76—Crystal structural characteristics, e.g. symmetry
- C04B2235/761—Unit-cell parameters, e.g. lattice constants
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/77—Density
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- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/80—Phases present in the sintered or melt-cast ceramic products other than the main phase
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/9669—Resistance against chemicals, e.g. against molten glass or molten salts
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005516254A JP4728811B2 (ja) | 2003-12-11 | 2004-12-10 | セラミックス焼結体、セラミックス焼結体の製造方法、金属蒸着用発熱体 |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003413533 | 2003-12-11 | ||
| JP2003413533 | 2003-12-11 | ||
| JP2005516254A JP4728811B2 (ja) | 2003-12-11 | 2004-12-10 | セラミックス焼結体、セラミックス焼結体の製造方法、金属蒸着用発熱体 |
| PCT/JP2004/018862 WO2005056496A1 (ja) | 2003-12-11 | 2004-12-10 | セラミックス焼結体、セラミックス焼結体の製造方法、金属蒸着用発熱体 |
Publications (2)
| Publication Number | Publication Date |
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| JPWO2005056496A1 JPWO2005056496A1 (ja) | 2007-12-06 |
| JP4728811B2 true JP4728811B2 (ja) | 2011-07-20 |
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| JP2005516254A Expired - Fee Related JP4728811B2 (ja) | 2003-12-11 | 2004-12-10 | セラミックス焼結体、セラミックス焼結体の製造方法、金属蒸着用発熱体 |
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Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4937723B2 (ja) * | 2006-12-14 | 2012-05-23 | 電気化学工業株式会社 | 金属蒸発発熱体の製造方法 |
| KR100838325B1 (ko) | 2007-12-27 | 2008-06-16 | 주식회사 이엠 인더스 | 이붕화티탄이 함유된 세라믹 제조방법 및 세라믹 |
| US8821988B2 (en) * | 2012-10-01 | 2014-09-02 | Dayton T. Brown, Inc. | Method for modification of the surface and subsurface regions of metallic substrates |
| CN103805822B (zh) * | 2013-09-26 | 2016-04-20 | 山东鹏程特种陶瓷有限公司 | 高性能四组分导电陶瓷蒸发舟及其生产工艺 |
| CN104030690B (zh) * | 2014-06-09 | 2015-10-07 | 河海大学 | 一种氮化钛-二硼化钛-立方氮化硼复合材料的制备方法 |
| US12247282B2 (en) | 2017-03-24 | 2025-03-11 | Kennametal Inc. | Evaporator boats for metallization installations |
| EP3902777A1 (en) * | 2018-12-27 | 2021-11-03 | Momentive Performance Materials Quartz, Inc. | Ceramic composite heaters comprising boron nitride and titanium diboride |
| JP7614845B2 (ja) * | 2019-01-31 | 2025-01-16 | デンカ株式会社 | セラミックス焼結体及びその製造方法、並びにノズル部材 |
| KR102740747B1 (ko) * | 2019-12-16 | 2024-12-11 | 스미토모덴키고교가부시키가이샤 | 입방정 질화붕소 소결체 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4315078B1 (enrdf_load_stackoverflow) * | 1963-05-20 | 1968-06-25 | ||
| JPS59118828A (ja) * | 1982-12-22 | 1984-07-09 | ユニオン・カ−バイド・コ−ポレ−シヨン | 二硼化チタン−窒化硼素金属間組成物の高温曲げ強さを改善する方法 |
| JPS63201064A (ja) * | 1987-02-13 | 1988-08-19 | 三菱マテリアル株式会社 | 切削工具用立方晶窒化硼素基超高圧焼結体の製造法 |
| JPH06298566A (ja) * | 1993-04-15 | 1994-10-25 | Denki Kagaku Kogyo Kk | 導電性セラミックス焼結体及びその用途 |
| JP2001302352A (ja) * | 2000-03-30 | 2001-10-31 | Wacker Chemie Gmbh | セラミック材料、その製造方法及びセラミック材料からなる蒸発器 |
| JP2003300779A (ja) * | 2002-04-09 | 2003-10-21 | Denki Kagaku Kogyo Kk | 導電性セラミックス、その製造方法及び用途 |
| WO2005031027A2 (en) * | 2003-09-24 | 2005-04-07 | General Electric Company | Container for evaporation of emtal and method for manufacture thereof |
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|---|---|---|---|---|
| US3181968A (en) * | 1960-07-25 | 1965-05-04 | Union Carbide Corp | Methods for metal vaporization |
