JP4721743B2 - 半導体ブロックの保持装置 - Google Patents

半導体ブロックの保持装置 Download PDF

Info

Publication number
JP4721743B2
JP4721743B2 JP2005095386A JP2005095386A JP4721743B2 JP 4721743 B2 JP4721743 B2 JP 4721743B2 JP 2005095386 A JP2005095386 A JP 2005095386A JP 2005095386 A JP2005095386 A JP 2005095386A JP 4721743 B2 JP4721743 B2 JP 4721743B2
Authority
JP
Japan
Prior art keywords
adhesive
semiconductor
slice base
semiconductor block
block
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2005095386A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006272756A5 (enExample
JP2006272756A (ja
Inventor
聡 川村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP2005095386A priority Critical patent/JP4721743B2/ja
Publication of JP2006272756A publication Critical patent/JP2006272756A/ja
Publication of JP2006272756A5 publication Critical patent/JP2006272756A5/ja
Application granted granted Critical
Publication of JP4721743B2 publication Critical patent/JP4721743B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8338Bonding interfaces outside the semiconductor or solid-state body
    • H01L2224/83385Shape, e.g. interlocking features

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP2005095386A 2005-03-29 2005-03-29 半導体ブロックの保持装置 Expired - Lifetime JP4721743B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005095386A JP4721743B2 (ja) 2005-03-29 2005-03-29 半導体ブロックの保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005095386A JP4721743B2 (ja) 2005-03-29 2005-03-29 半導体ブロックの保持装置

Publications (3)

Publication Number Publication Date
JP2006272756A JP2006272756A (ja) 2006-10-12
JP2006272756A5 JP2006272756A5 (enExample) 2008-02-07
JP4721743B2 true JP4721743B2 (ja) 2011-07-13

Family

ID=37207961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005095386A Expired - Lifetime JP4721743B2 (ja) 2005-03-29 2005-03-29 半導体ブロックの保持装置

Country Status (1)

Country Link
JP (1) JP4721743B2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100884246B1 (ko) * 2007-08-24 2009-02-17 주식회사 다우빔 실리콘 인고트 절단용 받침대
JP2009090416A (ja) * 2007-10-10 2009-04-30 Dainippon Printing Co Ltd メンブレン構造体の製造方法
JP5117880B2 (ja) * 2008-02-21 2013-01-16 セイコーインスツル株式会社 ウエハの作製方法
ATE500940T1 (de) * 2008-04-23 2011-03-15 Applied Materials Switzerland Sa Montierscheibe für eine drahtsägevorrichtung, drahtsägevorrichtung damit, und drahtsägeverfahren, das mit der vorrichtung durchgeführt wird
JP5196604B2 (ja) * 2008-06-19 2013-05-15 信濃電気製錬株式会社 インゴットスライシング用フレットバーを用いたインゴットの切断方法及び該フレットバーを貼着したインゴット
JP5348746B2 (ja) * 2008-11-17 2013-11-20 株式会社パイロットコーポレーション 歯列矯正用ブラケット
KR101078178B1 (ko) 2008-12-10 2011-10-28 주식회사 엘지실트론 잉곳 지지유닛 및 이를 포함하는 잉곳절단장치
JP5495981B2 (ja) * 2010-06-29 2014-05-21 京セラ株式会社 半導体基板の製造方法
KR200464626Y1 (ko) * 2011-01-21 2013-01-21 주식회사 넥솔론 기판 블록 고정장치
US10731016B2 (en) 2016-07-18 2020-08-04 Conopco, Inc. Method of modifying the dispensing properties of a container
CN117103474A (zh) * 2023-09-07 2023-11-24 常州时创能源股份有限公司 一种半片切割工艺

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4819387A (en) * 1987-12-16 1989-04-11 Motorola, Inc. Method of slicing semiconductor crystal
JP3351053B2 (ja) * 1993-10-19 2002-11-25 株式会社豊田自動織機 電子部品
JPH09155855A (ja) * 1995-12-06 1997-06-17 Sony Corp 単結晶加工用貼付台及び単結晶の加工方法
JP4325889B2 (ja) * 1999-07-13 2009-09-02 Sumco Techxiv株式会社 半導体ウェハの積層治具および半導体ウェハの製造方法
JP4361658B2 (ja) * 2000-02-14 2009-11-11 富士通マイクロエレクトロニクス株式会社 実装基板及び実装方法
JP2004082282A (ja) * 2002-08-27 2004-03-18 Kyocera Corp 半導体ブロックのスライス方法
JP2004114503A (ja) * 2002-09-26 2004-04-15 Kyocera Corp インゴットの切断方法
JP4388362B2 (ja) * 2003-12-22 2009-12-24 京セラ株式会社 半導体インゴットの切断方法

Also Published As

Publication number Publication date
JP2006272756A (ja) 2006-10-12

Similar Documents

Publication Publication Date Title
JP4721743B2 (ja) 半導体ブロックの保持装置
JP5515593B2 (ja) ワイヤーソーによるシリコンインゴットの切断方法およびワイヤーソー
JP2008160124A (ja) ワークピースを鋸断する装置及び方法
CN110202707B (zh) 一种多线切割装置及其切削液供液组件
JP2000343525A (ja) 半導体材料の切断・加工方法
JP4388362B2 (ja) 半導体インゴットの切断方法
JP5495981B2 (ja) 半導体基板の製造方法
JP2010284754A (ja) 固定砥粒式ソーワイヤ
JP5430294B2 (ja) 基板の製造方法
JP2011031386A (ja) 電着式固定砥粒ワイヤーおよびこれを用いた結晶スライス方法
CN106079126A (zh) 一种半导体单晶硅多线切割夹紧装置及方法
CN110497546A (zh) 游离-固结复合磨料多线切割硅片的方法及设备
JP5806082B2 (ja) 被加工物の切断方法
JP5460226B2 (ja) ワイヤーソー装置およびこれを用いた半導体基板の製造方法
JP2003159642A (ja) ワーク切断方法およびマルチワイヤソーシステム
JP2000288903A (ja) マルチワイヤーソーを用いた平面研削方法及び平面研削装置
JP5876388B2 (ja) 被加工物切断方法
JP5430144B2 (ja) 基板の製造方法および太陽電池素子
JP2006278701A (ja) 半導体ウェハの製造方法
JP6455294B2 (ja) ワイヤソー装置
JP5355249B2 (ja) ワイヤーソー装置
JP2016101611A (ja) 基板の製造方法
JP7208811B2 (ja) ゴム板から離型剤を剥離する剥離方法、および、チャックテーブルの製造方法
JP5366135B2 (ja) 薄ウェーハの加工方法
JP7441779B2 (ja) 被加工物の切断方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20071023

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20071217

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20071217

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20101118

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20101125

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110120

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20110308

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20110405

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140415

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150