| US3236663A (en) * | 1961-07-19 | 1966-02-22 | Union Carbide Corp | Method of producing refractory body bonded by an aluminum nitride-aluminum boride composition |
| JPS4315078Y1 (enrdf_load_stackoverflow) | 1964-10-27 | 1968-06-24 | ||
| US3544486A (en) * | 1968-05-23 | 1970-12-01 | Sylvania Electric Prod | Refractory bodies containing aluminum nitride,boron nitride and titanium boride |
| DE3325490A1 (de) * | 1983-07-14 | 1985-01-24 | Elektroschmelzwerk Kempten GmbH, 8000 München | Feuerfeste, elektrisch leitfaehige mischwerkstoffe und verfahren zu ihrer herstellung durch isostatisches heisspressen |
| JPS62132798A (ja) * | 1985-12-03 | 1987-06-16 | Denki Kagaku Kogyo Kk | 化合物半導体育成用るつぼとその製造方法 |
| JP2614891B2 (ja) * | 1988-03-18 | 1997-05-28 | 電気化学工業株式会社 | 耐摩耗性の大なる窒化硼素常圧焼結体の製造方法 |
| GB8926164D0 (en) * | 1989-11-20 | 1990-01-10 | Rtz Chemicals Borides Limited | Process for the production of refractory composite article |
| US5604164A (en) * | 1995-09-06 | 1997-02-18 | Advanced Ceramics Corporation | Refractory boat and method of manufacture |
| JPH09142934A (ja) * | 1995-11-29 | 1997-06-03 | Denki Kagaku Kogyo Kk | セラミックス、その評価方法、用途及び製造方法 |
| DE19708509C1 (de) * | 1997-03-03 | 1998-09-10 | Fraunhofer Ges Forschung | Kompositkeramik mit einer Gradientenstruktur und Verfahren zu deren Herstellung |
-
2004
- 2004-12-10 US US10/582,627 patent/US7632768B2/en active Active
- 2004-12-10 EP EP04807220A patent/EP1719745A4/en not_active Withdrawn
- 2004-12-10 BR BRPI0417078-4A patent/BRPI0417078A/pt not_active Application Discontinuation
- 2004-12-10 JP JP2005516254A patent/JP4728811B2/ja not_active Expired - Fee Related
- 2004-12-10 CN CN2004800369788A patent/CN1894171B/zh not_active Expired - Fee Related
- 2004-12-10 TW TW093138429A patent/TW200526795A/zh not_active IP Right Cessation
- 2004-12-10 WO PCT/JP2004/018862 patent/WO2005056496A1/ja active Application Filing
- 2004-12-10 KR KR1020067011351A patent/KR100759178B1/ko not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4315078B1 (enrdf_load_stackoverflow) * | 1963-05-20 | 1968-06-25 | ||
| JPS59118828A (ja) * | 1982-12-22 | 1984-07-09 | ユニオン・カ−バイド・コ−ポレ−シヨン | 二硼化チタン−窒化硼素金属間組成物の高温曲げ強さを改善する方法 |
| JPS63201064A (ja) * | 1987-02-13 | 1988-08-19 | 三菱マテリアル株式会社 | 切削工具用立方晶窒化硼素基超高圧焼結体の製造法 |
| JPH06298566A (ja) * | 1993-04-15 | 1994-10-25 | Denki Kagaku Kogyo Kk | 導電性セラミックス焼結体及びその用途 |
| JP2001302352A (ja) * | 2000-03-30 | 2001-10-31 | Wacker Chemie Gmbh | セラミック材料、その製造方法及びセラミック材料からなる蒸発器 |
| JP2003300779A (ja) * | 2002-04-09 | 2003-10-21 | Denki Kagaku Kogyo Kk | 導電性セラミックス、その製造方法及び用途 |
| WO2005031027A2 (en) * | 2003-09-24 | 2005-04-07 | General Electric Company | Container for evaporation of emtal and method for manufacture thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2005056496A1 (ja) | 2005-06-23 |
| JPWO2005056496A1 (ja) | 2007-12-06 |
| US7632768B2 (en) | 2009-12-15 |
| CN1894171A (zh) | 2007-01-10 |
| TW200526795A (en) | 2005-08-16 |
| EP1719745A1 (en) | 2006-11-08 |
| KR20070012321A (ko) | 2007-01-25 |
| CN1894171B (zh) | 2011-02-02 |
| BRPI0417078A (pt) | 2007-03-13 |
| US20080020920A1 (en) | 2008-01-24 |
| TWI292784B (enrdf_load_stackoverflow) | 2008-01-21 |
| EP1719745A4 (en) | 2009-11-04 |
| KR100759178B1 (ko) | 2007-09-14 |
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